RSH 9 #9 @1 @9 #2 @6 @4 !0 u #0 $2 #6 t #8 q y $0 $1 20 r !1 e @2 #7 #3 #1 !2 32 w 50, 63, 80 @3 Double acting (DL, DM) !3 !5 #6 o @5 i @1 @4 @6 !0 @7 @9 !6 t i !7 q !8 #8 $1 Single acting (TL, TM) Double acting built-in spring (BL, BM) $0 y r !1 #7 e #4 #7 !
With lead wire (3 m) Digital flow switch assembly 5 AD LVB4-650 to 500 L/min With 10 One-touch fitting LVB3-7-2 With One-touch fitting GD Rc 1/4 LVB3-7-3 Threaded type LVB4-7 NPT 1/4 LVB3-7-4 Filter body only With 10 One-touch fitting, with differential pressure indicator With One-touch fitting Clean air filter assembly 6 LVB3-7-2-1 Rc 1/4, with differential pressure indicator LVB3-7-3-1
AR425 to 935 ARX q Body size 1 2 3 Symbol Description AMR w Set pressure range 0 0.005 to 0.2 MPa V V 0.01 to 0.2 MPa V 1 0.01 to 0.4 MPa V V V 2 0.01 to 0.8 MPa V V V + ARM ARP IR-A IR-A e Exhaust direction 0 Bottom exhaust V V V 1 Front exhaust V 2 Rear exhaust V + IR IRV r Pipe thread type Nil Rc V V V N NPT V V V F G V V V + VEX 01 1/8 V 02 1/4 V V 03 3/8 V 04 1/2 V + SRH
1 !5 q u o Material Note Component Parts !4 r No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !
0 VEX IC-0(Internal sensor type) IC-1(External sensor type) No. q w e r Description Note Breathing port (M3 x 0.5 x 9.5) Breathing port (M3 x 0.5 x 9.5) Power supply, 10 bit input cable 13 wire, O.D. 6.8 mm, 1 mm length AMR Pneumatic regulator connection cable 5 wire, O.D. 6 mm, 1 mm length q q Cable for 4 point switch output ITV 3 wire, O.D. 3.4 mm, 1 mm length Cable for external sensor
le act nq, onerouch littings are prcvided onty on the rod side Series RSO Bore size 02ClRSnQB20 q ! > r l ii_9N c]0 v tadiris:10 Bore size d32, 040, d50/FSEOB32, 40, 50 _ 2 1 ?
H I J K L M N Bore size (mm) 32 40 50 Stroke range (mm) 20 to 100 44 37 13 16 45 18.5 M8 x 1.25 60 4.5 14 7 34 5.5 20 to 100 51 44 13 16 52 20 M8 x 1.25 69 5 14 7 40 5.5 30 to 100 57.5 49.5 15 20 64 28.5 M10 x 1.5 86 7 17 8 50 6.6 mm OB P Q RB S U Z Bore size (mm) 32 40 50 9 Rc 1/8 23 7 58.5 31.5 14 9 Rc 1/8 28 7 66 35 14 11 Rc 1/4 31.5 8 80 41 19 Refer to page 9 for details on rod end
le act nq, onerouch littings are prcvided onty on the rod side Series RSO Bore size 02ClRSnQB20 q ! > r l ii_9N c]0 v tadiris:10 Bore size d32, 040, d50/FSEOB32, 40, 50 _ 2 1 ?
Contents q Cover L (1 pc.) w Cover R (1 pc.) e Top covers (2 pcs.) r Hexagon head bolts (4 pcs.) t Flat washers (4 pcs.) y Cover mounting bolts (8 pcs.)
Dimensions (mm) A B C D E F G K L M N P Model IDFA100F IDFA125F Port size R2 670 460 335 107 700 1120 1276 267 1375 20 712 752 R2 1/2 700 655 350 78 935 IDFA150F E D B 10 note) A G F C N M L K Note) In addition to the overall length of the body, the filter mounting part (bracket) projects 10 mm.
Min.operating pressure (1) (1) 10 to 50C 10 to 50C Ambient and fluid temp.
4 Diaphragm (C) e OUT (2) SUP (1) OUT (2) OUT (2) SUP (1) IRV SUP (1) @3 !8 Exhaust valve !6 @1 @1 !8 e VEX Main valve e @1 Exhaust tValve guide tValve guide tValve guide SRH IR2120 IR3120 SRP @0 !1 SRF @5 !1 ITV @0 @6 !9 @0 @6 IC SUP side passage OUT side passage SUP side passage OUT side passage ITVH o o !0 ITVX !0 PVQ y q q IN !1 VY1 w IN !1 Bleed Bleed VBA VBAT y !
SYJA 2(A) 2(A) Standard VZA (P)1 3(R) (P)1 3(R) i VFA 2(A) 2(A) 2(A) 3(R) VFRA o For vacuum (P)1 3(R) (P)1 3(R) VPA4 SYJA X VZA 1(P) VTA For vacuum u y t r e w q VGA VPA VPA VPA3 i 2(A) 3(R) o X Component Parts No.
0 is interrupted, and the outside air flows inside the bowl q through the chamber o and the drain cock !1. Therefore, if there is an accumulation of condensate in the bowl q, it will drain out through the drain cock.
I l 50i 70 , iiFl.r* 0 q . . , . 50 6o ' 3 0 3o , , , . 3 0 , : LXPB5SA 40 40 '" .,1 Slide i Screw \ I i LXPB5SB 2D 2A LXSH2BC 100 50 220 High rigidity linear guide Ball LXSH2BD 100 50 90 Screw LXSH5BC 1 0 0 50 1 6 0 LXSH5BD 1 0 0 50 70 LXSH2SA 90 40 60 Slide LXSH2SB 45 20 30 Screw LXSHSSA 60 20 40 LXSH5SB 30 1 0 20 , \ | '-t 'oo"ot| I PLc I ll'i;!:-,?
10-24UNC 10.40) 10-32UNF : 270" Rotation Port Size. @ An gle Adj ustin g U nit/D im e ns io n s NCDRB18W10.15.20.30 (inch) N C R 8 1 8 W U 1 0 . 1 5 . 2 0 . 3 0 6-Q(NCRB1BW15, 20, 30) Include marka Auto Switch Compatible Type NCDRBIBWUi0. 15 NCDRB1BWU20.30 s*nci' u"it { Adjustable rotation{ *or"t "aru"ro. { With Auto Switch Appendix How To Set Rotation Time Ust@: Stable Rotation Time Regulation
10-24UNC 10.40) 10-32UNF : 270" Rotation Port Size. @ An gle Adj ustin g U nit/D im e ns io n s NCDRB18W10.15.20.30 (inch) N C R 8 1 8 W U 1 0 . 1 5 . 2 0 . 3 0 6-Q(NCRB1BW15, 20, 30) Include marka Auto Switch Compatible Type NCDRBIBWUi0. 15 NCDRB1BWU20.30 s*nci' u"it { Adjustable rotation{ *or"t "aru"ro. { With Auto Switch Appendix How To Set Rotation Time Ust@: Stable Rotation Time Regulation
Model PP SS VV OO Gasket QQ RR TT UU ML1C25 ML1C32 ML1C40 C11.2 10 14 37 24 8 27 20 8 16.5 C11.2 18 46 30 12 32 22 8 17 23.5 12.5 10 C14 53 40 34 26 Model A B C D E F G H I J K L M N P Q S T O R U W Z V Y ML1C25 ML1C32 ML1C40 274 260 137 140 88 108 87 85.5 60 74 97 100 42.5 26 34 206 28 24 5.6 9 5.5 8.5 9.5 M5 X 0.8 M6 X 1 11 322 306 161 160 108 131 101 99.5 64 92 118 120 53.5 28 40 242 36.5
10 Air Slide Table Long Stroke Type Series MXY Construction @3 y w q r u #0 MX MTS !
(R) 1 (P) Poppet VM200 2 port 3 port (A) 2 (A) 2 Side ported 1/4 Page 13 12 12 10 10 1 (P) 3 (R) 1 (P) VM400 3 port (OUT) 2 3 10 12 1 (N.C.)