Actuation Type: 2 Position Single Solenoid, Flow: Standard Flow, Pilot Specification: Internal Pilot, Back Pressure Check Valve: None, Coil Specification: Standard, Type: Plug-in, Rated Voltage: 24V DC; Use 24 V DC for EX180, EX510, and PC Wiring, Common Specifications: Positive Common, Connector Entry: Dedicated for Centralized Wiring, Light, Surge Suppressor: Light/Surge Suppressor, Non-polar

Actuation Type: 2 Position Single Solenoid, Flow: Standard Flow, Pilot Specification: Internal Pilot, Back Pressure Check Valve: None, Coil Specification: Standard, Type: Non-plug-in, Rated Voltage: 24V DC; Use 24 V DC for EX180, EX510, and PC Wiring, Common Specifications: Positive Common, Connector Entry: Individual Wiring, w/o Lead Wire, Light, Surge Suppressor: Light/Surge Suppressor,

Actuation Type: 2 Position Double Solenoid, Flow: Standard Flow, Pilot Specification: Internal Pilot, Back Pressure Check Valve: None, Coil Specification: Standard, Type: Non-plug-in, Rated Voltage: 24V DC; Use 24 V DC for EX180, EX510, and PC Wiring, Common Specifications: Positive Common, Connector Entry: Individual Wiring, w/o Lead Wire, Light, Surge Suppressor: Light/Surge Suppressor,

Actuation Type: 3 Position Exhaust Center, Flow: Standard Flow, Pilot Specification: Internal Pilot, Back Pressure Check Valve: None, Coil Specification: Standard, Type: Non-plug-in, Rated Voltage: 24V DC; Use 24 V DC for EX180, EX510, and PC Wiring, Common Specifications: Positive Common, Connector Entry: Individual Wiring, w/o Lead Wire, Light, Surge Suppressor: Light/Surge Suppressor,

Function: 4 Position Dual 3 Port N.C./N.C., Pilot: Internal Pilot, Back Pressure Check: None, Voltage: 24VDC, Common: -COM, Lead Wire: M Plug w/o Connector, Surge Suppressor: Light & Surge Suppressor, Switch: None, Manual Override: Slotted Locking Type, Port Size: Elbow Upward w/ø4 One-touch Fitting

Regulator, Pressure Boosting Valve: Regulator, Regulator Type: Manifold shaped, Shape: One-Touch Coupling Type, Operating Environment: Standard, Compatible Fluid: Air, Exhaust Mechanism (Air Bleed): [Included] Relief, Reverse Flow Function (Relief): [Included] Yes (Imbalance Type), Supply Side Connection Type: [One-Touch] Elbows Fitting, Supply Side, Connection Diameter: Ø10, Control Side

Nozzle Size: 04 [Nominal Nozzle Size: ø0.4mm; Large Flow, N.C.: 50.8psi (0.35MPa); Latching: 65.3psi (0.45MPa)], Body: 3 [For Manifold; Port Specification: No Distinction], Exhaust: Silencer Exhaust, Individual Exhaust, Valve Combination: Supply Valve: N.C.; Release Valve: N.C., Rated Voltage: 24VDC, Electrical Entry: L-Type Plug Connector w/Lead Wire, Manual Override: Non-Locking Push Type

ZP

D 02 1.2 M4 x 0.7 4 04 1.6 06 08 2.5 28.4 N S U F GN GS B4 M5 x 0.8 19.5 04 06 ZP R U 02 1.2 M5 x 0.8 5 04 1.6 06 08 2.5 B5 A2 Dimensions Per Vacuum Inlet Construction p. 115 Model Adapter Assembly p. 122 D E F Fitting part min. hole size Vacuum inlet direction q Pad dia.

ZP

Note 3) ZP3B-T2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-T(04/06/08)UM;(J/K)3-@ ZP3-T(04/06/08)B;(J/K)3-@ ZP3-T(04/06/08)UM;(J/K)6-@ ZP3-T(04/06/08)B;(J/K)6-@ ZP3-T(04/06/08)UM;(J/K)10-@ ZP3-T(04/06/08)B;(J/K)10-@ ZP3-T(04/06/08)UM;(JB/K)15-

Vacuum Pad

Note 3) ZP3B-T2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-T(04/06/08)UM;(J/K)3-@ ZP3-T(04/06/08)B;(J/K)3-@ ZP3-T(04/06/08)UM;(J/K)6-@ ZP3-T(04/06/08)B;(J/K)6-@ ZP3-T(04/06/08)UM;(J/K)10-@ ZP3-T(04/06/08)B;(J/K)10-@ ZP3-T(04/06/08)UM;(JB/K)15-

AC

For AC2030 For AC2530 For AC3030 For AC4030 For AC4030-06 Model Description 02 03 04 06 E50-06 E2001 02 03 E3002 03 04 E3002 03 04 E40Piping adapter 02 03 04 4 4 4 06 4 IS1000EY 01 02 03 2 2 2 Y IS1000E02 03 04 3 3 3 Y IS1000E02 03 04 3 3 3 Y IS1000EY54-03 04 Attachment Accessory Pressure switch with piping adapter IS1000M-2Y IS1000M-3Y IS1000M-3Y IS1000M-4Y IS1000M-5Y Y21-01 (02) Y31-02

3-COLOR DISPLAY DIGITAL FLOW SWITCH, DIGITAL FLOW SWITCH, F27, 160 lb

3-COLOR DISPLAY DIGITAL FLOW SWITCH, DIGITAL FLOW SWITCH, F27, 240.00000 lb

3-COLOR DISPLAY DIGITAL FLOW SWITCH, DIGITAL FLOW SWITCH, F27, 240.00000 lb

ZP3

Form w 1 Material e r Vacuum inlet Connection thread N S U F GN GS HS 04 06 08 UM 02 10.8 7 2 1.4 KQ2H02-M5N C2 04 14.7 8 4 2.5 KQ2H04-M5N ZP3 Y B3 02 10.8 7 2 1.4 KQ2H02-M5N 04 14.7 8 4 2.5 KQ2H04-M5N 06 10 6 KQ2H06-M5N Vacuum inlet: One-touch fitting 10 13 16 Applicable tubing O.D.

Table of Contents

-03 AMD150-03 1.5 0.2 HAA7-06 HAW2-04 AT6C-04 AFF2B-03 IDF2D-1 AM150-03 AMD150-03 2.2 0.3 HAA7-06 HAW7-06 AT6C-04 AFF2B-03 IDF3DAM150-03 AMD250-03 3.7 0.5 HAA7-06 HAW7-06 AT6C-04 AFF4B-03 IDF4DAM250-03 AMD250-03 5.5 0.7 HAA7-06 HAW7-06 AT6C-04 AFF4B-04 IDF6DAM250-04 AMD350-04 7.5 1.0 HAA15-10 HAW22-14 AT11C-06 AFF8B-04 IDF8DAM350-04 AMD350-04 11 1.5 HAA15-10 HAW22-14 AT11C-06 AFF8B-06 IDF11CAM350

Proposals for Energy Saving

06 08 10 12 16 Symbol 01 02 03 04 06 Tubing O.D. mm 4 6 8 10 12 16 Hose O.D.

CG5-S

8 -04 R 1/2 -04 R 1/2 Straight Union KGH KGLU12-02 R 1/4 12 -03 R 3/8 -04 R 1/2 Applicable tubing O.D.

VFR

How to Order Sub-plate Assembly Pilot type Nil R External pilot Internal pilot Thread type Plug-in VFR4000 P 04 Nil Rc Non plug-in VFS4000 S 04 G F N NPT NPTF T B Plug-in VFR4000 P 04 Non plug-in VFS4000 S 04 B Piping port (P, A, B port) Note) Bottom ported is not available for external pilot.

VFS

03 04 q Description No.