Compact Vacuum Ejector Series ZQ

Left Right 15 -60 -60 10 -40 -40 Air consumption -20 -20 5 S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U NL HL H S 1 S 2 R U NL HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE

A

The pressure difference generated at this time opens check valve and the residual pressure on the A port side is quickly exhausted from R port. 2 1(P) OFF 2(A) 1 3(R) 3 Soft Start-up Valve AV2000/3000/4000/5000 Construction B ON OFF B-B 1(P) 2(A) B 3(R) Parts list No. 1 2 3 Description Material Body Cap Cover ADC ADC ADC Replacement parts Description No. Part no.

IZ-OMU0031-CN

() 200 ms() 1.5 s() 0.5F.S. 1 digit 3+1/2 7 2 (/)5 /1s OUT1ON ()OUT2ON () IP40 050 -1060 () 3585R.H.() AC1000 V 1 50 M (DC500 V ) 0.5%F.S.(25 ) 5P 4P PBTPBT 30 g() CEUL/CSA 12 5 2 -32No.IZ*-OMU0031 (ZS-28-A) 2 0.2 mm 0.58 mm 1.12 mm 4.1 -33No.IZ*-OMU0031 0.56 mm R R2 2 (n ) <> <> 31Xn +3.5X(n -1) 31Xn +3.5X(n -1) -34No.IZ*-OMU0031 Revision history A 4-14-1, Sotokanda

NCRBIBwserbs

Switch Mounting Clamp Assembly NCDRBlBWlO P211170-1 NCDRBlBWl5 P211190-1 NCDRBlBW2O P21l t60-1 NCDRB'IBW3O P211180-1 Angle Adjusting Unit Switch version Angle Adjusting Unit fl {n l l -T--F-l -1+r-T Rotary Actuator: Vane Type NCRBlO\ryl0.t5.2O.30 Symbol _A I E -1) Air 40No lubrication Double end shafr with both Max.

Rotary Actuator NCRB1BW Series Single Vane / Double Shaft

Switch Mounting Clamp Assembly NCDRBlBWlO P211170-1 NCDRBlBWl5 P211190-1 NCDRBlBW2O P21l t60-1 NCDRB'IBW3O P211180-1 Angle Adjusting Unit Switch version Angle Adjusting Unit fl {n l l -T--F-l -1+r-T Rotary Actuator: Vane Type NCRBlO\ryl0.t5.2O.30 Symbol _A I E -1) Air 40No lubrication Double end shafr with both Max.

DOC1020530

Command bit setting of Controlword Bit 3 Bit 1 Command Transition No. Bit 7 Bit 2 Bit 0 Enable Enable Fault Reset Quick Stop Switch On Operation Voltage Shutdown 0 1 1 0 (2)/(6)/(8) Switch On 0 0 1 1 1 (3) Disable Voltage 0 0 (7)/(9)/(10)/(1 2) Quick Stop 0 0 1 (7)/(10)/(11) Disable Operation 0 0 1 1 1 (5) Enable Operation 0 1 1 1 1 (4)/(16) Fault Reset 0 1 (Note) (15) Note.

IR20-OM00008

(B),2 (C),(B)(A), () (B)(C) (A) BLEED (B) (C) OUT SUP SUP. 1 1 M Pa/ m ( B) m 2 N / m m m M Pa M Pa/ m m M Pa B m /N (A) ) ( N N m / N ( C) m 2 N ( A) m 2 N -5- 3. 1 SUP OUT 2 %F.S 3 4 R B(P36202028) G 2 3 Rc,F N IR2000G43-2-01 G43-P2-N01-X30 IR2010G43-4-01 G43-P4-N01-X30 IR2020G43-10-01 G43-P10-N01-X30 021/44 Rc NNPT FG 00.0050.2MPa 1: 0.010.4MPa 20.010.8MPa

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

C D F J K ARP20(K) ARP30(K) ARP40(K) 28.5 Note 2) 1/8, 1/4 1/8 40 98 27 28.5 M28 x 1 2 1/4, 3/8 1/8 53 117 29 29.5 M38 x 1.5 29.5 2.5 1/4, 3/8, 1/2 1/4 70 148 41 34 M42 x 1.5 34 1 Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K) ARP30(K) ARP40(K) H J H J H J M N Q R S

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted 1

How to Calculate the Flow Rate For obtaining the flow rate, refer to page 4-1-6. 4-16-1 2 Series VS3115/3110 How to Order VS311 D L 5 01 5 Thread type Accessory (Option) Nil Rc Mounting With indicator light L P With manual override N NPT T NPTF E Nil Without bracket Port size Piping Electrical entry B With bracket G 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Without sub-plate Rc 01 02 02 03 00 Body ported

VQZ100V-OMT0001

) ) ) 3) 3) 3) 3) 1 1 1 1 1 1 1 1 () 3 No.VQZ100V-OMT0001 VQZ VQZ VQZ VQZ 3 3 3 3 5 5 5 5 / / / / 1 DC VQ DC N.O.() 3 () 0.1 2 C-R C-R () C-R 3% 8% (SSR (SSR (SSR (SSR )AC )AC )AC )AC 1) (C-R ) OFF 2)() / / / / () 3 3 ( ( ( ( ) ) ) ) () 3 4 No.VQZ100V-OMT0001 VQZ VQZ VQZ VQZ 3 3 3 3 5 5 5 5 / / / / -10 / / / / 1V ( ) (1) ( )COM COM 2 1.

Soft Start-up Valve AV2000/3000/4000/5000

The pressure difference generated at this time opens check valve and the residual pressure on the A port side is quickly exhausted from R port. 2 1(P) OFF 2(A) 1 3(R) 3 Soft Start-up Valve AV2000/3000/4000/5000 Construction B ON OFF B-B 1(P) 2(A) B 3(R) Parts list No. 1 2 3 Description Material Body Cap Cover ADC ADC ADC Replacement parts Description No. Part no.

Quick Exhaust Valve Series AQ

1 Quick Exhaust Valve Series AQ Model Excellent exhaust characteristics Large flow capacity Compact and lightweight A wide selection of models Port size Effective area (mm2) Weight (g) Model IN OUT OUT EXH M5 x 0.8 AQ1500-M5 AQ1510-01 AQ2000-01 AQ2000-02 AQ3000-02 AQ3000-03 AQ5000-04 AQ5000-06 2 4 25 35 40 60 105 135 2.8 5.8 25 40 42 70 115 180 25 45 110 105 215 205 690 650 1 8 1 8 1 4

Water Regulator

Model Pressure range *1 Indication unit Connection thread Note MPa Port size 01 Rc1/8 02 Rc1/4 R1/8 R1/4 G46-7-02-SRB 0 to 0.7 R1/4 G46-10-02-SRB 0 to 1.0 G46-4-01 to 02-SRB 0 to 0.4 MPa Set pressure range: 0.05 to 0.69 MPa 02 WR110 X215 *1: Do not apply more pressure than the max. pressure displayed. It may cause a malfunction.

Model: 10S (Side Ported), SI Unit Specification: NA (PROFIBUS DP - 32 Outputs - Connector M12), SI Unit Ouput Polarity: N (Negative Common, PNP), Valve Stations: 2 Stations, P,E Port Entry: B (Both Sides, 2 to 16 Stations), SUP/EXH Block: R (External Pilot), A,B Port Size: N11 (ø3/8" One-touch Fitting, Straight, Inch), Mounting: D (DIN Rail Mounting w/o Name Plate), DIN Rail Option: 0 (w/

Type: 11S (Bottom Ported), SI Unit Specification: NA (PROFIBUS DP - 32 Outputs - Connector M12), SI Unit Output Polarity: N (Negative Common), Valve Stations: 9 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: R (External Pilot), A, B Port Size: N7 (ø1/4" One-touch Fitting)

Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: NA (PROFIBUS DP - 32 Outputs - Connector M12), SI Unit Output Polarity: N (PNP), Valve Stations: 12 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: R (External Pilot), A, B Port Size: C6 (ø6 One-touch Fitting), Mounting: AA (Direct Mounting, Name Plate w/Station Number)

Model: 12S (Top-Ported, Serial Interface), SI Unit Specification: NA (PROFIBUS DP - 32 Outputs - Connector M12), SI Unit Output Polarity: N (Negative Common), Valve Stations: 2 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: R (External Pilot), P, E Port Size: N (ø5/16")

Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: NA (PROFIBUS DP - 32 Outputs - Connector M12), SI Unit Output Polarity: N (PNP), Valve Stations: 14 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: R (External Pilot), A, B Port Size: N3 (ø5/32" One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate, w/o Station Number

Type: 10S (Side Ported), SI Unit Specification: NA (PROFIBUS DP - 32 Outputs - Connector M12), SI Unit Output Polarity: Positive Common, NPN or w/o SI Unit, Valve Stations: 2 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: R (External Pilot), A, B Port Size: C6 (ø6 One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate), DIN Rail Option: 13 (for 13 Stations; Longer

Type: 10S (Side Ported), SI Unit Specification: NA (PROFIBUS DP - 32 Outputs - Connector M12), SI Unit Output Polarity: N (Negative Common), Valve Stations: 13 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: R (External Pilot), A, B Port Size: N7 (ø1/4" One-touch Fitting), Mounting: A (DIN Rail Mounting, Name Plate w/Station Number), DIN Rail Option: 0 (w/o DIN Rail, w/Bracket