Sensor Range: 1 [For Vacuum (0~-101kPa)], Port Size: B2 (TSJ 1/4), Output Specification: Voltage Output (1~5V) Type, Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]

Sensor Range: 1 [For Vacuum (0~-101kPa)], Port Size: C01 (Rc 1/8), Output Specification: Voltage Output (1~5V) Type, Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]

Sensor Range: 1 [For Vacuum (0~-101kPa)], Port Size: 02 [R1/4 (M5 Female Thread)], Output Specification: Voltage Output (1~5V) Type, Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]

Sensor Range: 1 [For Vacuum (0~-101kPa)], Port Size: N01 [NPT 1/8 (w/M5 Female Thread)], Output Specification: Voltage Output (1~5V) Type, Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]

Sensor Range: 1 [For Vacuum (0~-101kPa)], Port Size: 01 [R 1/8 (w/M5 Female Thread)], Output Specification: Voltage Output (1~5V) Type, Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]

Sensor Range: 1 [For Vacuum (0~-101kPa)], Port Size: URJ 1/4, Output Specification: Voltage Output (1~5V) Type, Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]

Sensor Range: 1 [For Vacuum (0~-101kPa)], Port Size: TSJ 1/4, Output Specification: Voltage Output (1~5V) Type, Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]

Sensor Range: 1 [For Vacuum (0~-101kPa)], Port Size: Rc 1/8, Output Specification: Voltage Output (1~5V) Type, Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]

Sensor Range: 1 [For Vacuum (0~-101kPa)], Port Size: 02 [R1/4 (M5 Female Thread)], Output Specification: Voltage Output (1~5V) Type, Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]

Sensor Range: 1 [For Vacuum (0~-101kPa)], Port Size: N01 [NPT 1/8 (w/M5 Female Thread)], Output Specification: Voltage Output (1~5V) Type, Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]

Sensor Range: 1 [For Vacuum (0~-101kPa)], Port Size: 01 [R 1/8 (w/M5 Female Thread)], Output Specification: Voltage Output (1~5V) Type, Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]

BP1000

4 10 30 40 V15 V3 L 1 H V2 2 4 10 30 40 -30 in.Hg to 15 psig -30 in.Hg to 30 psig -30 in.Hg to 60 psig -30 in.Hg to 100 psig -30 in.Hg to 160 psig -30 in.Hg to 200 psig 0 to 200 psig 0 to 400 psig 0 to 1000 psig 0 to 3000 psig 0 to 4000 psig -0.1 to 0.1 MPa -0.1 to 0.2 MPa -0.1 to 0.4 MPa -0.1 to 0.7 MPa -0.1 to 1.1 MPa -0.1 to 1.4 MPa 0 to 1.5 MPa 0 to 3 MPa 0 to 7 MPa 0 to 21 MPa 0 to 28

BP1000

BP Diaphragm Valves Check Valves Vacuum Generators Flow Switches Technical Data/ Glossary of Terms Precautions SL AP Recommendations Regulators Wetted Parts Material S 316L SS secondary remelt SH Wetted Parts Body Diaphragm Nozzle Seat Seal Hastelloy C-22 Hastelloy C-22 316L SS 316L SS Viton (Option: Teflon, Kalrez) Teflon Flow Characteristics Dimensions inch (mm) BP1000 BP1000 30 0.21 28

COQ2BP

OJ 1A22x1.5 2. 1I 1 8 --g07D 28-03 ~ , Y-G08 80 71 23 038 SO r.122x15 21 27 lS'g.070 28 ~ 3 ~, 56 84 IV -GOS ~iTt .1 , m_ , m , L , CQ2 Double Rod Clevis Pin (mm) C02 Jam Nut J r ,..,. No. AppI_ bon~.. Dd9 L d I m 1 Soap ring ly-(l05 50,63 14

CE

28 Counter CEU5 Wiring with External Equipment 1.

Compact Hydraulic Cylinder

E F U A B Z M N O P S Bore size (mm) 32 M10 x 1.5 60 4.5 14 8.5 73.5 12 16 45 20 31.5 65 14 34 5.5 9 depth 7 Rc1/8 58.5 40 M10 x 1.5 69 5 14 8.5 75.5 12 16 52 22 35 67 14 40 5.5 9 depth 7 Rc1/8 66 50 M12 x 1.75 86 7 18 11 87 15 20 64 25 41 76 19 50 6.6 11 depth 8 Rc1/4 80 63 M12 x 1.75 103 7 18 11 91 15 20 77 27 47.5 80 19 60 9 14 depth 10.5 Rc1/4 93 80 M16 x 2 132 6 22 11 100 20 25 98 28

Series 11-CRA1-Z Rack & Pinion Type Rotary Actuator Size: 30, 50

D-M9B D-M9N, D-M9P D-A93 Load voltage Load current range Indicator light Application 24 VDC (10 to 28 VDC) 28 VDC or less 24 VDC, 100 VAC 2.5 to 40 mA 40 mA or less 5 to 40 mA, 5 to 20 mA 24 VDC relay, PLC IC circuit, Relay, PLC Relay, PLC Solid state auto switch PLC: Programmable Logic Controller Refer to page 920 for the applicable auto switch list. 905 Rotary Actuator 11-CRA1-Z Rotation

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

M4 x 0.7 Piping port F QL 6 13.5 Prepared hole diameter 3.3 2 x M3 x 0.5 (Plug: M-3P) 170.05 6 (fitting seat surface dimension) M3 x 0.5 Vacuum suction port Stroke: S M 1 Mounting base side B D Piping port A 2 x M3 x 0.5 A 5 5.5 3.2 J 2.4 Z Section AA 3.5 depth 2 2.5 +0.030 0 7 +0.030 0 depth 2 2.5 Q QL 11-/22-MXPJ6-10 4 x M3 x 0.5 depth 3 F (mm) E F H J M Q QL S Z Model 23 25 38 27 37 28

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

Load voltage 24 VDC,100 VAC 24 VDC (10 to 28V) 28 VDC or less Load current range Indicator light 5 to 40mA, 5 to 20mA 5 to 40mA 40mA or less D-Z73 D-Y59B D-Y59A Air cylinder Rotary actuator Air gripper Directional control valve Fittings & Tubing Pressure switch Clean gas filter Flow control equipment Filter, Pressure control equipment Air preparation equipment 2-wire type 3-wire type Solid

60

Connection thread 1/8 1/4 3/8 1/2 3/4 1 5.2 to 6.6 8.9 to 10.3 16.2 to 17.7 20.7 to 22.1 20.7 to 22.1 26.6 to 28.0 Installation and Adjustment Torque (7 to 9) (12 to 14) (22 to 24) (28 to 30) (28 to 30) (36 to 38) Warning Air Supply 1. Confirm the symbols 1 and 2 before the Warning valve is connected. The port marked 1 is the air inlet and the port marked 2 is the outlet.