MGC

B B B B B 16 (24) A 21.5 (29.5) 20.5 (28.5) 15.5 (22.5) 17.5 (25.5) 19.5 (27.5) 20 27.5 27 24.5 25.5 29 27 24 31 30 21.5 (29.5) 20.5 (28.5) 15.5 (22.5) 17.5 (25.5) 19.5 (27.5) 16 (24) 25 30 29.5 27 25.5 29 27 24 31 30 22.5 (30.5) 21.5 (29.5) 15.5 (23.5) 18.5 (26.5) 20.5 (28.5) 17 (25) 32 33.5 33 30.5 26.5 30 28 25 32 31 24.5 (33.5) 23.5 (32.5) 19 (26.5) 20.5 (29.5) 22.5 (31.5) 19 (28) 40

70pvvna

100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz Other Nil A B Non-locking push type Non-locking extended type Locking slotted type 1 2 3 4 5 6 7 9 1 2 3 4 5 6 7 9 Electrical entry Grommet Conduit Conduit terminal DIN terminal DIN terminal with indicator light Option G C T Note) D DL Option Option Option Note) When the electrical entry

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

to each bore size. 9 Series CY3B Magnetically Coupled Rodless Cylinder Basic Type Dimensions Basic type CY3B15 to 40 4-MM thread depth J L 0 0.1 H B 2-P (Piping port) G E G NN ( I ) D X NA R Mounting nut N W K N S + Stroke F F ZZ + Stroke H B E G Mounting nut NN NA F N CY3B15 (mm) Model CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 B 35 36 46 60 70 NA 17 24 30 36 46 R 28 34 40 50 S 83 106 111 124

VNH

C D E F G H I 3 Port 3-Rc 3-Rc 3 8 3 8 Rc 1 8 VNH1 -10A VNH2 -15A VNH3 -20A VNH4 -25A A B A B A B A B 60 80 100 115 235.5 265 300 319.5 60 77 96 113 46 60 76 85 34 40 50 60 24 36 41 50 135 164.5 200 219 50 60 79 90 77 95.5 111 119 1 2 3-Rc 3 4 3-Rc1 Rc1 4 Rc1 4 Rc1 8 1 2 2-Rc 3 4 2-Rc1 Model J K L M N O P Q R S T U V VNH1 -10A A B VNH2 -15A A B VNH3 -20A A B VNH4 -25A A B M5 x 0.8 depth

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Applicable cylinder MY3A16, MY3B16 MY3A25, MY3B25 MY3A40, MY3B40 MY3A63, MY3B63 A B A B A B A B MY-S16 MY-S25 MY-S32 MY-S40 63.6 Data 091 130 182 Guide for Using Side Support For long stroke operation, the cylinder tube may be deflected depending on its own weight and the load weight.

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

N.O. 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz 24 VDC 12 VDC 240 VAC, 50/60 Hz Note) N.O. valve operates properly only when appropriate pressure is applied to the pilot.

HRX-OM-X071

Table 8-1 Quality criteria for clean water (tap water) Item Unit Criterion Circulating fluid Facility water pH (at 25 oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25 oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulfuric acid ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness [mg/L]

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

center 3 position exhaust center 3 position closed center 3 position pressure center (1) 3 position exhaust center 3 position closed center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) Note 1) Except VQZ1000 and metal seal.

Rotary Gripper Series MRHQ

50 Pressure 0.2MPa Pressure 0.2MPa 40 40 Overhang H mm Overhang H mm 0.3MPa 0.3MPa 0.3MPa 0.3MPa 30 30 0.4MPa 0.4MPa 0.4MPa 0.4MPa 0.5MPa 0.5MPa 0.5MPa 0.5MPa 20 20 0.6MPa 0.6MPa 0.6MPa 0.6MPa 10 10 H 0 10 20 30 40 50 0 10 20 30 40 50 Gripping point L Gripping point L mm Gripping point L mm MRHQ16 MRHQ16 Internal gripping 60 60 50 50 Pressure 0.2MPa Pressure 0.2MPa 40 40 Overhang H mm Overhang

CP95

11 6.6 9 10 50 15 12 50 65 12 33 30 32 45 45 12 9 11 12 63 15 16 52 67 14 37 35 40 50 50 15 9 11 12 80 18 16 66 86 18 47 40 50 60 63 15 11 12.5 14 100 18 20 11 76 96 20 55 13.5 50 60 70 71 15 19 Mounting style (CR): Head side clevis with ball joint A B C D EN ER F E L M N P H Bore size (mm) 0.2 max 0.2 H7 0.1 max H11 H13 H13 0.5 0.5 32 22 10 14 15 30 5 32.5 10.5 6.6 45 10.5 5.5 40 38 12

CP95

11 6.6 9 10 50 15 12 50 65 12 33 30 32 45 45 12 9 11 12 63 15 16 52 67 14 37 35 40 50 50 15 9 11 12 80 18 16 66 86 18 47 40 50 60 63 15 11 12.5 14 100 18 20 11 76 96 20 55 13.5 50 60 70 71 15 19 Mounting style (CR): Head side clevis with ball joint A B C D EN ER F E L M N P H Bore size (mm) 0.2 max 0.2 H7 0.1 max H11 H13 H13 0.5 0.5 32 22 10 14 15 30 5 32.5 10.5 6.6 45 10.5 5.5 40 38 12

Table of Contents

Model A side B side JIS Symbol A relay output module of devices up to 110 A B is available for control VAC, 3 A. 4(A) 2(B) A B N.C. valve N.C. valve 3(EB) SOL.b SOL.a 1 2 SV A00 5(EA) B side passage symbol: Green B side manual override: Green Tie-rod base manifold (For SV1000/2000/3000/4000) 1(P) 4(A) 2(B) A side coil A side spool valve B side spool valve N.O. valve N.O. valve 1 2 SV B00

Process Pump

B Control unit Diaphragm B Diaphragm A 1.

Digital Flow Switches, Series PF2A, Series PF2W

100 200 500 10 50 100 200 500 1.1 5.4 11 21 54 10.7 53.5 107 214 535 1.1 5.4 11 21 54 10.7 53.5 107 214 535 1 5 10 20 50 1 5 10 20 50 8 For Air Digital Flow Switch/High Flow Rate Type Series PF2A Refer to www.poweraire.com for details of products compatible with overseas standards.

OMU0023

AREA A position 2 The AREA signal is output commonly for the ranges set for both the AREA A and AREA B. AREA B Set as AREA 1 AREA 2. position 1 AREA B position 2 48 - Data (Saved data) Data is sent as hexadecimal numbers.

5 Port Solenoid Valve Series SV

Labels are attached to indicate A and B side functions, using the same color as the manual override. A side manual override: Orange A side passage symbol: Orange A B A B B side passage symbol: Green B side manual override: Green Pull the lever forward with a screw driver, etc.

JXCx-OMT0005CN

1 2 L A A-1 1 B B-2 6 B A-2 5 COM-A/COM B-3 3 COM-B/ A-3 4 3 Shield Vcc B-4 12 GND A-4 13 A B-5 7 A A-5 6 B B-6 9 B A-6 8 3 (14.2) 2 (2) 1 8 1 B1 A1 (14) 17.7 5 6 (3) 1 2 (18) A6 B6 15 16 (11) 30.7 L 15.2 [820m] 1 2 LE CP 2 A B-1 L 1 A A-1 6 B B-2 8 8m * 5 B A-2 3 COM-A/COM B-3 A 10m * 4 COM-B/ A-3 B 15m * 3 Shield C 20m * 12 Vcc B-4 13 GND A-4 * 7 A B-5 6 A A-

Process Valve

2) 2 1 110 VAC 50/60 Hz 200 VAC 50/60 Hz 100 VAC 50/60 Hz Orifice dia.

Cylinder with Lock Series CNG

HS Auto switch Auto switch 12 8.5 24.5 16 A B A B 33 38.2 Auto switch mounting position Auto switch mounting height (mm) (mm) Auto switch model D-C7, C8 D-H7 D-H7W D-H7F D-H7BA D-H7 D-H7C D-H7W D-H7BA D-C7, C8 D-C73C D-C80C D-B5, B6 D-C73C D-C80C D-B5, B6 D-B59W D-G5NT D-H7C D-G5NT D-B59W D-H7F Bore size (mm) A A B A B A A HS HS HS B B B B A 20.5 (28.5) 14.5 (22.5) 17.5 (25.5) 19.5 (27.5)

Compact End Lock Cylinder Series CBQ2

size (mm) FD FT FV FX FZ A B A B FV M 82.5 65.5 75 58 5.5 8 48 56 65 32 92 75 81.5 64.5 5.5 8 54 62 72 40 4FD FX FZ FT L B + Stroke A + Stroke 93.5 75.5 83.5 65.5 6.6 9 67 76 89 50 95 77 89 71 9 9 80 92 108 63 Rod end male threads Bore size (mm) L L1 M 32 17 38.5 34 40 17 38.5 40 50 18 43.5 50 63 Rod end nut L1 18 43.5 60 Rear flange type/CBQ2G, CDBQ2G (mm) Rear flange type With rear lock