Series CQ2

There may be large variations depending on the surrounding environment (variations as much as 30%).

MGC

21.5 (29.5) 20.5 (28.5) 15 (22.5) 17.5 (25.5) 19.5 (27.5) 18 (26) 16 (24) 25 30 29.5 27 31 25.5 27.5 29 27 24 30 22.5 (30.5) 21.5 (29.5) 15.5 (23.5) 18.5 (26.5) 20.5 (28.5) 19 (27) 17 (25) 32 33.5 33 30.5 32 26.5 28.5 30 28 25 31 25 (34) 24 (33) 18 (27) 21 (30) 33 (32) 21.5 (30.5) 19.5 (28.5) 40 38 37.5 35 36.5 31 33 34.5 32.5 29.5 35.5 29.5 (41.5) 28.5 (40.5) 22.5 (34.5) 25.5 (37.5) 27.5

VHK

81 101 17.5 3.2 T (Width across flats) VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-B2A 49 17 1 30 25 21.5 31 VHK-B2A 49 17 1 30 25 21.5 31 Connection thread R Model S (Width across flats) 2(A) 1(P) Bracket mounting dimensions Bracket assembly no.

Turntable Cylinder Series MGT

l (mm) l 300 200 300 MGTL80 P = 0.5MPa m 200 MGTM80 100 P = 0.5MPa Load weight m(kg) Load weight m(kg) 40 50 100 Larger than 75st 50st 25st Larger than 50st 30 20 50 40 25, 50st 10 30 5 4 3 2 20 10 20 30 40 50 100 200 300 1 1 2 3 4 5 10 20 304050 100 200300400 Eccentric distance l (mm) 10 400 Eccentric distance l (mm) MGTL100 300 200 300 MGTM100 200 P = 0.5MPa 100 P = 0.5MPa Larger than

Compact Cylinder with Air Cushion and Lock Series RLQ

Model C D Mounting bolt M5 x 90l M5 x 95l M5 x 100l M5 x 110l M5 x 120l M5 x 145l M5 x 170l M5 x 100l M5 x 105l M5 x 110l M5 x 120l M5 x 130l M5 x 155l M5 x 180l M6 x 120l M6 x 130l M6 x 140l M6 x 165l M6 x 190l M8 x 125l M8 x 135l M8 x 145l M8 x 170l M8 x 195l RLQB32-20 RLQB32-25 RLQB32-30 RLQB32-40 RLQB32-50 RLQB32-75 RLQB32-100 RLQB40-20 RLQB40-25 RLQB40-30 RLQB40-40 RLQB40-50 RLQB40-75

LX Series Compact Electric Actuators

q . r. lksi : Screw LXFH5BC 30 Ball t : : t l : . : : : : : t : i : : t : i ' . serie!: LXF: LXFH5BD 30 Screw LXFH5SA 30 Slide LXFH5SB 20 I LXP82BC 60 50 220 Linear ball bearing LXP82BD 60 50 90 Ball Screw 60 50 160 6 0 ' .

High Vacuum Angle Valve, XL Series

.: 120C [248F]) Uniform baking temperature Excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. 3, 4, 5 3 120 120 Comparison with KF25 flange 100 100 Body 1 4 Temperature (C) Body 2 80 5 2 Temperature (C) Body 3 1 1, 2 Bellows 60 30 0 60 30 0 Time (minutes) Time (minutes) Valve F=(1.8xC

ZQ-OM01401

60 0.3MPa 40 40 30 20 20 10 0 0 0 1 2 3 4 5 0 1 2 3 4 5 [] [] ZQA (PD)() ZQ000A (PD) 80 80 0.45MPa 70 70 [L/min(ANR)] [L/min(ANR)] 0.5MPa 0.35MPa 60 60 50 50 0.25MPa 0.35MPa 0.3MPa 40 40 0.15MPa 30 30 20 20 0.05MPa 10 10 0 0 0 1 2 3 4 5 0 1 2 3 4 5 [] [] ZQA (PD) 80 70 [L/min(ANR)] 0.45MPa 60 50 0.35MPa 40 0.25MPa 30 0.15MPa 20 0.05MPa 10 0 0 1 2 3 4 5 [] 38 - No.ZQ-OM01401-B V [L/min

ZSE40/ISE40

(Refer to Precautions on page 16-2-24 for details.) 1.5 01: R 1/8 T1: NPT 1/8 Data ZSE40(F)/ISE40-W1 2-M4 x 0.7 thread depth 4 20 30 Rc 1/8 MPa 7 19 20 30 OUT2 OUT1 SET 6.5 R 6.4 18.35 Atmospheric release port Lead wire length 600 (3000) 3.5 12.4 7.8 7 2.5 2.6 30 15.2 42 10.7 4 6 For splash proof use (IP65), insert an air tube into the atmospheric release port.

For Dry Air, Pilot Operated Series VQ20/30 2 Port Solenoid Valve

-mGm-m VX VNl VQ Dotted line: Bracket mounting style (-F) 4.3-9 Series VQ20/30 Dimensions/Series VQ30 DIN connector (Y) VQ31A1-mYmm-m Dotted line: Bracket mounting style (-F) 4.3-10 Series VQ20/30 For Dry Air, Pilot Operated 2 Port Solenoid Valve How to Order Manifold VV2Q 2 2 08 How to Order Manifold Assembly List valve and option part numbers under the manifold base part number.

VHK

C D E F G J K 2(A) 1(P) 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-B2A 49 17 1 30 25 21.5 31 VHK-B2A 49 17 1 30 25 21.5 31 VHKlR-01S-01S 13 13 17 19 22 VHKlR-02S-02S 17 VHKlR-03S-03S 19 3.6-5 VHKlR-04S-04S 22

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

(Including insulator) 2.35 mm Min. bending radius (Fixed) 110 mm Power Supply Cable/Gateway Decentralized System (64 Points) For DeviceNet For PROFIBUS DP @6@7EX500-AP 050 S Connector specification Cable length (L) Angle connector type 010 1000 mm 050 5000 mm S Straight A Angle M12 14.9 Straight connector type 14.9 1 M12 6 6 5 1 2 2 28.3 5 4 3 4 3 30 5 50 L 25.3 30 5 50 40.7 27 Socket connector

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

AT75C-20 IDF75C-3 AMD850-20 110 15.0 AT125C-30 AFF125A-30 IDF120D-3 AMD910-30 150 20.0 AT150C-40 AFF125A-30 IDF120D-3 AMD910-30 220 30.0 AT220C-40 AFF220A-40 IDF150D-3 50 Hz area 60 Hz area IDF1D-1 IDF2D-1 IDF3DIDF4DIDF6DIDF8DIDF11CIDF15CIDF22C1-3 IDF22C1-3 IDF37C1-3 IDF55C-3 IDF75C-3 IDF120D-3 IDF120D-3 IDF150D-3 AMD1010-40 AMH150-03 AMH150-03 AMH250-03 AMH250-03 AMH350-04 AMH350

RLQ

RLQB32-20 RLQB32-25 RLQB32-30 RLQB32-40 RLQB32-50 RLQB32-75 RLQB32-100 RLQB40-20 RLQB40-25 RLQB40-30 RLQB40-40 RLQB40-50 RLQB40-75 RLQB40-100 RLQB50-30 RLQB50-40 RLQB50-50 RLQB50-75 RLQB50-100 RLQB63-30 RLQB63-40 RLQB63-50 RLQB63-75 RLQB63-100 M5 x 90l M5 x 95l M5 x 100l M5 x 110l M5 x 120l M5 x 145l M5 x 170l M5 x 100l M5 x 105l M5 x 110l M5 x 120l M5 x 130l M5 x 155l M5 x 180l M6 x 120l

Intrinsically Safe Valve

/N.O.) 2(B) 4(A) C Note 2) L-type plug connector with cover Lead wire length Symbol 3 6 10 15 20 30 100 Lead wire length 300 mm Note LL 5(EA) 3(EB) 1(P) Note 1) 3-position type is not available for the 53-SY9000 series.

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Example) 10-ARP30K-03BE-1RY Clean room compliant, copperfree, fluorine-free, silicon-free Clean room compliant Copper-free, fluorine-free Symbol 20 30 40 Body size Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without

MGP

1216 30 1216 30 2025 100 3263 100 15 17-2.

MHC2

MHZ MHC2/MHCA2/MHCM2 MHF MHL F MHR L MHK MHS F MHC MHC2-6D/MHCA2-6D MHC2-6S/MHCA2-6S MHCM2-7S MHT Pressure 0.6MPa 4 4 2 MHY Pressure 0.6MPa 0.5 Pressure 0.6MPa MHW Gripping force N Gripping force N Gripping force N 3 3 0.4 MRHQ 0.5 0.5 Misc. 2 2 1 0.3 0.4 0.4 D0.2 1 1 0.3 200 30 20 10 0 30 20 10 0 30 20 10 Gripping point L mm Gripping point L mm Gripping point L mm 12-8-11 12 Series MHC2/

MHC2

20 10 0 30 20 10 0 30 20 10 Gripping point L mm Gripping point L mm Gripping point L mm 12-8-11 12 Series MHC2/MHCA2/MHCM2 Confirmation of Inertial Moment of Attachment Step 2 Confirm the inertial moment of one of the two attachments.

VFR

Note 2) Min. operating frequency is once in 30 days.