PSxx-OMU0002CN

DC(+) 5 OUT1 4 OUT2 3 FUNC 2 DC(-) 1 -19No.PS-OMU0002CN-D Z/ISE20A(F)-S/-R () DC(+) NPN 2 Max.28 V80 mA 1 V R15 V OUT1 1 k OUT2 S420 mA DC(-) 12 V 300 24 V 600 50 DC(+) -S/-R () OUT1 NPN 2 OUT2 Max.28 V80 mA 1 V DC(-) DC(+) -X () -S/-R () OUT1 NPN 2 OUT2 Max.28 V80 mA 1 V DC(-) -20No.PS-OMU0002CN-D -V/-T () DC(+) PNP 2 Max.80 mA 1 V T15 V OUT1 1 k OUT2 V420 mA DC(

PSxx-OMM0002CN

24 V 600 50 -S/-R () NPN 2 Max.28 V80 mA 1 V -17No.PS-OMM0002CN-F -V/-T () PNP 2 Max.80 mA 1 V T15 V 1 k V420 mA 12 V 300 24 V 600 50 -V/-T () PNP 2 Max.80 mA 1 V -A NPN2 Max.28 V80 mA 1 V -B PNP2 Max.80 mA 1 V -18No.PS-OMM0002CN-F ONOFF () ON OFF ON5OFF 20 P 1 H_1 [Pa] ON OFF [s] -19No.PS-OMM0002CN-F <> (19) 1 [P_1][n_1] 1 1 2[P_2][n_2] 2 (P1L P1H ) P1L()P1H() (n1L

4/5 Port Air Operated Valve SYJA3000 Series

Lubrication Not required VFA Mounting orientation Unrestricted 300/50 Note 2) Impact/Vibration resistance (m/s2) VFRA Note 1) In case of single type, be certain that pressure within operating pressure range be supplied to supply port, because return pressure is introduced from supply port {1(P)} for activation.

Fieldbus system Ethernet POWERLINK compatible SI unit

BUS IN side: No Link, No Activity Green ON BUS IN side: Link, No Activity L/A1 Green flashing BUS IN side: Link, Activity OFF BUS OUT side: No Link, No Activity Green ON BUS OUT side: Link, No Activity L/A2 Green flashing BUS OUT side: Link, Activity 21 EX## OMS1015-A Specification Specifications Model EX600-SPL1-X26 Enclosure IP67 (With manifold assembled) 1 Housing material PBT Weight 300

Ozone Resistant

100 300 500 300 500 700 1000 2000 2500 3000 4000 4000-06 5000 6000 1000 2000 3000 4000 4000-06 2550 3050 4050 4050-06 3050 4050 4050-06 2060 2560 3060 4060 4060-06 5060 6060 425 625 825 925 3000 210 1020 300 400 500 600 AWM Mist separator regulator VQZ AWD Micro mist separator regulator SQ AS Speed controller VQD SY Flow control valves SYJ SX 3-port solenoid valve (2) VQ VQ VQZ AS Speed

Direct Operated Precision Regulator Modular Style Series ARP3000 1

0.25 0.25 0.20 0.20 AMR 0.15 0.15 ITV 0.10 0.10 IC 0.05 0.05 0 0 50 100 150 200 250 300 350 400 450 500 0 0 50 100 150 200 250 300 350 400 450 500 VBA Flow rate (/min (ANR)) Flow rate (/min (ANR)) VE VY1 G Pressure Characteristics PPA Inlet pressure: 2.0 MPa Outlet pressure: 0.8 MPa Flow rate: 60 /min (ANR) Inlet pressure: 2.0 MPa Outlet pressure: 0.3 MPa Flow rate: 60 /min (ANR) AL ARX20

3 Way Direct Acting NVKF 300 Series

/60 HZ, 220v 51 er,t1z, 1 00v 50/6o HZ, 2o0v 59 @lz 130"F or less (Standard) 95"F or less (Low power cons!

NVKF

/60 HZ, 220v 51 er,t1z, 1 00v 50/6o HZ, 2o0v 59 @lz 130"F or less (Standard) 95"F or less (Low power cons!

PSxx-OMU0008CN

12 V 300 24 V 600 DC(-) 50 DC(+) -V/-T () OUT1 PNP 2 OUT2 Max.80 mA 1 V DC(-) DC(+) -Y () -V/-T () OUT1 PNP 2 OUT2 Max.28 V80 mA 1 V DC(-) -23No.PS-OMU0008CN-D [] 3 0.2 [] / / OUT1 OUT1 OUT2 OUT2 [F10]30 () 1 3 1 3 5 (63 ) (3 ) () () (26 ) (28 ) (30 ) 3 () 3 -24No.PS-OMU0008CN-D ON OFF ON P_1 H_1 ON OFF [] ISE20C [P_1] OUT1 0.500 MPa [P_2] OUT2 0.500 MPa [

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

VCHC ASD230FG ASD330FG ASD430FG ASR ASQ 100 200 400 07,08,09,10,11 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 300 06 200 50 100 100 0 5 10 0 5 10 0 5 10 Number of needle rotations Number of needle rotations Number of needle rotations ASD530FG ASD630FG ASD530FG ASD630FG 1500 1000 10,11 12 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 10,11,12 08,09 1000 500 06,07

Suction Filter with Case FH99 Series

4B Weight (kg) S T U V W X Model Threaded without flange With flange FH990-04 FH990-06 FH990-08 FH990-10 FH990-12 FH990-16 FH991-20 FH991-24 FH991-28 FH991-32 23 M8 x 1.25 Thread depth 8 35 6 84 180 2.4 3.4 28 35 M8 x 1.25 Thread depth 8 50 8 91 240 3.6 5.0 44 50 M8 x 1.25 Thread depth 9 62 10 103 300 5.4 7.8 62 77 M10 x 1.5 Thread depth 12 10 118 360 9.7 13.5 90 102 M10 x 1.5 Thread depth

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

100 150 200 250 300 IR Flow rate (L/min (ANR)) Inlet pressure (MPa) IRV ARP30(K) ARP30(K) Rc 3/8 VEX 0.50 0.25 SRH 0.45 0.40 SRP Outlet pressure (MPa) Outlet pressure (MPa) 0.35 Set point SRF 0.30 ITV 0.20 0.25 0.20 IC 0.15 ITVH 0.10 ITVX 0.05 0.15 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.00 0 100 200 300 400 500 600 PVQ Flow rate (L/min (ANR)) Inlet pressure (MPa) VY1 ARP40(K) ARP40(K) VBA VBAT

Mist Separator Series AM Model Series AM can separate and Model AM850 AM250 AM350 AM450 AM550 AM650 AM150 remove oil mist in compressed air Rated flow 750 1500 2200 3500 6000 12000 300 (1) (l/min (ANR)) which is difficult to remove by Port size ordin

50 50 55 55 65 85 , AM250 AMl 1 2 3 8 1 2 , AM350 3 4 Related poroducts 1 2 3 4 , AM450 1 2 , 1 1 1, 1 AM550 AM650 3 4 AM450SAM, #4 AM550SAM, #5 AM650SAM, #6 AM150SAM, #1 AM250SAM, #2 AM350SAM, #3 4.6-4 Series AM Dimensions: AM850 Accessory D: With auto drain (N.O.) for AMD850 Options T: With element service indicator Dimensions with mounting bracket Mdel Port size (Nominal size B) A B C

AMG

Options J: With drain guide M Mounting Dimensions Model Port Size (Nominal size B) A G F E D C B S 1.6 2.0 2.0 2.3 2.3 3.2 3.2 4.5 4.5 R 4.5 5 5 5 5 9 9 10 12 Q 26 28 28 34 34 50 50 60 76 P 70 84 84 100 100 110 110 130 180 O 54 66 66 80 80 88 88 102 136 N 35 40 40 50 50 55 55 65 85 L 9 12 12 14 14 14 14 16 20 K 5 8 8 8 8 10 10 10 15 J 15 20 17 22 19 25 21 30 40 I 56 66 66 80 80 90 90 100

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Fluid Compatibility Acetone Ammonium hydroxide Isobutyl alcohol Isopropyl alcohol Hydrochloric acid Ozone Hydrogen peroxide Concentration 50% or less 50C or less Ethyl acetate Butyl acetate Nitric acid (except fuming nitric acid) Concentration 10% or less Deionized water Sodium hydroxide Ultra deionized water Toluene Hydrofluoric acid Concentration 50% or less Sulfuric acid

Compact and Low Profile Design Rodless Cylinder Series MY2H/HT, MY2C, MY3A/3B, CY1F

400 500 600 700 800 900 1000 1200 1400 1600 1800 2000 MY3A/3B 3000 16, 25, 40, 63 CAT.S20-153 English cat.no.ES20-153 Mechanical Joint Rodless Cylinder/Compact and Low Profile Series MY2H/HT Series MY2H/HT Standard stroke (mm) Bore (mm) Model Guide 50 100 150 200 250 300 350 400 450 500 550 600 700 800 900 1000 1200 MY2C 16 Cam follower guide High precision guide Single axis MY2H 25 High

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16Mcm of deionized water at class 10 clean room (1l/min flow rate).

PSxx-OML0002CN

24 V 600 50 OUT2 FUNC DC(-) DC(+) OUT1 -E OUT2 PNP 1 Max.80 mA 1 V 1 k FUNC DC(-) DC(+) -F OUT1 PNP 1 Max.80 mA 1 V 12 V 300 24 V 600 50 OUT2 FUNC DC(-) -20No.PS-OML0002CN-G 1 1 1 1 ONOFF ON OFF ON P_1 H_1 [Pa] ON OFF [] -21No.PS-OML0002CN-G <> 1 [P_1][n_1] 1 1 -22No.PS-OML0002CN-G 2[P_2][n_2] (P1LP1H) P1L()P1H() (n1Ln1H) 1 -23No.PS-OML0002CN-G 2[

Paddle Style Flow Switch Series IF3 For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

Flow Speed 3/4B (21.6) 1B (27.6) 11/4B (35.7) 11/2B (41.6) 2B (52.9) 21/2B (67.9) 2 1.8 3B (80.7) 1.6 1.4 Flow speed (m/s) 1.2 1 4B (105.3) 0.8 5B (130.8) 0.6 6B (155.2) 0.4 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0.2 50 100 150 200 250 300 350 400 0 Flow

For Dry Air, Pilot Operated Series VQ20/30 2 Port Solenoid Valve

Indicator light and surge voltage suppressor Coil voltage None With surge voltage suppressor With indicator light and surge voltage suppressor S Z 100V AC(50/60 Hz) 200V AC 110V AC 24V DC 12V DC Others voltages 1 2 3 5 6 Note) Coil voltage 100V AC: With surge voltage suppressor. Note) "YOZ" is not available. 9(1) Note 1) Contact SMC for other voltages.