TSJ Tube Swage Joint Swagelok URJ Union Ring Joint VCR ONOFF () (35 ) ON OFF 35 76 76 ON OFF Hysteresis / () () 25[]ON-OFF () -12No.PS-OMU0008CN-D NPN () () ()()() () ON ON 0 (1k1MA/D 5 V A/D 5(V)1(M)/(1(k)+1(M)) 4.995(V)0.005 V ) 35 ON-OFF ON () (P1LP1H)ON (35 ) () digit () 0 -13No.PS-OMU0008CN-D () SI ONOFF ON-OFF / ON/OFF 90% () () () () ON -14No.PS-OMU0008CN-D
ONOFF (31 ) ON OFF 31 61 61 ON OFF Hysteresis / () () 25[]ON-OFF -11No.PS-OMS0006CN-G NPN () () ON ON 0 31 ON-OFF ON ( )(P1L~P1H) ON (31 ) () "digit" () 0 () SI ON/OFF ON-OFF / ON/OFF 90 ON -12No.PS-OMS0006CN-G ON ( )(n1L~n1H) ON (31 ) 31 (0FF)(ON)(OFF)(ON) () 5%R.D.(5%) (0~1MPa 0.001MPa 1/1000 () () F () ripple -13No.PS-OMS0006CN-G (3X8L(2 ) 0.50.05 Nm ,, A
Couplers that can be used with low vacuum
・KK/KKH Series
KK2: -100 kPa to 1 MPa
KK3: -90 kPa to 1 MPa
・KKH Series
KKH3: -90 kPa to 1 MPa
・KA Series
KKA3: -100 kPa to 1 MPa
Oscillation Angle A: [90°] 90°, Torque (Range)(N⋅m): 100 or More, Type: Rotary Actuator Both Sides Shaft Outputs, Main Body Shape: Round Shape, Operation Method: Double Vane, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): 0.1 to Less than 1, Tube Nominal Diameter: 100, Valves: Not Provided, Allowable Kinetic Energy(J): 0.811, Operating
Oscillation Angle A: [90°] 90°, Torque (Range)(N⋅m): 100 or More, Type: Rotary Actuator Both Sides Shaft Outputs, Main Body Shape: Round Shape, Operation Method: Double Vane, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): 0.1 to Less than 1, Tube Nominal Diameter: 100, Valves: Not Provided, Allowable Kinetic Energy(J): 0.811, Operating
Oscillation Angle A: [90°] 90°, Torque (Range)(N⋅m): 100 or More, Type: Rotary Actuator Both Sides Shaft Outputs, Main Body Shape: Round Shape, Operation Method: Double Vane, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): 0.1 to Less than 1, Tube Nominal Diameter: 100, Valves: Not Provided, Allowable Kinetic Energy(J): 0.811, Operating
Oscillation Angle A: [90°] 90°, Torque (Range)(N⋅m): 100 or More, Type: Rotary Actuator Both Sides Shaft Outputs, Main Body Shape: Round Shape, Operation Method: Double Vane, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): 0.1 to Less than 1, Tube Nominal Diameter: 100, Valves: Not Provided, Allowable Kinetic Energy(J): 0.811, Operating
Oscillation Angle A: [90°] 90°, Torque (Range)(N⋅m): 100 or More, Type: Rotary Actuator Both Sides Shaft Outputs, Main Body Shape: Round Shape, Operation Method: Double Vane, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): 0.1 to Less than 1, Tube Nominal Diameter: 100, Valves: Not Provided, Allowable Kinetic Energy(J): 0.811, Operating
Oscillation Angle A: [90°] 90°, Torque (Range)(N⋅m): 100 or More, Type: Rotary Actuator Both Sides Shaft Outputs, Main Body Shape: Round Shape, Operation Method: Double Vane, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): 0.1 to Less than 1, Tube Nominal Diameter: 100, Valves: Not Provided, Allowable Kinetic Energy(J): 0.811, Operating
Oscillation Angle A: [90°] 90°, Torque (Range)(N⋅m): 100 or More, Type: Rotary Actuator Both Sides Shaft Outputs, Main Body Shape: Round Shape, Operation Method: Double Vane, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): 0.1 to Less than 1, Tube Nominal Diameter: 100, Valves: Not Provided, Allowable Kinetic Energy(J): 0.811, Operating
Oscillation Angle A: [90°] 90°, Torque (Range)(N⋅m): 100 or More, Type: Rotary Actuator Both Sides Shaft Outputs, Main Body Shape: Round Shape, Operation Method: Double Vane, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): 0.1 to Less than 1, Tube Nominal Diameter: 100, Valves: Not Provided, Allowable Kinetic Energy(J): 0.811, Operating
Oscillation Angle A: [90°] 90°, Torque (Range)(N⋅m): 50 to Less than 100, Type: Rotary Actuator Both Sides Shaft Outputs, Main Body Shape: Round Shape, Operation Method: Single Vane, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): 0.1 to Less than 1, Tube Nominal Diameter: 100, Valves: Not Provided, Allowable Kinetic Energy(J): 0.6, Operating
Oscillation Angle A: [90°] 90°, Torque (Range)(N⋅m): 50 to Less than 100, Type: Rotary Actuator Both Sides Shaft Outputs, Main Body Shape: Round Shape, Operation Method: Single Vane, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): 0.1 to Less than 1, Tube Nominal Diameter: 100, Valves: Not Provided, Allowable Kinetic Energy(J): 0.6, Operating
Oscillation Angle A: [90°] 90°, Torque (Range)(N⋅m): 50 to Less than 100, Type: Rotary Actuator Both Sides Shaft Outputs, Main Body Shape: Round Shape, Operation Method: Single Vane, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): 0.1 to Less than 1, Tube Nominal Diameter: 100, Valves: Not Provided, Allowable Kinetic Energy(J): 0.6, Operating
Oscillation Angle A: [90°] 90°, Torque (Range)(N⋅m): 100 or More, Type: Rotary Actuator Both Sides Shaft Outputs, Main Body Shape: Round Shape, Operation Method: Double Vane, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): 0.1 to Less than 1, Tube Nominal Diameter: 100, Valves: Not Provided, Allowable Kinetic Energy(J): 0.811, Operating
Oscillation Angle A: [90°] 90°, Torque (Range)(N⋅m): 100 or More, Type: Rotary Actuator Both Sides Shaft Outputs, Main Body Shape: Round Shape, Operation Method: Double Vane, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): 0.1 to Less than 1, Tube Nominal Diameter: 100, Valves: Not Provided, Allowable Kinetic Energy(J): 0.811, Operating
Oscillation Angle A: [90°] 90°, Torque (Range)(N⋅m): 100 or More, Type: Rotary Actuator Both Sides Shaft Outputs, Main Body Shape: Round Shape, Operation Method: Double Vane, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): 0.1 to Less than 1, Tube Nominal Diameter: 100, Valves: Not Provided, Allowable Kinetic Energy(J): 0.811, Operating
Oscillation Angle A: [90°] 90°, Torque (Range)(N⋅m): 100 or More, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Round Shape, Operation Method: Double Vane, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): 0.1 to Less than 1, Tube Nominal Diameter: 100, Valves: Not Provided, Allowable Kinetic Energy(J): 0.811, Operating
Oscillation Angle A: [90°] 90°, Torque (Range)(N⋅m): 100 or More, Type: Rotary Actuator Both Sides Shaft Outputs, Main Body Shape: Round Shape, Operation Method: Double Vane, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): 0.1 to Less than 1, Tube Nominal Diameter: 100, Valves: Not Provided, Allowable Kinetic Energy(J): 0.811, Operating
Oscillation Angle A: [90°] 90°, Torque (Range)(N⋅m): 100 or More, Type: Rotary Actuator Both Sides Shaft Outputs, Main Body Shape: Round Shape, Operation Method: Double Vane, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): 0.1 to Less than 1, Tube Nominal Diameter: 100, Valves: Not Provided, Allowable Kinetic Energy(J): 0.811, Operating