Series 12-REA ø25, ø32, ø40, ø50, ø63 Sine Rodless Cylinder

25 4 x M8 x 1.25 Effective thread depth 12 NA CC0.1 ZZ + Stroke S + Stroke W K 25 2 TF TN Nil P (Piping port) R Model L K I D B CC ZZ X W S NA Q V 300.007 0.037 100 12-REA50 M8 x 1.25 32 58 55 180 G1/4 86 52.4 25 110 27.5 176 60 60 Rc1/4 NPT1/4 320.007 0.043 12-REA63 M10 x 1.5 38 65.4 72 26 122 69 34.5 188 70 70 192 Rc1/4 NPT1/4 G1/4 862 A Specific Product Precautions Be sure to read this

Series 12-REA Sine rodless cylinder

110 K 38 32 C 70 60 X ZZ NA E D B 72.2 58.2 I 70 60 W 12-REA63 12-REA50 100 86 66 53 30-0.033 69 55 M10 x 1.5 x 16 M8 x 1.25 x 16 188 176 M14 x 1.5 x 11.5 M12 x 1.25 x 7.5 192 180 0 26 25 0 32-0.039 167 Specific Product Precautions Be sure to read before handling. 12-CY1B/3B/1R/3R/REA.

Series H, DL, L, LL Self-align Fittings

M L 8 6 4 DT04-00 32 DT06-00 10 10 10 12 15 16 5.7 14 23.5 23.5 36 DT08-00 47 12 14 25 16 24.5 10 12 DT10-00 26.5 70 DT12-00 28.5 14 17 70 17 19 49 55 17 17 Female union: DHF Applicable tube O.D. (mm) Effective orifice (mm 2) Weight (g) H2 (Hex.) Part No. H1 (Hex.)

Drain Separator for Vacuum Series AMJ 1

10.5 8.5 26 54 50 17 70 18 205 (206) 70 3/8, 1/2 AMJ4000 273 (274) 3.2 90 13 11 35 66 70 23 90 24 284 (285) 90 3/4, 1 AMJ5000 Note) ( ) is the case for metal bowl. 13-13-5

Series VCS

107 1/4, 3/8 VCS41 30 50 94 41 13.5 17 36 25 23 M5 8 26 88 48 78.5 103 78.5 70 111.5 1/2 35 60 102 41 17.5 17 36 30 28.2 M5 8 26 96 48 86.5 103 86.5 70 119 3/4 4 Direct Operated 2 Port for Steam Series VCS How to Order Manifolds How to Order Manifold Assemblies (Example) D VV2C S 2 02 01 Enter the valve and option models to be mounted under the manifold base part number.

3 Port Air Operated Valve

(Convertible) Standard 0.2 to 1.0 Operating pressure range (MPa) For vacuum 100 kPa to 0.2 Pilot pressure (MPa) 0.2 to 1.0 (Equivalent to the operating pressure or more) Ambient and fluid temperature (C) 10 to 50 (No freezing) Lubrication Not required Mounting orientation Unrestricted Impact/Vibration resistance (m/s2) Note) 300/50 Note) Impact resistance: No malfunction to axis and right

Air Suction Filter With One-touch Fittings ZFB Series

2 ZFB101-05 ZFB101-07 ZFB201-07 ZFB301-11 ZFB401-13 65 54 53 27.2 24.2 24 19.7 17.7 17.5 " " 15.2 18.5 21.7 14.4 15.5 50 15 12.5 22.5 26 48 12.8 8.5 52 57 64.5 28 30 34 9.5 11 13.5 24.5 27 30.5 13.5 14.5 16.5 16 17 21.5 61 65 81 17.5 21.5 25.6 16.6 18 23 70 87.5 30.2 34 21.7 24 280

IDUS/IDFS

Use an air compressor of 100 l/min or greater air delivery. Since the auto-drain is designed in such a way that the valve remains open unless the air pressure rises to 0.15MPa or higher, air will blow out from the drain discharge port when the air compressor starts up until the pressure increases.

SMC Actuators:

6 SMC Actuators: Copper-free Rotary Actuators Size: 1, 3, 7, 10, 20, 30, 50, 70, 100, 200 Size (Torque) Rotary Actuators Series Application Standard Copper-free 1 3 7 10 20 30 50 70 100 200 Series variations Rotary table Series MSU Basic type MSU With auto switch MDSU Rotary table Series MSQ 20-MSQ Basic type (Adjusting bolt type) 20-MSQA High precision type (Adjusting bolt type) 20-MSQR

Stainless Steel Heat

Use an air compressor of 100 l/min or greater air delivery. Since the auto drain is designed in such a way that the valve remains open unless the air pressure rises to 0.15MPa or higher, air will blow out from the drain discharge port when the air compressor starts up until the pressure increases.

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16Mcm of deionized water at class 10 clean room (1l/min flow rate).

NAIV

Symbol fl:] w 8$ Flow Characteristics NAN200 900 o Specifications 35 70 125 3s0 200 r7s0 An Flow (SCFMI Mar opetating pressu|e-145PSl(t0 2kg lcIrf) Nois reduction-30d B or more Operating tenperature range-40 1 40"F (5 ' 60 "C) Noise Level Model Model Port size (NPT) Eftectlve oririce mm2 (Cv) Wbight rbs.

Series VC, Series VCB, Direct Operated 2 Port Solenoid Valve for Heated Water

74.5 103 74.5 48 84 26 1/4, 3/8 VCB41 M5 23 25 36 17 13.5 41 94 50 8 30 111.5 70 78.5 103 78.5 48 88 26 1/2 M5 28.2 30 36 17 17.5 41 102 60 8 35 119 70 86.5 103 86.5 48 96 26 3/4 4 Direct Operated 2 Port for Heated Water Series VCB Model Selection VCB (for heated water) 2 port solenoid valve Class Orifice size mm Model Material Port size Body Seal 4 3 2 7 5 10 1/8 (6A) 2 1/4 (8A) VCB (for

Series KV2 Fittings

/400 100/400 100/400 100/400 100/400 100/400 100/400 100/400 100/100 100/100 100/200 100/200 100/200 100/200 100/200 100/200 100/100 100/100 100/100 ** Non-Standard Product, consult factory for lead time. * Dimension A reference after installation.

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

Refer to page 100 for part numbers. 85

Applicable Auto Switch Model

40, 50, 63, 80, 100 * Can not be used for lube type.

MVGQ

CC 25, 50, 75, 100 125, 150, 175, 200 M L MVGQ 80/100 RB Applicable Auto Switch/Refer to page 10-20-1 for further information on auto switches.

Cylinder with Lock Series MNB

2 Section B Section C 100 80 63 50 40 32 80, 100 80, 100 Description Material Note Parts list Description Material Note Parts list No. No.

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

Larger than 100st 25st 50, 75, 100st Larger than 100st 25st 117 128 168 55 74 89 54 56 71 100 125 150 24 24 35 188 225 272 70 80 100 14 14.5 17.5 Rc1/4 Rc3/8 Rc3/8 9 8 8 14 17.5 20 124 156 188 148 198 236 39 41 51 52 52 72 63 80 100 50 54 47 38 42 35 128 128 148 28 28 48 110 140 166 142 180 210 28 25.5 32.5 88 92 85 (mm) Bore size (mm) X XA XB XC XL YY YL Z 24 28 11 63 80 100 8 10 10 6 7

Air-hydro Unit

800 400 30 Capacity of converter (cm3) 300 CC CC 25 600 500 400 100 CRA1H100-180 200 20 CRA1H100-90 300 300 100 CRA1H80-180 200 200 150 CRA1H80-90 50 CRA1H63-180 100 100 80 CRA1H63-90 CRA1H50-180 60 50 40 50 CRA1H50-90 30 Selected model of rotary actuator 160 100 63 40 20 100 200 300 400 500 600 700 800 Nominal size of converter (mm) Cylinder stroke (mm) How to read the graph (ex: when using