Guide Table Series MGF

through K 40 3.5 100 120 114 8.7 6-K (6 places) 57 114 5 Guide Table Series MGF 63 MGF63 Scale: 40% 4-M10 x 1.5 through 140 160 120 11.5 48.5 + Stroke 10 60 + Stroke 20 9 2-Rc 1/4 port for extending cylinder Breathing hole for guide (with element) When the cylinder is extended 46 Port for retracting cylinder 4-M10 x 1.5 through M6: T-slot for hexagon bolt K 50 140 160 146 4 11 6-K (6 places

5 Port Solenoid Valve SY Series

-M(-F2) 3 4 5 SY5 20-D(-F2) 3 4 5 SY5 20-W0(-F2) 3 4 5 C4, N3 C6, N7 C8, N9 C4, N3 C6, N7 C8, N9 C4, N3 C6, N7 C8, N9 C4, N3 C6, N7 C8, N9 Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 60.9 157.8 Max. 10 53.4 12.7 28.1 [35.1] 42.1 27 32.6 M8 x 1 15.1 39.2 [46.2] Approx. 300 (Lead wire length) Pg7 63.5 [65.7] 53.7 [55.9] 73.5 72.6 62.6 55.2 67.8 48.7 45.3 32.7 139.6 [144] 120

Precision Clean Regulator Series SRP

140 0 10 20 30 40 50 60 70 80 90 100 Flow rate l/min (ANR) Flow rate l/min (ANR) SRP1-01 SRP1101-01 Conditions/Upstream pressure: 0.5MPa Conditions/Upstream pressure: 0.7MPa 0.25 0.50 0.20 0.40 Downstream pressure MPa Downstream pressure MPa 0.15 0.30 0.10 0.20 0.05 0.10 0.00 0.00 0 20 40 60 80 100 120 140 160 180 200 0 20 40 60 80 100 120 140 Flow rate l/min (ANR) Flow rate l/min (ANR)

10

1/RJ20 70 140 20 RJ2015L RJ2725L RJ1412L 60 120 Impact mass m [kg] Impact mass m [kg] Impact mass m [kg] 15 100 50 RJ2725H RJ1412H 80 40 RJ2015H 10 60 30 RJ1410 40 20 5 20 10 0 0 0 0 500 1000 1500 2000 0 500 1000 1500 2000 0 500 1000 1500 Collision speed [mm/s] Collision speed [mm/s] Collision speed [mm/s] 882 Model Selection RJ Series Model Selection Graph The model selection graphs

Precision Clean Regulator

140 0 10 20 30 40 50 60 70 80 90 100 Flow rate L/min (ANR) Flow rate L/min (ANR) SRP1101-01 Conditions/Inlet pressure: 0.5 MPa SRP1-01 Conditions/Inlet pressure: 0.7 MPa 0.25 0.50 0.20 0.40 Outlet pressure MPa Outlet pressure MPa 0.15 0.30 0.10 0.20 0.05 0.10 0.00 0.00 0 20 40 60 80 100 120 140 160 180 200 0 20 40 60 80 100 120 140 Flow rate L/min (ANR) Flow rate L/min (ANR) Pressure Characteristics

Load Mass (Horizontal Mounting)(kg): 120~150.1, Table Size Length L(mm): 200, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Sliding Guide] Guide Type of Slide Bearing, Table Size Width W(mm): 144, Table Size Height H(mm): 107, Table Parallelism(µm): 120, Table Surface Treatment: [Anodize] Hard Anodize, Operating Pressure(MPa): 0.15 to

Load Mass (Horizontal Mounting)(kg): 120~150.1, Table Size Length L(mm): 200, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Sliding Guide] Guide Type of Slide Bearing, Table Size Width W(mm): 144, Table Size Height H(mm): 107, Table Parallelism(µm): 120, Table Surface Treatment: [Anodize] Hard Anodize, Operating Pressure(MPa): 0.15 to

Load Mass (Horizontal Mounting)(kg): 120~150.1, Table Size Length L(mm): 200, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Sliding Guide] Guide Type of Slide Bearing, Table Size Width W(mm): 144, Table Size Height H(mm): 107, Table Parallelism(µm): 120, Table Surface Treatment: [Anodize] Hard Anodize, Operating Pressure(MPa): 0.15 to

Load Mass (Horizontal Mounting)(kg): 120~150.1, Table Size Length L(mm): 200, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Sliding Guide] Guide Type of Slide Bearing, Table Size Width W(mm): 144, Table Size Height H(mm): 107, Table Parallelism(µm): 120, Table Surface Treatment: [Anodize] Hard Anodize, Operating Pressure(MPa): 0.15 to

Load Mass (Horizontal Mounting)(kg): 120~150.1, Table Size Length L(mm): 200, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Sliding Guide] Guide Type of Slide Bearing, Table Size Width W(mm): 144, Table Size Height H(mm): 107, Table Parallelism(µm): 120, Table Surface Treatment: [Anodize] Hard Anodize, Operating Pressure(MPa): 0.15 to

Load Mass (Horizontal Mounting)(kg): 120~150.1, Table Size Length L(mm): 200, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Sliding Guide] Guide Type of Slide Bearing, Table Size Width W(mm): 144, Table Size Height H(mm): 107, Table Parallelism(µm): 120, Table Surface Treatment: [Anodize] Hard Anodize, Operating Pressure(MPa): 0.15 to

Load Mass (Horizontal Mounting)(kg): 120~150.1, Table Size Length L(mm): 200, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Sliding Guide] Guide Type of Slide Bearing, Table Size Width W(mm): 144, Table Size Height H(mm): 107, Table Parallelism(µm): 120, Table Surface Treatment: [Anodize] Hard Anodize, Operating Pressure(MPa): 0.15 to

Load Mass (Horizontal Mounting)(kg): 120~150.1, Table Size Length L(mm): 200, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Sliding Guide] Guide Type of Slide Bearing, Table Size Width W(mm): 144, Table Size Height H(mm): 107, Table Parallelism(µm): 120, Table Surface Treatment: [Anodize] Hard Anodize, Operating Pressure(MPa): 0.15 to

Load Mass (Horizontal Mounting)(kg): 120~150.1, Table Size Length L(mm): 200, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Sliding Guide] Guide Type of Slide Bearing, Table Size Width W(mm): 144, Table Size Height H(mm): 107, Table Parallelism(µm): 120, Table Surface Treatment: [Anodize] Hard Anodize, Operating Pressure(MPa): 0.15 to

Load Mass (Horizontal Mounting)(kg): 120~150.1, Table Size Length L(mm): 200, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Sliding Guide] Guide Type of Slide Bearing, Table Size Width W(mm): 144, Table Size Height H(mm): 107, Table Parallelism(µm): 120, Table Surface Treatment: [Anodize] Hard Anodize, Operating Pressure(MPa): 0.15 to

Load Mass (Horizontal Mounting)(kg): 120~150.1, Table Size Length L(mm): 200, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Sliding Guide] Guide Type of Slide Bearing, Table Size Width W(mm): 144, Table Size Height H(mm): 107, Table Parallelism(µm): 120, Table Surface Treatment: [Anodize] Hard Anodize, Operating Pressure(MPa): 0.15 to

Load Mass (Horizontal Mounting)(kg): 120~150.1, Table Size Length L(mm): 200, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Sliding Guide] Guide Type of Slide Bearing, Table Size Width W(mm): 144, Table Size Height H(mm): 107, Table Parallelism(µm): 120, Table Surface Treatment: [Anodize] Hard Anodize, Operating Pressure(MPa): 0.15 to

Load Mass (Horizontal Mounting)(kg): 120~150.1, Table Size Length L(mm): 200, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Sliding Guide] Guide Type of Slide Bearing, Table Size Width W(mm): 144, Table Size Height H(mm): 107, Table Parallelism(µm): 120, Table Surface Treatment: [Anodize] Hard Anodize, Operating Pressure(MPa): 0.15 to

Load Mass (Horizontal Mounting)(kg): 120~150.1, Table Size Length L(mm): 200, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Sliding Guide] Guide Type of Slide Bearing, Table Size Width W(mm): 144, Table Size Height H(mm): 107, Table Parallelism(µm): 120, Table Surface Treatment: [Anodize] Hard Anodize, Operating Pressure(MPa): 0.15 to

Load Mass (Horizontal Mounting)(kg): 120~150.1, Table Size Length L(mm): 200, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Sliding Guide] Guide Type of Slide Bearing, Table Size Width W(mm): 144, Table Size Height H(mm): 107, Table Parallelism(µm): 120, Table Surface Treatment: [Anodize] Hard Anodize, Operating Pressure(MPa): 0.15 to