High Purity Fluoropolymer

Proof pressure 0 to 150C Operating temperature Burst Pressure and Heat Resistance Performance 4.0 3.5 3.0 2.5 Pressure (MPa) 2.0 1.5 1.0 0.5 0 20 40 60 80 100 120 140 Temperature (C) 1/8", 3/16", 1/4", 4, 6 tubing 3/8", 10 tubing 1/2", 12 tubing 3/4", 19, 1", 25 tubing 3 High Purity Fluoropolymer Fittings Series LQ1 Construction Quadruple sealing construction The quadruple sealing construction

SRP

140 0 10 20 30 40 50 60 70 80 90 100 Flow rate l/min (ANR) Flow rate l/min (ANR) SRP1-01 SRP1101-01 Conditions/Upstream pressure: 0.5MPa Conditions/Upstream pressure: 0.7MPa 0.25 0.50 0.20 0.40 Downstream pressure MPa Downstream pressure MPa 0.15 0.30 0.10 0.20 0.05 0.10 0.00 0.00 0 20 40 60 80 100 120 140 160 180 200 0 20 40 60 80 100 120 140 Flow rate l/min (ANR) Flow rate l/min (ANR)

MGF

through K 40 3.5 100 120 114 8.7 6-K (6 places) 57 114 5 Guide Table Series MGF 63 MGF63 Scale: 40% 4-M10 x 1.5 through 140 160 120 11.5 48.5 + Stroke 10 60 + Stroke 20 9 2-Rc 1/4 port for extending cylinder Breathing hole for guide (with element) When the cylinder is extended 46 Port for retracting cylinder 4-M10 x 1.5 through M6: T-slot for hexagon bolt K 50 140 160 4 146 11 6-K (6 places

MHF2

External gripping Internal gripping L L F F MHF2-8D MHF2-12D 70 Pressure 0.7MPa 30 60 Pressure 0.7MPa 0.6MPa 0.6MPa 50 Gripping force N Gripping force N 0.5MPa 20 0.5MPa 40 0.4MPa 0.4MPa 30 0.3MPa 0.3MPa 10 20 0.2MPa 0.2MPa 10 40 20 40 30 20 10 0 0 80 60 Gripping point L mm Gripping point L mm MHF2-16D MHF2-20D 140 210 Pressure 0.7MPa Pressure 0.7MPa 120 180 0.6MPa 0.6MPa 100 150 Gripping

ML1

Cylinder EA Absorber model EB EC ED EF EY S T EH EI h i TT REA ML1-A25H ML1-A32H ML1-A40H ML1C25 ML1C32 ML1C40 101 90 25 20 11 72 67.3 12 31 39.5 4.5 3 MAX. 16.5 RB1412 120 107 30 25 16 93 73.2 15 38 49 5.5 6 MAX. 20 REC RB2015 147 129 30 31 16 105.5 73.2 15 40.5 54.5 5.5 6 MAX. 25 RHC Side Support MTS CC Side support A Side support B (mm) H G F J E Cylinder D Part No.

SRP

140 0 10 20 30 40 50 60 70 80 90 100 Flow rate l/min (ANR) Flow rate l/min (ANR) SRP1-01 SRP1101-01 Conditions/Upstream pressure: 0.5MPa Conditions/Upstream pressure: 0.7MPa 0.25 0.50 0.20 0.40 Downstream pressure MPa Downstream pressure MPa 0.15 0.30 0.10 0.20 0.05 0.10 0.00 0.00 0 20 40 60 80 100 120 140 160 180 200 0 20 40 60 80 100 120 140 Flow rate l/min (ANR) Flow rate l/min (ANR)

VP300/500/700

S070 Nil Standard (Internal pilot) R External pilot Manual override VQ Option Light/Surge voltage suppressor Nil Push type Rated voltage B Locking type (Slotted) Nil None VKF 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz C Locking type (Manual) With light/surge voltage suppressor (Type E, T, D, or Y only) Z Option VQZ 110 to 120 VAC, 50/60 Hz S With surge voltage suppressor (Type G only) 4

5 Port Air Operated Valve Series SYA3000/5000/7000 1

/5 Port Air Operated Valve Flow Characteristics/Weight Flow characteristics Note 2) Note 3) Weight (g) Pilot port size Valve model Type of actuation Port size 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) b Cv C [dm3/ (s bar)] b Cv C [dm3/ (s bar)] 90 Single 2.2 0.58 0.34 0.63 2.4 0.36 2 position 110 Double Closed SA 1.8 0.45 0.35 0.49 2.0 0.37 center 1/8 SYJA720-01 0.35 0.73 3.0 Exhaust VA 1.2 120

4/5 Port Air Operated Valve Series SYJA3000 1

/5 Port Air Operated Valve Flow Characteristics/Weight Flow characteristics Note 2) Note 3) Weight (g) Pilot port size Valve model Type of actuation Port size 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) b Cv C [dm3/ (s bar)] b Cv C [dm3/ (s bar)] 90 Single 2.2 0.58 0.34 0.63 2.4 0.36 2 position 110 Double Closed SA 1.8 0.45 0.35 0.49 2.0 0.37 center 1/8 SYJA720-01 0.35 0.73 3.0 Exhaust VA 1.2 120

VFN2000N

characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) VFN2120N-5D-02F 260 400 C 3.48 3.48 b 0.25 0.25 Cv 0.85 0.85 C 4.57 4.57 b 0.17 0.17 Cv 1.06 1.06 VFN2220N-5D-02F 2 position Single solenoid Double solenoid How to Order VFN2 20 1 5 D N 02 F Z Thread type Solenoid Single solenoid Double solenoid 1 2 NAMUR Interface Rc (PT) G (PF) NPTF Nil F N Voltage 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 to 120

Dedicated Controller Series LC1 Uniaxial Type

Note 2) The power supply for model LC1-1B3H2 is 200VAC, 50/60Hz. 52 Dedicated Controller Series LC1 Performance/Specifications General specifications Model LC1-1B1 LC1-1B2 Item 100V/110VAC10% 50/60Hz 200V/220VAC10% 50/60Hz (LC1-1B3H2 is 200VAC10%) Power supply 5mA or less Leakage current 80 x 120 x 244mm Dimensions 2.2kg Weight Single unit installation type (resin housing) Housing type Actuator

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

Also available without switch rails and magnets. 110 120 Shown without switch rails and magnets 130 140 150 160 170 Can be mounted from three directions. Highly flexible mounting Work piece mounting taps 1. Using table top taps 2. Using table side taps 1. Using tapped holes 2. Using through holes 3.

Guide Table Series MGF

through K 40 3.5 100 120 114 8.7 6-K (6 places) 57 114 5 Guide Table Series MGF 63 MGF63 Scale: 40% 4-M10 x 1.5 through 140 160 120 11.5 48.5 + Stroke 10 60 + Stroke 20 9 2-Rc 1/4 port for extending cylinder Breathing hole for guide (with element) When the cylinder is extended 46 Port for retracting cylinder 4-M10 x 1.5 through M6: T-slot for hexagon bolt K 50 140 160 146 4 11 6-K (6 places

Precision Clean Regulator Series SRP

140 0 10 20 30 40 50 60 70 80 90 100 Flow rate l/min (ANR) Flow rate l/min (ANR) SRP1-01 SRP1101-01 Conditions/Upstream pressure: 0.5MPa Conditions/Upstream pressure: 0.7MPa 0.25 0.50 0.20 0.40 Downstream pressure MPa Downstream pressure MPa 0.15 0.30 0.10 0.20 0.05 0.10 0.00 0.00 0 20 40 60 80 100 120 140 160 180 200 0 20 40 60 80 100 120 140 Flow rate l/min (ANR) Flow rate l/min (ANR)

OMR0032

Turn ON No. 3 and No. 6, and (c) Differential input R3 = 120 turn OFF the others. ON ON ON 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 (a) Open collector input (24 V) (b) Open collector input (5 V) (c) Differential input 36 - (4) Pulse input circuit example i.

EXxx-OMZ0016

(Wch: 112-119) 19 Remote registration information (Wch: 8-15) Remote registration information (Wch: 1-7)*1 20 Remote registration information (Wch: 24-31) Remote registration information (Wch: 16-23) 25 Remote registration information (Wch: 104-111) Remote registration information (Wch: 96-103) 26 Remote registration information (Wch: 120-127) Remote registration information (Wch: 112-119

10

1/RJ20 70 140 20 RJ2015L RJ2725L RJ1412L 60 120 Impact mass m [kg] Impact mass m [kg] Impact mass m [kg] 15 100 50 RJ2725H RJ1412H 80 40 RJ2015H 10 60 30 RJ1410 40 20 5 20 10 0 0 0 0 500 1000 1500 2000 0 500 1000 1500 2000 0 500 1000 1500 Collision speed [mm/s] Collision speed [mm/s] Collision speed [mm/s] 882 Model Selection RJ Series Model Selection Graph The model selection graphs

Rotary Table/

50 MSQA50 (High precision type) 70 60 0 0 20 40 60 80 100 120 6 8 10 14 12 2 4 Load N Load N 5 Rotary Table Air Consumption Air consumption is the volume of air which is expended by the rotary tables reciprocal operation inside the actuator and in the piping between the actuator and the switching valve, etc.

Precision Clean Regulator

140 0 10 20 30 40 50 60 70 80 90 100 Flow rate L/min (ANR) Flow rate L/min (ANR) SRP1101-01 Conditions/Inlet pressure: 0.5 MPa SRP1-01 Conditions/Inlet pressure: 0.7 MPa 0.25 0.50 0.20 0.40 Outlet pressure MPa Outlet pressure MPa 0.15 0.30 0.10 0.20 0.05 0.10 0.00 0.00 0 20 40 60 80 100 120 140 160 180 200 0 20 40 60 80 100 120 140 Flow rate L/min (ANR) Flow rate L/min (ANR) Pressure Characteristics

Load Mass (Horizontal Mounting)(kg): 120~150.1, Table Size Length L(mm): 200, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Sliding Guide] Guide Type of Slide Bearing, Table Size Width W(mm): 144, Table Size Height H(mm): 107, Table Parallelism(µm): 120, Table Surface Treatment: [Anodize] Hard Anodize, Operating Pressure(MPa): 0.15 to