Electric Actuators

With brake: 150 Without brake: 115 Housing 36.5 32 Thread size M4 x 0.7 6 4 70 M5 x 0.8 6 4 70 Effective thread length (mm) Quantity P.C.D. B 89 A A B Section BB Coupling P.C.D.

Rotary Cylinder Series MRQ

32 Selection Caution 1.

Smooth Cylinder

22 19.5 17 32 10 13 8 45 6 8 33.5 5.5 15 30 M26 x 1.5 1/8 62 120 M10 x 1.25 26 22 19.5 17 32 12 13 8 45 6 8 37.5 5.5 15 34.5 M26 x 1.5 1/8 64 122 M10 x 1.25 26 24 21 22 41 14 16 11 50 8 10 46.5 7 21.5 42.5 M32 x 2 1/4 88 154 M14 x 1.5 32 (mm) Boss-cut ZZ Bore size (mm) 20 25 32 40 103 107 109 138 10 Smooth Cylinder Series CG1Y 20, 25, 32, 40, 50, 63, 80, 100 Specifications and auto switch

Table of Contents

Refer to Flow Characteristics (page 14-20-32) and figure of Max. Air Flow (page 14-20-30).

Parallel Style Air Gripper Series MHZ

Refer to page 439 for the auto switch mounting brackets. 398 Parallel Style Air Gripper/Standard Type Series MHZ2 How to Order Bore size M9BW 32 MHZ2 D 32 to 40 Number of fingers 2 Made to Order Refer to page 400 for details. 2 fingers Bore size 32 40 Number of auto switches Nil S n 32 mm 40 mm 2 pcs. 1 pc. n pc.

CV/MVGQ

30 32 40 40 52 52 10 10 10 14 14 30 35 35 40 40 9 9 11.5 13.5 13.5 4 4 0 0 0 12 12 15 18 18 60 70 86 102 116 80 90 105 130 150 27 32 32 37 37 71 81 101 119 133 60 70 86 102 116 42 50 59 76 92 100 110 130 160 180 Up to 500 Up to 600 Up to 600 Up to 750 Up to 750 The minimum stroke of the one with rod boot is 20 mm or more.

Compact Rotary Actuator Series CRQ2

32 Selection Caution 1.

CV/MVGQ

32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 8 11 11 13 16 18 18 18 20 20 Bore size (mm) 40 50 63 80 100 Without rod boot With rod boot ZZ 221 231 239 271 283 W l 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke H 51 58 58 71 72 ZZ 229 239 247 280 292 h 59 66 66 80 81 f 11.2 11.2 11.2 12.5 14.0 e 43 52 52 65 65 8 0 0 0 0 Axial

pa

Series Diaphragm material Volume to be discharged per 1 cycle LVA Turbine oil P-32 Turbine oil 32(Mitsubishi turbine oil 32) Cosmo turbine 32 Kyodo turbine oil 32 Turbine oil 32 Stork turbine 32 Turbin oil 32 General R turbine oil 32 Fucoal turbine 32 PTFE NBR Approx. 40 ml PA3000 automatically operated type 100 million cycles 50 million cycles LVH Approx. 100 ml PA5000 automatically operated

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

10% PF3A7 H 12 to 24 VDC 10% 12 to 24 VDC PF2M7 PFMC 10% 18 to 30 VDC 10% PF3A7 H-L 12 to 24 VDC 10% 12 to 24 VDC 10% 12 to 24 VDC 10% 21.6 to 30 VDC PF3A701H/ 702H-L 18 to 30 VDC 10% 18 to 30 VDC PF2M7-L PFMC-L 10% 21.6 to 30 VDC PF3A8 H-L Temperature characteristics (25C standard) 3% F.S. 1 digit (15 to 35C) 5% F.S. 1 digit (0 to 50C) 2% F.S. 2% F.S. (15 to 35C) 2% F.S. (15 to 35C) Monitor

Series PF2W Digital Flow Switch For Water

(Specifications: Maximum load current of 10 mA; Maximum applied voltage of 30 V) Output for display unit Output Note 2) specifications Environment Voltage output 1 to 5 V Accuracy: 5%F.S., Min. load impedance: 100 k (Output impedance: 1 k) Analog output Current output 4 to 20 mA Accuracy: 5%F.S., Max. load impedance: 300 or less (at 12 VDC), 600 or less (at 24 VDC) 12 to 24 VDC 10% Power

7ND9071en

6.1 Prestage.32 6.2 Spool valve .32 6.3 Flame arrestor assembly.33 6.4 Diaphragms.33 6.5 Communication board.33 7 ERROR MESSAGES.34 7.1 Failsafe errors.34 7.2 Alarms.34 7.3 Errors.34 7.4 Warnings .35 7.5 Notifications.36 8 TROUBLE SHOOTING.36 9 ND9000 WITH LIMIT SWITCHES.37 9.1 Introduction .37 9.2 Installation on a valve controller .40 9.3 Electrical connections.41 9.4 Adjustment.41 9.5

Pin Clamp Cylinders

/Mounting Method Applicable cylinder -X2321/-X2322 -X2321/-X2322 -X2321/-X2322 Applicable auto switches D-P3DWAl D-M9lV/M9lWV D-A73/A79W Bore size [mm] 32 32 32 Auto switch mounting bracket part no.

Check Valve Series AK

Model AKH03-U10/32 AKH03-N01S AKH07-U10/32 AKH07-N01S AKH07-N02S AKH09-N01S AKH09-N02S AKH09-N03S AKH11-N02S AKH11-N03S AKH11-N04S AKH13-N03S AKH13-N04S 8 11.11 10-32 UNF 1/8 10-32 UNF 1/8 1/4 1/8 1/4 3/8 1/4 3/8 1/2 3/8 1/2 24.3 24.6 25.8 26.9 31 31.7 21.2 20.6 22.7 22.9 25 27.7 36 35.5 48.3 40.7 41.2 54 46.5 5 10 10 11 18 16 24 43 47 40 79 87 85 Applicable tubing 5/32 2.8 12.7 2.8 6.5 6.5

LEC-OM07605CN

PB26](_ _ _ 1) 5 32 5. 5.2.3 ([Pr. PC_ _ ]) [] PC01 ERZ rev03rev200rev200rev 0 0 [rev] () 1000 . [Pr.

0.5

Ground the F.G. cable with a resistance of 100 or less +24 V Brown + 24 VDC +24 V Blue 0 V Power supply 24 VDC 0 V F.G.

155

D-M9NA D-M9BA D-M9PA Auto switch model In-line In-line In-line Electrical entry direction 3-wire 2-wire Wiring type NPN PNP Output type 24 VDC relay, PLC IC circuit, Relay, PLC Applicable load 5, 12, 24 VDC (4.5 to 28 V) Power supply voltage 10 mA or less Current consumption 24 VDC (10 to 28 VDC) Load voltage 28 VDC or less 2.5 to 40 mA 40 mA or less Load current 4 V or less 0.8 V or

OMR0032

switch setting Turn ON No. 2 and No. 5, and (a) 24 VDC +/10% R2 = 1.5 k turn OFF the others.

Programless controller (with stroke study) Step motor (servo 24 VDC)

Connector 11 No.JXC-OMU0030-A (4) Power ON alarm (error) Supply 24 VDC power supply.

Large Size Vacuum Module: Series ZR

Nil Air operated Nil Note) Air operated 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC 100 VAC ( Hz) 110 VAC ( Hz) Filter specifications (F) L LN Lead wire length 0.3 m L plug connector type 5 6 V S R Nil No setting Without lead wire Unit specifications LO Without connector M Lead wire length 0.3 m Digital pressure switch for vacuum (ZSE30A) specifications (D) M plug connector type Nil M P With unit switching