Modular Pressure Control Equipment F.R.L. Replacement Procedure

1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

2/3 Port Solenoid Valve for Chemicals

3 Sleeve 7 Iron Spacer 8 PBT r Return spring 9 Stainless steel w Board assembly 10 e Casing 11 PBT q Plug 12 NBR O-ring 13 NBR 3 Diaphragm Type Direct Acting 2/3 Port Solenoid Valve for Chemicals Series LVM10/100 Construction/Base Mounted Type LVM13R LVM14R LVM16R !2 !0 !2 !0 !2 !0 !1 !1 !1 y y y t t t u u i i u i o o !3 !3 o !3 r r r e e w w e w q !4 !4 q q !4 LVM115 Description No.

Low Profile Guide Type

43 44 45 NBR NBR NBR NBR Hard anodized Electroless nickel plated Nickel plated Zinc chromated Chrome molybdenum steel Carbon steel Body (rodless cylinder) gasket Adjuster holder positioning key Magnet 1554 CY1F Series Magnetically Coupled Rodless Cylinder Low Profile Guide Type Dimensions QA 1/2 (Q + Stroke) Q + Stroke CY1F 4 x MM thread depth ML (LL) LA 6 x YA recessed area Note 2) XAH7

MHC2

9 MHC6-PS Seal kit MHCA2-6 (Short body type) Double acting/With fingers closed Single acting Double acting/With fingers open o i e q t !1 !6 w !0 r !4 u !5 !7 y !3 !2 Component Parts Material Note Material Note No. Description No. Description Hard anodized Aluminium alloy High carbon chromium bearing steel Body Needle roller q !

MHC2

9 MHC6-PS Seal kit MHCA2-6 (Short body type) Double acting/With fingers closed Single acting Double acting/With fingers open o i e q t !1 !6 w !0 r !4 u !5 !7 y !3 !2 Component Parts Note Material Material Note No. Description No. Description Hard anodized Aluminium alloy High carbon chromium bearing steel Body Needle roller q !

High Vacuum Angle Valve, XL Series

XLCV/With solenoid valve Q Port R (exhaust port) N N With double solenoid P K M L With single solenoid Port P (pressure port) (mm) N 3 3 3 3 6.5 6.5 M 6.5 6.5 6.5 6.5 11 11 L 9 9 9 9 11 11 K 14 16 29 42 32 45 P 17 15 2 6 Q Model XLCV-16 XLCV-25 XLCV-40 XLCV-50 XLCV-63 XLCV-80 16.5 16.5 17.5 17.5 29 29 Other dimensions are the same as XLA. 11 Series XLF Normally Clossed/O-ring Seal Air

4/5 Port Air Operated Valve Series SYJA3000 1

(R2) Same manifolds as series SYJ5000 are prepared. 3 position pressure center (A) 4 (B) 2 SS5YJA5 Fill the same as SS5YJ5. 1 (P) 5 (R1) 3 (R2) Base mounted 2 position single 2 position double (A) 4 (A) 4 (B) 2 (B) 2 Instruct by specifying the valves and blanking plate assembly to be mounted on the manifold along with the manifold base model no. 1 (P) 3 (R) 1 (P) 3 (R) (Example) SS5YJA5-42

4/5 Port Air Operated Valve SYJA3000 Series

SS5YJA5-42-03-01 1 set SYJA5140 1 set SYJA5240 1 set SYJ5000-21-1A 1 set 4(A) (B)2 4(A) (B)2 1 (P) (R)3 1 (P) (R)3 3 position pressure center The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc. 4(A) (B)2 1 (P) (R)3 Caution Be sure to read this before handling the products.

SYJA3000

01 02 01 02 01 02 12.6 (0.7) 170 (90) 2 position single SYJA714012.6 (0.7) 190 (110) 2 position double SYJA72408.5 (0.47) 3 position closed cente SYJA7340(1) M5 X 0.8 200 (120) 1/8, 1/4 9 (0.5) [6.5 (0.36)] 3 position exhaust center SYJA7440PA, B: 13.5 (0.75) [7 (0.39)] A, BR1, R2: 7 (0.39) 3 position pressure center 01 02 SYJA7540Note1) P, A, B port: Rc(PT)1/8R1, R2 port: Rc(PT)1/4 Note2

Series: 2 (VQZ200), Composite Symbol: 1 (Metal Seal N.C.), Function: Standard (0.35W DC, AC), Coil Voltage: 5 (24VDC), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Manual Override: Non-locking Push Style, IP65 Compliant: None, 1: 1, Port Size: 01T (Base Mounted w/Sub-plate NPTF1/8), CE Compliant: Q (CE Marked)

Series: 2 (VQZ200), Composite Symbol: 1 (Metal Seal N.C.), Function: K (High Pressure 0.9W), Coil Voltage: 5 (24VDC), Lead Wire: YO (DIN Terminal w/o Connector), Manual Override: Non-locking Push Style, IP65 Compliant: None, 1: 1, Port Size: 01T (Base Mounted w/Sub-plate NPTF1/8), CE Compliant: Q (CE Marked)

Series: 2 (VQZ200), Stations: 9 Stations, Port Size: 01T (NPTF1/8), Option: None, CE Compliant: Q (CE Marked)

Series: 2 (VQZ200), Stations: 14 Stations, Port Size: 01T (NPTF1/8), Option: D0 (DIN Rail Mount w/o DIN Rail), CE Compliant: Q (CE Marked)

Series: 2 (VQZ200), Stations: 4 Stations, Port Size: 01T (NPTF1/8), Option: D (DIN Rail Mounting), CE Compliant: Q (CE Marked)

Series: 2 (VQZ200), Stations: 14 Stations, Port Size: 01T (NPTF1/8), Option: D (DIN Rail Mounting), CE Compliant: Q (CE Marked)

Series: 2 (VQZ200), Stations: 6 Stations, Port Size: 01T (NPTF1/8), Option: None, CE Compliant: Q (CE Marked)

Series: 2 (VQZ200), Stations: 2 Stations, Port Size: 01T (NPTF1/8), Option: None, CE Compliant: Q (CE Marked)

Series: 2 (VQZ200), Composite Symbol: 1 (Metal Seal N.C.), Function: Standard (0.35W DC, AC), Coil Voltage: 6 (12VDC), Lead Wire: LO (L Plug w/o Connector), Manual Override: Non-locking Push Style, IP65 Compliant: None, 1: 1, Port Size: 01T (Base Mounted w/Sub-plate NPTF1/8), CE Compliant: Q (CE Marked)

Function: Standard (0.35W DC, AC), Coil Voltage: 5 (24VDC), Lead Wire: G (Grommet w/Lead Wire 0.3m), Manual Override: Non-locking Push Style, Port Size: 01T (NPTF1/8), CE Compliant: Q (CE Marked)

Function: Standard (0.35W DC, AC), Coil Voltage: 5 (24VDC), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Manual Override: Non-locking Push Style, Port Size: 01T (NPTF1/8), CE Compliant: Q (CE Marked)