4-channel Flow Monitor ( compatible)

Normal output Reversed output -100No.PF-OMA1011-A Specifications Model PFG20# series PF2A5 PF3W5 PF2D5 Applicable flow sensor 10 50 11 21 51 04 20 40 11 25 04 20 40 Rated flow range 1 to 10 5 to 50 10 to 100 20 to 200 50 to 500 0.5 to 4 2 to 16 5 to 40 10 to 100 50 to 250 0.4 to 4 1.8 to 20 4 to 40 L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min 0.35 to 1.7 to

AC Servo Motor Driver (CC-Link Type)

Recommended Parameter Values [LEF] LEFS25 LEFS32 LEFS40 Lead symbol H A B H A B H A B Series Lead 20 12 6 24 16 8 30 20 10 Parameter *1,*2 Para. Initial value Recommended value No.

Cylinder with Lock Series CLS

PLC: Programmable Logic Controller Refer to pages 14 through 19 for sections related to auto switches.

VXP21/22/23

Dimensions (Orifice Size: 10 mm) Normally Closed: VXP2130 Grommet: G Conduit: C (67) (52) 20 23 (67) (52) 20 39 270 10 290 10 G 1/2 VC (5.5) (2.3) (2.3) (5.5) VDW 80 86 63 69 66.5 73.5 80 86 71 77 (33) 36 (33) 36 (27) 30 VQ (7.5) (27) 30 (7.5) Bracket 11 14 11 14 VX2 IN OUT IN OUT Bracket 24 26 50 2-Rc 1/4, 3/8, 1/2 (28) (28) 24 26 50 2-Rc 1/4, 3/8, 1/2 VX 22 28 40 22 28 Courtesy of Steven

MHZ2/MHZJ2

4 60 6.3 10 MHZJ2-10S Normally open 6 130 24 16 MHZJ2-16S 10 255 28 20 MHZJ2-20S 14 465 45 25 MHZJ2-25S 4 12 60 10 MHZJ2-10C Normally closed Single acting type, normally closed 6 31 130 16 MHZJ2-16C 10 56 255 20 MHZJ2-20C 14 83 460 25 MHZJ2-25C Note 1) Values for pressure of 0.5MPa, gripping point L= 20mm, at center of stroke.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

Bore size (mm) 10, 20, 30, 40, 50 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75, 100 Standard stroke 6 10, 15 20, 25, 32 Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

) One-Touch fitting 4 tube 6 tube 8 tube 34 35 10 to 16 38 39 20 to 32 134 136 40, 50 (g) Additional Weight by Stroke Pad diameter (mm) Stroke (mm) 20 30 40 50 +10.5 +12.5 +22.5 +24 10 to 16 +37.5 +40 +66.5 20 to 50 13 Series ZPR With Buffer ZPR 10/13/16 F J/K10-0-A10 (With Buffer) S M10 x 1 Width across flats 14 3 I 3 Width across flats 10 J Applicable tube O.D.

Dedicated Controller

CN2 11 15 14 2 12 PF SG CR PP PG NP NG SD V24 SON LSN LSP ALM SG 3 12 13 9 10 7 8 20 17 11 LG 19 P5 4 OP 1 V+ 20 12 7 6 P5 LG MR MRR MD MDR SD 7 8 1 2 4 5 9 P5 LG MR MRR MD MDR SHD SG 7 8 1 2 4 9 P5 LG MR MRR MD MDR SHD Note 3) Detector 17 16 Plate 5 Note 2) Note 6) Be sure to connect the shielding wires to the ground plate inside the connector. 12 SG Note 1) Do not orient diodes incorrectly

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

21.3 32.4 N 20 25 40 M 9 12 16 LW 120 176 229 G 8.5 10.7 15.5 C 5.4 8.6 10.8 LB 87.4 124.7 148.3 B 9.5 14 17.5 (LL) 40 49.6 75 A 80 105 165 LE 5 6 8 LD 5.5 9 11 Model MY2HT16G MY2HT25G MY2HT40G P M5 x 0.8 Rc 1/8 Rc 1/4 PE 1 3.4 0.5 SS 9.7 14 21.5 TT 12.5 19.3 35.4 PF 10 12 20 RW 69 100 116 PG 10 12.5 20 PH 10.2 13 18.5 PI 41 57.6 72 QW 66 98 110 R 5 8 12 RR 5.3 8.5 11 PD 23 29.2 36 QQ 16.4

3 Port Air Operated Valve Series SYJA300 1

Series VPA700 2.9/3.1 3.5/3.3 3.5/3.5 3.8/4.0 0.18/0.23 0.19/0.18 0.27/0.27 0.26/0.28 14/14 15/16 12/12 15/14 VPA744 (Base mounted) 0.71 Note 1) In the case of body ported type, the valve is without bracket.

HRX-OM-R028

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low level in tank 1 High circulating fluid discharge temp. 2 Circulating fluid discharge temp. rise 3 Circulating fluid discharge temp. drop 4 High circulating fluid return temp. 5 High circulating

VQ5000

Refer to How to Order Manifold. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 D-sub Connector Cable Assembly (Option) Electric Characteristics Multi-core vinyl cable 0.3 mm2 x 25C Item Characteristics Cable length (L) Assembly part no.

AC Servo Motor Driver (SSCNET /H Type)

Pr.1 Setting value Set value set by PLC program (Unit) 0:mm 1 to 20(x10-2mm/min) 1:inch 1 to 20(x10-3inch/min) 2:degree 1 to 20(x10-3degree/min) (Note 1) 3:PLS 1 to 50(PLS/s) (Note 1) The command speed range by setting Pr.83 Speed control 10 x multiplier setting for degree axis" to valid: 1 to 20(x10-2degree/min). -64- Pr.9 Acceleration time 0, Pr.10 Deceleration time 0 Pr.9 Acceleration

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

TSUBAKI CABLEVEYOR cross-sectional dimensions (mm) A Series A B H S LJ1 10 LJ1 20 LJ1 30 10 20 B H S H S 10 20 14 40 H S Example) For LJ1 10 2 3 6 4 8 8 4 Correct: 60% or less Incorrect: More than 60% 103 Made to Order/Clean Room Specification Series LJ1H10 Dimensions/LJ1H10 (X60) 1 2 Scale: 20% Dimensions inside ( ) are for the model with brake. 120 40 70 2-5H10 depth 8 4-Limit switch mounting

Rotary Gripper Series MRHQ

Single acting 1060 (3.44) 90 MRHQ20S MRHQ20C 10 20 1057 (2.33) 180 1566 (3.45) 90 MRHQ25S MRHQ25C 14 25 1560 (3.44) 180 Note 1) Values without auto switch weight.

AC Servo Motor Driver (CC-Link Type)

Recommended Parameter Values [LEF] LEFS25 LEFS32 LEFS40 Lead symbol H A B H A B H A B Series Lead 20 12 6 24 16 8 30 20 10 Parameter *1,*2 Para. Initial value Recommended value No.

Refrigerated Air Dryers

, IDF6E-20 IDF8E-20, IDF11E-20 5 A IDU3E-20, IDU4E-20 IDU6E-20, IDU8E-20, IDU11E-20 [mm] Dimensions Model A B C D E F IDF22E-20 59 40 IDF15E1-20, IDF22E-20, IDF37E-20 IDU15E1-20 IDF22E-30, IDF37E-30 IDF55E-30 IDU22E-30, IDU37E-30, IDU55E-30 25 46 IDF37E-20 IDF22E-30 39 30 mA 125 10 A 60 60 IDF37E-30 IDF55E-30 148 81 50 36 IDF75E-30 133 73 IDU22E-30 151 74 200 V type IDF75E-30, IDU75E-30 15

HRX-OM-T004

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 4 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low level in tank 1 High circulating fluid discharge temp. 2 Circulating fluid discharge temp. rise 3 Circulating fluid discharge

Vacuum

20 30 46 80 91 9.9 zPlouo souo 7 u02 2 1.2 12 0.8 u04 4 4.4 1 . 6 7 12 0.8 u06 7 2.5 7 12 0.8 u08 I 7 12 1 u10 1 0 12 1 2 3 u13 1 3 1 5 4 1 3 7.7 1 2 u16 1 6 1 8 1 3 8.2 '12.5 3.5 u20 20 1 5 14 4 u25 1 5 1 4 4 u32 32 4 1 5 1 0 14.5 4 5 u40 40 43 7 1 8 18.5 I u50 50 53 7 1 8 19.5 7.5 D l 0 1 0 1 2 10.7 D16 1 8 11.7 7 D25 2A 4 15.5 20 1 0 D40 40 43 7 1 8 24.2 29 126 Uacuum Pad/Gom serles zPR

IDUS/IDFS

/m3. ( ) Therefore, with an air flow rate of 3m3/min (22kW equivalent compressor), the amount of condensed water per unit of time is 15.2 x 3 x 60 = 2736g/h. 6 7 8 3 1 2 3 4 5 Dew Point Conversion Chart 60 50 40 30 Pressure dew point C 20 10 1.5MPa 1.3MPa 1.1MPa 0.9MPa 0.7MPa 0.5MPa 0.3MPa 0.1MPa Atmospheric pressure 0 -40 -30 -20 -10 -60 -50 -60 -50 -40 -30 -20 -10 0 10 20 30 Atmospheric