Modular Design with Uniform Body Style

v*17 v*17 v*17 v*17 ZA*16 Digital pressure switch: With unit selection function *18 *18 *18 *18 *18 *1 Drain guide is NPT1/8 (applicable to the AC20-D) and NPT1/4 (applicable to the AC30-D to AC60-D).

Series SV

Quantity 20 19 18 17 16 15 13 12 11 14 10 9 8 7 6 5 4 3 2 1 Valve stations Single solenoid Double solenoid Closed center Exhaust center Pressure center N.C./N.C. N.O./N.O. N.C.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

20 stations (Max.)

CL

to 500 20 to 600 20 to 600 20 to 750 20 to 750 30 to 1400 30 to 1400 30 to 1400 69 16 20 20 25 30 36 36 40 14 14 14 27 32 32 37 37 47 47 53 40 50 55 65 80 90 90 90 15 17 17 21 21 16 16 18.5 60 70 86 102 116 145 161 182 32 40 40 52 52 15 17 17 21 21 16 16 18.5 22 27 27 32 41 11 11 11 11 11 16 16 18.5 8 11 11 13 16 6 7 7 11 11 15 15 17 14 18 18 22 26 31 31 36 9 9 11.5 13.5 13.5 19 19 19 40

CV/MVGQ

28 6.8 47 45 4 19.5 13 5.5 22 10 33.5 Up to 300 17 32 6 8 78.8 40 3.2 104 28 6.8 47 45 4 19.5 13 5.5 22 12 37.5 Up to 300 17 32 6 8 84.8 55 3.2 134 30 7 54 50 4 21 16 7 24 14 46.5 Up to 300 22 41 8 10 ZZ Z Y X S NN MM NA LZ N Bore size (mm) 20 25 32 40 131 21 8 20 62 M20 x 1.5 M8 x 1.25 24 55 15 135 25 8 20 62 M26 x 1.5 M10 x 1.25 30 55 15 137 25 8 20 64 M26 x 1.5 M10 x 1.25 34.5 55 15 171

CV/MVGQ

across flats NA In the case of 40 Mounting hole S + Stroke ZZ + Stroke In the case of 20 to 32 Eh8 B1 FT FX FY FZ H H1 A AL B B2 C2 D F FD H2 HX Bore size (mm) 20 25 32 40 Stroke range 75 41 34 7 4 60 Up to 300 18 15.5 13 26 30 8 13 5 8 65.3 20 0 0.033 60 75 45 Up to 300 22 19.5 40 17 32 37 10 13 7 4 6 8 70.5 26 0 0.033 45 19.5 40 13 7 4 60 75 Up to 300 22 17 32 37 12 6 8 76.5 26 0 0.033

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Port size M5 x 0.8 t 10.5 15 18 20 t 10.5 15 18 20 Series Assembly part no.

CNA

40 10 95 17 56.5 20 13 15 12 11 Up to 600 200.1 0.3 35 32 86 27 115 1/4 1/4 64 16 25 20 40 10 102 17 67 20 18 12 15 11 Up to 600 0.1 0.3 40 37 102 32 139 1/4 1/4 78 20 31.5 25 52 14 123 21 83 20 23 18 17 13 Up to 750 Data 0.1 0.3 40 37 116 41 160 1/4 1/4 92 25 35.5 30 52 14 144 21 98 22 25 20 19 16 Up to 750 Bore size (mm) 40 50 63 80 100 J KA L MM N P Q H S T U V W Z ZZ K RR 6 M8 x 1.25

CNA

40 10 95 17 56.5 20 13 15 12 11 Up to 600 200.1 0.3 25 35 32 86 27 115 1/4 1/4 64 16 20 40 10 102 17 67 20 18 12 15 11 Up to 600 0.1 0.3 40 37 102 32 139 1/4 1/4 78 20 31.5 25 52 14 123 21 83 20 23 18 17 13 Up to 750 Data 0.1 0.3 40 37 116 41 160 1/4 1/4 92 25 35.5 30 52 14 144 21 98 22 25 20 19 16 Up to 750 Bore size (mm) 40 50 63 80 100 J KA L MM N P Q H S T U V W Z ZZ K RR 6 M8 x 1.25

MY1

h 3.6 3.6 3.5 4.5 4.5 5.5 5.5 FC 14 14 13 17 17 26 31 EY 39.5 45.5 53.5 67 83 106 129 EC 5.8 5.8 6.5 8.5 10 14 14 EB 30 32 38 50 57 66 77 EA 7 10 12 14 17 20 26 E 14.6 20 24 29 35 40 52 Model MY1M16 MY1M20 MY1M25 MY1M32 MY1M40 MY1M50 MY1M63 h Low load shock absorber + Adjusting bolt MY1M Bore size Stroke TT h h L E F EA F EB W For MY1M16, 20 FW Shock absorber Stroke adjusting unit (Shock

ZP

MB P. 14 With adapter Single unit Front matter 5 Series Variations Type Symbol Variations Pad Diameter Adapter type Page Oval Pad For work pieces with limitations on the adsorption surface P. 17 Single unit P. 18 With adapter: Vacuum inlet direction Vertical 3.5 x 7 4 x 10 5 x 10 6 x 10 P. 19 4 x 20 5 x 20 6 x 20 8 x 20 Oval W With buffer: Vacuum inlet direction Vertical 4 x 30 5 x 30 6 x

CM2

5 5 24 M20 X 1.5 18 8 28 12 15.5 8 M8 X 1.25 20 15 12 13 20 8 41 20 1 to 300 17 6 5.5 30 M26 X 1.5 22 10 33.5 12 19.5 8 M10 X 1.25 22 15 12 13 25 8 45 26 34.5 1 to 300 17 6 5.5 M26 X 1.5 22 12 37.5 15 19.5 10 M10 X 1.25 27 15 20 13 32 8 45 26 21.5 42.5 1 to 300 22 8 7 M32 X 2 24 14 46.5 15 21 10 M14 X 1.5 33 20 16 40 11 50 32 With rod boot h Symbol Bore S U Z ZZ P 1/8 1/8 1/8 1/4 RR Stroke

Stability of suction position,

CL 2 5 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-50BM ZP3E-125BM ZP3 12 30 S, F S, F 25 Displacement [mm] Displacement [mm] ZP3E ZP3E 20 8 N N ZP2 15 U U 10 4 ZP2V CL CL 5 ZP 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZPT ZPR ZP3E-63BM XT661 16 N, S, F Displacement [mm]

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Fittings & Tubing Air Cylinders Rotary Actuators Without Power Supply Terminal With Power Supply Terminal Positive common Negative common Common 20 20 20 Positive pin (Common) Positive pin 19 19 19 18 18 Station 9 SOL.b Negative pin Negative pin (Common) 18 17 17 SOL.a Station 16 Station 16 17 16 16 Station 8 SOL.b 16 15 15 SOL.a 15 6 6 SOL.b Station 5 SOL.b Station 5 4 5 4 5 Station 2

Electric Actuators

CN2 11 15 14 2 12 PF SG CR PP PG NP NG SD V24 SON LSN LSP ALM SG 3 12 13 9 10 7 8 20 17 11 LG 19 P5 4 OP 1 V+ 20 12 7 6 P5 LG MR MRR MD MDR SD SG 7 8 1 2 4 5 9 P5 LG MR MRR MD MDR SHD 7 8 1 2 4 9 P5 LG MR MRR MD MDR SHD Note 3) Detector 17 16 Plate 5 Note 2) Note 6) Be sure to connect the shielding wires to the ground plate inside the connector.

Table of Contents

0.36 4.7 18 0.40 5.0 20 0.28 5.2 23 0.32 6.2 23 0.27 5.8 25 0.21 6.2 16 0.37 4.6 18 0.41 5.1 20 0.27 5.2 23 0.32 6.1 23 0.26 5.8 25 0.20 6.1 15 0.38 4.1 16 0.31 4.3 17 18 0.31 0.28 4.6 4.7 20 21 0.33 0.30 5.4 5.4 14 0.38 3.6 17 [16] 0.39 [0.35] 4.8 [4.3] 17 0.29 4.6 18 0.29 4.6 21 [18] 23 [20] 0.31 [0.34] 5.6 [5.0] 0.27 [0.33] 5.9 [5.2] 16 [9.4] 0.39 [0.40] 4.2 [2.6] 17 0.36 4.5 20 0.31

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

18 45 25 14 17.5 9.5 M8 x 1.25 18 32 20 M14 x 1.5 30 22 1/4 37 15 106 50 9 25 73 53 14 23 19 20 50 28 17 17 13 M10 x 1.5 20 35 22 M16 x 1.5 30 26 3/8 43 18 112 63 8 28 80 60 16 27 21 22.4 55 30 17 17 13 M10 x 1.5 22 40 25 M18 x 1.5 30 26 3/8 47 20 116 80 8 32 100 75 18 31 26 28 65 32 22 20 15 M12 x 1.75 26 45 29 M22 x 1.5 35 30 1/2 57 22 127 100 6.5 38 118 90 20 35 34 35.5 80 35 27 19 16

Cylinder with Lock

E2 TA TC TD TF TH TL TO TR TS TT TU TX TY TZ UW XV Z 32 MB-S03 47 62 62 12 +0.070 0 47 35 45 12 7 10 13 8.5 50 71 74 49 131 153 40 MB-S04 54 80 80 16 +0.070 0 60 45 60 17 9 12 17 10 63 77.5 97 58 150 174 50 66 80 92 16 +0.070 0 60 45 60 17 9 12 17 10 75 91 109 71 166 198 63 MB-S06 77 100 110 20 +0.084 0 80 60 70 20 11 14 22 15 90 103 130 87 179 211 80 99 100 130 20 +0.084 0 80 60 70 20 11

CY1

14 20 13 8 15 39.5 76 26 17.5 CY1R15 14 53 4.3 5 M4 x 0.7 6 M5 x 0.8 84 18 17 25 16 7 18 54.5 94 32 19 Rc(PT) 1/8 Rc(PT) 1/8 Rc(PT) 1/8 Rc(PT) 1/4 Rc(PT) 1/4 Rc(PT) 1/4 CY1R20 11 62 5.6 5 M4 x 0.7 7 95 17 20 40 19 7 22 64 107 38 20.5 CY1R25 15 70 5.6 6 M5 x 0.8 6.5 105 20 22.5 40 21.5 7 28 72 117 43 21.5 CY1R32 13 76 7 7 M6 x 1 8.5 116 26 28 50 27 7 35 79 130 54 24 CY1R40 15 90 7 8 M6 x 1

Table of Contents

20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 , , 1 4 3 8 40 40 50 50 55 55 65 85 , Misc.