Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 4 Port/Base Mounted Common SUP Common EXH, Stations: 13 Stations, A B Port Size: M3X0.5 Type 31, S31, P R Port Thread: -

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 4 Port/Base Mounted Common SUP Common EXH, Stations: 16 Stations, A B Port Size: M3X0.5 Type 31, S31, P R Port Thread: -

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 4 Port/Base Mounted Common SUP Common EXH, Stations: 2 Stations, A B Port Size: M3X0.5 Type 31, S31, P R Port Thread: -

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 4 Port/Base Mounted Common SUP Common EXH, Stations: 3 Stations, A B Port Size: M3X0.5 Type 31, S31, P R Port Thread: -

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 4 Port/Base Mounted Common SUP Common EXH, Stations: 4 Stations, A B Port Size: M3X0.5 Type 31, S31, P R Port Thread: -

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 4 Port/Base Mounted Common SUP Common EXH, Stations: 6 Stations, A B Port Size: M3X0.5 Type 31, S31, P R Port Thread: -

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 4 Port/Base Mounted Common SUP Common EXH, Stations: 10 Stations, A B Port Size: M3X0.5 Type 31, S31, P R Port Thread: -

Compact Cylinder with Air Cushion Series RQ

Auto switch mounting screw (M3 x 0.5 x 10l) Auto switch spacer Auto switch mounting nut 4 Series RQ Dimensions/20, 25 Refer to pages 12 and 13 for proper auto switch mounting positions and height.

3

to 24 VDC 10% 12 to 24 VDC 10% 12 to 24 VDC 10% 24 VDC 10% Temperature characteristics (25C reference) 3% F .S. (15 to 35C) 5% F .S. (0 to 50C) 2% F .S.

PSxx-OMG0001CN

No.PS-OMG0001CN-H // PSE300 2 8 9 10 10 12 14 16 19 21 23 24 31 31 33 -1No.PS-OMG0001CN-H *1) (ISO/IEC) (JIS) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218: Manipulating

IZN10_C

M3 0.610.63Nm 1) 12mm 10mm -10- 2)L L 4 -11- L (M3X6)L :0.610.63Nm M3 -12- L L M3 (M3X6) :0.610.63Nm 3) :0.610.63Nm 90 -13- 4)DIN L :0.610.63Nm (M3X6)L :0.610.63Nm DIN :0.610.63Nm -14- 5) :0.610.63Nm 3 M3 L DIN -15- 4 4 4 4-3. 3. 3. 3. 1 +24V 2 GND 3 OFF 4 ONOFF OFF 5 0N 6 OFF 7 ON 8 1 ON 9 2 ON ()D ON NPN:GND ONOFF PNP:24V ONOFF NPN:(GND )ONOFF

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

+0.08 0 7.5 2 10 M12 x 1.25 16 11.5 3 14.5 M14 x 1.5 +0.08 0 Trunnion mounting taps for the width across flats NA are not attached to 80 and 100 types. 18 (mm) Bore size (mm) Stroke range (mm) 20 25 32 40 50 63 80 100 GA GB H H1 I J K KA MM A AL B1 C D E F 35 12 26 12 5 M4 x 0.7 depth 7 5 M8 x 1.25 Up to 200 14 8 13 15.5 2 18 12 6 40 12 31 12 6 5.5 M10 x 1.25 M5 x 0.8 depth 7.5 Up to 300

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

+0.08 0 6 1.25 8.5 M10 x 1.25 14 +0.08 0 7.5 2 10 M12 x 1.25 16 11.5 3 14.5 M14 x 1.5 +0.08 0 Trunnion mounting taps for the width across flats NA are not attached to 80 and 100 types. 18 (mm) Bore size (mm) Stroke range (mm) 20 25 32 40 50 63 80 100 GA GB H H1 I J K KA MM A AL B1 C D E F 35 12 26 12 5 M4 x 0.7 depth 7 5 M8 x 1.25 Up to 200 14 13 8 15.5 2 18 12 6 40 12 31 12 6 5.5 M10 x

Thermo-chiller/Rack Mount Type

VOptions HRR012/018 How to Order With Electric Conductivity Control Function, Applicable to DI Water Piping p. 32 Air-cooled Refrigeration (Single-phase 100/115 VAC) p. 12 Applicable to DI Water Piping p. 32 Water-cooled Refrigeration (Single-phase 100/115 VAC) p. 12 Inverter Pump Mounted p. 33 Specifications High-Pressure Pump Mounted p. 34 Air-cooled Refrigeration (Single-phase 100

AMH

Max. air flow rate (m3/min (ANR)) JIS Symbol P . 14-20-55 Inlet pressure (MPa) Caution Be sure to read before handling.

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations

Rotary Cylinder Series MRQ Size: 32, 40 1

(2-color) Grommet A79W 3-wire (NPN) F7NV F79 5 V,12 V IC circuit Grommet 3-wire (PNP) F7PV F7P F7BV J79 12 V 2-wire Connector J79C Relay, 24 V 3-wire (NPN) F7NWV F79W PLC 5 V,12 V IC circuit 3-wire (PNP) F7PW Diagnostic indicator (2-color) Grommet F7BWV J79W 12 V 2-wire F7BAV F7BA Water resistant (2-color) 4-wire (NPN) 5 V,12 V Diagnosis output (2-color) F79F IC circuit Lead wire

Aluminum High Vacuum Angle Valve

XLA XLFV/With solenoid valve J XL XL XLQ XM XY M N Port P D(Pressure port) XSA K L P R XVD XGT Port R (Exhaust port) CYV (mm) (mm) J J K L M N K L M N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 Model XLFV-63 XLFV-80 XLFV-100 XLFV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 49.7 12 4 2 67 21.7 12 4 2 128.5 58 12 4 2 Other dimensions

IDX-OM-W020

V 12 V V 12-2 12-1 1. 1 2 2. 3.

HRL

x V x C x iT it m x C x (T0 Tt) it Q = = 1 x 250 x 4.186 x 103 x 12 900 = = 13953 [J/s] 14.0 [kW] m x C x (T0 Tt) it x 860 x V x 60 x C x iT it x 860 Q = = Cooling capacity = Considering a safety factor of 20%, 14.0 [kW] x 1.2 = 1 x 250 x 60 x 1.0 x 103 x 12 15 x 860 16.8 [kW] = Thermo-chiller Q x t: Heat capacity [kJ] 13953 [W] = 14.0 [kW] Water bath 20C Cooling capacity = Considering