Rotary Actuator/Vane Type

, 12 V S99V S99 V V v v IC circuit 3-wire (PNP) S9PV S9P V V v v 2-wire 12 V T99V T99 V V v v Solid state auto switch Oilproof heavy-duty cord Yes For 10, 15 Relay, PLC 24 V Grommet 5 V, 12 V 5 V, 12 V, 24 V 90 Vinyl parallel cord V V V IC circuit 5 V, 12 V, 100 V 5 V, 12 V, 24 V, 100 V 90A Oilproof heavy-duty cord V V V Reed auto switch No 2-wire Yes 97 Vinyl parallel cord

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

51 69 117 2-Rc1/8 (external pilot port) With connector on D side (FD) 12 Base Mounted Type Series VQ5000 Dimensions (mm) 1in 25.4mm Bottom port diagram With connector on U side (FU) 106 46.8 59.2 83.5 9 9 55.5 M5 ground screw 2n-1/2 (ports A, B) 34.5 n U side X 12 B 2 A 4 6 B A B 2 A 4 5 SMC SMC SMC SMC SMC B A B 2 A 4 4 B A P=41 L1 L2 B 2 A 4 3 B A B 2 A 4 2 B A 34.5 46 68.5 P = 41 B 2

CNG

x 1.0 26.5 5.5 10 M10 x 1.25 35.5 1/8 2.5 73 154 (162) 11 3 12 40 35 17 62 218 (226) M5 x 0.8 depth 8 10 (11) 196 (204) 28 M10 x 1.25 6 14 M14 x 1.5 44 1/8 2.5 81 169 (178) 12 4 12 50 35 17 70 241 (250) M6 x 1 depth 12 10 (12) 221 (230) Note) Dimensions inside ( ) are for long strokes. 5 Cylinder with Lock Double Acting: Single Rod Series CNG Basic type (B): With air cushion/CNGBA P Front

Cylinder with Lock Series CNG

2 85 10 (12) 18 5.5 6 4 8 5 201 to 350 to 200 201 to 350 20 to 300 22 19.5 17 45 45 103 1/8 51.5 16.5 10 14 2 96 10 (12) 25 6.5 9 7 10 6 301 to 400 to 300 301 to 400 20 to 300 22 19.5 17 45 45 104 1/8 51.5 20 12 18 2 97 10 (12) 25 6.5 9 7 10 6 301 to 450 to 300 301 to 450 20 to 300 30 27 19 52 52 112 1/8 58.5 26 16 25 2 104 10 (13) 26 7 11 7 12 8 301 to 800 to 300 301 to 800 (mm) Without

3 Port Air Operated Valve

1/8, 1/4 2(A) port 19.5 12 40.5 2 x 4.2 (For mounting) 11.2 30 18.5 1/8, 1/4 3(R) port 1/8 12(PA) port 2A NO 35 43 NC 12 12 3R 1P NC (1/8) 12(PA) port 12 6.7 58.2 18.5 65.2 60 59 24 X 12 M5 x 0.8 (Breathing hole) 19.5 39 1/8, 1/4 1(P) port For vacuum/VPA344V-101 02 A B 1/8, 1/4 2(A) port 19.5 12 40.5 2 x 4.2 (For mounting) 1/8, 1/4 3(R) port 18.5 11.2 30 2A NO 35 43 NC 12 3R 1P NC 1/8 12(

Stopper Cylinder

40 42.5 40.5 38 37.5 35 43 43.5 49 45 48 46 43 Operating Range (mm) Auto switch model Bore size (mm) RSQ RSQ 12 16 20 32 40 50 D-M9/M9V D-M9W/M9WV D-M9A/M9AV RSG 3 5 5.5 6 6 7 RS2H D-A9/A9V D-A7/A80 D-A7H/A80H D-A73C/A80C 6 9.5 9 9.5 9.5 9.5 RSH 12 12 12 11 10 MIW MIS D-A79W 13 13 13 14 14 D-F7/J79 D-F7V/J79C D-F7W/J7WV D-F7BA/F7BAV D-F79F/F7NT 6 5.5 6 6 6 5.5 5 D-P3DWA 6 Since this

44

Width across flat Width across flat Effective area (mm2) 2 x Applicable tubing Weight (g) L M d Model H1 H2 KC M L I.D. 2.5 3 4 6 7.5 8 9 10 13 4 4 6 8 10 10 12 12 16 KFG2L0425-00 KFG2L0403-00 KFG2L0604-00 KFG2L0806-00 KFG2L1075-00 KFG2L1008-00 KFG2L1209-00 KFG2L1210-00 KFG2L1613-00 H1 1.8 2.3 3.3 5.3 6.8 7.3 8 9 12 1.6 2.6 6 17 30 35 45 57 101 7 8 13.3 5 8 13 28 47 46 51 48 89 d KK 9 12

Solid State Auto Switches

Note 4) The auto switches can operate at 12 VDC, but consider the internal voltage drop of the auto switch described in Reed Auto Switch Precautions on page 12.

HRX-OM-W002

5.4.1 Screen configuration . 5-12 5.4.2 Main menu . 5-12 5.4.3 Alarm display menu . 5-14 5.4.4 Notice for maintenance Menu . 5-15 5.5 Advanced setting mode . 5-17 5.5.1 Switch to advanced setting mode . 5-17 5.5.2 Display contents of monitor menu . 5-17 5.5.3 Display contents of the standard setting menu . 5-19 5.5.4 Alarm setting menu . 5-33 5.5.5 Communication setting menu . 5-46 5.5.6

CXWM/CXWL

V Yes 24 V Connector 3-wire (NPN equivalent) IC circuit 10 5 V Grommet 2-wire 24 V Relay, PLC 100 V 12 V F7NV F7PV F7BV J79C F7NWV F7BWV F7BAV 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Grommet 2-wire 12 V Connector 10 16 20 25 32 3-wire (NPN) 3-wire (PNP) 24 V IC circuit 16 20 25 32 5 V, 12 V Diagnostic indication (2-color indication) Yes Relay, PLC F7PW J79W F7BA Water resistant

MGQ

Z73 Y59A Y7P Y59B Y7NW Y7PW Y7BW 3-wire (NPN) 2-wire Y69A Y7PV Y69B Y7NWV Y7PWV Y7BWV 100 V or less IC circuit 5 V, 12 V 3-wire (PNP) IC circuit 2-wire 12 V Relay, PLC 24 V Grommet 3-wire (NPN) 3-wire (PNP) 5 V, 12 V Diagnostic indication (2-color indication) 2-wire 12 V Lead wire length symbols: 0.5 m Nil (Example) Y59A 3 m L (Example) Y59AL 5 m Z (Example) Y59AZ Since there are

New

240 VAC Conduit Example) VXN Z Z 1A 1 2 A (With surge voltage suppressor) 24 VAC 12 VDC 12 VDC 24 VDC Electrical option Other option Faston terminal 100 VAC 110 VAC 200 VAC 230 VAC DIN terminal (With surge voltage suppressor) 48 VAC 2G 2H 2V 2J 220 VAC 240 VAC 24 VAC 12 VDC 24 VDC 2K 2L 100 VAC 110 VAC 200 VAC 230 VAC 2M 2N 2P 2Q 2R 2S Conduit terminal (With surge voltage suppressor) 48

7

P p p 2-wire 12 V M9BW P P P p p Diagnostic indication (2-color indicator) Relay, PLC 24 V Grommet Yes 3-wire (NPN) 5 V, 12 V M9NA p p P p p IC circuit 3-wire (PNP) M9PA p p P p p 2-wire 12 V M9BA p p P p p Water resistant (2-color indicator) Grommet Yes 3-wire (NPN equivalent) 5 V A96 P P IC circuit Reed auto switch 2-wire 24 V 12 V 100 V A93 P P P P Relay, PLC No 5 V, 12 V 100

HRX-OM-X037

Refer to Table 5.4-12 Offset setting for details. (1) (2) Offset setting Table 5.4-12 Offset setting No. Indication Item Explanation Setting range (1) Offset Temp.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

[ ] for AC 3 80 68 6 137 125 8 175 163 10 213 201 Station L1 L2 20 403 391 2 61 49 4 99 87 5 118 106 7 156 144 9 194 182 11 232 220 12 251 239 13 270 258 14 289 277 15 308 296 16 327 315 17 346 334 18 365 353 19 384 372 2.2-46 Series SYJ300/500/700 Made to Order (Contact SMC regarding detailed specifications, dimensions and delivery.)

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

-/21-CXS6 6 single rod 10-/12-/21-CXS10 10-/12-/21-CXS15 10-/12-/21-CXS20 10-/12-/21-CXS25 10-/12-/21-CXS32 10, 20, 30, 40, 50 10 15 20 25 32 M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Specifications Suction flow rate of vacuum suction type (Reference values) Bore size (mm) 10/15 20/25/32 6 Item 1.05MPa 0.7MPa Proof pressure Max. operating pressure Min. operating pressure Ambient and fluid

HRX-OM-Y098

Refer to Table 5.4-12 Offset setting for details. (1) (2) Offset setting Table 5.4-12 Offset setting No. Indication Item Explanation Setting range (1) Offset Temp.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

Flat ribbon cable connector SOL.A () (+) 20 1 station SOL.B () 18 (+) SOL.A 20 19 () 16 (+) 2 stations SOL.B 18 17 () 14 (+) 16 15 SOL.A 12 () (+) 3 stations 14 13 SOL.B () (+) 10 12 11 SOL.A 8 () (+) 10 9 4 stations SOL.B () 6 (+) 8 7 Connector terminal no.

ARM10/11

VE 3 56 SMC AXT100-DR-8 110.5 28 AXT100-DR-10 135.5 SMC SMC VY1 K K P P C C U U O O S S L L H H AXT100-DR-12 160.5 8 AXT100-DR-14 185.5 12 12 G 11.5 AXT100-DR-16 210.5 AXT100-DR-19 248 PPA AXT100-DR-21 273 AXT100-DR-23 298 AL 81 AXT100-DR-25 323 AXT100-DR-28 360.5 33.5 14 16 OUT IN OUT IN ARM11BC2-08 Handle position: Bottom L2 L2-10.5 L1=(28 x n)+36 52.5 18 28 39 28 12 12 5.3 3 5.5 SMC SMC

ARM10/11

VE 3 56 SMC AXT100-DR-8 110.5 28 AXT100-DR-10 135.5 SMC SMC VY1 K K P P C C U U O O S S L L H H AXT100-DR-12 160.5 8 AXT100-DR-14 185.5 12 12 G 11.5 AXT100-DR-16 210.5 AXT100-DR-19 248 PPA AXT100-DR-21 273 AXT100-DR-23 298 AL 81 AXT100-DR-25 323 AXT100-DR-28 360.5 33.5 14 16 OUT IN OUT IN ARM11BC2-08 Handle position: Bottom L2 L2-10.5 L1=(28 x n)+36 52.5 18 28 39 28 12 12 5.3 3 5.5 SMC SMC