Dedicated Controller

Step designation BIT 5 8 Stp-no. bit4 20 BIT 6 21 Stp-no. bit5 8 BIT 7 9 Stp-no. bit6 21 22 Stp-no. bit7 9 35V DC max. + SET-ON 10 Temporarily stops the program run by means of the ON input. 3 Temporary stop READY HOLD 23 BUSY <2> 11 Performs an emergency stop when ON input stops. 16 Emergency stop (nonlogical input) ALARM STOP 24 COM 12 ALARM RESET 4 Alarm release Releases the alarm being

3 Port Solenoid Valve Metal Seal Series VZ200 1

VVZ400-32A-21 pc.

AC Servo Motor Driver (SSCNET /H Type)

(SW1) (SW1) (SW2-3, SW2-4) (SW2-3, SW2-4) 0 1 0 17 1 2 1 18 2 3 2 19 3 4 3 20 4 5 4 21 5 6 5 22 6 7 6 23 ON ON 7 8 7 24 8 9 8 25 1 2 3 4 1 2 3 4 9 10 9 26 A 11 A 27 B 12 B 28 C 13 C 29 D 14 D 30 E 15 E 31 F 16 F 32 -13- Auxiliary axis number Auxiliary axis number Axis selection rotary switch Axis selection rotary switch Control Control setting switch setting switch axis No. axis No.

Series KP/KPQ/KPG

Male Branch Tee: KPT Effective area mm Note 1) D1 Model L1 TPH TPS A H (width across flats) Applicable tubing O.D. mm Weight g Connection threads R L2 M D2 L1 2-Applicable tubing M L1 M 6 7 8 9 12 13 20 21 24 27 24.5 26.5 27 29 30 31.5 35.5 36.5 38.5 41.5 1/8 1/4 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 23.2 27.2 24.4 28.4 26.6 29.4 32.1 33.1 34.3 38.3 12 14 12 KPT04-01 KPT04-02 KPT06-01 KPT06-02

Series KP/KPQ/KPG

Male Branch Tee: KPT Effective area mm Note 1) D1 Model L1 TPH TPS A H (width across flats) Applicable tubing O.D. mm Weight g Connection threads R L2 M D2 L1 2-Applicable tubing M L1 M 6 7 8 9 12 13 20 21 24 27 24.5 26.5 27 29 30 31.5 35.5 36.5 38.5 41.5 1/8 1/4 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 23.2 27.2 24.4 28.4 26.6 29.4 32.1 33.1 34.3 38.3 12 14 12 KPT04-01 KPT04-02 KPT06-01 KPT06-02

KP/KPQ/KPG

8 9 12 13 19 20 21 24 4 18 20.7 10.4 7.5 7.5 D1 10 6 19.5 22.8 12.8 11 11 D1 14 8 21.5 26.3 15.2 21 21 12 D2 M 45 52 45 57 H 10 24 29.4 18.5 17 17 Connection threads 12 57 57 25 31.4 20.9 22 Reference dimension for R threads after installation Note 1) D1 indicates the maximum diameter.

Compact Cylinder with Air Cushion Series RQ

Hs A Auto switch mounting height mm Proper auto switch mounting positions mm D-F9 D-F9V D-F9W D-F9WV D-A9V D-F9V D-F9WV D-F9BAL D-A9 D-A9V Bore size (mm) D-F9BAL Bore size (mm) Hs Hs Hs A B A B A B 20 22.5 25 22 25 9.5 3 13.5 7 12.5 6 24.5 27 24 20 32 11 5.5 15 9.5 14 8.5 27 29 26.5 25 40 12.5 4.5 16.5 8.5 15.5 7.5 30.5 32.5 30 32 50 17 7 21 11 20 10 36.5 38.5 36 40 17 12.5 21 16.5 20 15.5

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

-07SD AS321F-03-08SD 1/4" 13.2 27.8 39.3 17 41 29.5 18.5 8 15.2 79 77 R 3/8 19 23 9.8 1.2 47.4 19.8 52.6 AS321F-N03-09SD AS321F-03-10SD NPT 3/8 19 23 9.8 1.2 47.4 5/16" 15.2 29.5 41 18.5 43.3 31.8 21 10 18.5 81 79 19.8 52.6 AS321F-N03-11SD AS321F-03-12SD 3/8" 44.3 17.9 31.8 43.3 21 32.8 22 12 20.9 83 81 AS421F-N04-11SD AS421F-04-10SD 3/8" 17.9 33.6 47.9 21 47.9 33.6 21 10 18.5 141 141 24

Speed Controller with One-touch Fitting

) AS22m1F-02-11PA 3/8" 15.5 26.4 35.7 (35.8) 15.6 21 (22) AS32m1F-03-07PA 1/4" 3/8 21 (21.7) 7.2 20.9 30.2 (30.3) 1/4 17 (17.5) 22.6 36.6 35 29 (28.5) 27.4 (26.9) 13 13.3 38 (39) AS32m1F-03-09PA 5/16" 13.2 22.7 33.9 (34.3) 14.2 38 (40) AS32m1F-03-11PA 3/8" 15.5 26.7 37.9 (38.3) 28.2 15.6 39 (40) AS42m1F-04-11PA 3/8" 1/2 27 (28.6) 15.5 18.8 27.4 41.8 (42.6) 36.2 50.8 49.2 40.4 38.8 15.6 66

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Applicable shaft type: W (mm) L2 Y Size (mm) 10 X L1 3 to 8 5 ( 8 Y) to (Y 1) Size 10 15 3 to 14 9 (14 X) to (X 1) 3 to 9 6 ( 9 Y) to (Y 1.5) Y = L1 = 15 20 5.5 to 18 10 (18 X) to (X 1.5) 3 to 10 7 (10 Y) to (Y 1.5) L2 = 20 30 7 to 20 10 (20 X) to (X 1.5) 5 to 13 8 ( 13 Y) to ( Y 2) X = 30 40 7 to 22 10 (22 X) to (X 1.5) 7 to 15 9 (15 Y) to (Y 4.5) Symbol: A11 The long shaft can be further

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

Male Branch Tee: KPT Effective area mm Note 1) D1 Model L1 TPH TPS A H (width across flats) Applicable tubing O.D. mm Weight g Connection threads R M L2 D2 L1 2-Applicable tubing M L1 M 1/8 1/4 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 12 14 12 24.5 26.5 27 29 30 31.5 35.5 36.5 38.5 41.5 23.2 27.2 24.4 28.4 26.6 29.4 32.1 33.1 34.3 38.3 6 7 8 9 12 13 20 21 24 27 KPT04-01 KPT04-02 KPT06-01 KPT06-02

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

cushion Air cushion type is not available for 21-/22-CJ2.

NCA1

8 1 1/4 3/4 7/8 2.56 NCA1-P800 1 1/2 1 21/32 4 1/2 3/4 2 1/4 1 1/2 1 1 1/4 3.25 NCA1-P1000 2 1 3/8 21/32 5 7/8 3 2 1/8 1 3/8 1 5/8 3.81 NCA1-P1200 2 1/2 1 3/4 29/32 6 1/2 7/8 3 1/8 2 1/4 1 3/4 2 1/8 4.95 NCA1-P1400 2 1/2 2 1 1/16 7 1/2 1 3 1/2 2 1/2 2 2 7/16 5.75 NCA1-P1401 3 2 1/2 1 3/16 8 1/2 1 3/4 4 3/4 2 5/8 2 1/2 3 6.58 NCA1-P1402 3 3 1 5/16 9 1/2 2 5 1/4 2 7/8 2 3/4 3 1/4 7.50 Note)

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

The process and suction status can then be compared. 8 Diagnosis (flow rate) 0: OFF 1: ON 14 Fixed output 0: OFF 1: ON 15 Diagnosis (error) 0: OFF 1: ON 16 to 31 Measured flow rate value Signed 16 bit Bit offset 31 30 29 28 27 26 25 24 23 22 21 20 19 18 17 16 Item Measured flow rate value (PD) Bit offset 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Item Error Fixed Reservation Flow rate Reservation

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KQ2C Caps P Plugs Q Cartridge KR Fitting Boot . . . . . . . .6 .7 .7 .7 P .8 .8 .9 .9 o 't0 1 0 1 0 1 1 1 1 1 1 1 2 Spucial [nnlhunilions Page 14 IIU lrlylon lltliltg Page 15 Bmss Phe tittittg$ pase N i p p l e s . . . . . . . . . 1 7 Cdinlinars -. -14 Bushings Aalaolers 1 8 '18 1 q Ts6s .20 .20 Pftr^q 21 SAE 45" Flares . -..22-23 .24 General Assembly..,.. lmoortant Oo's and Dont's Chemical

Title not found

Shield 12 13 7 6 9 8 3 B-4 A-4 B-5 A-5 B-6 A-6 Brown Black Red Black Orange Black Vcc GND A A B B Connector B terminal no.

MHY2/MHW2

7 !8 !

CQS

For detailed specifications, refer to page 7-9-1. Electrical entry (Fetching direction) Type Model Features D-A90 Reed switch Grommet (In-line) D-A90V Grommet (Perpendicular) Without indicator light Normally closed (NC = b contact), solid state switch (D-F9G/F9H type, and D-F8 type) are also available. For details, refer to pages 7-9-23 and 7-9-21. 7-4-45

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Caution on Adjuster Option Table (1) MXP6 MXP10/12/16 With Shock Absorber L1 L1 L1 (mm) 9 (One side only) 9 (One side only) 7 6 7 7 8 8 Model MXP6-5 MXP6-10 MXP10-10 MXP10-20 MXP12-15 MXP12-25 MXP16-20 MXP16-30 Caution 1. Do not rotate the screw set on bottom of shock absorber. This is not an adjusting screw. Turning it could cause oil leakage. 2.

240

thread depth 7 65 LEY -X5 1 [1] Motor cable mounting direction: R (Entry on the right side) Motor cable length 300 2 x 5 Origin Note 2) Stroke end [Origin] Note 3) 11LEFS Manual override screw M4 x 0.7 thread depth 7 [Stroke end] 11LEJS 15 30 21 20 25A59.7 10 Note 5) Mounting surface 4.5 L2 L1 Stroke 10 LEC Motor cable mounting direction: L (Entry on the left side) 10 Note 5) 12 4.5 LEC