5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

SUNX Corp.: S-LINK System (16 output points) 8 SUNX Corp.: S-LINK System (8 output points) 1 to 4 stations 8 stations D side DeviceNet, CompoBus/D (OMRON Corp.) 16 16 stations 1 to 8 stations OMRON Corp.: CompoBus/S System (16 output points) OMRON Corp.: CompoBus/S System (8 output points) 8 8 stations 1 to 4 stations Mitsubishi Electric Corp.: CC-LINK System 16 stations 16 1 to 8 stations

10

Made to Order (For details, refer to pages 16 to 21.)

SMC Pneumatic Clean Series

Bore size NTJ-010A NTJ-006A 8 6 M3 x 0.5 2.4 5.5 6.4 5.5 6.5 M3 x 0.5 6 12.5 M4 x 0.7 3.2 7 8.1 7 8.5 M4 x 0.7 8 14.5 NTJ-015A 10 M5 x 0.8 4 8 9.2 10.5 M5 x 0.8 16.5 10 9 (mm) Standard C D E F B A J K L M N O P G H I Bore size 8 6 M2.5 x 0.45 13 7 7 10 9 19 3 5 4 9 3.5 8 7 5.3 24 M3 x 0.5 13 7 8 11 10 21 3 6 5 11 4.5 10 8 5.3 25 10 13.5 M3 x 0.5 7 8.5 11.5 10.5 22 3.2 6 6 12 5 11 8.5 5.6

PC Wiring System Series PCW

14 12 16 34 20 18 24 22 26 30 28 32 36 40 38 Input/output connector (CS0) 3 1 5 9 7 13 11 15 19 17 23 21 33 25 29 27 31 35 39 37 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Power supply terminal block 108 109 110 111 112 113 114 115 100 101 102 103 104 105 106 107 2 6 4 8 10 12 14 16 18 20 Input/output connector (CS1) 1 5 3 7 11 9 15 13 17 19 Green Red F E D C B A 9 8 7 6 5 4 3 2 1 0 1 1 2 3 4

Speed Controller with

15.4 8.8 13.5 12.7 13.5 17 18 17 18 21 22 21 22 3.3 5.5 10 12.6 17 10.5 4.3 7.8 14 17 12 22.8 20.5 4.3 8 19.3 22 25 12 22.1 28 33 14 4.3 8 25 26.2 Note) Reference dimensions Inch Size D1 D2 D3 D4 L1 L2 L3 MAX.

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

69.3 61 21 18.5 64.4 8.2 5/16" 21 15.2 32.1 3.5 60.9 55.5 18 10 18.5 16 27 24.5 21 3.5 AS3001F-11-3 AS4001F-12-3 36 70.3 62 22 70.8 3/8" 17.2 33.3 62.1 56.7 21 9.5 12 20.9 AS4001F-11-3 3/8" 27 21 17.9 34.9 3.5 69.2 60.9 21 76.9 10.3 24.5 AS4001F-13-3 21.7 1/2" 83.1 36.3 11.6 70.6 62.3 22

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

69.3 61 21 18.5 64.4 8.2 5/16" 21 15.2 32.1 3.5 60.9 55.5 18 10 18.5 16 27 24.5 21 3.5 AS3001F-11-3 AS4001F-12-3 36 70.3 62 22 70.8 3/8" 17.2 33.3 62.1 56.7 21 9.5 12 20.9 AS4001F-11-3 76.9 3/8" 27 21 17.9 34.9 3.5 69.2 60.9 21 10.3 24.5 AS4001F-13-3 21.7 1/2" 83.1 36.3 11.6 70.6 62.3 22 15-9-74

15

Motor mounting surface Actuator (LEFB) FD depth FE FK FC FF FJ Dimensions [mm] Size Motor type FA FB FC FD FE FF FG FH FJ FK M1 M2 PD 25 NZ/NX M4 x 0.7 8 46 30 3.5 31.5 57.8 65.5 M2.5 x 10 M4 x 30 8 NY M3 x 0.5 8 45 30 3.5 31.5 57.8 65.5 M2.5 x 10 M4 x 30 8 NM2 3.4 31 22* 2.5* 31.5 6 21 57.8 65.5 M2.5 x 10 M4 x 30 6 NZ M5 x 0.8 9 70 50 4 44 69.8 83.5 M3 x 12 M5 x 45 14 NY M4 x 0.7

5 Port Air Operated Valve

30 60 83 VFA VFA 4A 4A 4A 4A 4A VFRA 3/8 [1 (P), 3/5 (R) port] 4 x 7 (For mounting) 1/8 (Pilot port: Upward) 30 (Pitch) P=33 VPA4 Breathing hole SYJA (Station n) (Station 1) 1/8 [Pilot port: Lateral (-P)] VZA VTA 76 53.5 29.5 VGA VPA Dimensions n: Stations 2 3 n L 10 9 8 7 6 5 4 357 VPA3 L1 L2 93 126 159 192 225 258 291 324 80 113 146 179 212 245 278 311 344 Type 21: VV5FA5-21-1-: Common

Series KP/KPQ/KPG

-02 KPQT06-M5 KPQT06-01 KPQT06-02 KPQT08-01 KPQT08-02 KPQT10-02 KPQT10-03 KPQT12-03 KPQT12-04 M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 8 15.3 22 26 15.8 23.2 27.2 24.4 28.4 29.9 31.9 33.1 37.1 6 13 19 7 14 20 14 22 29 39 41 38 17 21 25 18.5 23.5 27.5 26 30 33 34.5 37 39.5 4 4 4 D1 18 10.4 20.7 10 D1 8 A L2 6 10 10 19.5 12.8 22.8 D2 H Connection threads 10 (R) 8 26 18 15.2 21.5 26.3 12

Series KP/KPQ/KPG

-02 KPQT06-M5 KPQT06-01 KPQT06-02 KPQT08-01 KPQT08-02 KPQT10-02 KPQT10-03 KPQT12-03 KPQT12-04 M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 8 15.3 22 26 15.8 23.2 27.2 24.4 28.4 29.9 31.9 33.1 37.1 6 13 19 7 14 20 14 22 29 39 41 38 17 21 25 18.5 23.5 27.5 26 30 33 34.5 37 39.5 4 4 4 D1 18 10.4 20.7 10 D1 8 A L2 6 10 10 19.5 12.8 22.8 D2 H Connection threads 10 (R) 8 26 18 15.2 21.5 26.3 12

KP/KPQ/KPG

KPQL08-02 KPQL10-02 KPQL10-03 KPQL12-03 KPQL12-04 17 21 25 18.5 23.5 27.5 26 30 33 34.5 37 39.5 8 15.3 22 26 15.8 23.2 27.2 24.4 28.4 29.9 31.9 33.1 37.1 8 10 14 8 10 14 12 14 4 10 19 6 12 20 13 21 26 36 38 65 4 4 4 18 10.4 20.7 D1 10 L2 A D2 8 H 6 10 10 19.5 12.8 22.8 Connection threads 10 (R) 8 (R) 15.2 18 26 21.5 12 26.3 Applicable tubing 10 18.5 29 41 24 29.4 M L1 17 17 12 20.9 46 58

HRX-OM-Y098

-20 . 8-6 8.4 Cooling Capacity . 8-7 8.4.1 HRL100-A-20 CH1 . 8-7 8.4.2 HRL200-A-20 CH1 . 8-7 8.4.3 HRL300-A-20 CH1 . 8-8 8.4.4 HRL100/200/300-A-20 CH2 . 8-8 8.5 Pump Capacity . 8-9 8.5.1 HRL100-A-20 CH1 . 8-9 8.5.2 HRL200-A-20 CH1 . 8-9 8.5.3 HRL300A20 CH1 . 8-10 8.5.4 HRL-A-20CH2 . 8-10 8.6 Types of Hazard Labels . 8-11 8.6.1 Positions of danger warning label . 8-12 8.7 Standards . 8-13

LX

Stroke + 126 3.3 24 1 5 3 5.8 8 3 21 59 F 5H9 +0.030 0 depth 5 T-slot dimensions (2/1) 29.5 5H9 +0.030 0 depth 5 6 T-slot 4-M5 x 0.8 (for body mounting) thread depth 8 (11.5) 38 E Refer to page 299 for mounting.

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

-02 KPGT06-M5 KPGT06-01 KPGT06-02 KPGT08-01 KPGT08-02 KPGT10-02 KPGT10-03 KPGT12-03 KPGT12-04 M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 8 15.3 22 26 15.8 23.2 27.2 24.4 28.4 29.9 31.9 33.1 37.1 6 13 19 7 14 20 14 22 29 39 41 38 17 21 25 18.5 23.5 27.5 26 30 33 34.5 37 39.5 4 4 4 D1 18 10.4 20.7 10 D1 8 A L2 6 10 10 19.5 12.8 22.8 D2 H Connection threads 10 (R) 8 26 18 15.2 21.5 26.3 12

Brake mechanism added

+ 40 (n 4) 2 90 + 40 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 15 + 40 n (n = 2, 4, 6, 8 ) Note 1) (n = 4, 8, 12, 16 ) Note 2) 2 (Different surfaces, Same surface) 1 55 60 65 D-A9V (n 2) 2 10 50 50 + 30 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 55 + 30 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 60 + 30 (n 4) 2 65 + 30 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 10 + 30 n (n = 2, 4, 6, 8 ) Note 1) (n = 4, 8,

Speed Controller with One-touch Fittings In-line Type/Panel Mount Type AS  1F-3 Series

60.1 54.7 17 100 84 12 20.9 AS4001F-10-3 77.7 AS3001F-09-3 82.1 11.3 35 69.3 61 21 5/16" 21 15.2 32.1 3.5 60.9 55.5 18 64.4 8.2 167 88 18.5 16 10 18.5 27 21 24.5 3.5 AS4001F-12-3 36 70.3 62 22 AS3001F-11-3 3/8" 17.2 33.3 62.1 56.7 21 70.8 9.5 171 95 12 20.9 Note 1) Reference dimensions AS4001F-11-3 3/8" 27 21 17.9 34.9 3.5 69.2 60.9 21 76.9 10.3 175 24.5 AS4001F-13-3 21.7 1/2" 11.6 70.6

4-channel Flow Monitor ( compatible)

No.PF-OMA1011-A PRODUCT NAME 4-channel Flow Monitor ( compatible) MODEL / Series / Product Number PFG20# Table of Contents Safety Instructions 2 Model Indication and How to Order 8 Summary of Product parts 9 Definition and terminology 11 Mounting and Installation 14 Installation 14 Wiring 16 Internal circuit and wiring example 18 Outline of Settings 21 Initial Setting 22 F 0 Connection product

Possible to transfer a workpiece at low-speed.

G 1/8, NPT 1/8, NPTF 1/8 Port size Mountable Auto switch Dimensions Shaft type X Z Form (mm) D (g6) G H N UX UZ M Size 20 30 40 8 0 0.1 10 0 0.1 11 0 0.1 10 21 11 50 65 15 75 18 24 13 57 12 84 20 15 27 15 64 2 Shaft Type Variation, Double Shaft With Key (Size 20/30/40) (Dimension parts different from the standard conform to the general tolerance.)

ITV

(For details, refer to Specific Product Precautions on page 14-8-11.) (mm) 10 9 8 7 6 5 4 3 2 Manifold stations n L1 L2 180 165 150 135 120 105 90 75 60 235.5 223 198 185.5 173 160.5 148 123 110.5 14-8-10 11 Compact Electro-pneumatic Regulator Series ITV0 Precautions Be sure to read before handling. Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions.