1

Clip Approx. 80 to 90 or b Auto switch mounting band Fig. 1-5 Fig. 1-4 a Switch holder Enlarged view of clip M2.5 set screw (Accessory) e i Auto switch r Reinforcing plates w q y u c M3 set screw 5.1 or more 0 to 5 t Reinforcing plates M3 set screw Nut M3 set screw Nut The end of the set screw is protruding.

Modular F.R.L. Units

(ANR) ( 0.8 ppm) 2 3 AFD20-A to AFD40-06-A Max. 0.1 mg/m3 (ANR) (Before saturated with oil 0.01 mg/m3 (ANR) or less 0.008 ppm) 2 3 Rated flow [L/min (ANR)] 1 AFM20-A to AFM40-06-A 200 450 1100 AFD20-A to AFD40-06-A 120 240 600 Drain capacity [cm3] 8 25 45 Bowl material Polycarbonate Bowl guard Semi-standard (Steel) Standard (Polycarbonate) Weight [kg] 0.09 0.19 0.38 0.43 1 Conditions: Inlet

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Mounting screw tightening torques 10-SV1000 SV1000-67-1A M2: 0.15 Nm M3: 0.6 Nm M4: 1.4 Nm 10-SV2000 SV2000-67-1A 10-SV3000 SV3000-67-1A 10-SV4000 SV4000-67-1A Plug (White) These are inserted in unused cylinder ports and P, E ports.

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators 63.5+ST ST 50+ST 8 5.5 16 2 x 3.2 through 15+1/2ST 2.75 19 2 x 6.5 counterbore depth 3.3 14 1 OUT 3 3 1 3.2 5.6 (16) 280.2 280.2 22.7 35 16 37 6.3 5 6 M3 x 0.5 x 12.5 L and M3 x 0.5 (Hexagon bolt) (Hexagon nut) 7 2 x M5 x 0.8 thread depth 4.5 IN (Piping port) 2 x M3 x 0.5 (Through-hole) 2 x M3 x 0.5 (Through-hole) 4 x M5 x 0.8 thread depth

Support Guide/11-LEFG Series

0 0.1 0.6 0.5 0.4 0.3 0.2 25AParticle diameter [m] Particle diameter [m] LEC 11-LEFS32 Speed 500 mm/s 11-LEFS40 Speed 500 mm/s LEC S 10 10 LEC SS-T ISO Class 6 upper limit ISO Class 6 upper limit 10 10 LEC Y Motorless Suction flow rate: 0 L/min ISO Class 5 upper limit Suction flow rate: 0 L/min 10 10 Particle concentration [particles/m3] Particle concentration [particles/m3] LAT Suction

MU

Applicable auto switch Reed switch Solid state switch Bore size (mm) D-F7, D-J79 D-F7V, D-J79C D-F7W, D-J79W D-F7WV, D-F79F D-F7NTL D-F7BAL/F7BAVL D-A7, D-A80 D-A7H, D-A80H D-A73C, D-A80C D-A79W Auto switch mounting screw (M3 x 0.5 x 6.5l) Switch mounting nut BMU1-025 25, 32, 40, 50, 63 Switch mounting bracket Round head Phillips screw (M3 x 0.5 x 14l) Hexagon socket head cap screw (M3 x

240

Hard anodized Chromated Countersunk head screw Nut Rod seal Piston seal Gasket Plug Nickel plating Nickel plating Zinc chromated D-X 23 MXH Series Dimensions: 6 LT 9 15 LA LB 8 J x M3 x 0.5 Depth 5 3 x M4 x 0.7 through Pilot hole dia 3.3 2 x 3 x 6 counterbore depth 3.3 2 x 2 x M5 x 0.8 Cylinder port (With plug for port) 4 x M3 x 0.5 Depth 5.5 2 x M5 x 0.8 Cylinder port 4 x M3 x 0.5 Depth

Speed Controller: Standard Type Series AS In-line Type 1

Note 2) AS1000, AS2000 are not applicable. 8 3 2 1 Bore size 2 1 Bore size Applicable series M3 M5 01 02 03 04 M3 x 0.5 M5 x 0.8 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 AS1000 AS1000 AS2000 AS2000/3000/4000/5000 AS3000/4000/5000 AS4000/5000 Thread type Nil Metric thread (M3, M5) Rc NPT G N F Caution Be sure to read before handling.

Hydraulic

Note Applicable Auto Switches Bore sizes (mm) Reed Switches Solid State Switches Switch mounting screw (M3 x 0.5 x 8l) Square nut DA7, DA80 DA73C, DA80C DA7H, DA80H DA79W DF7, DJ79 DF7V, DJ79C DF7W, DJ79W DF7WV, DF7BA DF7F, DF7NTL 20 BQ 1 Switch mounting screw (M3 x 0.5 x 10l) Switch spacer Switch mounting nut 32, 40, 50 63, 80, 100 BQ 2 [Stainless Steel Mounting Screw Kit] The following

VFR

VFS VS4 Series VFR2000 VQ7 Pilot valve assembly Tightening Torque for Mounting Bolt EVS Thread M3 (2 pcs.) M3 (3 pcs.) M3 (3 pcs.) M4 (4 pcs.)

VFS

1 Hexagon socket head screw Steel M3 x 32 M3 x 32 M3 x 32 !2 Detent assembly VFS3000-9A Refer to How to Order Pilot Valve Assembly on page 3-8-54. Pilot valve assembly !

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Max. load mass Review M1, M2, M3. M max is the allowable moment. 2 = M/M max 2. Static moment Review Me1, Me3. Me max is the allowable moment. 3 = Me/Me max 3.

Digital Flow Switch For Air/Water Series PF2A/PF2W

(Fixed SI unit [l/min, or l, m3 or m3 x 103] will be set for switch types without an unit switching function.)

Digital Flow Switches Series PF2A

(Fixed SI unit [(l/min, or l, m3 or m3 x 103)] will be set for switch type without the unit switching function.) Note 3) The high flow rate type is CE marked; however, the linearity with applied noise is 5% F.S. or less. Note 4) Switch output and accumulated pulse output selections are made using the button controls.

IDX-OM-W011

2 (16AWG) 812mm3 () 1.25mm 0.1m 30m (11 ) M3 6.5mm () M3 0.631Nm () 2-2 IDF Series 2 4 IDX-OM-W011 2 2 3 ()2 2 2-2-3 4 2-3 IDF Series 2 5 IDX-DM-W011 3 3 1 IDF4E15E1 ` 3 2 ON IDF1E3E IDF4E15E1 5 0.15MPa (IDF1E ) 3-1 IDF Series 3 1 IDX-DM-W011 3 3 3 3 4 3 3 5 3 5 OFF 3 6 24 3-3 IDF Series 3 2 IDX-OM-W011 4 4 4-1 5 310 4-2 4-2-1 () 4-2-2 1.

IDX-OM-W026

) L1 L2 PE L3 M3 6.5mm 2 1.25mm 12-4 () () ONOFF 12-5 R 6-4 6-3 T 13-6 13-3 IDF Series 12-3 12 2 IDX-OM-W026 13 T 13 T 13-1 IEC 13-2 AC200V / 2A DC24V / 2A ( 20V / 3mA) 13-3 ON 3 () 5 /1 () IDF Series 13-1 13 1 IDX-OM-W026 13 T 13-4 1 2 3 PE L3 L1 L2 PE 1 2 3 L1L2L3 PE: PE: LN: LN PE: PE: PE: M3 6.5mm M3 2 1.25mm 6.5mm 2 1.25mm () () 13-5 3 5-2 IDF55E/75E

SYJ300-OMU0003

SY100-68-A-20 W2WA2500mm W3WA31000mm <2> 300mm W4WA42000mm SYJ312-5LPZ-M3 W7WA75000mm Assy Ass'y SYJ312-5W1ZE-M3 13 No.SYJ300-OMU0003 SYJ Series M8 10COM2 B 12 DCU+COM-COM 1 3 4 L 300mm V100-49-1-1 500mm V100-49-1-2 A B A B A B A B 1000mm V100-49-1-3 A B COM (+)(-) COM (+)(-) 2000mm V100-49-1-4 5000mm V100-49-1-7 (+)(-) (+)(-) (+)(-) (+)(-) (+)(-) (+)(-) (+)(-) (+)(-) (+)(-) (+)(-)

AS

VCHC AS1201F-M3, AS1211F-M3 AS1301F-M3, AS1311F-M3 AS1201F-M5-02, AS1211F-M5-02 AS1201F-M5, AS1211F-M5 AS1301F-M5, AS1311F-M5 AS2201F-01, AS2211F-01 AS2301F-01, AS2311F-01 ASS Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa ASR ASQ Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Number of needle rotations Number of needle rotations Number of

SMC Pneumatic Clean Series

Note 1) Sampling air flow rate: Number of particles contained in 75l of air Note 2) Actuator: 1 million cycles Solenoid valve: 2 million cycles Particle generation characteristics of CM2 Particle generation characteristics of CXSL Particle generation characteristics of CY1B 106 106 106 Particle concentration (particles/m3) Particle concentration (particles/m3) Particle concentration (particles

CV/MVGQ

0 M3 x 28l Stainless steel Hex. socket head cap screw with spring washer Exhaust throttle with silencer ASN2-M5 !1 @8 M3 x 10l Port size: 6 Stainless steel Hex. socket head cap screw with spring washer One-touch fitting @9 !2 Aluminum alloy Plate Metallic painted !3 Replacement Parts Aluminum alloy Sub-plate Metallic painted !4 Refer to the How to order below.