PSxx-OMV0003CN

.4 No.5 No.6 -73No.PS-OMV0003CN-G No.7 No.8 No.8 No.9 No.10 No.11 No.12 No.13 No.14 -74No.PS-OMV0003CN-G No.

Modular F.R.L. Pressure Control Equipment

Straight type V Elbow type Fitting size One-touch fittings for regulator Straight V 2.5 3 6.5 Elbow W 6 6.5 6 Elbow X 11 11 11.5 Elbow Y 35.5 36 38.5 4, 5/32 6 1/4 8, 5/16 W X Y Note) The O-ring is attached.

7.4

AN110-01 (BC sintered body) AN10-01 (Resin) 34 23 11 13 756 Options S0700 Series Body Ported Base Mounted Double check block (Separated) VQ1000-FPG-mm Cylinder side pressure (P2) SJ It is used on the outlet side piping to keep the cylinder in the intermediate position for long periods of time.

Thermo-chiller

Displays the unit of displayed pressure (default setting: MPa). 11 Changing pressure unit Pressure unit can be changed. MPa PSI r [REMOTE] lamp Enables remote operation (start and stop) by communication.

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

Adjuster for series 11-MXP6 is available for one side only. Without adjuster type is unavailable for series 11-MXP6. 11-MXP How to Order 11MXPJ6 Clean series 11 Vacuum suction type 11 MXPJ6 10 22 MXPJ6 10 11-MXPJ6 Copper, fluorine and silicon-free + low particle generation Stroke 5 10 5mm 10mm 22 Vacuum suction type With auto switch type is unavailable for 11-MXPJ6.

E-P HYREG ® Series VY1 1

4 7 1 4 11 2 1 2 2 9 Note) Only bracket or foot may be mounted. 14-10-2 3 E-P HYREG Series VY1 Standard Specifications 02 03 04 04 06 10 02 03 04 VY1A0 0 1-M5 VY1B0 0 1M 0 5 1 VY110 0 10 0 1 2 VY120 0 10 0 1 2 VY130 0 1VY140 0 1VY150 0 1VY170 0 11 1 0 2 VY190 0 11 2 4 0 Model VY1D00-M5 10 M5 01 M5 Port M5 01 02 01 02 02 03 20 04 02 03 04 04 06 10 12 14 P Port size Rc 11 2 1 1 8 1 8 1 4

VDW

2 3 4 5 n U side VDW23-GVDW23-GVDW23-GVDW23-G70 31.5 21 18.5 (OUT port) n-1/8 n-M5 x 0.8 11 P = 22 11 4.5 1.5 54 6 32 6 (19.5) 9.5 11 9.5 11 4-M4 x 0.7 46 10 24 10 When w/o bracket, M3 threads at both ends (4 positions) can be used for other purposes.

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

Refer to Glossary of Terms on front matter 10 for details on the max. operating pressure differential and the max. system pressure. 3.0 4.5 0.46 0.61 2.3 3 8 (10A) 6 0.3 1.1 4.1 8 0.3 1.6 6.4 1.0 10 0.3 2.2 11 1 2 (15A) 10 0.3 2.2 11 Note) Weight of grommet type. Add 10 g for conduit type, 30 g for DIN terminal type, 60 g for conduit terminal type respectively.

•

-m;;:r~t 1~ 2M6 Screw depth 11 1 5 2-M6 Screw depth 11 ' ~ Lsii S ~ 60 L 4L.I Applicable clamp Part No. A cylinder , Maleual :Casl iron Malerial: Carbon steel I Matefial : Cast lIon . Part No.

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

14 14 H 13.5 12.5 13 20 20.5 22 29 33 33 I 28 34 40 50 58 72 J 4.5 4.5 6 6 8 8 10 12 12 N 9.5 11 11 18 18.5 20 26 25 25 Q NN S 62 63 83 106 111 124 150 176 188 K 5 4 11 8 10 15 16 25 26 V A 4 4 4 8 8 8 10 T C 8 14 14 26 32 32 41 L 35 38 57 66 70 80 92 110 122 MM NA 10 14 17 24 30 36 46 55 69 Model 12-CY3B6 12-CY3B10 12-CY3B15 12-CY3B20 12-CY3B25 12-CY3B32 12-CY3B40 12-CY3B50 12-CY3B63

3 Port Air Operated Valve

441 426 468.5 453.5 496 481 523.5 508.5 551 536 578.5 563.5 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 stations Station n L1 L2 1571 VPA300/500/700 Series VPA500 Series/Dimensions Type 41/Common exhaust: VV3PA5-411-03 Stations 92.5 2 x 7.2 (For mounting) 30 N.C.

Angle Seat Valve /

Fluid Nil No L Yes Thread type*1 5 Steam Nil Rc A G B NPT Body material/Port size/Orifice diameter Symbol Body material Port size Orifice diameter A Bronze (CAC) *1 The thread type for the main piping and pilot piping is the same. 3/8 11 B 1/2 14 C 3/4 18 D Stainless steel 316L equivalent Pressure type 3/8 11 E 1/2 14 F 3/4 18 Nil Standard H High pressure Other Special Options Special Entry

1

G F 300 G F 280 G F Terminal part Flat terminal connector 11 23 9 H C 15 6.5 H C H C G1/2 Terminal: T DIN terminal: D Applicable cable O.D.: 6 to 12 G F G F Width across flats 22 G1/2 32 H (44) H 31.5 25 C C J G1/2 J Dimensions [mm] Model A B C D E F M P Q Grommet: G Grommet: GS Conduit: C Flat terminal: F DIN terminal: D Terminal: T G H G H G H G H G H J G H J XSA1-1P(N) 30 30 66 30 11

Clean Regulator/Fluororesin Type

SRF 1 07 11 0 S S 1 With nut Body size 1 3 5 Fitting type Pilot port thread type Made to Order (Refer to page 887 for details.)

MQQ

0.5 M4 x 0.7 7 35 + Stroke 35 + Stroke 7 Standard type: MQQT CC 40 + Stroke 8.5 13 to 17 M5 x 0.8 M6 x 1 45 + Stroke 9 RB 7.5 50 + Stroke 8 to 11 M3 x 0.5 65 + Stroke M4 x 0.7 7 J Anti-lateral load type: MQQL (Built-in ball bushing type) 70 + Stroke 5.5 80 + Stroke 8 13 to 17 M5 x 0.8 M6 x 1 D6.5 85 + Stroke 105 + Stroke 7 -X : Stroke 20Data 10-5-11 11 Series MQQ Dimensions Basic style (Through-hole

MGC

View A-A Bore size (mm) Stroke range (mm) AF AE AD AC AB AA A G F E D C B AP H 20 25 32 40 50 75, 100, 125, 150, 200 25 62 15.5 13 11 84 5.6 90 45 24 106 M5 x 0.8 depth 10 9.5 depth 6 22 M6 x 1 depth 10 30 65 16.5 13 15 89 6.8 103 45 26.5 120 11 depth 8 M6 x 1 depth 12 M8 x 1.25 depth 14 27 75, 100 125, 150 200, 250 300 35 70 16.5 13 15 94 6.8 118 50 26.5 135 11 depth 8 M6 x 1 depth 12 M8

MGQ

For details, refer to page 8-30-32. 8-20-11

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

(The selection should allow a sufficient margin because the value calculated by the selection software involves an error with reference to the actual value.) m3max m1max m2max Weight kg MY340 20 30 40 50 Collision deceleration G 1500 N 10 5 4 3 2 1 40 30 20 10 5 4 3 2 1 m3 max m1 max m2 max Weight kg 8-14-11 11 Series MY3A/3B Model Selection 2 Calculation of Guide Load Factor 1.

Compact Cylinder

Moving Parts: With Magnet for Auto Switch [g] 100 Allowable lateral load at rod end [N] 80 Bore size [mm] Cylinder stroke [mm] 63 5 10 15 20 25 30 35 40 45 50 50 40 32 12 6 7 8 9 10 11 10.0 16 7 8 9 10 11 12 20 16 17 19 21 23 25 27 29 31 33 25 25 25 28 31 34 37 40 43 46 49 53 20 32 43 48 52 57 61 66 70 75 79 83 16 40 69 75 81 87 93 99 105 111 117 123 1.0 12 50 127 137 147 157 167 177 187

Dedicated Controller

SET-ON 10 Start readiness signal CN2 24V DC + COM 1 COM 11 NO. 0 Indicates operation in progress when ON. ON when program is being executed and when returning to the home position. 2 BUSY 11 Operating signal NO. 1 12 NO. 2 3 <1> When this signal is OFF, an alarm is being generated for the actuator/controller.