3 Way Direct Acting NVKF 300 Series

or less (Standard) 95"F or less (Low power cons!

Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

Speed Controller: Standard Type Series AS Large Flow In-line Type 1

Free flow Controlled flow Applicable cylinder bore size (mm) Effective area (mm2) Effective area (mm2) Flow rate (/min (ANR)) Flow rate (/min (ANR)) Model Port size Weight (g) AS420-02 2,500 1/4 38 3,600 55 0.34 AS420-03 5,000 3/8 77 4,800 74 0.33 63, 80, 100, 125 AS420-04 6,600 1/2 100 6,700 102 0.32 AS500-06 10,100 3/4 154 8,100 123 140, 160, 180, 200 0.36 AS600-10 15,100 1 230 16,900 258

High Pressure Coolant Valve

mounting Same as back side 8 locations J B G Bracket (Option mark: B) H I 15 R S K L M E T: Long hole for mounting P O A F D Q 4 positions C Main port 3 (3 port valve only) VNA VNB Flow indicator for 2 port valve SGC Dimensions SGH (mm) Main port 1, 2, 3 2 Port 2 x 2 x Pilot port 12(P1), 10(P2) A B Note) C D E F G H I Model 3 Port 3 x 3 x VNC 3 8 1 2 2 x 3 4 2 x 1 3 8 1 8 VNH1 -10A VNH2

VPA4

1/4) VP500-2-1P (Rc 1/4) VP500-2-2P (Rc 3/8) VP700-2-1P (Rc 3/8) VP700-2-2P (Rc 1/2) VPA344 VP300-17-1 VP300-24-4 M4 x 0.7 x 41 VPA544 VP500-17-1 Series Thread type VP500-24-3 M5 x 0.8 x 50 3 5 7 P F N T VPA344 VPA544 VPA744 Rc G NPT NPTF VPA744 VP700-17-1 VP700-24-1 Caution Port size Mounting screw tightening torques VPA344 1/8 1/4 VPA544 1/4 3/8 VPA744 3/8 1/2 Symbol 1 2 M3: 0.6 Nm M4:

Air cooled Thermo-con (Compact type)

COMMUNICATION FORMAT -3-1 3.1 TYPE OF MESSAGE -3-1 3.2 CONTENT OF COMMUNICATION -3-1 3.3 COMPOSITION OF REQUIRED MESSAGE (FROM MASTER TO THE PRODUCT) -3-2 3.4 COMPOSITION OF RESPONSE MESSAGE (FROM THE PRODUCT TO MASTER) -3-3 3.5 EXPLANATION OF CODE -3-4 3.6 CAUTIONS FOR COMMUNICATION -3-6 3.7 COMMUNICATION EXAMPLE -3-7 3.8 CONNECTION -3-9 3.9 IDENTIFICATION CODE LIST -3-9 3.10 ASCII CODE

Air cooled Thermo-con (Compact type)

COMMUNICATION FORMAT -3-1 3.1 TYPE OF MESSAGE -3-1 3.2 CONTENT OF COMMUNICATION -3-1 3.3 COMPOSITION OF REQUIRED MESSAGE (FROM MASTER TO THE PRODUCT) -3-2 3.4 COMPOSITION OF RESPONSE MESSAGE (FROM THE PRODUCT TO MASTER) -3-3 3.5 EXPLANATION OF CODE -3-4 3.6 CAUTIONS FOR COMMUNICATION -3-6 3.7 COMMUNICATION EXAMPLE -3-7 3.8 CONNECTION -3-9 3.9 IDENTIFICATION CODE LIST -3-9 3.10 ASCII CODE

Information

G Stainless steel Body material Applicable tubing O.D. 04 06 08 10 12 4 6 8 10 12 Body size 2 Elbow Type 2 3 4 5 6 M5 1/8 1/4 3/8 1/2 Control type Port size 0 1 Meter-out Meter-in M5 01 02 03 04 M5 x 0.8 R1/8 R1/4 R3/8 R1/2 With one-touch fitting 1

VEX-OMY0001

NXT013-3 VO307K-1 2) 3) VEX322 VEX342 Rc A 1/8 1/4 F G VVEX2 VVEX4 B 1/4 3/8 N NPT ( ) VEX1-17 VEX4-5 C 1/2 T NPTF 11 No.VEX-OMY0001 (2) () 3 2(A) 23(P2) 12(P1) a,b 12(P1),23(P2) (2) a 12(P1) 1(P)2(A)3 3(R) 3(R) b 23(P2) 2(A) 2(A)3(R)1 1(P) 1(P) 12(P1) 1 2 3 23(P2) 4 5 6 7 8 POM 9 -12No.VEX-OMY0001 () () 3(R) 2(A) 1(P) 1(P) 2(A) 3(R) () a b P1P2 2(A) 1(P)

Mist Separator Series AM Model Series AM can separate and Model AM850 AM250 AM350 AM450 AM550 AM650 AM150 remove oil mist in compressed air Rated flow 750 1500 2200 3500 6000 12000 300 (1) (l/min (ANR)) which is difficult to remove by Port size ordin

Rc(PT) Thread F G(PF) N NPT Accessories Options Table: Accessory/Option combinations Available Not available Depending on model L D J T AM150 R AM250 AM350 AM450 Applicable models Accessories /Options C C D -J -R AM550 AM650 AM850 Port size N.C. auto drain N.O. auto drain Accessories 06 3/4B 01 02 03 1/8B Drain guide 1/4B 10 14 20 1/4B 1B 11/2 B Options INOUT reversal 3/8B Element service

AME

size 01 B 1 8 B 1 4 B 3 8 04 B 1 2 06 B AFF 1 Standard 11 2 Standard Nil Rc Thread type 02 03 JIS Symbol AME AM F G N NPT P . 14-20-57 3 4 1B Misc. 10 14 1 B 1 2 20 2B Caution Note) Refer to How to Order Bowl Assembly on page 14-20-59.

AMH

AMH250 AMH350 AMH450 AMH550 AMH650 AMH850 AMH150 Model Note) 500 1000 2000 3500 6000 12000 200 Rated flow (l/min (ANR)) Port size (Nominal size B) 1 8 1 4 3 8 1 4 3 8 1 2 3 8 1 2 3 4 1 1 2 3 4 1 3 4 1 1 1 2 1 2 1 2 , , , , , , , , , , , 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Weight (kg) Note) Max. flow capacity at pressure of 0.7 MPa. It varies depending on operating pressure.

Micro Mist Separator with Prefilter AMH Model Model AMH250 AMH350 AMH450 AMH550 AMH650 AMH850 AMH150 Series AMH can separate and (1) remove aerosol state oil mist in 500 1000 2000 3500 6000 12000 200 Rated flow (l/min(ANR)) compressed air and remove Po

Thread Rc(PT) Table: Accessory/Option combinations Depends on model l Not available Available F G(PF) N NPT Accessories Options C C D -J -R D J T AMH150 R AMH250 AMH350 AMH450 Applicable models Port size Accessories Options AMH550 AMH650 AMH850 B 01 B 06 10 14 1 8 3 4 1B N.C. auto drain N.O. auto drain Drain guide 1/4B IN/OUT reversal -T Element service indicator Accessories 02 03 1 4 3

AME

BM51 BM52 BM53 BM54 BM55 BM56 BM57 How to Order AME 250 03 R B Option R INOUT reversal Body size HAl Accessories (Options) 150 250 350 450 550 650 850 1/8 1/4 3/8 1/2 3/4 None B AT With bracket IDl Port size 1/8B 01 02 03 04 06 10 14 20 2B 1 Thread 1/4B AMG 11/2 3/8B Rc(PT) F G(PF) N NPT 1/2B AFF 3/4B 1B AMl 11/2B Symbol Related poroducts AME Note) Refer to p.4.7-7 for "How to Order" case

Speed Controller with One-touch Fitting Series AS Elbow Type (Metal Body) 1

3 !4 !5 !

Speed Controller with

Made to Order How to Order 2 F 06 200 AS G A Lubricant: Vaseline -X12 Example) AS2002FG-06A-X12 Body size Made to Order Grease-free (Seal: Fluorine-coated) + Restrictor (Without check valve) -X21 100 M5 standard 200 1/8 standard 205 1/4 standard 300 3/8 standard 400 1/2 standard Push-lock type Example) AS2002FG-06A-X21 * Not particle-free Applicable tubing O.D.1 Metric size Inch size 23 3.22

Residual Pressure Release Valve

8 15.2 20.9 27 29 35.3 40 6 7.5 15.4 21.1 64 89 17 19 Weight (g) Connection thread D L1 L2 Q KEC-02 KEC-03 665

Thermo-chiller

Thermo-chiller Dual Channel Refrigerated Thermo-chiller for Lasers HRL Series How to Order HRL A 20 100 Power supply Cooling capacity CH1 CH2 100 9 kW 1 kW 200 19 kW 1 kW 300 26 kW 1 kW 20 3-phase 200 VAC (50 Hz) 3-phase 200 to 230 VAC (60 Hz) Pipe thread type Nil Rc F G (with Rc-G conversion tting) N NPT (with Rc-NPT conversion tting) Cooling method A Air-cooled refrigeration Specications

For Water Digital Flow Switch Series PFW

Applicable model Flow rate (l/min) Rc NPT G Nil N F Symbol 40 4 16 3/8 1/2 3/4 PFW504, 520 PFW520, 540 PFW540 03 04 06 Specifications Model Measured fluid Detection type Flow rate measurement range Operating pressure range Withstand pressure Operating temperature range Power supply voltage Current consumption Weight Enclosure Port size (Rc, NPT, G) PFW520 PFW504 PFW540 Water Karman

Series: 350 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 3 [350 (3 Port) ø3], Port Size: 01 [1/8 (6A)], Thread: G, Material: Stainless Steel Body, FKM Seal, Class B Coil, Option: Foot Bracket, CE Compliance: CE Marked