Stopper Cylinder

acting) 16 20 Bore size: 16, 20 Q S M L A + 2 stroke B + Stroke H + Stroke V W X E G T 0 0.1 D Width across flats K E Workpiece transfer direction 2 x N through 4 x O counterbore 2 x P (Rc, NPT, M thread) F Stroke Y Q S M L A + 2 stroke B + Stroke H + Stroke V G T 0 0.1 D E M L A + 2 stroke B + Stroke H + Stroke V Width across flats K Workpiece transfer direction 2 x P (Rc, NPT, G) F Z X

MK

stroke (Basic) (mm) U S R K L Oh9 Q F E C B A Model MKB20 MKB25 0 0.052 0 0.052 0.15 0.15 4 31 62 72.5 24.5 48 36 46.8 36 13.5 0.15 0.15 7.5 20 5 32 63 73.5 27.5 53.8 40 52 40 16 8 23 Note 1) Above figure is for D-A73/A80.

VQ7-6/7-8

R U side D side A B Side Bottom Cylinder port location Rc Nil NPTF T G F P, R port size L R L side R side Cylinder port size 04 06 C12 Rc 1/2 Rc 3/4 One-touch fitting for 12 Note) It is not applicable to One-touch fittings. 03 04 3/8 1/2 Thread type Rc Nil NPTF T G F Replacement Parts (For manifold block) Description Material Qty.

NCA1

1 5/8 7 3/4 2.59 4 1/4 2.72 8 1/2 400 (4) 1 3/8 1-14 1 5/8 4.7 2 5/8 1 1/4 3/4 3/4 1 1/4 3/8-24 4.5 0 1/2 5/8 5/8 1.57 1.18 1 1/4 1 3/4 1 5/8 7 3/4 2.59 4 1/4 2.72 8 1/2 Oversized Rod Single Detachable Rear Clevis Type NC A1C (XB5) Bore S 200 3/4 250 3/4 325 1-1/16 400 1-1/16 X119 Option (in) Bore (in) MM KK A AA B C CB CD CW D DD E EA EE F FA G J L LR M WF XD Y LF P ZD 200 (2) 1 3/4-16

C95

17 24 24 30 32 4 4 5 5 5 5 32 40 50 63 80 100 1.11-7 Series C95 With Mounting Bracket Foot L Centre Trunnion T Flange F Mounting at the back Mounting at the front Rear single clevis C Rear double clevis D Bore (mm) Z E1 R W MF ZF FB CD EB L XD UB CB EW MR TR AO AT XA SA AH AB L1 TL TD TM UW TF UF E2 48 55 68 80 100 120 32 36 45 50 63 75 16 20 25 25 30 35 10 10 12 12 16 16 130 145 155 170

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

Please refer to page of Best Pneumatics Vol. 7. 12 2-M5 x 0.8 Auto switch Lead wire min. bending radius 10 H thread effective depth C 2 x 4-OB counterbore depth RB 2 x 4-OA effective depth RA Note 1) Q F 16 I 4-N through D M E T Plain washer K B + Stroke L M A + Stroke E 20, 25 Rod end male thread H1 Rod end nut Note 2) C1 X L1 Rod End Male Thread Bore size (mm) 12 16 20 25 (mm) C1 9 10 12

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

Grease pack GR-L-005 (5 g) GR-L-010 (10 g) GR-L-150 (150 g) CV MVGQ CC RB J D-X 20Data 10-4-13 14 Series CG1Y Dimensions: 20 to 100 Mounting bracket dimensions are the same as those of the low friction, double acting, single rod type of Series CG1Q. Please refer to page of Best Pneumatics Vol. 6.

Clamp Cylinder with Lock Series CLK1

Pin Dd9 2-3 L 4 4 D L Part no.

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

M5 x 0.8 M4 x 0.7 NDh8 Z S 12-0.027 10-0.022 4 5 122 121 66 65 0 0 Foot (L): CJ2WL, CJ2WL 10112122View E Mounting nut Relief port 2 x M5 x 0.8 GA GA NN GC F MM NN GC F Rod end nut Cover surface Piping port 2 x M5 x 0.8 MM D D LY LB LH LZ LX LT LT Y NA X S + Stroke H NA Y A X 4 x LC Mounting hole A H + Stroke Z + 2 x Stroke C B 0 0.3 B 0 0.3 Drawing of view E (mm) Bore size 16 10 15 15 B LT

5 Port Solenoid Valve SY Series

39.4 20 (23.9) (P port) 1/4 0.9 31.5 [38.5] 2 18 40 EA P EB 24.5 28 For manifold gasket positioning 22.2 die-cast hole 36 (EA, EB port) 1/8 39.4 L plug connector (L) : SY7120-L(-F ) C8, N9 C10, N11 1 2 M plug connector (M): SY7120-M(-F ) C8, N9 C10, N11 1 2 DIN terminal (D): SY7120-D(-F ) C8, N9 C10, N11 1 2 M8 connector (W0): SY7120-W0(-F ) C8, N9 C10, N11 1 2 Applicable cable O.D. 3.5 to

5 Port Solenoid Valve, Series VQC

(SIGNAL) 4 3 () Circuit power supply V 3 1 4 () Sensor power supply SW 3 Signal H CAN_H 4 Sensor input signal SIGNAL 4 5 Signal L CAN_L 5 Sensor ground E 5 In the case of 4-input block unit (EX250-IE2), this is the sensor input signal.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

MPa Lateral load F (N) Lateral load F (N) Lateral load F (N) 200 0.3 MPa 120 0.2 MPa ML2B 300 0.2 MPa 160 C J G5-S 80 120 200 CV 80 40 MVGQ 100 40 CC 40 120 100 80 60 180 140 100 60 240 200 160 120 80 RB Point of application L (mm) Point of application L (mm) Point of application L (mm) J D-X 20Data 10-11-7 7 Escapements Series MIW/MIS 8, 12, 20, 25, 32 How to Order Finger option Nil: Basic

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

MPa 240 0.5 MPa 400 0.4 MPa 0.4 MPa CE2 0.3 MPa Lateral load F (N) Lateral load F (N) Lateral load F (N) 200 0.3 MPa 120 0.2 MPa ML2B 300 0.2 MPa 160 C J G5-S 80 120 200 CV 80 40 MVGQ 100 40 CC 40 120 100 80 60 180 140 100 60 240 200 160 120 80 RB Point of application L (mm) Point of application L (mm) Point of application L (mm) J D-X 20Data 10-11-7 7 Escapements Series MIW/MIS 8, 12, 20

High Vacuum Angle Valve, XL Series

XLFV/With solenoid valve J M N Port P (pressure port) K L R P (mm) Port R (exhaust port) M 3 3 3 4 4 4 L 8.5 8.5 8.5 12 12 12 K 13 14 23 23 29 39 J 16.5 16.5 17.5 28 29 29 N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 XLFV-63 XLFV-80 3 3 3 2 2 2 Other dimensions are the same as XLF. 15 Series XLG, XLGV Double Acting/O-ring Seal Air Operated Type How to Order XLG 16 F9N High vacuum angle valve

Cylinder with Lock

Bore size Dd9 L l m d (Drill through) Applicable split pin CD-M03*1 32, 40 10 0.040 0.076 44 36 4 3 3 x 18L CD-M05*1 50, 63 14 0.050 0.093 60 51 4.5 4 4 x 25L CD-M08*1 80, 100 22 0.065 0.117 82 72 5 4 4 x 35L Part no.

2/3 Port Valve

MainPort Rc(PT) Pilot port Rc(PT) A Model B C D E F H J K L 1 8 1 4 1 4 105 120 140 77 96 113 53 60 74 26.5 30 37 120.5 137 160 20 24 24 129.5 147 170 229.5 247 270 197 214.5 237.5 55 63 74 1 4 1 2 1 1 2 VNC5-32A VNC6-40A VNC7-50A 4.2-24 VNC Port size: 32A, 40A, 50A Flange connection Applicable flange Pilot port Rc(PT) A Model B C D E F H J K L 32 40 50 1 8 1 4 1 4 130 150 180 210.5 226 250

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

2: Clear / PD Out invalid 4..5 Idle output (IO-Link) 0: Clear 1: Hold 2: Force ON 6..7 Idle output (DO) 0: 2 / 2 / 2 / 2 1: 4 / 4 / 4 / 4 2: 8 / 8 / 8 / 8 3: 16 / 16 / 2 / 2 4: 32 / 2 / 2 / 2 Process data mapping Port1/Port2/Port3/Port4 (Input and Output) 4 0..7 0 L+ control Port 1 0: L+ ON, 1: L+ OFF 1 L+ control Port 2 0: L+ ON, 1: L+ OFF 5 2 L+ control Port 3 0: L+ ON, 1: L+ OFF 3

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

CXWM/CXWL

0 4-3.2 through 4-6.5 counterbore depth 3.3 2 x 2-M4 x 0.7 thread depth 8 2-RB0805-X552 Shock absorber (mm) ZZ Z SS S Q P L Model F Note) For 25 stroke, the shock absorber is mounted on a plate.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Model L A B n D E F LEFS25lll-50l 210.5 56 160 4 20 LEFS25lll-100l 260.5 106 210 4 LEFS25lll-150l 310.5 156 260 4 LEFS25lll-200l 360.5 206 310 6 2 240 LEFS25lll-250l 410.5 256 360 6 2 240 LEFS25lll-300l 460.5 306 410 8 3 360 LEFS25lll-350l 510.5 356 460 8 3 360 LEFS25lll-400l 560.5 406 510 8 3 360 LEFS25lll-450l 610.5 456 560 10 4 480 LEFS25lll-500l 660.5 506 610 10 4 480 LEFS25lll-