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3 0.4 0.1 Port size 4 0.2 0.05 Series 200 p p Port size Symbol 300 p p Note 1) Indicates the maximum operating pressure differential of pressure ports 2 and 3.

(Panel mounting hole: See Dimensions.) 2 r o t c e n n o C h c n I c i r t e M 8 / 1 1 0 P M D K 2 . 3 3 2 P M D K e u l B 2 3 / 5 3 0 P M D K 4 4 0 P M D K r o t c e n n o C g u l P d e R 4 / 1 7 0 P M D K 6 6 0 P M D K 6 1 / 5 9 0 P M D K 8 8 0 P M D K 8 / 1 1 0 P M D K 2 . 3 3 2 P M D K r o t c e n n o c t e k c o S ) g n i k c a p h t i W ( e u l B 2 3 / 5 3 0 P M D K 4 4

N 1 * S 1 5 T L A N 9 T L A N 1 * S 1 9 T L A N ) a P M ( g i s p e r u s s e r p y l p p u s . x a M ) 5 . 1 ( 0 2 2 ) a P M ( g i s p e r u s s e r p g n i t a r e p o . x a M ) 0 . 1 ( 0 5 1 e g n a r . p m e t g n i t a r e p O ) C 0 6 ~ 5 ( F 0 4 1 ~ 3 2 t n a c i r b u l d e d n e m m o c e R ) 2 3 G V O S I ( 1 # l i O e n i b r u T y d o B C D A e r u s s e r p e n i l d n a k

11 Specifications p. 12 Set Pressure Range and Rated Pressure Range p. 13 Functions p. 13 Internal Circuits and Wiring Examples p. 14 Dimensions p. 15 How to Order p. 19 Specifications p. 20 Set Pressure Range and Rated Pressure Range p. 21 Functions p. 21 Internal Circuits and Wiring Examples p. 22 Dimensions p. 23 Function Details p. 29 Made to Order Specifications p. 33 Safety Instructions

N 9 T L A N 1 * S 1 9 T L A N ) a P M ( g i s p e r u s s e r p y l p p u s . x a M ) 5 . 1 ( 0 2 2 ) a P M ( g i s p e r u s s e r p g n i t a r e p o . x a M ) 0 . 1 ( 0 5 1 e g n a r . p m e t g n i t a r e p O ) C 0 6 ~ 5 ( F 0 4 1 ~ 3 2 t n a c i r b u l d e d n e m m o c e R ) 2 3 G V O S I ( 1 # l i O e n i b r u T y d o B C D A e r u s s e r p e n i l d n a k n a t n e e w t e

port (for ejector) Applicable tubing O.D.: 4 (P. port) KJS04-M5 Applicable tubing O.D.: 6 (P. port) KJS06-M5 16.38 15.5 Applicable tubing O.D.: 4 (P. port) 10.6 9.3 15.6 KJL04-M5 12 Space Saving Vacuum Ejector Series ZQ Made to Order Specifications Please contact SMC for detailed dimensions, specifications, and lead times.

Values for double types are when the switch is ON. 4 position dual 3 port valve (A) (A) 4 (B) 2 3 (R2) 5 (R1) 1 (P) N.C. N.C. 4 position dual 3 port valve (B) (A) 4 (B) 2 3 (R2) 5 (R1) 1 (P) N.O. N.O. 4 position dual 3 port valve (C) (A) 4 (B) 2 3 (R2) 5 (R1) 1 (P) N.C.

(P.12) ) INP ON (INP 9.1 (P.32) PLC ) 5 3.(P.12) PLC (PLC) 2 11.4 (P.49) () 10.(P.41) 3.(P.12) -81- 5(P.23) 9.1 (P.32) 3.(P.12) PLC (PLC) 2 11.4 (P.49) () () 3.2 (P.13) USB 10.(P.41) 5 10.(P.41) 10.(P.41) 3.(P.12) ( EMG ) 3.

Dimensions are the same as the standard model. 2.35J 11.8 40 Construction: Refer to p.1.4-9 Dimensions: Refer to p.1.4-10 to 1.4-18 Construction: Refer to p.1.4-9 Dimensions: Refer to p.1.4-10 to 1.4-18 Refer to p.1.4-4 for other specifications.

port P P Note 1) The above dimensions are for ZZA103-00.

PVQ10 /%IR # # P = 0.2 MPa P = 0.1 MPa IRV ! ! P = 0.08 MPa P = 0.15 MPa l1 l1 & & VEX1 P = 0.1 MPa P = 0.05 MPa 0 0 P = 0.05 MPa P = 0.02 MPa SRH ( ( SRP " " SRF % % % "% (% (% 0% % !% 0% -% &% "%% !% "(% #% "0% -% "!% .% "-% "%% (%% % % % "% (% (% 0% % !% 0% -% &% "%% !% "(% #% "0% -% "!

, T1 = 297 5 K, 0.07 bar P 0.14 bar.

SYJ5000-21-1A 1 pc. 1 (P) 3 (R) 0.2 Caution 0.1 0.2 0.3 0.4 0.5 0.6 Be sure to read before handling. Refer to p.0-33 to 0-36 for Safety Instructions and common precautions.

Applicable shaft types: J, K, T Applicable shaft types: J, K, T (mm) (mm) Q1 Q2 L2 + (3 x P) L2 = L2 + (3 x P) K axis (T axis) J axis Shaft type Shaft type J K J K T T Size Size Q1 = M L1 = L1 + (3 x P) L2 = 10 10 Not available Not available 15 15 M3 M3 20 20 M3, M4 M3, M4 30 30 M3, M4, M5 M3, M4, M5 Q2 = M Q2 = M 40 40 M3, M4, M5 M3, M4, M5 Symbol: A37 Symbol: A38 The long shaft can be

Applicable shaft types: J, K, T Applicable shaft types: J, K, T (mm) (mm) Q1 Q2 L2 + (3 x P) L2 = L2 + (3 x P) K axis (T axis) J axis Shaft type Shaft type J K T J K T Size Size Q1 = M L1 = L1 + (3 x P) L2 = 10 10 Not available Not available 15 15 M3 M3 20 20 M3, M4 M3, M4 30 30 M3, M4, M5 M3, M4, M5 Q2 = M Q2 = M 40 40 M3, M4, M5 M3, M4, M5 Symbol: A37 Symbol: A38 The long shaft can be

Applicable shaft types: J, K, T Applicable shaft types: J, K, T (mm) (mm) Q1 Q2 L2 + (3 x P) L2 = L2 + (3 x P) K axis (T axis) J axis Shaft type Shaft type J K T J K T Size Size Q1 = M L1 = L1 + (3 x P) L2 = 10 10 Not available Not available 15 15 M3 M3 20 20 M3, M4 M3, M4 30 30 M3, M4, M5 M3, M4, M5 Q2 = M Q2 = M 40 40 M3, M4, M5 M3, M4, M5 Symbol: A37 Symbol: A38 The long shaft can be