Model: Extended Male Elbow, Applicable Tube OD: Ø4, Port Size Applicable Tube: 01S [R(PT)1/8]

Model: Union"Y", Different Dia.Union "Y", Plug-in"Y", Branch, Applicable Tube OD: Ø4, Port Size Applicable Tube: 01S [R(PT)1/8]

Model: Extended Male Elbow, Applicable Tube OD: Ø3.2, Port Size Applicable Tube: 01S [R(PT)1/8]

Model: Male Run Tee, Applicable Tube OD: Ø4, Port Size Applicable Tube: 01S [R(PT)1/8]

Model: Male Branch Tee, Tee, Different Dia.Tee, Applicable Tube OD: Ø6, Port Size Applicable Tube: 01S [R(PT)1/8]

Model: Male Branch Tee, Tee, Different Dia.Tee, Applicable Tube OD: Ø4, Port Size Applicable Tube: 01S [R(PT)1/8]

Model: Male Run Tee, Applicable Tube OD: Ø6, Port Size Applicable Tube: 01S [R(PT)1/8]

(mm)Fitting typeFitting modelMY3 25Rc1/86Hexagon socket head male connectorKQ2S06-01S

(mm)Fitting typeFitting modelMY3 25Rc1/83.2Male connectorKQ2H23-01S

(mm)Fitting typeFitting modelMY3 25Rc1/84Male elbowKQ2L04-01S

(mm)Fitting typeFitting modelMY3 32Rc1/88Male elbowKQ2L08-01S

(mm)Fitting typeFitting modelMY3 32Rc1/88Hexagon socket head male connectorKQ2S08-01S

(mm)Fitting typeFitting modelMY3 32Rc1/86Male connectorKQ2H06-01S

This is a legacy product, and replaced byVHK3A-01S-04F VHK2 FINGER VALVE. FINGER VALVE. VALVE. VHK2/3 BODY PT 1/8. .05399 lb. DA.

This is a legacy product, and replaced byVZM450-N01-01S VALVE, MECH L (STEEL). VALVE. VM BODY PT 1/4. .29326 lb.

Plug-in Unit

VQC4000 Thread type Note) VVQC4000-3A-1 Series Nil F T Rc G NPT/NPTF Kit type 1 2 4 Thread type VQC1000 VQC2000 VQC4000 Nil F T 1 2 3 Rc G NPT/NPTF S (EX240) kit F, P, T, S (EX250) kit L, M, S (EX500) kit Note) VQC 4000 thread port only Note) Tie-rods (2 pcs.) for additional stations included. U-side end plate assembly !8 U-side end plate assembly part no.

Lubrication Equipment

ALF400 ALT-9 1.17-11 Auto Feed Lube ALF400 to 900 Operating pressure range Tank and line pressure How to Order Auto Feed Lube ALF 40 02 0 Option Auto Feed Lube Port size Symbol Description Applicable model W/ bracket ALF400 to 600 B 02 03 04 06 10 12 14 20 4 1 Body size 8 3 AC 40 50 60 80 90 2 1 2 1 4 3 4 3 AV 1 1 2 1 1 1 2 2 1 4 1 AU 2 1 AF Thread Rc (PT) NPT G (PF) N F AR Note 1) Tank

Electro-Pneumatic Proportional Valve Series VEF/VEP

Repeatability 3% F .S. Sensitivity 0.5% F .S. Linearity 3% F .S. or less Lubrication Not required (Use turbine oil Class 1, ISO VG32, if lubricated.)

5

2 x FC Mounting hole B 0 0.3 A F NA FT NB FX FZ H S + Stroke F Z + Stroke Refer to page 148 for details of the mounting nut.

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output