Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

Load voltage Max. load current 4.4 Lead wire length Switch contacts side 0.5m Load connection side 0.5m 3.4 CD-P SWITCH 18 9 VOLT 15.5 38 46 Connection To connect a switch unit to a contact protection box, connect the lead wire from the side of the contact protection box marked SWITCH to the lead wire coming out of the switch unit.

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

M2 M3 m1 m2 m3 16 25 40 16 25 40 7 6 7 15 13 13 MY2H 28 26 26 32 30 30 60 50 60 62 62 62 46 55 46 20 18 18 100 120 100 38 35 35 MY2HT 200 220 200 80 80 80 The above values are the maximum allowable values for moment and load. Refer to each graph regarding the maximum allowable moment and maximum allowable load for a particular piston speed.

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

across flats 12 M5 x 0.8 M8 x 1 5 3 20 D 3 5 Y Width across flats 16 15 D 3 3 F Width across flats 12 Width across flats 12 F Width across flats 10 Width across flats 2 Width across flats 3 3 C C 2 2 A A B B Dimensions A Dimensions A (mm) (mm) B C D F Y B C D F Model Model ZPT10F-B5-A8 ZPT20F-B5-A10 10 12 10 12.5 37.5 20 22 1.5 12.5 15.5 48.5 ZPT13F-B5-A8 ZPT25F-B5-A10 13 15 25 28 10.5 13 38

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

(mm) One-touch fitting 4 tube 6 tube 8 tubing 34 35 10 to 16 38 39 20 to 32 134 136 40, 50 Weight by Stroke (g) Pad dia.

ZR

ZR1 V K1 5 M Z Combination of vacuum valve and release valve Manual override With light/surge voltage suppressor Pilot valve Rated voltage Electrical entry 13-3-38 38 Series ZR Large Size Vacuum Module: Vacuum Pump System Vacuum Pressure Switch: ZSE2-0R-15 Specifications Vacuum pressure switch part no.

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

effective depth 6 2 x M5 x 0.8 2 x 2 x 6.5 counterbore 5.5 M5 x 0.8 (Piping port) (Relief port) 2 x 2 x M4 x 0.7 effective depth 7 Note 2) 2 x 3.5 through 32 0.5 15.5 25 6 Flat washer 5 10 4 4 3.5 27 + Stroke 15.5 30.5 + Stroke 25 16 17.5 5 5.5 2 x M5 x 0.8 M5 x 0.8 (Relief port) 2 x 2 x 6.5 counterbore M4 x 0.7 effective depth 8 (Piping port) 2 x 2 x M4 x 0.7 effective depth 7 Note 2) 38

Low Profile Guide Type

Technical Data 1555 CY1F Series Auto Switch Mounting Proper Auto Switch Mounting Position (Detection at stroke end) D-A9, D-A9V (mm) Note 2) Bore size Mounting patternq A1 Mounting patternw A2 Mounting patterne A3 Operating range 9 B1 B2 B3 (mm) 10 15 25 38 60 18 80 38 80 10 39 66 19 86 39 86 11 44.5 95.5 24.5 115.5 44.5 115.5 D-M9, D-M9V, D-M9W, D-M9WV D-M9A, D-M9AV Mounting pattern q B1

High Vacuum Angle Valve

Heater: Indicator: 5 Aluminum High Vacuum Angle Valve XLA/XLAV Series Dimensions XLA: Air operated (b) E C E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) [mm] Model A B C D E*1 Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95

100

Thread size Recommended tightening torque [Nm] 1/8 3 to 5 1/2 28 to 30 3/4 28 to 30 1 36 to 38 Vacuum port Vacuum pressure detection port Exhaust block surface to be held (Width across flats 40) Body surface to be held (Width across flats 40) Exhaust port Branch Port Warning 1.

Air Cooled Aftercooler Series HAA 1

Model A B C A B C A B C A B C 500 1000 1500 1000 2200 3000 2000 3300 4000 4000 5700 7000 34.5 38 40 33 36.5 38 34 36 37 34 35 36 35 40 44 35.5 40 42 37 40 41.5 38 40 42 35.5 42.5 47.5 36 42.5 44 38.5 42.5 45 39 43 45 HAA7 HAA15 HAA22 Maintenance HAA37 Caution 1. Inspect the cooler at least once a week and clean it to prevent it from becoming obstructed. 2.

Series HAW Water Cooled Aftercooler 1

Cooling water (l/min) 180C Inlet air temperature Correction factor Air flow (l/min (ANR)) Model 50C 70C 100C 41.5 43 45.5 37 43 49.5 37 43 45.5 37 42 43.5 40 44 46 39.5 43 44.5 41 43 45.5 A B C A B C A B C A B C A B C A B C A B C 35.5 36 36.5 33.5 36 38 33.5 36 36.5 33.5 35 36 34.5 36 37 34.5 35.5 36 34.5 35.5 36 38.5 40 42 36 40 45.5 36 40 42.5 36 40 41 38 40 42.5 38

CQM

10.5 G1/8 Rc1/8 NPT1/8 NPT1/8 75, 100 50 33 5 to 50 46.5 29.5 40 Rc1/8 NPT1/8 NPT1/8 G1/8 8 11 G1/8 Rc1/8 NPT1/8 NPT1/8 56.5 39.5 8 11 52 50 41.4 75, 100 56.5 39.5 10 to 50 50.5 30.5 50 10.5 10.5 G1/4 Rc1/4 NPT1/4 NPT1/4 60.5 40.5 10.5 10.5 64 62 53.4 Rc1/4 NPT1/4 NPT1/4 G1/4 75, 100 60.5 40.5 HA NN NN OA Bore size (mm) 32 40 50 V W HB IA IB J KA KB L M N OB RA RB S U Z , TN, TF , TN, TF 38

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

(mm) Stroke range Bore size (mm) I J K M B D C E KA GA GB H 51 57 66 78 92 110 144 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M12 x 1.75 8 8 10 10 14 14 20 11 12 22 25 25 25 25 25 30 36 45 55 68 87 11 12 16 21 26 32 36 21 24 30 36 46 53 65 16 26 28.5 34.5 40 46.5 54 20 21 35 40 45 50 50 29 33 38 46 55 66 86 39 43 49 59 71 82 106 20 25 32 40 50 63 80 12.5 18 19.5 23.5 28 34.5 36 Up

30

38 38 44.5 44.5 8 9 9 13 13 13 15 15 0.5 0.5 0.5 0.75 0.75 0.75 1 1 300 800 800 1250 1250 1250 3100 3100 0.03 0.05 0.05 0.11 0.11 0.11 0.22 0.22 JC20-8-100 JC25-10-150 JC32-10-100 JC40-12-125 JC40-12-150 JC40-12-175 JC50-16-150 JC63-16-200 8 10 10 12 12 12 16 16 1 1.5 1 1.25 1.5 1.75 1.5 2 D-X Technical Data 1139 JC Series Dimensions of Accessories Rod end nut (mm) d: Thread nominal size

PF-OMM0004_C

P2dH n2dH P2dL n2dL P2AH n2AH P2AL n2AL P2L/n2L P2H/n2H H2 (38 ) tnL/tPL tnH/tPH Ht (40 ) P_2/n_2 H_2 (38 ) tn/tP H_t (40 ) (39 ) 4. [F 2] OUT2 -36No.PF-OMM0004-D 1. [F 2] [oUt2] OUT2 [-] 2. ON-OFF -37No.PF-OMM0004-D 3. a. ([n_2]) 4. [F 2] OUT2 b. ([n2L]) [P2H] or [n2H] ([n2H]) 4. [F 2] OUT2 -38No.PF-OMM0004-D c.

LV50-OMQ0002

38) P1dH/n1dH (Page 39) 4 Select display color [F 2] Setting of OUT2 complete. -36No.LV50***-OMQ0002-G 1.Selection of output mode Press the or button in function selection mode to display [F 2] on the main screen.

LFE-OMY0008

Add/dEC P1AH/n2AH P1dH/n1dH (39 ) P2L/n2L P2H/n2H/H2 (38 ) P_2/n_2/H_2 (38 ) 4. 4. 4. 4. [F 2] OUT2 36 No.LFE*-OMY0008 1. 1. 1. 1. [F 2] [oUt2] OUT2 [-] 2. 2. 2. 2. (ON-OFF ) 37 No.LFE*-OMY0008 3. 3. 3. 3. a. ([n_2]) 4. 4. 4. 4. [F 2] OUT2 b. ([n2L]) [P2H] or [n2H] ([n2H]) 4. 4. 4. 4. [F 2] OUT2 38 No.LFE*-OMY0008 c. / Add/dEC OUT1 (31 ) ( [n2AH]) ( [n2dH]) c.(32 ) 4. 4. 4. 4.

LEF-OM002xx

Electric actuators / Common precautions . 35 5.1 Design and selection . 35 5.2 Mounting . 36 5.3 Handling . 36 5.4 Operating environment. 37 5.5 Maintenance . 38 5.6 Precautions for actuator with lock . 38 6.

LEF-OM006xx

e. f. -37- 6.5 (LEFBLEFS -(A) (-(B)) A B LEF16 M2.5x5 LEF16 M2.5x16 LEF25 M3x6 LEF25 M3x20 LEF32 M3x6 LEF32 M4x30 LEFS40 M3x6 LEFS40 M4x35 -38- 7. No. 1) 1 / /P30 4.

Series CQ2

Note 1) 36 2 x 4-M22 x 2.5 thread depth 38 109 + Stroke 17 M24 x 3 effective thread depth 33 126 + Stroke 182 226 Width across flats 55 Note 1) 2 x 4-M22 x 2.5 threads through for strokes of 20mm or less.