Slider Type Ball Screw Drive/11-LEFS Series

Select the graphs for horizontal of the LEFS40 on page 51. 3. Lx = 250 mm, Ly = 180 mm, Lz = 1000 mm 4.

C95Series

IIIB OA DB IOL lou DC OX iDE .1 00 DS OH Z ODHIl ": ~ 46 , 31 1 21 18 5 3a , 2' 1 51 l a.5 6.6 If 7 32 1184 lO ' ;~ 52 35 ,24 I 22 15.5 41 21 i 54 16.5 6.6 11 9 ' 36 l a, J:!'

Cylinder

II NN I Rod end without '~uto switch illG i ;:xI I ~ 2.FC thread Bore size S z I With 'al:lw switch I wi (mm) 30 51 I 5st 2051 1551 I 20st ~ ~ H 5" 10" 10 st 1 15 51 i 30" P I 6 30.5 35.5 40.5 45.5 3 47.5 52.5 57.5 62.5 18.5 20 , 22. 10 30.5 35.5 40.5 1 45.5 65.5 55.5 1 3 i 50.5 55.5 1 60.5 ;:5:5 1 21 f 30.5 15 35.5 40.5 145.5 26.5 55.5 1 4 54.5 59.5 I 64.5 69.5 79.5 1 23 ~F .Ot ~ .

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

13 15 25 24 HA 17 24 30 36 41 52 62 80 92 G 3 4 5 6 6 7 7 8.5 8.5 HT 10.5 14 17 24 23.5 29 36 45 51 J x E M4 x 0.7 x 6 M4 x 0.7 x 6 M5 x 0.8 x 7 M6 x 1 x 8 M6 x 1 x 8 M8 x 1.25 x 10 M8 x 1.25 x 10 M10 x 1.5 x 15 M10 x 1.5 x 15 B 6.5 8 9.5 9.5 11 11 14 14 GP 20 27 33 39 44 55 65 83 95 HB 10.5 14 17 21 23.5 29 36 45 51 C 3.2 4.2 5.2 5.2 6.5 6.5 8.2 8.2 GW 18.5 25.5 31.5 37.5 42.5 53.5 63.5

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

15.5 Stroke (mm) Auto switch operating range 10 30.5 31.5 18.5 19.5 Model Model 5 25.5 26.5 13.5 14.5 A B C D A B C D 11-/22-MXP6 5 11-/22-MXP6 3 11-/22-MXP10, 12, 16 Electrical entry from outside Electrical entry from inside Parallel electrical entry B A B B A A Solid state auto switch D-M9B, D-M9N Reed auto switch D-A93 (mm) (mm) Stroke (mm) 20 41 29 47 35 Stroke (mm) 20 45 25 51

Rotary Actuator/Vane Type

Dimensions Page 73 V Free Mount Type Rotary Actuator with Angle Adjuster/Vane Type CRBU2WU Series How to Order Page 78 Construction Page 79 Dimensions Page 80 V Simple Specials Shaft Pattern Sequencing1 -XA1 to -XA24 Page 84 Shaft Pattern Sequencing2 -XA31 to -XA58 Page 90 DV Made to Order Page 96 V Component Unit Page 99 V Angle Adjustment Setting Page 100 V Auto Switch Mounting Page 102 51

Slide Unit Series CX2/CXWM/CXWL

CXS Theoretical Output Symbol Specifications XB11 Long stroke type (N) XB13 Low speed cylinder (5 to 50 mm/s) DOperating pressure (MPa) Model Rod size (mm) Piston area (mm 2) X146 Hollow piston rod 0.9 0.8 0.7 0.6 0.5 0.4 0.3 0.2 X138 Adjustable stroke -X CX2N10 CX215 CX225 91 81 71 61 51 40 30 6 101 20 X168 CX helical insert thread 186 166 145 124 104 83 62 8 207 41 X169 Individual -X 2

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

Stroke Range Bore size (mm) Stroke range (mm) 10 51 to 299 15 51 to 499 25 101 to 599 CY1F XB10 Bore size Piping thread type Piping direction Stroke Auto switch Symbol Adjustment bolt symbol (Example) CY1F10R237ALA93XB10 Symbol 2 Long Stroke -XB11 Available with long strokes exceeding the standard strokes. The stroke can be set in 1 mm increments.

Aluminum High Vacuum Angle Valve

type of heater.For further details, refer to mounting positions under Replacement Heaters on page 465. 423 B XLC/XLCV Series Dimensions XLCV/With solenoid valve R N P In case of double solenoid valve Port R (Exhaust port) Q K L M Port P (Pressure port) In case of single solenoid valve (mm) P K L M N Q R Model XLCV-16 XLCV-25 XLCV-40 36 14.3 9.2 6.4 3.5 2.7 17.3 41 15.8 9.2 6.4 3.5 2.7 15.8 51

High Vacuum Angle Valve

details, refer to mounting positions under Replacement Heaters on page 465. 439 B XLG/XLGV Series Dimensions XLGV/With solenoid valve R N P Port R In case of double solenoid valve (Exhaust port) Q K M L Port P (Pressure port) In case of single solenoid valve (mm) N K L M P Q R Model XLGV-16 XLGV-25 XLGV-40 6.4 14.3 9.2 3.5 2.7 17.3 36 6.4 15.8 9.2 3.5 2.7 15.8 41 6.4 29 9.2 3.5 2.7 2.6 51

Ejector Valve Unit Series ZYY/ZYX

Silencer (AN203-KM81 pc) 51 26 16 2. Mounting bolt nut (M2 x 0.4 x 254 pcs.) 1095 Series ZYY/ZYX Ejector Valve Dimensions ZYX3L-S1-EC-MN Silencer Vacuum switch Ejector unit V Release flow rate adjusting needle Supply/Release valve P1 Circuit diagram 6.8 7.4 85 Accessory (packed together) 1. Silencer (AN203-KM81 pc) 51 26 16 2.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

Stroke Range Bore size (mm) Stroke range (mm) 10 51 to 299 15 51 to 499 25 101 to 599 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CY1F XB10 Bore size Piping thread type Piping direction Stroke Auto switch Symbol Adjustment bolt symbol (Example) CY1F10R237ALA93XB10

PROFINET Compatible Fieldbus System

(for M12 connector socket) For unused branch connector (OUT). 1: Refer to page 12 for wiring. 2: Refer to page 51 for display -46No.EX-OMT0009 Mounting and Installation Installation Refer to the drawing below. NOTE Tighten the screws while holding the SI unit and the supply/exhaust block assembly so that there is no gap between them.

EXxx-OMY0004

Specifications . 51 10.3. Wiring . 53 10.4. Safe digital I/O Safe digital inputs . 53 10.5. Safe digital I/O Safe power supply (outputs). 54 10.6. Safe parameter values . 54 10.7. Process data for valves . 59 10.8. Output status unit . 59 10.9. LED indicators . 61 10.10. Production label . 65 2 No.EX##-OMY0004 10.11. DIP Switches . 65 10.12. Block diagram . 68 11.

Sensor Monitor

[F90] Setting of all functions completed : Setting of each function Every time the button is pressed, the display moves to the next function in order of "Setting of each function" on page 51. Set by using the and buttons.

Digital pressure switch for energy-saving control ejector

Specifications 51 -1No.TQ0010298-OM003-A Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

Digital Flow Switch

Default settings 28 Function Setting [Function selection mode] 28 Default settings 28 F0 Reference condition Unit selection function 29 F1 Setting of OUT1 31 F2 Setting of OUT2 39 F3 Response time 44 F10 Display mode 45 F13 Reversed display mode 46 F20 External input 47 F22 Setting of analogue output 48 F30 Accumulated value hold 49 F31 Orientation correction function 50 F80 Display OFF mode 51

PFxx-OMO0004CN

No.PF-OMO0004CN-E // PFMB7201 2 10 13 14 16 16 19 21 [] 25 OU1OUT2 {3 ] 26 28 [] 28 28 F0 29 F1 OUT1 31 F2 OUT2 39 F3 44 F10 45 F13 46 F20 47 F22 48 F30 49 F31 50 F80 OFF 51 F81 52 F90 53 F98 55 F99 56 57 61 62 64 65 65 68 71 -1No.PF-OMO0004CN-E (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic

PF-OMM0004_C

No.PF-OMM0004-D / / PF3W7## SMC 2 11 13 14 16 17 19 21 24 26 26 F1 OUT1 60 F2 OUT2 36 F3 42 F10 43 F20 47 F22 48 F30 50 F80 51 F81 52 F82 53 F90 54 F98 55 F99 56 57 61 61 65 65 71 79 81 88 -1No.PF-OMM0004-D (ISO/IEC) (JIS) 1 2 1) ISO 4414:Pneumatic fluid power -General rules relating to systems.

Digital Flow Switch (Remote type monitor unit)

Installation 15 Installation 15 Wiring 16 Flow Setting 21 Function Setting 24 Default settings 25 F0 Selection of sensor 26 F1 Setting of OUT1 27 F2 Setting of OUT2 35 F3 Response time setting 41 F10 Selection of sub screen 42 F20 Setting of external input 46 F22 Setting of analogue output 47 F30 Storing of accumulated flow 49 F80 Setting of power saving mode 50 F81 Setting of security code 51