42

TURN COM VQ4000 VQ5000 LOCK Caution Terminal block marking Model A COM B T Do not apply excessive torque when turning the locking type manual override. (0.1 Nm or less) VQ 4 5 10 0 1 A side COM VQ 4 5 20 0 1 A side COM B side VQ 4 5 3 4 5 6 0 0 1 A side COM B side Note 1) There is no polarity. It can also be used as COM.

CL

0 !1 !2 !3 !4 !5 !6 !7 !8 !

0.5

0 0 200 400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 0 0 0 0 Installation distance [mm] 0 200 400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 Installation distance [mm] 0 200 400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 Installation distance [mm] Installation distance [mm] Installation distance [mm] Installation distance

Table of Contents

0 40 80 120 160 20 40 60 80 0 Outlet air flow rate (l/min (ANR)) Outlet air flow rate (l/min (ANR)) IDG20 (Type A products group) IDG30 (Type B products group) P1 = 0.3 MPa P1 = 0.3 MPa 0 0 Outlet air atmospheric pressure dew point (C) Outlet air atmospheric pressure dew point (C) P1 = 0.5 MPa 10 P1 = 0.5 MPa 10 P1 = 0.7 MPa 20 HA 20 P1 = 0.7 MPa 30 AT 30 40 ID 50 0 40 100 200 300 0 100

LEF-OM002xx

Transfer 12 50 B B B 20 A 10 A A 40 H W(kg) W(kg) H 8 W(kg) 15 30 6 10 20 4 5 2 10 0 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 V (mm/s) V (mm/s) V(mm/s) LEFS16 LEFS25 LEFS32 50 12 B B 20 B A 10 A 40 H H A W(kg) W(kg) W(kg) 15 8 30 6 10 20 4 5 10 2 0 0 0 0 100 200 300 400 500 600 0 100 200 300 400 500 600 0 100 200 300 400 500 600 V(mm/s) V (mm/

JXCx-OMT0028CN

0 1 1 0 46 - (2)READY 1(ON) (3)ALARM 1 1(ON)0(OFF) (4) 0(OFF)1(ON) (5) 1 1(ON)0(OFF) (CN2SW)ON (GW [OUT Data]Address.250, bit7)ON (6)() ID ON(1)ID OFF(0) (GW [OUT Data] Address.251 Address.252) bit 7 6 5 4 3 2 1 0 Address 251 ID8 ID7 ID6 ID5 ID4 ID3 ID2 ID1 252 ID12 ID11 ID10 ID9 (7) (LEC)ID ID 2 bit 3 2 1 0 ID 1 0 0 0 1 2 0 0 1 0 3 0 0 1 1 11 1 0 1 1 12 1 1 0 0 47 - 11.4 (OUT

Air Cylinder

4 0.5 5.5 25 M6 x 0.75 10 +0.08 0 5 1 6.5 32 M8 x 1.0 12 +0.08 0 5.5 1 7.5 40 M10 x 1.25 14 +0.08 0 6 1.25 8.5 50 M12 x 1.25 16 +0.08 0 7.5 2 10 63 M14 x 1.5 18 +0.08 0 11.5 3 14.5 80 100 D-X * Cylinder sizes 80 and 100 do not have trunnion mounting female thread on the width across flats NA.

MTS

0 0 28 33 (45) 18 28 (35) 5 (17) D-A9, D-A9V 0 (15) 0 0 32 32 (47) 22 22 (37) 0 (15) 16 D-M9, D-M9V 10 (17) 0 0 32 37 (49) 22 32 (39) 5 (17) D-F9W, D-F9WV 10 (17) 0 0 32 37 (49) 22 32 (39) 5 (17) D-A9, D-A9V 0 (15) 0 0 38 38 (53) 26 26 (41) 0 (15) 20 D-M9, D-M9V 10 (17) 0 0 38 38 (55) 26 36 (43) 0 (17) D-F9W, D-F9WV 10 (17) 0 0 38 38 (55) 26 36 (43) 0 (17) D-A9, D-A9V 0 (15) 0 0 40 40 (55

240

[mm] 120 120 120 120 X 80 80 80 80 Me m 40 40 40 40 0 0.2 0.4 0.6 0.8 1 0 0 0.0 0.4 0.8 1.2 1.6 2.0 0 0.0 0.4 0.8 1.2 1.6 2.0 0 0 0.2 0.4 0.6 0.8 1 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 200 200 200 200 Me 150 150 150 150 L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 100 100 100 100 Wall Y L5 50 50 50 50 0 0.2 0.4 0.6 0.8 1 0 0 0 0 0 0.2 0.4 0.6 0.8 1 0.0 0.4 0.8 1.2 1.6 2.0 Work

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

0 +4 0 9 0 +4 0 e v 0 Non-locking push style is standard.

Multi-Axis Step Motor Controller

3000 3000 0 85.0 50 100.0 0 0 0.5 Axis 2 INC 500 200.00 3000 3000 0 85.0 50 100.0 0 0 0.5 1 Axis 3 INC 500 200.00 3000 3000 0 85.0 50 100.0 0 0 0.5 > > > > > > > > > > > > > > Axis 1 SYN-I 500 100.00 3000 3000 0 0 0 100.0 0 0 0.5 Axis 2 SYN-I 0 0.00 0 0 0 0 0 100.0 0 0 0.5 2046 Axis 3 SYN-I 0 0.00 0 0 0 0 0 100.0 0 0 0.5 Axis 1 CIR-R 500 0.00 3000 3000 0 0 0 100.0 0 0 0.5 Axis 2 CIR-R 0 50.00

CM2

0) 0(0) 0.5(0) 5.5 A 0.5(0) 0.5(0) 1.5(0) 6.5 B 3(1) 3(1) 4(2) 9 A 4(2) 4(2) 5(3) 10 Hs 69.5 72 75.5 79.5 B 6(4) 6(4) 7(5) 12 Hs 60 62.5 66 70 A 7(5) 7(5) 8(6) 13 Hs 25 27.5 31 35 B 0(0) 0(0) 1(0) 6 Hs 22.5 25 28.5 32.5 A 1(0) 1(0) 2(0) 7 B A B 1.5(0) 1.5(0) 4.5(2.5) 3.5(1.5) 2.5(0.5) 4.5(2.5) 3.5(1.5) 2.5(0.5) 5.5(3.5) 10.5 4.5(2.5) 9.5 3.5(1.5) 8.5 2.5(0.5) 7.5 ( ): With air cushion 1.4

AZ1000

No pressure gauge (Connections: 1/4 inch face seal male) 0 Porting Configuration V3 L 1 H 2 4 10 40 -30 in.Hg to 30 psig -30 in.Hg to 60 psig -30 in.Hg to 100 psig -30 in.Hg to 160 psig 0 to 200 psig 0 to 400 psig 0 to 1000 psig 0 to 4000 psig -0.1 to 0.2 MPa -0.1 to 0.4 MPa -0.1 to 0.7 MPa -0.1 to 1.1 MPa 0 to 1.4 MPa 0 to 3 MPa 0 to 7 MPa 0 to 28 MPa r r e Sample Order Number Port w q w

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Stroke adjusting range (One side) 0 to 10 mm 0 to 15 mm [Built-in adjusting bolts (2 pcs.)]

25

F .G. + 24 V Brown (2 pcs.) + 24 VDC + + + 24 V Power supply 24 VDC 0 V 0 V 0 V DC/DC Blue (2 pcs.) 0 V F .G.

Table of Contents

0 !1 !2 !

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

0 +4 0 9 0 +4 0 e v 0 Non-locking push style is standard.

JXCx-OMT0061CN

0 0 0 100 0 0 0.1 () 1No.1(IN0ON) / 2DRIVEON (2)(5)(10)(13) No.1 DRIVE (1) No.

Electric Actuator with Integrated Guide

(kg) 300 L2 200 Mer a=1000 a=2000 a=3000 L2 (mm) Rolling Yawing m 100 L2 Mer 50 40 30 20 10 0 m Transfer load m (kg) 300 200 a=1000 a=2000 a=3000 L3 (mm) L3 100 m Mey a 50 40 30 20 10 0 Transfer load m (kg) Refer to page 71 for deflection data. 42 46 Non-standard Motor/Horizontal Mount Specification Series LTF8 Dimensions/LTF8FPH(X10) Scale: 13% thread depth 9 4-M6 x 1 1.

REA/REB

7 @6 #1 #0 @8 !0 @9 !1 #2 i !6 @3 @1 @5 @4 @0 REAS10 Parts list Parts list No. Description No.