Manifold Type: Body Ported, Valve Stations: 3 Stations, A, B Port: G, CE Marked: CE Marked

Manifold Type: Body Ported, Valve Stations: 9 Stations, A, B Port: G, CE Marked: CE Marked

Type: Base for Manifolds, Type: 20 type manifold, Number of Stations: 4, Port pipe connection port diameter: -, Specification: CE-compliant product, Thread standard: G, Option: Without Options

Manifold Type: Body Ported, Valve Stations: 10 Stations, A, B Port: G, CE Marked: Q (CE Marked)

Manifold Type: Body Ported, Valve Stations: 8 Stations, A, B Port: G, CE Marked: Q (CE Marked)

Manifold Type: Body Ported, Valve Stations: 7 Stations, A, B Port: G, CE Marked: Q (CE Marked)

Manifold Type: Body Ported, Valve Stations: 3 Stations, A, B Port: G, CE Marked: Q (CE Marked)

Manifold Type: Body Ported, Valve Stations: 4 Stations, A, B Port: G, CE Marked: Q (CE Marked)

Manifold Type: Body Ported, Valve Stations: 5 Stations, A, B Port: G, CE Marked: Q (CE Marked)

Manifold Type: Body Ported, Valve Stations: 6 Stations, A, B Port: G, CE Marked: Q (CE Marked)

Manifold Type: Body Ported, Valve Stations: 16 Stations, A, B Port: G, CE Marked: Q (CE Marked)

Stations: 14, Thread: G

Stations: 05, Thread: G

Soft Start-up Valve

)-A AVA5000-(F,N)06~10(B,G,S)(-R,Z)-A AVL2000-(F,N)02(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A AVL3000-(F,N)02(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A AVL4000-(F,N)02(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A AVL5000-(F,N)06~10(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A Contents Page 1.

Vacuum System Peripherals:

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03

Fieldbus System

) 16 02 08 02 16 stations 2 stations 8 stations 2 stations CC-Link M12 Specified layout Note 2) (Available up to 32 solenoids) Specified layout Note 2) (Available up to 16 solenoids) EtherCAT M12 24 16 24 stations 16 stations Note 1) Double wiring: 2-position single, double, 3-position and 4-position valves can be used on all manifold stations.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

-02 ASP ASN AQ ASV AK VCHC ASS ASR ASQ Component Parts No.

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Note 2) 52-SY9000 has no bracket. 5 7 9 52-SY5000 52-SY7000 52-SY9000 Thread type Type of actuation Nil F N T Rc G NPT NPTF 2-position single 2-position double 3-position closed centre 3-position exhaust centre 3-position pressure centre 1 2 3 4 5 A, B port size (Body ported type) Piping type Port size Applicable series Symbol 01 C4 C6 C8 N3 N7 N9 02 C8 C10 N9 N11 02 03 C8 C10 C12 N9 N11

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size 12 10 8 6 4 3.2 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS131FG-M5 AS121FG-M5 M50.8 6, 10, 16, 20 AS231FG-01 AS221FG-01 20, 25, 32 R 1/8 AS231FG-02 AS221FG-02 20, 25, 32, 40 R 1/4 AS331FG-02 AS321FG-02 40, 50, 63 R 1/4 AS331FG-03 AS321FG-03 40, 50, 63 R 3/8 AS431FG-04 AS421FG-04 63, 80, 100 R 1/2

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

Elbow type Meter-out AS3201F-02 Meter-out AS3311F-02 Meter-out AS3301F-02 Component Parts Component Parts No.