Fluoropolymer Piping Equipment

E E H L L M Min. port size W M H LQ3U1A 1/8" 10 9 11 46.5 44.5 14 2 10 LQ3U2A 1/4" 17 16 16 57 55 20 4 14 LQ3U3A 3/8" 22.5 19.5 21 79 73 25 6.4 18 LQ3U4A 1/2" 24.5 22.5 24 88 84 29 9.5 22 LQ3U5A 3/4" 26.5 24 32 103 98 37 16 30 LQ3U6A 1" 30 26 41 122 113.5 49 22 36 LQ3U7A 1 1/4" 35 35 50 142 142 64 28.5 46 LQ3U8A 1 1/2" 39 60 152 77 36 55 Class 7, 8 924 A Union Reducing LQ3 Series How to

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

depth 10 5 HA GA 4H9 ( ) depth 4 +0.030 0 4H9 ( ) depth 4 +0.030 0 B-B A-A (mm) Model F 28 28 38 34 34 36 36 N 4 4 4 6 6 8 10 G 18 18 20 9 23 12 H 32 32 40 39 36 36 NN 2 2 2 3 3 4 5 GA 18 18 20 38 48 59 84 HA 32 32 40 39 39 72 72 I 12 12 14 15 13 17 17 J 34 34 42 58 70 110 135 K 26.5 36.5 46.5 56.5 66.5 91.5 116.5 KA 117.5 142.5 NA 4 4 4 4 4 8 8 M 67 67 77 94 104 148 173 Z 66 66 76 93 103

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

( ) depth 3.5 +0.030 0 2 x M5 x 0.8 thread depth 8 N 35 1 x F 2 4 x M4 x 0.7 thread depth 6 4H9 ( ) depth 3.5 +0.030 0 27 M 0.5 30 32 Z ZZ (NN 1) x H G 8.5 18.5 8.5 18.5 H B A 4.2 8.5 9 9 20 1 4H9 ( ) depth 3.5 +0.030 0 5 B A NN x M5 x 0.8 thread depth 10 4H9 ( ) depth 3.5 +0.030 0 HA GA Section AA Section BB (mm) Model F 35 35 35 50 35 55 65 ZZ 99 99 99 111 131 177 231 M 71 71 71 83 103

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

A + Stroke L Rod end male thread H1 Rod end nut C1 X L1 Rod End Male Thread (mm) Bore size (mm) 63 Auto switch D-A9, F9 C1 X H1 L1 26 28.5 M18 x 1.5 33.5 80 32.5 35.5 M22 x 1.5 43.5 100 32.5 35.5 M26 x 1.5 43.5 (mm) Without auto switchWith auto switch Bore size (mm) Stroke range (mm) C D E F H I J K L M N O P Q S U Z A B A B 46 10 to 50 54 14 depth 10.5 63 64 56 15 20 77 10.5 M10 x 1.5 103

Rotary Actuator/Vane Type

When tightening the screw, take care that the auto switch does not tilt. 103 CRBm2 Series Auto Switch Mounting: Size 10, 15 (D-S/T99(V)m, S9P(V), 97/93A, 90/90A) External view and descriptions of auto switch unit This following shows the external view and typical descriptions of the auto switch unit.

CV/MVGQ

M22 x 1.5 M26 x 1.5 60 70 85 102 116 32 40 40 52 52 27 30 31 37 40 10 10 10 14 14 84 90 98 116 126 65 75 90 110 130 8 11 11 13 16 Without rod boot H 51 58 58 71 72 Bore size (mm) With rod boot e 43 52 52 65 65 TDe8 TI TQ TT TX TY TZ W I Q l 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke f 11.2 11.2 11.2 12.5 14.0 h 59 66 66 80 81 ZZ 229 239 247 280 292 Z 101 111 115 138 144 Z 93 103

Slide Unit Series CX2/CXWM/CXWL

ZZ (mm) With adjusting bolt ZZ 132 182 232 282 With shock absorber ZZ 176 226 276 326 Z S SS Model F G L P Q R CX2N10-25 CX2N10-50 CX2N10-75 CX2N10-100 94 144 194 244 9.5 20 25 25 19.5 30 35 35 38 63 88 113 48 52 67 92 103 153 203 253 28 32 47 72 27 52 77 102 67 92 117 142 Housing mounting style with auto switch CDBX2N10 Stroke Stroke Plate mounting style with auto switch CDPX2N10 Magnet

New

Fluid 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 101 102 103 104 105 106 107 108 109 Pa 1) Type of fluid Vacuum piping direction: if the system uses a vacuum pump, we ask that you install the vacuum pump on the secondary side. Also, install a filter on the primary side, and be careful that no foreign material is picked up.

XM, XY

XMA series with KF (NW) flange A (mm) Model Weight (kg) Conductance (L/s) B (mm) CYV XMA-16 40 103 0.33 5 XMA-25 XMA-40 XMA-50 50 113 0.61 14 B 65 158 1.40 45 70 170 2.00 80 A 160 XMA-63 XMA-80 88 196 3.60 90 235 6.20 200 A : Common to all series. 479 Series Variations Operating pressure Flange size Shaft seal system Models Valve type Angle type In-line type Options Application Switch Indicator

MY1

115 175 200 G 23.5 25 60 70 LW 80 96 112 140 GB 37 39 71.5 79.5 HG 40 51 66 85 H 94 116 150 190 JJ M6 x 1 M8 x 1.25 J M12 x 1.75 M14 x 2 Model MY1B 50 MY1B 63 MY1B 80 MY1B100 PB 50 60 65 85 PE 240 280 M 14 16 20 25 PC 100 115 PF 22 42 PA 120 140 80 120 PD 8.5 9.5 N 47 50 85 95 Q 384 440 660 760 NC 38 51 65 85 QW 76 92 90 120 NE 76.5 100 124 157 Z 400 460 690 800 NG 51 59 82 103

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

A + Stroke L Rod end male thread H1 Rod end nut C1 X L1 Rod End Male Thread (mm) Bore size (mm) 63 Auto switch D-A9, F9 C1 X H1 L1 26 28.5 M18 x 1.5 33.5 80 32.5 35.5 M22 x 1.5 43.5 100 32.5 35.5 M26 x 1.5 43.5 (mm) Without auto switchWith auto switch Bore size (mm) Stroke range (mm) C D E F H I J K L M N O P Q S U Z A B A B 46 10 to 50 54 14 depth 10.5 63 64 56 15 20 77 10.5 M10 x 1.5 103

CV/MVGQ

1.5 60 70 85 102 116 32 40 40 52 52 27 30 31 37 40 10 10 10 14 14 84 90 98 116 126 65 75 90 110 130 8 11 11 13 16 Without rod boot H 51 58 58 71 72 Bore size (mm) 40 50 63 80 100 With rod boot e 43 52 52 65 65 TDe8 TI TQ TT TX TY TZ W I Q l 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke f 11.2 11.2 11.2 12.5 14.0 h 59 66 66 80 81 ZZ 229 239 247 280 292 Z 101 111 115 138 144 Z 93 103

RSH/RS1H

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com L CZ CT CT Y V U Conveyor lower limit position CD T R Stroke H B 2-P D QA FT A GA Rear pressure port Front pressure port QB 2-Plug WB GB E W (Width across corners I) (mm) Width across corners I 85 103 132 GA 16 24 24 H 128 144.5 171.5 FT 20 25 25 FX

CJ2

st 76 to 100 st 101 to 125 st 126 to 150 st 10 16 3.2 6.5 8 8 28 28 8 10 15 15 12 18.3 14 20 12 18.3 4 5 M4 x 0.7 12.5 18.5 5 8 84.5 86.5 92 95 104 107 116 119 125 149 167 179 3.3 5 48.5 48.5 56 57 68 69 80 81 87 111 129 141 M5 x 0.8 12.5 23.5 T-bracket Dimensions ZZ Bore size (mm) Bore size (mm) 10 16 TX TC TH TV TW TY 126 to 150 st 193 10 16 5 to 15 st 95.5 100.5 16 to 30 st 103

MB

58 52 92.5 48.5 45 51.5 45 45 100 55 55 62 59.5 55.5 113.5 65.5 60 103 56.5 53.5 60.5 53.5 53.5 C85 125 66.5 66.5 71.5 70.5 67.5 125 76.5 72 115 68.5 65 72 65 65 C95 Operating Range CP95 (mm) Auto switch type Bore size 32 40 50 63 80 100 125 NCM D-Z7/Z80 13 10 17 7.5 8.5 7.5 9.5 9.5 10.5 9 9 10 11 11 11 NCA D-A5/A6 D-A59W D-A3/A44 13 13 13 14 14 15 D9 9 10 11 11 11 10 D-Y59/Y69 D-Y7P

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 3 2-5.1 8 6 22.5 22.5 (mm) 4-M5 x 0.8 thread depth 4.5 W Z ZZ SS S Model CXSW6-10 CXSW6-20 CXSW6-30 CXSW6-40 CXSW6-50 (Piping port) (Opposite side: Same) 66 103 46 40 10 (Z) (13) (13) 76 123 56 50 20 86 143 66 60 30 96 163 76 70 40 106 183 86 80 50

MNB

92.5 52.5 46.5 55 46.5 80 CLQ 60.5 65.5 53.5 60 53.5 56.5 53.5 55.5 113.5 103 59.5 55 62 55 100 MLGP Operating Range RLQ Auto switch model Bore size (mm) 32 40 50 63 80 100 7.5 MLU D-Z7/Z80 10.5 11 15 11 9.5 11 14 11 9.5 11 14 11 7.5 10 13 10 8.5 9 13 9 ML1C D-A5/A6 9 D-A59W 13 9 DD-A3/A44 D-Y59/Y69 D-Y7P/Y7V D-Y7W/Y7WV 5.5 6.5 7.5 7 5.5 5.5 -X D-Y7BAL 5 4.5 4 3.5 3.5 3.5 20D-F5/J5 D-F5W

Series VT 3port, direct operated poppet valves are compact in size, yet provide large flow capacity, and low power consumption.  The series is suitable for use in vacuum applications.  The VT valve is a single valve with 6 functions (universal porting type) such as N.C. valve, N.O. valve, divider valve, selector valve, etc.  The manifold style valve, series VO, can be easily converted from

Stations: 3 Stations, Piping: 1 (P Common, R Common, A Side), Thread: N (NPT), Option: A (Mounting Adaptor), CE/UKCA Compliant: Q (CE/UKCA-Compliant)

Stations: 2 Stations, Piping: 1 (P Common, R Common, A Side), Thread: N (NPT), Option: A (Mounting Adaptor), CE/UKCA Compliant: Q (CE/UKCA-Compliant)