SMC Corporation of America
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ZFC200-08 No. 0.0001 1 10 100 ZFC200, 201 ZFC100, 101 S14 S10 O-ring Accessory BP-17S BP-16S Bracket Flow rate l/min (ANR) O-rings are already installed in spare elements. A bracket is included with the product. 4 Air Suction Filter Series ZFC In-line Type with One-touch Fittings Dimensions (mm) 1in=25.4mm Applicable tubing O.D.

Blue F-2815-201-B80-NORYL F-2815-201-B85-NORYL .025 Black F-2815-251-B80-NORYL F-2815-251-B85-NORYL .030 Beige F-2815-301-B80-NORYL F-2815-301-B85-NORYL .035 Dk.

Dimensions Page 182 Step Motor (Servo/24 VDC) Electric Actuator/Low Profile Slider Type: Cam Follower Guide Type LEMC Series How to Order Page 186 Specifications Page 188 Construction Page 189 Dimensions Page 190 Step Motor (Servo/24 VDC) Electric Actuator/Low Profile Slider Type: Linear Guide Type LEMH/HT Series How to Order Page 196 Specifications Page 198 Construction Page 199 Dimensions Page 201

[mm] Size Stroke range [mm] MA MC MD MH ML MO MR XA XB 15 to 39 24 32 50 M5 x 0.8 6.5 4 5 40 to 100 42 41 101 to 124 75 125 to 200 59 49.5 201 to 400 76 58 25 20 29 20 to 39 22 36 50 M6 x 1 8.5 5 6 40 to 100 36 43 101 to 124 80 125 to 200 53 51.5 201 to 500 70 60 32 25 30 50 to 70 24 50 44 65 M8 x 1.25 10 6 7 75 to 120 45 60.5 125 to 200 58 67 205 to 500 86 81 100 505 to 800 135 63 38 857

fluid Compatibility Standard mineral hydraulic fluid Compatible W/O hydraulic fluid Compatible O/W hydraulic fluid Compatible Water/Glycol hydraulic fluid Phosphate hydraulic fluid Not compatible Consult with SMC. 265 A CHKD Series Theoretical Output Unit: N Operating pressure (MPa) Bore size (mm) Rod size (mm) Operating direction Piston area (mm2) 10 3.5 7 314 3140 1099 2198 OUT 20 12 201

A B 16 8 16 8 G (NN 1) x H H B-B A-A (mm) Model F 28 28 38 34 34 36 36 N 4 4 4 6 6 8 10 G 18 18 20 9 23 12 H 32 32 40 39 36 36 NN 2 2 2 3 3 4 5 GA 18 18 20 38 48 59 84 HA 32 32 40 39 39 72 72 I 12 12 14 15 13 17 17 J 34 34 42 58 70 110 135 K 26.5 36.5 46.5 56.5 66.5 91.5 116.5 KA 117.5 142.5 NA 4 4 4 4 4 8 8 M 67 67 77 94 104 148 173 Z 66 66 76 93 103 147 172 ZZ 95 95 105 122 132 176 201

Theoretical Output (N) Operating pressure (MPa) Piston area (mm 2) Model Rod size (mm) 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 CXWM106 101 20 30 40 51 61 71 81 91 CXWM1610 245 49 74 98 123 147 172 196 221 CXWM2012 402 80 121 161 201 241 281 322 362 CXWM2514 597 119 179 239 299 358 418 478 537 CXWM32Made to Order Specifications (For details, refer to page 8-31-1.) 20 980 196 294 392 490 588 686 784

OUT 113 23 34 45 57 68 79 90 102 113 12 6 IN 85 17 26 34 43 51 60 68 77 85 OUT 201 40 60 80 101 121 141 161 181 201 Symbol Specifications 16 8 IN 151 30 45 60 76 91 106 121 136 151 -XA Change of rod end shape OUT 314 63 94 126 157 188 220 251 283 314 Heat resistant cylinder (150C) -XB6 20 10 Low speed cylinder (10 to 50 mm/s) -XB9 IN 236 47 71 94 118 142 165 189 212 236 Intermediate stroke

stroke (mm) Bore size (mm) Data -XC79 Machining tapped hole, drilled hole and pin hole additionally. 6, 10, 16, 20 5, 10, 15, 20, 25, 30, 40, 50, 60 Theoretical Output (N) Operating pressure (MPa) Piston area (mm2) Bore size (mm) Operating direction Rod size (mm) 0.3 0.5 0.7 19.8 14.2 8.49 28.3 OUT 6 3 14.8 10.6 6.36 21.2 IN 55.0 39.3 23.6 78.5 OUT 10 4 46.2 33.0 19.8 66.0 IN 141 101 60.3 201

Stations: 11 Stations, Piping: 1 (P Common, R Common, A Side), Thread: F [G (PF)], Option: A (Mounting Adaptor)

Stations: 6 Stations, Piping: 1 (P Common, R Common, A Side), Thread: T (NPTF), Option: A (Mounting Adaptor)

Stations: 15 Stations, Piping: 1 (P Common, R Common, A Side), Thread: T (NPTF), Option: A (Mounting Adaptor)

Stations: 16 Stations, Piping: 1 (P Common, R Common, A Side), Thread: T (NPTF), Option: A (Mounting Adaptor)

Stations: 11 Stations, Piping: P Common, R Common, A Side, Thread: F [G (PF)], Option: Mounting Adaptor, CE/UKCA Compliant: -

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

Series VT 3port, direct operated poppet valves are compact in size, yet provide large flow capacity, and low power consumption.  The series is suitable for use in vacuum applications.  The VT valve is a single valve with 6 functions (universal porting type) such as N.C. valve, N.O. valve, divider valve, selector valve, etc.  The manifold style valve, series VO, can be easily converted from