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Filtration Max. 1.0 mgf/Nm3 ( 0.8 ppm) (1)(2) Oil mist density in the outlet side IR 750 1500 3500 6000 Rated flow (/min (ANR)) (3) 1.8 2.8 3.5 6.7 VEX Weight (kg) Note 1) Compressed air density: 30 mgf/Nm3. Note 2) An element for the mist separator is included on the inlet side. Mineral grease is applied on the sliding parts inside the regulator.

93 109 5 6 62 72 31 36 5.5 6.5 28.3 33.3 2.3 2.3 30 35 43 49 61.5 74 17-4-40 5 Series VND Steam Valve: 2 Port Valve For Steam Port size 32A, 40A, 50A H (Valve open) Indicator (Option) Pilot port VC VDW VQ VX2 VX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VX3

Fluid Standard specifications Option Note) Air (Standard, Dry) Vacuum (up to 1.3 x 102 Pa) Turbine oil Carbon dioxide (CO2), Nitrogen gas (N2) Vacuum (up to 1.3 x 101 Pa)(V) Non-leak (106 Pam3/s or less) (V) Other Note) Refer to page 17-3-14 Applicable Fluids Check List for details of special fluids outside of the standard options and specifications.

Standard Stroke 2 , 3 , 4 , 5 , 6 , 8 , 1 0 2, 3, 4, 5, 6, 8, 10 5, 10, 15,20,25,30 5, 10, 15,20,25,30,40 5, 10, 15, 20,25, 30, 40 5, 10, 15,20,25,30,40 1 kg=2.2 16. Magnetic Holding Power (lbs) 1N=0.101 H 227.94 L type 140.65 Basicweight. -. -. 8.00 lb6) Additional weight.. . 0.30/1 inch !

Series VF, a five port pilot solenoid valve, offers large flow capacity in a compact size. The VF is available in many variations including three types of manual override and four types of electrical entry. Common exhaust for main valve and pilot valve is also available.VF3000 series manifold, Metric threads [Rc(PT)], Manifold type: S mount, Maximum stations: 10, Port sizes: 1/8, 1/4, Common

Series VF, a five port pilot solenoid valve, offers large flow capacity in a compact size. The VF is available in many variations including three types of manual override and four types of electrical entry. Common exhaust for main valve and pilot valve is also available.VF3000 series manifold, Metric threads [Rc(PT)], Manifold type: S mount, Maximum stations: 10, Port sizes: 1/8, 1/4, Common

Information Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN URL http://www.smcworld.com 2006 SMC Corporation All Rights Reserved 06-E533 Issued: June, 2006 D-DNP P-120 (DN) Stainless Steel Speed Controller (Elbow Type) Series ASG Flow Rate and Effective Area Material: Stainless steel 316 Model ASG22F-M5 Tubing O.D.

Size End width L: 2.0 to 2.4 [mm] End thickness W: 0.5 to 0.6 [mm] W Magnified view of the end of the screwdriver L 48 Series LECP2 Dimensions Screw mounting (LEC2-) 38 36.2 85 4.5 For body mounting 18.1 1.2 4.5 110 101 86 4.5 For body mounting CN4 I/O connector CN3 Encoder connector CN2 Motor connector CN1 Power supply connector DIN rail mounting (LEC2D-) 38 36.2 85 (11.5) SL 24.2 35 127.3

SP157X-014E P TY P.G.Information (Specialized Product ) Step motor (Servo 24 DC) Absolute Controller LECP7-XB3 Series SMC Corporation 4-14-1, SOTO-KANDA, CHIYODA-KU, 101-0021, JAPAN URL: http://www.smcworld.com Return to origin not required after power is OFF/Shorten equipment recovery time The current actuator position can be monitored even if the power of the battery is shutoff The position

Port size Fluid Air Proof pressure 1.5 MPa 1.0 MPa Max. operating pressure 0.05 to 0.85 MPa Setting pressure range 5 to 60C (No freezing) Ambient and fluid temperature Relieving type Construction 0.3 m Filtration Max. 1.0 mgf/Nm3 ( 0.8 ppm) (1)(2) Oil mist density in the outlet side 750 1500 3500 6000 Rated flow (L/min (ANR)) (3) 1.8 2.8 3.5 6.7 Weight (kg) Note 1) Compressed air density: 30

6% (Full span)NPN open collector output: Max. 30 V, 80 mA PNP open collector output: Max. 80 mAWithin ?1% (Full span)Within 0.5% (Full span)Within ?0.5% (Full span)Within 0.2% (Full span)Within ?0.12% (Full span)/C?2%F.S. 1 digitkPa Note 5) Minimum display: 10 to 50C (No condensation)IP65350 g

6% (Full span)NPN open collector output: Max. 30 V, 80 mA PNP open collector output: Max. 80 mAWithin ?1% (Full span)Within 0.5% (Full span)Within ?0.5% (Full span)Within 0.2% (Full span)Within ?0.12% (Full span)/C?2%F.S. 1 digitkPa Note 5) Minimum display: 10 to 50C (No condensation)IP65350 g

6% (Full span)NPN open collector output: Max. 30 V, 80 mA PNP open collector output: Max. 80 mAWithin ?1% (Full span)Within 0.5% (Full span)Within ?0.5% (Full span)Within 0.2% (Full span)Within ?0.12% (Full span)/C?2%F.S. 1 digitkPa Note 5) Minimum display: 10 to 50C (No condensation)IP65350 g

6% (Full span)NPN open collector output: Max. 30 V, 80 mA PNP open collector output: Max. 80 mAWithin ?1% (Full span)Within 0.5% (Full span)Within ?0.5% (Full span)Within 0.2% (Full span)Within ?0.12% (Full span)/C?2%F.S. 1 digitkPa Note 5) Minimum display: 10 to 50C (No condensation)IP65350 g

6% (Full span)NPN open collector output: Max. 30 V, 80 mA PNP open collector output: Max. 80 mAWithin ?1% (Full span)Within 0.5% (Full span)Within ?0.5% (Full span)Within 0.2% (Full span)Within ?0.12% (Full span)/C?2%F.S. 1 digitkPa Note 5) Minimum display: 10 to 50C (No condensation)IP65350 g

6% (Full span)NPN open collector output: Max. 30 V, 80 mA PNP open collector output: Max. 80 mAWithin ?1% (Full span)Within 0.5% (Full span)Within ?0.5% (Full span)Within 0.2% (Full span)Within ?0.12% (Full span)/C?2%F.S. 1 digitkPa Note 5) Minimum display: 10 to 50C (No condensation)IP65350 g

6% (Full span)NPN open collector output: Max. 30 V, 80 mA PNP open collector output: Max. 80 mAWithin ?1% (Full span)Within 0.5% (Full span)Within ?0.5% (Full span)Within 0.2% (Full span)Within ?0.12% (Full span)/C?2%F.S. 1 digitkPa Note 5) Minimum display: 10 to 50C (No condensation)IP65350 g

6% (Full span)NPN open collector output: Max. 30 V, 80 mA PNP open collector output: Max. 80 mAWithin ?1% (Full span)Within 0.5% (Full span)Within ?0.5% (Full span)Within 0.2% (Full span)Within ?0.12% (Full span)/C?2%F.S. 1 digitkPa Note 5) Minimum display: 10 to 50C (No condensation)IP65350 g

6% (Full span)NPN open collector output: Max. 30 V, 80 mA PNP open collector output: Max. 80 mAWithin ?1% (Full span)Within 0.5% (Full span)Within ?0.5% (Full span)Within 0.2% (Full span)Within ?0.12% (Full span)/C?2%F.S. 1 digitkPa Note 5) Minimum display: 10 to 50C (No condensation)IP65350 g

6% (Full span)NPN open collector output: Max. 30 V, 80 mA PNP open collector output: Max. 80 mAWithin ?1% (Full span)Within 0.5% (Full span)Within ?0.5% (Full span)Within 0.2% (Full span)Within ?0.12% (Full span)/C?2%F.S. 1 digitkPa Note 5) Minimum display: 10 to 50C (No condensation)IP65350 g