High Vacuum L Type Valve

150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1) 5 14 45 80 160 200 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Leakage Pam3/s External 1.3 x 10-11 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW) KF (NW), K (DN

XL-OMV0002

XLC-16 XLC-25 XLC-40 XLC-50-1 XLC-63-1 XLC-80-1 XLC-100-1 XLC-160-1 16 25 40 50 63 80 100 160 560(5150) -5 Pa (abs) 110 l/s 1 5 14 45 80 160 200 300 800 10 (FKM) 1.310 Pam 3/S -11 (FKM) 1.310 KF(NW) KF(NW)K(DN) SUS316LSUS304FKM() 2 MPa (G) 0.30.6 0.40.6 cm 3 3 0.5MPa 38 91 430 280 500 1000 2300 3700 M5 Rc 1/8 Rc1/4 kg 0.28 0.46 1.1 1.4 2.3 4.0 8.7 14.5 1) 2) Y-VAC2 3) 1 7 XL-OMV0002

XL-OMY0002

48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114 30 40 13 XL-OMY0002 8 X L D 25 M9N A A ( X A N1 A ) 25 40 B A 50 63 80 C P11 160 100 FKM() P8 KF (NW) D K (DN

This is a legacy product, and replaced byKQ2R03-07A, FITTING, PLUG-IN REDUCER *LQA, CONNECTORS, KQ2 FITTING, DN, KQ2 5/32, .00542 lb

Part Number Description: GASKET HOLD DN SCREWS   Product Line: V   Product Line Description: VALVE   Family Code: 220   Family Description: VK3000 SOL VALVE 4/5 PORT   Class Code: 22   Part Code: 2   Reference Code:  H   PDF Documentation: PDF   Click here to report information errorImage shown may not match exact part number

Low torque Metal seal type Rotary joint

Printed in Japan. 1st printing June, 2002 D-MITAKA P-80 (DN) This catalog is printed on recycled paper with concern for the global environment.

Flange Size: 100, Flange Type: D [K(DN)], Port Direction: Flange Side, Temperature: 5 to 60°C, Version: 1 (Legacy)

Valve Type: XLAV (Normally Closed, Bellows Seal), Flange Size: 63, Flange Type: D [K (DN)], Valve Direction: F (w/Indicator, Left Flange Surface), Version: None, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 5 (24 VDC), Electrical Entry: L (L Type Plug Connector), Surge Suppressor: Z (w/Light & Surge Voltage

Valve Type: XLAV (Normally Closed, Bellows Seal), Flange Size: 80, Flange Type: D [K (DN)], Valve Direction: G (w/Indicator, Rear Flange Surface), Version: None, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, 0.5M, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: A (2pcs, Valve Open/Closed), Voltage: 5 (24 VDC), Electrical Entry: G [Grommet (Lead Wire Length 300mm

Valve Type: XLAV (Normally Closed, Bellows Seal), Flange Size: 80, Flange Type: D [K (DN)], Valve Direction: L (w/o Indicator, Rear Flange Surface; Std.

Air Cylinder CP Series Cylinder Positioner Assembly

3s.s iBl 2.83 \f2) {256) l 1 0 6 i281t 2.56 (65) 0.55 3 1 9 l6i) t0.43 (265) 11.42 (290) 'Mn Srrohe = 079 (2cdm) wiBool MirideleB in Pan$ses SERIES CP CYLINDER POSITIONING ASSEMBLY DIMENSIONS CPA1 DN ROO BOOT w/o Eoot ool ' RE A D E F GAGE K L MM N P BB s U CD cx cz H z zz oe h 22 1.38 t35) 2.76 l70l 2.05 {52) x.79 (20) 1.57 l40t 0 3 9 o0l 0.67 t17l MAxl 25 0.n t7\ 1.38 t35) 1 . t a {30)

MXS Series Air Slide Table

10,20,30,40,50,75,100,125 10,20,30,40,50,75,100,125,150 10,20,30,40,50,75,100,125,150 Stroke adjuster/shock absorber option BS BT With shock absorber at extension end* With shock absorber at retraction end* *Shock absorber option is not available for MXS6 52 Air Slide Table MXS Series Construction/Parts list, Seal list 3 6 8 9 br bs bt bp 7 2 1 bl bk bq 4 bm bn bo 5 ck cp cm cn co cq cs cr ct dk dp dn

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

Symbol Port specifications Porting specifications (A,B) trA FB I 2 Common Common Side Bottom Series 1N313 Serial I rN313 AB I Allen Bradley DN I DeviceNet MB I l\4itsubishi PB I Prolibus 2 i 32 outputs/32 inputs AB2 Accessories D-sub cable with connectors on both ends.

Mechanical Valves Series NVM, NVFM, NVZNI

Parentheses Millimeters in "24.51 NVM220-N02-06 230-N02-06 E Panel lMounting Panel N4ountrng F.tJ T 1 2 3 5 l b s ( 5 6 k 9 ) P T 0 138 in (3 smm) O T 0 079 in (2mm) T T 0 216 in (5 smm) F O F 12 35 lbs (5.6 ks ) P T 0,138 in (3 5mm) O T 0 079 in (2mm) T T 0 216 in (5 Smm) '75 PSIG (5 Kg{/cm2) "75 PSIG (5 Kgt/cm2) A B c D E F G 4.25 (1 08) 2.20 (56) 1 . 3 2 :33.5 0.91 (231 0.24 (6) 0.81 'DN

Air Cylinder NCQ7 Series Compact Cylinder

(Applicable to all models) (Ex.)A731 D-A731 Ac ces s sorie sl Part s Li st 056 (e^6) 075 (3/4) 106 0n/16) 150 (1-1/2') 2OO (2') 25O (2-1t2',) 300 (3') 400 (4"' Jam Nd JM.O1 JM-02 JM-03 JM.O4 JM.O5 JM-05 JM-08 JM-10 Single Rod Clevis RCS-015 BCS-02 RCS-03 RCS-04 HCS-o5 RCS-05 RCS-08 RCS-10 Double Rod Clevis RDS-o15 RDS-02 RDS-03 RDS-04 RDS-05 RDS{5 RDS.08 RDS-10 w/ dn(l). rcteinino rin6{21

EXxx-OMN0029CN

n()10 -15No.EX-OMN0029CN-D DIN (SY SY ) (1)6 (M4X6)(EX600-ZMB2) 2 EX600 0.70.8 Nm (2)(M4X14)(EX600-ZMA2)2 0.70.8 Nm EX600-ZMA2 EX600-ZMB2 (3)DIN DIN (4)DIN (5)(M4X20)(EX600-ZMA2) 0.70.8 Nm DIN DIN EX600-ZMA2 -16No.EX-OMN0029CN-D M12 M8 M12 SPEEDCON SPEEDCON (1)(/)BA (2)C (3)B180(1/2) (1) (2) (3) A B C (EX600-ZT1) -17No.EX-OMN0029CN-D SI EX600-S A SI 1 PNP() 2 NPN() TM DN

Type: Air-Actuated Vacuum Valve, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Switching Type: 2-Position Normally Closed, Piping Opening: Flange, Flange Type: [Other] DN, Flange Size Nominal: 63, Seal Type: Bellows Seal, Valve Type: In-line type, Indicator: No indicator, Pilot Port Direction: Flange surface, back, Temperature Range(°C): 5

Type: Air-Actuated Vacuum Valve, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Switching Type: 2-Position Normally Closed, Piping Opening: Flange, Flange Type: [Other] DN, Flange Size Nominal: 63, Seal Type: Bellows Seal, Valve Type: In-line type, Indicator: No indicator, Pilot Port Direction: Flange surface, back, Temperature Range(°C): 5

Type: Air-Actuated Vacuum Valve, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Switching Type: 2-Position Normally Closed, Piping Opening: Flange, Flange Type: [Other] DN, Flange Size Nominal: 63, Seal Type: Bellows Seal, Valve Type: In-line type, Indicator: With indicator, Pilot Port Direction: Flange surface, back, Temperature Range(°C):

Type: Air-Actuated Vacuum Valve, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Switching Type: 2-Position Normally Closed, Piping Opening: Flange, Flange Type: [Other] DN, Flange Size Nominal: 80, Seal Type: Bellows Seal, Valve Type: In-line type, Indicator: No indicator, Pilot Port Direction: Flange surface, back, Temperature Range(°C): 5