3 Port Solenoid Valve

V100-31-1A Part No. V100-77-1A Round head combination screw Place the notch mark on a blank plate to the port 2 side when assembling.

SYJ Series

Push-turn slotted locking type [Type D] While pressing, turn in the direction of the arrow. If it is not turned, it can be operated the same way as the non-locking type. Locked position When operating the locking type D with a screw driver, turn it gently using a watchmakers screw driver.

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

Silencer AN103-X233 VVQ1000-F7-L C3 C4 C6 Example Double (latching) solenoid (24 VDC) VQ2170-5MOD-C6 (4 sets) Single solenoid (24 VDC) VQ1170-5MO-C6 (4 sets) C6 (EXH) port One-touch fitting for 6 Cylinder port C6: Witn One-touch fitting for 6 Block bushing assembly (4 pcs. attached) U side D side 3 m 1 2 3 Stations D side U side D-sub connector cable F kit (D-sub connector) Manifold base

Table of Contents

Max. 16 stations C3, C4, C6, M5 C6 VQ1000 Side D-sub Connector (25 pins) D side U side Stations 1 2 3 Cable assembly 015 030 050 AXT100-DS25Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Wire Color by Terminal No. of D-sub Connector Cable Assembly The D-sub connector

VQZ1000/2000/3000

release Manual override (For C6, C8) (5) 10.5 U side D side Stations 1 2 3 n ( 9.5) 45 65.5 ( 9.5) 22 2-Rc 1/8, 1/4, C6, C8 C6: One-touch fitting assembly for 6 7 (59.5) 58 20.5 Residual pressure release Manual override (33) (41.5) 1.5 C8: One-touch fitting assembly for 8 2-Rc 1/8, 1/4, C6, C8 C6: One-touch fitting assembly for 6 C8: One-touch fitting assembly for 8 B B B 2 2 2 A A A 4 4

High Vacuum L Type Valve

-2-9-1A ** XLD100-2-9-1A ** XLD160-2-9-1A ** Assy (4) Initial pumping Standard AS568-020V valve seal (5).

Series VQ Metal Seal/Rubber Seal Body Ported

Porting specifications Applicable stations Series Port size P, R Port location A, B C6 C3, C4, M5 VQ0 VQ1000 VQ2000 Side Max. 16 C3, C4, C6, M5 C4, C6, C8 C6 Side Max. 16 C8 Side Max. 16 D-sub connector (25 pin) 015 AXT100-DS25-030 050 Cable Assembly Wire color table by terminal number of D-sub connector cable assembly: ( ) The D-sub connector cable ass'y can be ordered individually or included

Fieldbus System

B C4, N3 C6, N7 C8, N9(D) D side U side Manual override ( ) Push-turn locking slotted type: Press, then rotate it.

SMC Electronic Switch Series Variations

The signal has to be converted by a A/D converter for pressure display or switch output. Current Output signal is a current signal in the range of 4 to 20[mA]. The signal is transformed into a voltage signal before being converted by a A/D converter for pressure display or switch output.

Fieldbus System

Select a valve from R, U, NS or NZ when the SI Unit common is negative common. 18 Series SY3000/5000 Dimensions: Type 10/For EX600 (M12 Connector)/Series SY3000 (mm) C2 C3, N1 C4, N3 C6, N7 2 4 SS5Y3-10S6l l(D) Stations U D B D side U side L3 L4 (DIN rail mounting hole pitch: 12.5) 5.3 Manual override Note 2) (L5) L1 ( ) 4(A) port side : Blue (For rubber seal) : Gray (For metal seal) 2(B)

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

C6: One-touch fitting for 6 D side VQD Manifold base (9 stations) SS5Q13-09FD2-D F kit (D-sub connector kit) SS5Q13-09FD2-D 1 set (F kit 9 station manifold base) SQ1130-5-C6 4 sets (2 position single) SQ1230-5-C6 4 sets (2 position double [latching]) SSQ1000-10A-3 1 set (Blanking plate) The asterisk denotes the symbol for assembly.

3 Port Air Operated Valve Series SYJA300 1

VP300-27-1A VP500-27-1A VP700-27-1A Series VPA342 VPA542 VPA742 Bracket (With screw) Only VPA344, VPA544 and VPA744 Specifications Fluid Type of actuation Air N.C. or N.O. (Can be switched.) Note) Standard Vacuum Operating pressure range (MPa) 0.2 to 0.8 N.C.

Fieldbus System

Protective class class # (Mark: ) 38 EX600 5 Port Solenoid Valve Series SV1000/2000/3000 RoHS How to Order Manifold P Tie-rod Base SS5V 1 Q D U 05 10S6 C6 Series Mounting 1 SV1000 2 SV2000 3 SV3000 Nil Direct mounting D DIN rail mounting (With DIN rail) D0 Note 1) DIN rail mounting (Without DIN rail) D3 For 3 stations When a longer DIN rail is desired than the specified stations.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

, C8, C10, 02 (7.5) (5.5) 26 C8: One-touch fittings for 8 C6: One-touch fittings for 6 (4) 44.5 Mounting holes Grommet (G) C10: One-touch fittings for 10 02: Rc(PT)1/4 U side DIN rail clamp screw n Manual override 5 A A A A 2 4 B 4 4 4 4 (L4) (L3) 2 L2 L1 3 B 2 2 P=19 B 2 1 SMC B 21 Stations 6 D side 9 9 10.5 10.5 58 37 95 (Single) (C6, C8) 17.5 10.5 (C10) 116.5 (Double) 130 (3 Position

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

fitting ass'y for 6 C8: One-touch fitting ass'y for 8 DIN rail clamp screw 23 P=22 L1 L2 L3 (C6, C8) (C6, C8) 9.5 9.5 (C6, C8) (C6, C8) Mounting hole for 2-M4 9.5 9.5 4.5 Mounting hole for 2-M6 IN IN IN IN 5.5 80 6.5 (40) 69.5 58 80 37.5 39.5 Residual pressure release manual override U side D side Stations (5) 10.5 1 2 3 n 22 7 (59.5) 58 20.5 2-Rc(PT)1/8, 1/4, C6, C8 C6: One-touch fitting

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

M4 mounting hole A B 1 0 A B 1 0 A B 1 0 A B 1 0 9 61.5 A A A A R4.5 26 62.5 97 = 4.5 (5.5) (35) (L3) (5.2) 52 (L4) Stations D side U side 1 2 3 4 5 6 7 8 n 2-C6 P(SUP) port P A P A A A A A A A 24.5 (11) 13.5 R B R B B B B B B B (7.5) 7 2-C6 R(EXH) port 19.2 P = 11 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 threads Broken

High Vacuum Slit Valve

one for C open and close) F D-sub connector (CDE-9PF05 : Hirose Electric Co.

rep-filter-e

Pressure Control Equipment Air Preparation Equipment Industrial Filters Replacement Procedure Hexagon socket head cap screw (M4 x 0.7 x L10) Scraper Vibration stop PENTA-seal O-ring (JIS B2401-1A-G25) Cover body O-ring (JIS B2401-1A-P32) Actuators Modular F.R.L. Pressure Control Equipment Industrial Filters 483 Series FN1/FN4 Replacement Procedure of Element 2 2.

Industrial Filters Replacement Procedure

Pressure Control Equipment Air Preparation Equipment Industrial Filters Replacement Procedure Hexagon socket head cap screw (M4 x 0.7 x L10) Scraper Vibration stop PENTA-seal O-ring (JIS B2401-1A-G25) Cover body O-ring (JIS B2401-1A-P32) Actuators Modular F.R.L. Pressure Control Equipment Industrial Filters 483 Series FN1/FN4 Replacement Procedure of Element 2 2.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

VG How to Order Manifold Assembly (Example) VP D side U side 1 3 4 5 stations 2 VQ VQZ VQZ212-5M-C6 4 set VV3QZ22-05C VVQZ200-10A-2 VQZ212-5M-C6 1 set (C kit 5 stations manifold base) 1 set (Blank plate assembly) 4 sets (N.C. style) VZ VS Prefix "" mark to valves etc. to be assembled on the manifold.