ZFC Series How to Order With bracket (standard) Air suction filter In-line type with One-touch fitting 100 04 B ZFC IN/OUT applicable tube O.D.
Stations A, B port side VZ 4 stations 04 M5 C4 M5 X 0.8 Applicable blank plate assembly VF : : 4 One-touch fitting 12 stations 12 SYJ3000-21-3A (With dust cap) P port R port VFR Rc(PT)1/8 Rc(PT)1/8 VP7 VP4 Installation of the SYJ300 Valves on the SY3000 Manifold.
H L Option Pressure gauge Combinations R: Rear pressure gauge mounting Standard specification Valid combination Invalid combination Pressure gauge VAC (Vacuum pump side) SET (Pad side) Applicable model Specifications Symbol L H O S C U K IRV2000 IRV3000 IRV1000 P SMC Connection Rc 1/8 01 Connection Rc 1/4 02 Standard specifications Connection Rc 3/8 03 Accessory Connection Rc 1/2 04
How to Order 100 04 B ZFC With bracket (Standard) Air suction filter in-line type with One-touch fittings IN/OUT applicable tubing O.D.
O-ring O,O Non plug-in type @ o End plate (kit) assy MEF363LR-04-t End plates O Joint/clamp O,O . Gasket O,O . O-ring O,O Plug-in type MEF373LH-04-1 End plates O . Joint/clamp O,O . casket O,O .
Electrical entry/Function Bore size (mm) 40 Model No. of auto switch 50 63 80 100 D-B5/B6 Grommet Band mounting Tie rod mounting Band mounting Tie rod mounting D-B59W Grommet (2 color indication) D-A5/A6 D-A59W D-F5l/J5l D-F5lW/J59W D-F5NT D-F5BAL/F5lF D-A3l Terminal conduit Reed switch Solid state switch D-A44 DIN terminal BT-04 BT-04 BT-06 BT-08 BT-08 D-A5/A6 Grommet D-A59W Grommet (2 color
32 50 50 7 60 120 96 118 1 2, 3 4 82 68 88 92 1 181 53 12 81 70 35 36 66 52 9 66 140 96 133 DC C Model VS3135-02 VS3135-03 VS3135-04 VS3145-04 VS3145-06 A B Port size Rc 1 4, 3 8, 1 2 163 64 50.8 196 68 60.5 1 2, 3 4 4-16-7
AS121FP-M5 AS221FP-01 AS221FP-02 Upstream pressure: 0.5 MPa Upstream pressure: 0.5 MPa Upstream pressure: 0.5 MPa Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 08,10 06,08 06 04 04 Number of needle rotations Number of needle rotations Number of needle rotations AS321FP-03 AS421FP-04 Upstream pressure: 0.5 MPa Upstream pressure: 0.5 MPa 12 10 Flow rate (L/min (ANR
Made to Order How to Order 2 1 F 06 200 AS S Lubricant: Vaseline -X12 Example) AS2002FS-04-X12 Made to Order Body size Grease-free (Seal: Fluorine-coated) + Restrictor (Without check valve) -X21 100 M5 standard 200 1/8 standard 205 1/4 standard 300 3/8 standard 400 1/2 standard Applicable tubing O.D.1 Example) AS2002FS-04-X21 Not particle-free Metric size Inch size 23 3.22 04 4 06 6 08 8
Suction Filter with Case FH99 Series How to Order 04 0 0 0 M 074 FH99 0 Companion flange Suction filter with cace Nil None With companion flange F Construction/Connection 0 1 Common with L-type threaded and flange L-type flange Nominal filtration 074 105 149 74 m 105 m 149 m Port size (Outlet side) 1/2B 04 06 08 10 12 16 20 24 28 32 3/4B M Micromesh Element Differential pressure indication
Supplied regenerative resistors or regenerative option is used with the servo amplifier of 11k to 22kW. 01: FR-BU2-(H) FR-RC-(H) FR-CV-(H) 02: MR-RB032 03: MR-RB12 04: MR-RB32 05: MR-RB30 06: MR-RB50(Cooling fan is required) 08: MR-RB31 09: MR-RB51(Cooling fan is required) 80: MR-RB1H-4 81: MR-RB3M-4(Cooling fan is required) 82: MR-RB3G-4(Cooling fan is required) 83: MR-RB5G-4(Cooling fan
When parameter No.PA.04 is set to " 1 ", automatically ON DI-1 (always ON) can be set inside. DI1 CN3-2 Devices can be assigned for DI1 DI2 DI3 with PC or PLC...etc setting. For devices that can be assigned, refer to the PC or PLC...etc instruction manual. The following devices can be assigned for Q172HCPU Q173HCPU QD75MH.
Supplied regenerative resistors or regenerative option is used with the servo amplifier of 11k to 22kW. 01: FR-BU2-(H) FR-RC-(H) FR-CV-(H) 02: MR-RB032 03: MR-RB12 04: MR-RB32 05: MR-RB30 06: MR-RB50(Cooling fan is required) 08: MR-RB31 09: MR-RB51(Cooling fan is required) 80: MR-RB1H-4 81: MR-RB3M-4(Cooling fan is required) 82: MR-RB3G-4(Cooling fan is required) 83: MR-RB5G-4(Cooling fan
04 04 04 1/2 4 + Nil Nil Nil Nil Without mounting option a Mounting B B B B With bracket H H H H With hexagon panel nut (for panel mount) + Pressure gauge Nil Nil Nil Nil Without pressure gauge Option Note1) G G G G Round type pressure gauge 5 EA EA EA EA NPN open collector 1 output b With digital pressure switch EB EB EB EB PNP open collector 1 output EC EC EC EC NPN open collector 1 output
Drain guide 1/4 Note 4) AFM30, 40 Rc NPT G Nil C AFM20 to 40 1/8 1/4 3/8 1/2 3/4 01 02 03 04 06 R Flow direction: Right to left AFM20 to 40 N Note 1) Float type auto drain (N.O.)
Metric thread (M5) Rc NPT G Nil N F Port size Accessories Body size Port size Symbol Nil B E Symbol Applicable model AR10 to 60 AR20 to 60 AR10 AR20 to 60 AR10 to 40 Description With bracket 10 20 25 30 40 50 60 M5 01 02 03 04 06 10 M5 1/8 1/4 3/8 1/2 3/4 1 With square embedded type pressure gauge (with limit indicator) With round pressure gauge (without limit indicator) With round pressure
O-ring O,O Non plug-in type @ o End plate (kit) assy MEF363LR-04-t End plates O Joint/clamp O,O . Gasket O,O . O-ring O,O Plug-in type MEF373LH-04-1 End plates O . Joint/clamp O,O . casket O,O .
Speed controller Silencer SGP15A x 1 m AS420-04 AN400-04 Features 1 Valve Variations Note 1) Electrical entry Actuation Voltage Light/surge voltage suppressor 2 position 3 position DC AC 100 V 50/60 Hz 110 V 50/60 Hz 200 V 50/60 Hz 220 V 50/60 Hz M plug connector Sonic conductance C [dm3/(sbar)] L plug connector 24 V Series M8 Connector Pressure center 12 V DIN terminal Closed center Exhaust
How to Order With bracket (standard) Air suction filter In-line type with One-touch fitting 100 04 B ZFC IN/OUT applicable tube O.D.
Rc1/4 2571 Body O.D.;52 03 Rc3/8 1239 Body O.D.:84 04. Rc1/2 1719.