CXS

x 0.8 thread depth 4 (Piping port) OUT IN Steel balls 8-28-25 25 Series CXSJ Dimensions: 15 to 32 Standard Piping U Q R T ZZ + Stroke Stroke J K SS + Stroke 1 D B M L Z I 1 G 0.2 (G) H A E F (Through) N ( I ) (L) (Z) (G) C NN A B ZZ C D E M F G H I J K L N NN Q R U 2-M5 x 0.8 thread depth 4 2-M5 x 0.8 thread depth 4 2-M5 x 0.8 thread depth 4 2-Rc 1/8 thread depth 5 SS T Bore size (mm) 2

CXS

Z) (G) C NN A B ZZ C D E M F G H I J K L N NN Q R U 2-M5 x 0.8 thread depth 4 2-M5 x 0.8 thread depth 4 2-M5 x 0.8 thread depth 4 2-Rc 1/8 thread depth 5 SS T Bore size (mm) 2 x 2-4.3 through 2 x 2-8 counterbore with depth 4.3 2 x 2-5.5 through 2 x 2-9.5 counterbore with depth 5.3 2 x 2-6.5 through 2 x 2-11 counterbore with depth 6.3 2 x 2-6.5 through 2 x 2-11 counterbore with depth 6.3 2

VQ

Latching style Latching style AC () () (+) 100V AC, 200V AC 100V AC, 200V AC Reset B C Set Yellow Yellow Blue Red A A Single solenoid (AC) Latching solenoid (AC) COM. Blue Red Blue Red SOL. C C A set A SOL. Reset Gray Gray Single style B C COM SOL. SOL.

Table of Contents

(mm) Proper tightening torque (Nm) Cylinder stroke (mm) Model 5 10 15 20 25 30 40 50 6, 10 16 20, 25 32 M3 M4 M5 M6 1.08 10% 2.45 10% 5.10 10% 8.04 10% 22 (27) 25 (35) 28 (38) 31 (41) 34 (44) 37 (47) C(D)U6-D 36 (41) 40 (50) 44 (54) 48 (58) 52 (62) 56 (66) C(D)U10-D 50 (75) 56 (86) 62 (92) 68 (98) 74 (104) 80 (110) C(D)U16-D 95 (128) 106 (143) 117 (154) 128 (165) 139 (176) 150 (187)

SFOD-OMT0010

-COM1, -COM2 I/O 2 20K (a) +COM3, +COM4 (c) BUSY1 to BUSY4, AREA1 to (b) AREA4, INP1 to INP4, ALARM1 to ALARM4 (c) -COM3, -COM4 -PNP type I/O 1 External Inside the controller (a) +COM1, +COM2 OUT0 to OUT8, BUSY, AREA, (a) (b) SETON, INP, SVRE, ESTOP, ALARM 10K (c) -COM1, -COM2 I/O 2 (b) 4.7K (a) +COM3, +COM4 (c) BUSY1 to BUSY4, AREA1 to (b) AREA4, INP1 to INP4, ALARM1 to ALARM4 (c) -COM3

4 Port Solenoid Valve Series VQD1000

(Initial value) 3 1 (R) (P) Flow characteristics 14/2(PA/B) 4/25/3(A/BEA/EB) Flow characteristics Port size C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv Valve model Body ported 10-VQD1121-L M-M5 10-VQD1121 -L M-M5 10-VQD1151-L M-M5 10-VQD1151W-L M-M5 0.22 0.27 0.22 0.27 0.16 0.24 0.10 0.25 0.05 0.07 0.05 0.07 0.19 0.28 0.22 0.27 0.31 0.28 0.31 0.28 0.05 0.07 0.06 0.07 Base mounted (With sub-plate

JXCx-OMU0026

Actuator Specifications Supplement 1.1 Initial setting of LEY/LEYG series Model LEY16/LEYG16 LEY25/LEYG25 LEY32/LEYG32 LEY40/LEYG40 Lead symbol A B C A B C A B C A B C Lead [mm] 10 5 2.5 12 6 3 16 8 4 16 8 4 Stroke (mm) 300 300 300 400 400 400 500 500 500 500 500 500 Max. speed [mm/s] 500 250 125 500 250 125 500 250 125 300 150 75 Min. speed [mm/s] (Independent and interpolation) 15 8 4 18

Rotary Cylinder Series MRQ

C + D = 3.5 + 24.3 = 27.8L/min Operating time (S) B C Rotary motion parts A D Linear motion parts 0 1 2 340 Rotary Cylinder Series MRQ Size: 32, 40 How to Order 32 MRQ B S 50 C A J79W Made to Order or port type Refer to page 343 for the Made to Order details. Nil XF Rc 1/8 G 1/8 NPT 1/8 XN The combination with Made to Order is not available.

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

Dd9 L d l m t -0.030 -0.040 -0.040 -0.076 -0.040 -0.076 -0.040 -0.076 -0.050 -0.093 IY-J015 IY-G02 IY-G03 IY-G04 IY-G05 10 5 16.6 4.8 12.2 1.5 0.7 C type 5 for shaft 16 8 21 7.6 16.2 1.5 0.9 C type 8 for shaft 20 10 25.6 9.6 20.2 1.55 1.15 C type 10 for shaft 25, 30 10 41.6 9.6 36.2 1.55 1.15 C type 10 for shaft 40 14 50.6 13.4 44.2 2.05 1.15 C type 14 for shaft 9

Lubricator Series AL10 to 60

Note 3) Bowl assembly for AL30 to AL60 comes with a bowl guard (steel band material). 14-2-63 Series AL10 to 60 Dimensions AL10 AL20 L D Bracket (Option) G F Port size K M A Port size C B R C J H OUT OUT IN OUT OUT IN B R P Min. clearance for maintenance Min. clearance for maintenance A AL50/60 AL30/40 L D D L Port size Bracket (Option) Bracket (Option) G F G F Port size M K M K E J C B R

MHY2/MHW2

-20D 2-M5 X 0.8 Depth 8 Pin hole positioning (Mounting thread) 14 5 19 42 +0.030 0 4H9 Depth 4 2-M4 X 0.7 2-M5 X 0.8, 10 deep (Thread for mounting attachment) 8 10 0.005 0.025 (Mounting thread) 5 9 2-5.5 (Mounting hole) 2-M5 X 0.8 Depth 10 18 (Mounting thread) (Limted area for mounting attachment) 38 48 36 36 37 25 MHZ2 21H9 Depth 1.5 +0.052 0 Postioning pin hole 51 MHZJ2 16 69 26 MHQ 86

Precision Regulator Series IR1000/2000/3000

eInterface rInterface with bracket 231 180 128 OUT 2 G G 2 OUT 2 OUT EXH 3 97 133 169 G 30.2 wAFM20 40.7 wAFM30 qAF20 qAF30 50 qAF40 wAFM40 IR200--X120 IR100--X120 IR300--X120 Accessory (Option)/Part No. Part no.

VCB

size Model Grommet: G Conduit: C Conduit terminal: T M L K H F E D C B N A U S R Q R Q R Q M4 12.8 14 28 12.5 6.5 31 64 28 4.5 13.5 83 66 50 99 50 44 59 22 1/8 VCB21 M4 12.8 18 28 12.5 8.5 31 67.5 36 6 18 86 66 53 99 53 44 62 22 1/4 M5 19 20 32 15 11 36.5 81.5 40 8 22 99 68 66.5 101 66.5 46 76 24 1/4, 3/8 VCB31 M5 23 25 32 15 13.5 36.5 86 50 8 30 104 68 71 101 71 46 80 24 1/2 M5 23 22.5

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

With gasket is provided as standard. 1/8, 1/4 standard 3/8 standard 1/2 standard Port size Symbol Cylinder side In the side of solenoid valve M5 01 M5 x 0.8 R 1/8 M5 x 0.8 Rc 1/8 Rc 1/4 Note 1) Elbow 02 R 1/4 Rc 3/8 Note 2) 03 04 F01 Rc 3/8 Rc 1/2 G 1/8 G 1/4 Note 1) R 3/8 R 1/2 R 1/8 F02 R 1/4 G 3/8 Note 2) Caution Control F03 F04 U10/32 N01 G 3/8 G 1/2 10-32 UNF NPT 1/8 NPT 1/4 Note 1)

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

x 0.8 Rc 1/8 (A port) M5 01 Body ported (Single type) VKF332 (With bracket) 5 G M5 Body ported (For manifold) 5 G M5 VKF333 5 G 01 VKF334 Base mounted Port size Light/Surge voltage suppressor Valve option 01 Nil For vacuum For low power consumption For vacuum/low power consumption Continuous duty type Rc 1/8 (With sub-plate) Without sub-plate Nil S None With surge voltage suppressor With

CQM

Mounting Bolt for CQM/Without Auto Switch Model C D Mounting bolt Model C D Mounting bolt Model C D Mounting bolt CQMB12-5 -10 -15 -20 -25 -30 CQMB16-5 -10 -15 -20 -25 -30 CQMB20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CQMB40-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 CQMB50-10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 CQMB25-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CQMB32-5 -10 -15 -20 -25

Speed Controller: Standard Type Series AS In-line Type

Body size 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Port size Type Symbol Cylinder side In the side of solenoid valve M5 01 02 03 04 F01 F02 F03 F04 U10/32 N01 N02 N03 N04 Elbow 2 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 M5 x 0.8 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 G 1/8 G 1/4 G 3/8 G 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT

PSxx-OMU0005CN

HNBR C3604 SUS304NBR POMSUS304NBRC3604 24 g 34 g 36 g 30 g 30 g +39 g 0.15 mm 2(AWG26) 1.0 mm (5 ) 3.5 -78No.PS-OMU0005CN-C M5 7 3.5 01/N01 A 01 R1/8 10 N01 NPT1/8 12 C4LC6L 4 A B C4L 17.5 8.2 C6L 18.3 10.4 -79No.PS-OMU0005CN-C A B -80No.PS-OMU0005CN-C 0.5~7 + 0.5~7 -81No.PS-OMU0005CN-C 2 (n ) <> <> 31n +3.5(n -1) 31n +3.5(n -1) -82No.PS-OMU0005CN-C Revision history A [2018

CATALOG VC10

Listed and CSA Certified for Hazardous LocationsClass I, Div 1, Group C and D Class II, Div 1, Groups E, F, and G; Div 2 Groups A,B,C,D,E,F, AND G. Mtg.

TABLE OF CONTENTS

Listed and CSA Certified for Hazardous LocationsClass I, Div 1, Group C and D Class II, Div 1, Groups E, F, and G; Div 2 Groups A,B,C,D,E,F, AND G. Mtg.