High Purity Chemical Valve

Lock nut Locks the adjustment knob position. 463 Series LVC Construction Standard type N.C. type N.O. type Double acting type q q q PB PB PB e w e w e w PA PA PA A B A B A B r t y With reducer With flow rate adjustment With bypass u i PB i PA t y A B Suck back (single type) Suck back (unit type) i i i e P P q e P t y e t y e B A A B r w w r With indicator o Parts list No.

Modular Type Filter Regulator Series AW

w w t t t q q q e IN OUT IN OUT IN OUT y y y e e r r r u u u Drain Drain Drain Parts list Material No.

Air Cylinder

6 o r t qy w e!7 iu !8 CJ1 CJP CJ2 JCM CM2 CM3 With air cushion CG1 CG1 q r !2 !1 !8 !4 w !0 e i !5 !9 !3 o !6 t !7 CG3 JMB MB MB1 CA2 CS1 CS2 Component Parts No. Description Material Note 1 Rod cover Aluminum alloy Hard anodized No.

Environment

How to Order 25A-LEFS 25 H R B 200 S 1 6N 1 q r w e t u y i o !0 !1 !

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

For connector cable of M8 connector, refer to page 1-5-78. 1-5-6 4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 Construction (A) 4 (B) 2 (A) 4 (B) 2 2 position single 2 position double 5 (R) 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) t e q t r w qr w (B) 2 (A) 4 (B) 2 (A) 4 SV SZ u u 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) 5 (R) SY y 3 position closed center/exhaust center/pressure center SYJ 3 position closed

33

(No dustproof net is included.) w Replacement type dustproof filter HRS-FL002 5 filters per set Size: 300 x 370 w r Particle Filter Set Removes foreign objects in the circulating fluid.

ZP

W Horizontal lifting 13-11-99 Series ZPT/ZPR Component Parts Series ZPT Series ZPR Pad Diameter: 10 to 32 Pad Diameter: 10 to 32 r Buffer r Buffer t Adaptor e Adaptor q Pad q Pad With buffer With buffer Pad Diameter: 40, 50 Pad Diameter: 40, 50 r Buffer r Buffer e Adaptor t Adaptor w Lock ring w Lock ring q Pad q Pad With Buffer With Buffer Description Material Note Compornent Parts No.

CJ2

Component Parts No. q w e r t y No. u i o !0 !

NCQ8

0 r t !1 y q e u o w i !3 !2 w Auto switch *No spacer !2 for Z type Parts List Repair Parts: Standard Seal Kit for Double Acting, Single Rod Remarks Description Material No.

Prevents Micro-Bubbles

Rotate the lever assembly w to align the holes on the lever assembly w and the base e. Insert the lever pin q into the holes to fix the lever assembly w. 1 y Tubing !1 Holder assembly replacement screw i Holder assembly r Insert pin assembly u Fitting nut Place the insert bushing t on the insert pin assembly r. t Insert bushing 2 !

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

Install the ejector body gasket for manifold t into the gasket groove of each vacuum pump system assembly r. 2. Install the ejector body gasket for manifold t into the gasket groove of the end block R w. 3. Align the ejector assemblies r, end block (L) w, and end block (R) e using positioning pins (at the two a positions) and fasten with clamp rods q (2 pcs.)

Hygienic Design Cylinder Series HY

W 50mm W CJ5 CG5 HY C M D-X Individual -X Technical data 869 Series HYC Construction r !3 !6 y u q !5 !8 i e !7 !4 t !9 !0 !2 w !1 o @0 @1 Built-in magnet @2 @5 @3 @4 Component Parts No. Description Material Qty. Note No. Description Material Qty.

NCA1

E CJP CJ2 F W J G TF CM2 WF LF + Stroke UF A ZB + Stroke CG1 MB LF ZB P Y WF UF TF R J G FB W F EE EA D C BA B AA A KK MM E Bore size (in) 150 (1.5") 3 5/8 4 3/4 2.36 1.71 1 3 3/8 2 3/4 1.43 1.1 1.26 5/16 5/8 3/8 3/8 0.3 9/16 3/8 1 1/8 1 1/8 2.02 3/4 7/16-20 5/8 2 MB1 200 (2") 3 5/8 4 3/4 2.4 1.71 1 4 1/8 3 3/8 1.84 1.06 1.26 3/8 5/8 3/8 3/8 0.3 9/16 3/8 1 1/8 1 1/8 2.6 3/4 7/16-20 5/8 2

NCA1

E CJP CJ2 F W J G TF CM2 WF LF + Stroke UF A ZB + Stroke CG1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MB MM KK E A AA B BA C D EA EE F W FB G J R TF UF WF Y P ZB LF Bore size (in) 150 (1.5") 5/8 2 7/16-20 3/4 2.02 1 1/8 1 1/8 3/8 9/16 0.3 3/8 3/8 5/8 5/16 1.26

Digital Flow Switches

Cable wire color Terminal 1 Brown DC+ q 2 Not used N.C. w 3 Blue DC e 4 White IN: 1 to 5 V r Power supply / Output connector (8P) Power supply / Output connector (accessory) i u y t r e w q Pin no. Pin no. Terminal 7 Green CH4_OUT1 8 Yellow N.C.

ZX

The needle will fall out if it is turned more than 4 full turns. 1 Connector (w/o lead wire) LO Without connector M Connector (0.3 m) MN Connector (w/o lead wire) MO Without connector G Grommet (0.3 m) H Grommet (0.6 m) 3 100 VAC 110 VAC 5 24 VDC 6 12 VDC V Pilot valve DC: 0.45 W (With indicator light: 0.5 W) AC DC: 1 W (With indicator light: 1.05 W) Nil 6 VDC S 5 VDC R 3 VDC Applicable

VZ3000

Caution Mounting Screw Tightening Torques M2.5: 0.32 Nm (For stacking type manifold) 3-3-41 Series VZ3000 Exploded View/DIN Rail Manifold Type 45 Manifold r w U side r q e w (b) Lever (a) Bolt (Both sides) e (a) Bolt (Both sides) Replacement Parts No. Part no.

RSQ

4 r !6 e !0 !3 !2 !1 w o @0 !7 i !9 !

5

Applicable bore size A D L MM N R W Flat type Round type CJ-CF010 CJ-CR010 10 8 10 13 M4 x 0.7 6 10 8 Part no.

3 Port Solenoid Valve Rubber Seal Series SY100 1

Material Replacement Parts Material Note Component Parts VQZ No. q w e r t y No. !0 !