IDX-OM-W017

/4E IDF-S0001 IDF-S0002 1 IDFA6E15E1 1 IDFA3E/4E C32FP-260S C42FP-260S 1 IDFA6E15E1 1 IDFA3E/4E IDF-S1932 2 IDF-S1933 1 IDFA6E15E1 4-2 44 IDFA Series IDX-OM-W017 5 5 5-1 3 ON OFF 600mm 1 10% () ( 60cm 1 ) 10% 3 IDFA Series 5-1 5 1 IDX-OM-W017 5 () 60cm 1 2 INOUT INOUT () IDFA Series 5-1 5 2 IDX-OM-W017 6 6 6-1 IDFA3E IDFA4E IDFA6E IDFA8E IDFA11E IDFA15E1 3 12 24 36

IDX-OM-W020

/h) (120 m 3/h) 11 SCFM 16 SCFM 26 SCFM 43 SCFM 62 SCFM 80 SCFM 45 F (7.2C) (19 m 3/h) (27 m 3/h) (45 m 3/h) (74 m 3/h) (106 m 3/h) (136 m 3/h) 17 SCFM 28 SCFM 45 SCFM 65 SCFM 86 SCFM 12 SCFM 50 F (10C) (20 m 3/h) (28 m 3/h) (47 m 3/h) (77 m 3/h) (110 m 3/h) (147 m 3/h) 100psig (0.7MPa) 100 F (37.8C) 100 F (37.8C) 115V 60Hz 41-122 F (5-50C) 22psig (0.15MPa) 150psig (1.0MPa) () 36

IDX-OM-W035

IDFB55E-46 IDFB75E-46 107SCFM 161SCFM 226SCFM 300SCFM 37 F (2.8) 3/h) 3/h) 3/h) 3/h) (182m (273m (384m (510m (ANR) (1) 120SCFM 173SCFM 258SCFM 353SCFM 45 F (7.2) 3/h) 3/h) 3/h) 3/h) (205m (294m (438m (600m 130SCFM 181SCFM 297SCFM 406SCFM 50 F (10) 3/h) 3/h) 3/h) 3/h) (221m (308m (504m (690m 100psi (0.7MPa) 100 F (37.8) 100 F (37.8) 41122 F (550) 22 150psi (0.15 ~ 1.0MPa) 36

PSxx-OMU0008CN

No.PS-OMU0008CN-D // ZSE20C(F) ISE20C(H) 2 9 11 12 16 16 19 21 [] 24 25 3 26 28 30 30 30 F0 32 F1 OUT1 33 F2 OUT2 36 F3 38 F4 39 F5 FUNC 41 F6 43 F10 44 F11 50 F80 51 F81 52 F82 54 F90 55 F96 57 F97 58 F98 60 F99 62 63 67 67 68 77 77 79 -1No.PS-OMU0008CN-D 1 (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems

PSxx-OMS0006CN

No.PS-OMS0006CN-G / / ZSE20(F) ISE20 2 8 10 11 14 14 16 18 [] 20 21 3 22 24 26 26 26 F0 28 F1 OUT1 29 F3 32 F4 33 F6 35 F10 36 F11 41 F80 42 F81 43 F82 45 F90 46 F98 48 F99 49 50 54 54 55 62 62 64 -1No.PS-OMS0006CN-G *1) (ISO/IEC)(JIS) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules

PSxx-OML0002CN

No.PS-OML0002CN-G // ZSE30A(F) ISE30A 2 8 10 11 14 14 17 18 21 21 24 24 24 F0 26 F1 OUT1 27 F2 OUT2 30 F3 30 F4 31 F5 32 F6 34 F7 35 F8 36 37 F90 37 F97 39 F98 41 F99 43 44 47 48 49 56 56 58 -1No.PS-OML0002CN-G (ISO/IEC)(JIS) 1) 2) 1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating

PSxx-OMM0006CN

No.PS-OMM0006CN-E // ZSE40A(F) ISE40A 2 9 12 13 16 16 18 20 23 23 25 25 25 F0 27 F1 OUT1 28 F2 OUT2 31 F3 33 F4 34 F5 / 36 F6 38 F11 39 F80 40 F81 41 42 F90 42 F97 44 F98 46 F99 48 49 52 52 53 60 60 63 -1No.PS-OMM0006CN-E (ISO/IEC)(JIS) 1) 2) 1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules

Mechanically Jointed Rodless Cylinder/Linear Guide Type Series MY1H-Z

Replacement Parts: Seal Kit (15, 16, 25, 36 and 37 are not included in the seal kit. Order them as required with by individual part numbers.) Description Material Qty. MY1H25 No.

Air Preparation Equipment

Symbol Number of arranged elements 4 7 13 19 Number of arranged elements 30 36 55 83 04 07 13 19 30 36 55 83 Symbol Nominal filtration accuracy (m) Note) Nominal filtration accuracy (m) 0.5 1 2 5 10 20 40 Symbol Nominal filtration accuracy (m) 50 70 74 75 100 105 120 X50 001 002 005 010 020 040 050 070 074 075 100 105 120 Symbol Element length Element length L250 L500 (L250 x 2) L750 (L250

PF2D

+0.5 0 PFMB -1 PNP (2 outputs) PFMC 36 +0.5 0 Load OUT2 8 PFMV 4 Sensor input Load Black OUT1 Main circuit 7 3 PF2A Sensor DC(+) DC(+) Brown 2 6 + 12 to 24 VDC DC() DC() Blue 1 5 PF3W A Note) LFE PF2D PF2D IF R3.5 or less Note) Decide the length of A taking into account the size of terminal you use.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

2.8 depth 8.4 8 PF2M705/710/725/750W -F1(-L) 86.2 13 14 18.2 2.8 depth 8.4 2 x P PF2M711/721W-02(-L) 88 13 17 20 2.8 depth 6.2 PF2M711/721W-N2(-L) 88 13 17 20 2.8 depth 6.2 PF2M711/721W-F2(-L) 88 17 21 20 2.8 depth 6.2 22 PF2M7(-L) Series Dimensions PF2M701/702/705/710/725/750/711/721(-L) Panel mounting/Without flow adjustment valve/Straight With bracket/Without flow adjustment valve 48 36

7.4

Dual 3-port valve S07 A B C2 0.57 0.39 0.15 0.55 0.37 0.15 25 or less 44 2-position Single S0715 0.39 0.39 0.11 0.37 0.39 0.10 12 or less 28 Single Unit Base Mounted Page 747 Double S0725 0.39 0.39 0.11 0.37 0.39 0.10 10 or less 36 Manifold 3-pos. 3-position closed center S0735 0.29 0.29 0.07 0.26 0.21 0.06 28 or less 38 Bar Base Page 750 4-pos.

IIIIIIIIII

SPECIFICATIONS INPUTS VCC 5 12 VDC Vm 12 VDC DIR TTL, DTL, MOS Compatible Low (0) = Decrease High (1) = Increase CLK TTL, DTL, MOS Compatible 225 Hz Fixed frequency Positive Edge Triggered SPECIFICATIONS SUPPLY VOLTAGE 12 VDC SUPPLY CURRENT Min. 400 mA SELECTABLE STEP RANGE 8 8148 steps STEP RATE 225 PPS OUTPUTS 1 MOTOR 170 mA/coil @ 12 VDC, 36 ohms/coil STEP RATE Motor step rate = Clock

Table of Contents - Tubing

Colors indication Longer lengths available upon request Color Black White Red Blue Yellow Green Symbol B W R BU Y G T0645 6 4.5 36 T1613 16 13 100 T0604 6 4 24 T1209 12 9 75 T0425 4 2.5 13 T0806 8 6 48 T0403 4 3 25 T1075 10 7.5 60 Model O.D. mm I.D. mm Min. bending radius mm Length 20m 100m Roll Reel Specifications Operating fluid Max. operating pressure Burst pressure Air, Water 218psi

VCC

For 3 port (2 stations, one-piece type) 254 g For gate valve 300 g For 2 port 409 g End plate For 3 port 495 g For 2/3 port mixed mounting 452 g 24 g 6 25 g 8 VCKH 33 g 10 36 g 12 25 g 6 26 g 8 VCKK Fittings 32 g 10 37 g 12 29 g 6 30 g 8 VCKL 37 g 10 41 g 12 648 Valve for Water and Chemical Base Fluids VCC Series Dimensions Mounting hole dimensions (When valve is built in to the device.)

VDW30/40-XF

Caution One-touch fitting Dimensions VDW30-G--P7 / P7 Quick Fastener VDW40-G--P10 / P10 Quick Fastener 30 36 Approx. 300 21 23 32 18 20 27 Approx. 300 56 48 10 9 P7 1 (IN) port P7 2 (OUT) port 50 21 P10 1 (IN) port P10 2 (OUT) port 56 VDW40-5G--P10--N VDW30-5G--P7--N 16 12 2 x M3 x 0.5 thread depth 4 2 x M3 x 0.5 thread depth 5 Male Quick Fastener Dimensions Quick Fastener Clip Dimensions

Load Mass (Horizontal Mounting)(kg): 1~4.9, Table Size Length L(mm): 66, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Guideless] Prototype, Table Size Width W(mm): 36, Table Size Height H(mm): 36, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General Purpose, Maximum Load(kg): 1.1, Port Screw Type: Rc, Cushion: Rubber cushion, Custom-made

Load Mass (Horizontal Mounting)(kg): 1~4.9, Table Size Length L(mm): 66, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Guideless] Prototype, Table Size Width W(mm): 36, Table Size Height H(mm): 36, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General Purpose, Maximum Load(kg): 1.1, Port Screw Type: Rc, Cushion: Rubber cushion, Custom-made

Load Mass (Horizontal Mounting)(kg): 1~4.9, Table Size Length L(mm): 66, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Guideless] Prototype, Table Size Width W(mm): 36, Table Size Height H(mm): 36, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General Purpose, Maximum Load(kg): 1.1, Port Screw Type: Rc, Cushion: Rubber cushion, Custom-made

Load Mass (Horizontal Mounting)(kg): 1~4.9, Table Size Length L(mm): 66, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Guideless] Prototype, Table Size Width W(mm): 36, Table Size Height H(mm): 36, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General Purpose, Maximum Load(kg): 1.1, Port Screw Type: Rc, Cushion: Rubber cushion, Custom-made