High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

Weight (g) LEC S LEC SS-T D-M9P(V) D-M9B(V) D-M9N(V) Auto switch model 0.5 m (Nil) 8 7 LEC Y 1 m (M) 14 13 Lead wire length 3 m (L) 41 38 Motorless 5 m (Z) 68 63 LAT Dimensions LZ (mm) D-M9 D-M9V LC3F2 M2.5 x 4 L M2.5 x 4 L Indicator light Slotted set screw Slotted set screw 8 Indicator light 2 3.2 4.6 2.6 4 2.8 2.7 2.7 20 2.8 4 22 3.2 2.6 9.5 Most sensitive position 6 4 6 Most sensitive

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

.: 3.2 : 4 : 6 Thread size: M5 L n Formula L1 = 11.5n + 55.5 L2 = 11.5n + 73 n: Stations (Max. 24 stations) Dimensions 24 331.5 349 375 385.5 23 320 337.5 362.5 373 22 308.5 326 350 360.5 21 297 314.5 337.5 348 20 285.5 303 325 335.5 19 274 291.5 312.5 323 18 262.5 280 300 310.5 17 251 268.5 300 310.5 16 239.5 257 287.5 298 15 228 245.5 275 285.5 14 216.5 234 262.5 273 13 205 222.5 250 260.5

Environment

work load [kg] 50 55 60 Lead 6: LEY25B 20 40 Lead 6: LEY25B 16 30 Lead 12: LEY25A 10 20 8 10 Lead 12: LEY25A 0 0 0 300 200 400 100 500 600 0 300 200 400 100 500 600 Speed [mm/s] Speed [mm/s] LEY32m LEY32m for acceleration/deceleration: 2000 mm/s2 90 50 Lead 4: LEY32C 80 Lead 4: LEY32C 40 43 Horizontal work load [kg] 70 Vertical work load [kg] Lead 8: LEY32B 60 30 40 45 50 Lead 8: LEY32B 22

Silencer Metal Case Type Series 25

19 2510-002 17.2 1 4 55 56 22 19 2511-003 17.2 3 8 0.05 0.02 0.01 0.005 0.002 Construction/Parts/Dimensions 50 100 200 500 1000 2000 5000 10 20 Port size Air flow (l/min (ANR)) Case (ZDC) Noise Level (Initial conditions) Hexagonal flats D (2507-006: Width across flats) 2504 to 2511 Condition: 0.5 MPa at inlet pressure of solenoid valve Measurement distance: 1 m Sound absorbing cover (SUS

Vacuum Filter AFJ Series

Do not expose the product to direct sunlight for an extended period of time. 1/4 12 to 14 3/8 22 to 24 3. Do not use in a place subject to heavy vibration and/or shock. 1/2 28 to 30 4. Do not mount the product in locations where it is exposed to radiant heat. 2.

D. P. Lube (Unit) Series ALD(U)600/900

(Connection port center) (Connection port center) F (Bracket mounting dimensions) Bracket (Option) B C A INA-11-402 INA-11-403 INA-11-404 INA-11-405 INA-11-406 INA-11-407 Model Port size Rc 4 1 63 63 80 85 90 100 141 164.5 170 180 230 251 15 15 15 20 22 22 8 3 , , 8 3 4 1 2 1 Bracket dimensions E C D B A Model Port size 4 3 F 345 419.2 G 32.5 0 H 95 120 J 14 14 K 57 49.6 1 1 , 87.5 125 4

Compact manifold regulator ARM5 Series

L dimension 21 273 22 285.5 23 298 24 310.5 25 323 26 335.5 27 348 28 360.5 29 373 30 385.5 No.

Speed Controller with Indicator

Connection Female Thread: Rc, NPT, NPTF Uni thread size Wrench tightening angle after hand-tightening [deg] Tightening torque [Nm] 1/8 30 to 60 3 to 5 1/4 30 to 60 8 to 12 3/8 15 to 45 14 to 16 1/2 15 to 30 20 to 22 Connection thread size Proper tightening torque [Nm] NPT, R1/8 3 to 5 NPT, R1/4 8 to 12 NPT, R3/8 15 to 20 NPT, R1/2 20 to 25 Connection Female Thread: G Chamfered area for female

Flame Resistant

91 AS421F-G04-10W2D G1/2 24 19.5 28.6 25 12.4 33.6 47.9 26.8 65.3 1.2 56.7 21 150 AS421F-G04-12W2D 20.9 34.6 48.9 22 156 2 These safety instructions are intended to prevent hazardous situations and/or equipment damage.

Air-hydro Unit

.: 0.5 MPa Operating oil: Additive turbine oil Class 1 (ISO VG32) Oil piping length: 1 m Flow control valve Flow control valve Throttle valve Throttle valve Stop valve CCVS10/11/12/13 CCVS20/21/22/23 CCVS02 Piping bore Piping bore Piping bore Piping bore Piping bore Piping bore Cylinder driving speed (mm/s) Cylinder driving speed (mm/s) Cylinder driving speed (mm/s) No load No load No load

Pin Clamp Cylinders

-X 545 C(L)KU32 Series Auto Switch Mounting 2 Auto Switch Mounting Height Applicable cylinder: C(L)KU32-X2321 C(L)KU32-X2322 D-P3DWA 44.5 23.5 D-M9V D-M9WV 40 35 D-A7 40 22 546 Auto Switch Mounting C(L)KU32 Series Auto Switch Mounting Bracket Part No.

Series 11-CRA1-Z Rack & Pinion Type Rotary Actuator Size: 30, 50

D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-A9/A9V Rotating angle Size Operating range ( ) Operating range ( ) Proper mounting position A (mm) Proper mounting position A (mm) 90 13 9 30 42 81 180 22 18 Operating range at proper mounting position /2 90 22.5 18.5 50 30 44 180 39 35 Most sensitive position Operating range of single auto switch Values which include hysteresis are for guideline purposes

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

63: L 0 -0.2 8 x V Effective thread depth Y H A B E G Mounting nut width across flats C G E H B NN Effective thread length T (R) NA Q N F NA I F N CC 0.1 + 12-CY3B50, 63 12-CY3B6 to 15 (mm) B 17 25 35 36 46 60 70 86 100 0.007 0.043 30 32 CC 32 38 D 7.6 12 16.6 21.6 26.4 33.6 41.6 52.4 65.4 E 4 1.5 2 2 2 2 3 8 8 F 8 9 10 13 13 16 16 2 2 G 5 5 5.5 7.5 7.5 8 11 14 14 H 13.5 12.5 13 20 20.5 22

VXA31/32

C 9 10 D 22 24 E 59 66 F 33 34 G 24 25 H 30 40 J 36 46 K 6 9 M 45.5 50.5 N 69 76 VVXA31 VVXA32 17-3-108

Manifold Specifications

300 (Lead wire length) 3 position 171.5 Double 164 Single 106 MAX.10 79 With light/surge voltage suppressor Pg7 103 95.4 PE P EB EA n: Stations L Stations Formula 20n + 21 20n + 30 2 61 70 3 81 90 4 101 110 5 121 130 6 141 150 7 161 170 8 181 190 9 201 210 10 221 230 11 241 250 12 261 270 13 281 290 14 301 310 15 321 330 16 341 350 17 361 370 18 381 390 19 401 410 20 421 430 21 441 450 22

Slit Valve

Bellows protection structure Wiper Detail drawing OPEN 528 Slit Valve XGT Series RoHS How to Order XGT 22 2 46236 1 C Auto switch and the connector (Refer to the table below) High vacuum slit valve Valve size Gate O-ring material Number of axis Two axes bellows One axis bellows Applicable wafer size 200 mm 300 mm Symbol 22 31 Material FKM Kalrez 4079 Symbol 1 2 Opening window size Width Height

Air Suction Filter / In-line Type With One-touch Fittings Series ZFC

For polyurethane tubes, 22 colors other than the ones above are available. 1114 Series ZFC100/200 Made to Order Specifications Please contact SMC for detailed specifications, dimensions and delivery. Air Suction Filter with Metal Case 1 Max. operating pressure 0.5 MPa For the standard type, the max. operating pressure is up to 0 kPa.

S

NCX2N10 0.15MPa / 22 PSI NCX2N1S Min Operating Pressure 0.15MPa / 22 PSI NCX2N2S 0.1MPa / 15 PSI S E L E C T O R 5 ~ 60C / 40 ~ 140OF Ambient and Operating Fluid Temp See List Below Piston Speed (Non-Lube Type) With Shock Absorber (Option) Cushion 2~25.4mm / +0.08 ~ -1 inch Stroke Adjustment Range NCX2N10 1Kg / 2.2 lb NCX2N1S Note 1) Max Movable Load 3Kg / 6.6 lb NCX2N2S 6Kg / 13.2 lb +0.1O

Refrigerated Air Dryer

Applicable dryer Capacity Model Inlet voltage Outlet voltage A B C D E F Weight (kg) 380, 400, 415 VAC (50 Hz) 380 to 420 VAC (60 Hz) IDF-TR500-3 15 Single phase Single turn 100 VAC (50 Hz) 110 VAC (60 Hz) IDF1E-10 to 8E-10 IDU3E-10, 4E-10 500 VA 230 207 190 210 160 9 420, 440, 480 VAC (50 Hz) 420 to 520 VAC (60 Hz) IDF-TR500-4 22 11 13 Accessory (Option) Base Integrated with a Transformer

IDUS/IDFS

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com J K Draft air outlet A B D E Power cord outlet Air outlet Air inlet 22 C Draft air inlet F L 16 M HA AT Model IDUS3E IDUS4E Port size A B C D H K J L M E F G 297 330 315 380 260 470 540 85 130 350 325 440 Rc 1/2 ID 85 130 Rc 1/2 440 260 560 540 297 330