Counter/Extension Cable

COM RS Q G 1 k ( ) or Control signal input RS H A 2.2 k (Select Reset/ Hold/Bank) Power supply (24 or 12 VDC) RZQ MI W S CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-12-29 Series CEU CEU5 Operation Parts description External power supply Pulse input terminals Control signal input A COM COM COM B 12 VDC GND F.G. R.S.

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

2.4 Z Section AA 3.5 Depth 2 2.5 +0.030 0 7 +0.030 0 Depth 2 2.5 Q QL 11-/22-MXPJ6-10 4M3 x 0.5 depth 3 F (mm) E F H J M Q QL S Z Model 23 25 38 27 37 28 8 5 44 11-/22-MXPJ6-51 30 35 53 42 47 37 11 10 59 11-/22-MXPJ6-10 100 Air slide table MXP/MXPJ6 11221122Dimensions: MXP6 Air cylinder Rotary actuator Air gripper Directional control valve Fittings & Tubing Pressure switch Clean gas filter

21

0.29 J 0.46 J 0.84 J Allowable kinetic energy Female rod end 0.11 J 0.18 J 0.29 J 0.52 J Operate the cylinder within the allowable kinetic energy.

Electric Actuators

P JOG and constant rate movement, return to origin, test operation and testing of forced output can be performed. 32 Series LEC Teaching Box/LEC-T1 RoHS How to Order LEC T1 3 J G Enable switch (Option) Teaching box Enable switch S None Equipped with enable switch Nil Cable length [m] 3 3 Interlock switch for jog and test function Stop switch Initial language J E Japanese English Stop switch

VCW

4-G C 1.5 B D L E 4-H Valve mounting hole F Bracket Mounting Dimensions/Bracket Material: Stainless Steel (mm) A B C D E F G H J L Port size Bracket part no.

ZPT/ZPX

63.5 85.5 160.5 211.5 27.5 75-B01-A18 75-B01-A18 183.5 234.5 196.5 247.5 ZPX HBJ-B01-A22 (Male thread) 100 125 Hexagon width across flats 17 M22 x 1.5 9.5 50 Hexagon width across flats 30 Width across flats 19 Rc 1/8 9.5 10 Hexagon width across flats 21 J Width across flats 60 70 4-M5 x 0.8 I 11 H G F E Y 4 40 C A B D Dimensions (mm) Model B A C D E F G H I J Y ZPX100HBJ25-B01-A22 141.5

AWM20 to AWM40

B B B B B N.O.: Black Dimensions B B B N.C.: Gray O S O S 1/8 1/4 10 One-touch fitting Barb fitting Applicable tubing: T0604 M5 x 0.8 Width across flats 14 Width across flats 17 Model Standard specifications Optional specifications Square type pressure gauge Digital pressure gauge Round type pressure gauge P1 P2 A B Note) C D E G J F K H J H J H J AWM20/AWD20 28 27.8 1/8, 1/4 1/8 M28 x 1

AWM20 to AWM40

B B B B B N.O.: Black Dimensions B B B N.C.: Gray O S O S 1/8 1/4 10 One-touch fitting Barb fitting Applicable tubing: T0604 M5 x 0.8 Width across flats 14 Width across flats 17 Model Standard specifications Optional specifications Square type pressure gauge Digital pressure gauge Round type pressure gauge P1 P2 A B Note) C D E G J F K H J H J H J AWM20/AWD20 28 27.8 1/8, 1/4 1/8 M28 x 1

3

Pin name 1 2 3 4 DC (+) OUT2 DC () OUT1 1 3 2 x Piping port Z U T S 4 x WX G 2 4 (35.5) 42 H For PF3W721 OUT IN AA G 4 x P K L 2 x Piping port G N DD PF3W504/520/540/511/521 Remote sensor unit Y A E J F 30 W B V 2 x Piping port Z S T U 4 x WX G H 42 (35.5) For PF3W521 IN OUT AA G 4 x P K L 2 x Piping port G N (mm) Bracket dimensions Model Port size A AA B D DD E F G H J K L N P (Rc, NPT,

Air Cylinder: Standard Type Double Acting, Single Rod Series CM2 ø20, ø25, ø32, ø40 How to Order Mounting style Cylinder stroke (mm) T B Basic style (Refer to “Standard Stroke” on page 129.) Head side trunnion style Clevis integrated style Axial foot styl

Rubber bumper 0.4 J 0.65 J 1.2 J Allowable kinetic energy 0.54 J (11.0) 0.78 J (11.0) 1.27 J (11.0) 2.35 J (11.8) Air cushion (Effective cushion length (mm)) CG1 With air cushion MB Standard Stroke MB1 Bore size (mm) Maximum stroke (mm) Standard stroke (1) (mm) Made to Order Specifications (For details, refer to pages 1373 to 1498.)

Air Pilot Operated Series NVSA

DITENSIONS A B c D E F o H J t( T N o P B s r u 3.43 (87) 2.

240

Dimensions [mm] Model L1 L2 A B C D E F G J K LEPS10-25 138 152.5 61.8 20 22 30 29 20 29 39 88.2 LEPS10-50 163 177.5 24 43 34 50 24 50 60 113.2 LEPS10L-25 124 138.5 47.8 20 22 30 29 20 29 39 88.2 LEPS10L-50 149 163.5 24 43 34 50 24 50 60 113.2 394 LEPY/LEPS Series Specific Product Precautions 1 Be sure to read this before handling the products.

15

Select [Applicable tubing O.D.: 4 or more, Connection thread: Rc1/8]. 10.5 Motorless Motorless FK LAT Dimensions [mm] LZ Size Stroke range [mm] B C D EH EV H J K L M O1 R S T U LC3F2 63 50 to 200 123 21 40 76 82 M16 x 2 44 36 33.4 60 M8 x 1.25 16 78 83 5 205 to 500 158 505 to 800 193 The L measurement is when the unit is at the retracted stroke end position.

Integrated Controller

GR-S-010 (10 G) GR-S-020 (20 G) 20 Easy to Operate EQFSH Series Battery-less Absolute (Step Motor 24 VDC) Dimensions: In-line Motor EQFS16H (72) 50 24 3 H9 (+0.025 0 ) depth 3 4 x M4 x 0.7 thread depth 6.4 12 Body mounting reference plane (B dimension range)1 39.4 28 3.5 3 H9 (+0.025 0 ) depth 3 Stroke A + Stroke (Table traveling distance)2 Required space: J L + Stroke 127 (With lock: 188

Refrigerated Air Dryer

IDFB3E IDFB4E to IDFB11E B Q A D E Compressed air inlet Illuminated switch Compressed air outlet Evaporation thermometer G F J Ventilation direction Ventilation direction C Ventilation air outlet Drain tube (O.D.: 0.4 [10 mm], Length: 31.5 [0.8 m]) H 4 x 0.5 [4 x 13 mm] N M L K Power cable with plug (Length: 110 [2.8m]) Dimensions Unit: inch [mm] A B C D E F G H J K L M N Q Model Port size

Micro-Mist Separator with Prefilter Series AMH

V j.--v v V AMl,so 0.2 Ij.--~ V I 2.Select the type whose max. air flow capacity is over that point; AMH650. 0.2 0.4 0.6 0.8 1.0 tnlet air pressure MPa SeriesAMH How to Order .

IZx-OMX0087

3 10 10 G 1 K 5 Straight 15 15 H 2 M 10 Straight N None J 3 S 3 To use AC adapter, specify "N", and select AC adapter with the option number.

240

NS 14 14 24 24 30 30 45 55 60 LT 42 42 52 52 62 62 72 82 92 LB 20 25 30 LA 10 10 20 20 30 30 20 25 30 J 4 4 4 4 4 4 6 6 6 Stroke (mm) 5 10 15 20 25 30 40 50 60 24 Compact Slide MXH Series Dimensions: 10 LT MXH MXH 19 11 MXS MXQ 11 LA LB J x M4 x 0.7 Depth 6 MXQ 3 x M5 x 0.8 through Pilot hole dia 4.3 2 x 3 x 7.5 counterbore depth 4.4 MXF 2 x 2 x M5 x 0.8 Cylinder port (With plug for port)

CS1

J 60C Nylon tarpaulin 110C K Heat resistant tarpaulin Bore size (mm) Stroke (mm) Max. ambient temperature for the rod boot itself. 180 1,569 200 998 250 813 300 564 1.10-3 Series CS1 Major Material and Surface Treatments Precautions Description Note Material Cover Black coated Rolled steel plate Hard anodized Aluminum alloy Be sure to read before handling.

CXS

A A a B B s j C f g t C0.5 C0.2 C0.2 b d e 45 45 Section A-A p k C0.5 45 C n h i l (d) C0.5 q m O Section B-B r (l) View C (mm) +0.2 0 l i o j k m n p q r s t b e g a c d f h Model 0 0.2 0.05 0.15 + 0.1 0 +0.2 0 3.5 +0.013 +0.001 CXS 6 2.75 M2.5 x 0.45 4.5 3.5 4.75 C0.5 2.8 0.5 4 3.5 3 3.5 16 0.1 M3 x 0.5 4 1 5.5 6 +0.2 0 0.05 0.15 0 0.2 + 0.1 0 +0.2 0 5 +0.016 +0.001 CXS10 4 M3 x 0.5 8 5