Stations: 9 Stations, A, B Port: Side/Bottom, Bottom Plugged 3/4, SI Unit: DeviceNet, P, R Port Size: 1, P, R Port Location: Both Sides, Thread: NPTF

Supply(P),Vacuum(V), One-touch Fitting: N (Supply (P) Port: ø1/4"; Vacuum (V) Port: ø1/2"), Exhaust Type: Silencer Exhaust, Supply/Release Valve Combination: K2 (Supply Valve, N.C.), Rated Voltage: 5 (24 VDC), Electrical Entry: H (Grommet, Lead Wire Length 600mm), Light/Surge Voltage Suppressor: Z (w/Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Vacuum Pressure

Supply(P),Vacuum(V), One-touch Fitting: Supply (P) Port: ø6; Vacuum (V) Port: ø12, Exhaust Type: Silencer Exhaust, Supply/Release Valve Combination: K1 [Supply Valve (N.C.), Release Valve (N.C.)], Rated Voltage: 5 (24 VDC), Electrical Entry: G (Grommet, Lead Wire Length 300mm), Light/Surge Voltage Suppressor: Z (w/Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Vacuum

SMC Pneumatic Clean Series

Bore size NTJ-010A NTJ-006A 8 6 M3 x 0.5 2.4 5.5 6.4 5.5 6.5 M3 x 0.5 6 12.5 M4 x 0.7 3.2 7 8.1 7 8.5 M4 x 0.7 8 14.5 NTJ-015A 10 M5 x 0.8 4 8 9.2 10.5 M5 x 0.8 16.5 10 9 (mm) Standard C D E F B A J K L M N O P G H I Bore size 8 6 M2.5 x 0.45 13 7 7 10 9 19 3 5 4 9 3.5 8 7 5.3 24 M3 x 0.5 13 7 8 11 10 21 3 6 5 11 4.5 10 8 5.3 25 10 13.5 M3 x 0.5 7 8.5 11.5 10.5 22 3.2 6 6 12 5 11 8.5 5.6

Air-hydro Unit

CC100-L1-G CC160-L1-G 3/8 186 1/2 64 104 86 88 53 121.8 151.5 98 35 18 35 104 45 86 45 83 60 1/2 223 1/2 92 139 116 123 61 121.8 156.5 98 35 18 35 109 65 86 45 88 65 1/2 259 3/4 92 139 116 123 61 133.8 185.5 134 40 24 50 140 65 116 66 112 85 3/4 319.5 3/4 144 202.5 180 183 60 133.8 181.5 134 40 24 50 136 93 116 66 108 81 L Dimension (mm) T Model NB Effective oil level stroke W QL S QB NL P

Series 10-MGF ø40, ø63, ø100 Guide Table

8.7 120 X T V 1/4 1/4 1/8 40 P 46 46 38 PP 70 50 M12 x 1.75 M10 x 1.5 M8 x 1.25 N H GA C M6 M6 M5 18.5 KA KB 100 63 30, 50, 75, 100 40 78 73 58 66.5 61.5 48.5 4 4 3.5 8 100 90 120 160 1/8 1/8 1/8 8 200 160 20 20 11.5 11.5 9.5 846 Guide Table 10-MGF Specific Product Precautions Be sure to read this before handling.

Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper

(Mounting thread) Note) If the fitting attached to the port interferes with the auto switch, please use the extension fitting assembly supplied with the air gripper. 4 x AA thread depth AB (Mounting thread) Prepared hole diameter AC through (Mounting hole) Note) AD depth AE AF depth AG S H When open AS When closed AR When closed AT M T D P B R N G Q F E C A 2 x AH thread depth AJ (Mounting

CP95

A B C D E F G H P U Load (kN) Weight (g) Angle Bore size (mm) JA30-10-125 32 70 2.5 0.5 9 8 8 5 24 19.5 49.5 M10 x 1.25 17 JA40-12-125 40 160 4.4 0.75 13 11 11 6 31 20 60 M12 x 1.25 22 5 27 JA50-16-150 50, 63 300 11 1.0 15 13.5 14 7.5 41 22 71.5 M16 x 1.5 JAH50-20-150 80, 100 1080 18 2.0 18 16 32 24 59.5 11.5 28 31 101 M20 x 1.5 CJ1 CJP CJ2 CM2 CG1 MB MB1 CA2 Rod Clevis GKM (ISO 8140)

CXS

Port location 32 CXS P 6 M 50 F9BW J S Number of auto switches Compact type Nil S n 2 pcs. 1 pc. n pcs.

Process Valve

H (Conduit terminal: T) I (DIN terminal: D) Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S T U Model VNA2-10A VNA2-15A VNA3-20A VNA4-25A 3 8 1 2 3 4 63 144.5 55 125.5 52 42 26 29 4.5 14 24.3 72.5 2.3 80.5 25 75 34 80 84.5 124 135.5 151.5 137 153 156 172 60.5 73 1 80 90 62 72 50 60 31 36 35 40 5.5 6.5 17.5 20 28.3 33.3 84 100 2.3 2.3 92 108 30 35 84 90 43 49 89 95 93.5 99.5 Port

Coolant Valve

VNA VNB SGC SGH VNC VNC VNH VND VCC TQ 621 A VNC Series Threaded Type/Port size: 10A, 15A, 20A, 25A K L Pg9 N P Applicable cable O.D. 6 to 8 F (Air operated) J (External pilot solenoid) Pilot port 12(P1) 2 x (Back side 10(P2)) 4 x M 8 1 Light/surge voltage suppressor (For DZ) Manual override (Non-locking push type) P1 D S Q E Bracket 15 H A R B C Main port 1(A) [Back side 2(B)] Port size:

Steam Valve

x 1/8 (Back side 10(P2)) P1 51.5 75 40 64 (12.5) 1(A) (Back side 2(B)) Main port Port size: refer to table below (1.6) 23 24 (21) 45 27 Bracket (Option) 2 x 4.5 2 x M4 x 0.7 depth 7 18 50 Main port 1(A), 2(B) Model VND10D-6A VND10D-8A VND10D-10A 1 8 1 4 3 8 18 Port size: 10A, 15A, 20A, 25A M G (Valve open) Q N R Pilot port 12(P1) Indicator (Option) 1 8 2 x (Back side 10(P2)) VNA P1 4 x P

High Pressure Coolant Valve

to 8 Pilot EXH port 10(P2) Silencer installed (Standard) EBKX-L7004-040: VNH1, VNH2 AN210-02: VNH3, VNH4 Light/surge voltage suppressor (For DZ) Pilot SUP port 12(P1) Manual override (Non-locking push type) N P2 P1 Main port 1 (Back side port 2) U: Female thread for bracket mounting Same as back side 8 locations J B G Bracket (Option mark: B) H I 15 R S K L M E T: Long hole for mounting P

For post-stoppage positioning and locking

140 mm Bore size 100 mm 2000 Cylinder proof pressure 1 MPa Max. operating pressure 0.49 MPa Non-lube 1000 Ambient temperature 5 to 60C Piston rod size 30 mm 0 0.5 0.4 0.3 0.2 0.1 Weight 28 kg 35 kg Supply pressure [MPa] W-R3-SProximity Switch Specifications/Maker: OMRON Corporation 4000 Model E2E-X7D1-M1J-T10.3M Clamping force [N] Voltage range 10 to 30 VDC {Allowable ripple: 10% or less (P-P

Smooth Vent Valve

1.3 x 10-10 P.526 XVD2-02S 522 Smooth Vent Valve (Supply Line) XVD Series RoHS How to Order 02 XVD 2 V Fitting type Smooth vent valve V S For VCR For Swagelok Space-saving Valve / needle valve integrated construction requires only 1/4 the piping space of previous models.

Compact and

For vacuum equipment precautions, refer to the Handling Precautions for SMC Products and the Operation Manual on the SMC website: http://www. smcworld.com Nozzle diameter Port size 05 0.5 mm 07 0.7 mm Nil 6 One-touch fitting 01 Rc1/8 female thread Symbol EXH Vacuum pressure reached S 90 kPa L 48 kPa Mounting P V Caution Specifications 1 .

Clean Regulator/Fluororesin Type

ARM 2 2 3 3 3 4 4 5 5 6 6 2 2 2 3 3 4 4 5 5 6 6 1 2 1 2 3 1 2 1 2 1 2 A B C A B A B A B A B 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 19 x 16 12 x 10 25 x 22 19 x 16 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" SMC SMC SMC ARP P U Panel mount union Union IR-A IR SMC IRV : Basic size : With reducer

Water Separator Series AMG Please refer to page 14-20-62 for specific product precautions. 1

M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G S 6.0 , 2 H 463.5 I 180 J 30 K 15 L 24 N 120 O 184 P 220 Q 110 R 18 460.5 AMG850 1 2 13 42 348 220 57.5 220 10 14-20-7

Series HAW Water Cooled Aftercooler 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Pressure drop = = (0.7 + 0.1013) x P P1 + 0.1013 0.8013 x 0.0065 0.3 + 0.1013 = 0.013 MPa Construction HAW2/7 HAW22 to 110 Air outlet Air outlet Air inlet Air inlet Cooling water outlet Cooling water outlet Cooling water inlet Cooling water inlet HA Drain

CC

4T Mounting hole for hexagon socket head cap screw Air port size Rc REC CX CY MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RHC MK(2) RS Q G Oil draining hole Rc 1/4 Oil port size Rc RS H A (mm) Model Air port size Rc Oil port size Rc A B C DA DB DL H NL P