Series PF2D Digital Flow Switch For Deionized Water and Chemicals

1 q t i 48 Series PF2D Dimensions: Remote Type Sensor Unit PF2D504-11/520-13 60 70 176 40 15 A Model PF2D504 PF2D520 9.52 12.7 62 52 42 A Internal circuits and wiring examples z to , are the terminal numbers. 4-4.5 Display unit (PF2D30/31) Sensor unit 52 1 Brown 6 2 Analog output Switch output or Pulse output Main circuit Main circuit 8 4 Load + 12 to 24 VDC White 7 3 Black 5 1 Blue 18

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

S A 3H9 effective depth 2 3H9 effective depth 2 TD TB TC D (g6) DD (h9) Rotation A AU B BA BB BC BD BU H Size 42 (8.5) 29 8.5 17 53 (9.5) 31 9 26.4 6.7 10.6 2.2 16.7 23.1 18 20 12 14 5 6 10 15 90, 180 90, 180 W Q S US UW ab M TC TD TA Size Rotation 4.5 17 56 69 65 82 90 180 90 180 10 35 44 6 9 8 15.4 15.5 15 5.5 20 40 50 7 10 9 17.6 16 Dimension AU does not indicate the dimension when shipped

Free-Mounting Cylinder with Air Cushion Series CU

13 Piston seal 1 NBR 14 Rod seal 1 NBR 15 Gasket 3 Free-Mounting Cylinder with Air Cushion Series CU Dimensions 2-cushion needle 2-port 2-P through Q R E GB GA 4-NN MM D CB CA C K J JA E H A' A 2-P through KA B 4-T counterbore Width across flats L S + Stroke Z + Stroke (mm) Port size Bore size (mm) GA H J JA A B A' C CA CB D E GB 20 25 32 29 32.5 35 19 23 27 16 20 24 12 15 19 26 32 40 42

Smooth Cylinder Series CQSY

IN 84.8 59 42 25 CQSY16-PS 12 6 OUT 113 79 57 34 CQSY20-PS IN 151 106 75 45 CQSY25-PS 16 8 OUT 201 141 101 60 When only grease for maintenance is necessary, please order by the following part numbers. Grease pack GR-L-005 (5 g) GR-L-010 (10 g) GR-L-150 (150 g) IN 236 165 118 71 20 10 OUT 314 220 157 94 IN 378 264 189 113 25 12 OUT 491 344 245 147 Intermediate Strokes Method Model no.

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Stainless steel Spring washer Flat washer 37 Stainless steel 18 Stainless steel Flat washer Top cover 38 Electroless nickel plated Aluminum alloy Electroless nickel plated Aluminum alloy 19 Plate A Cushion seal holder 39 Chromated Aluminum alloy Electroless nickel plated Aluminum alloy 20 21 Plate B O-ring 40 Fluoro rubber Fluoro rubber Cushion seal O-ring 41 Fluoro rubber Linear guide 42

Turntable Cylinder Series MGT

M12 X 1.75 M14 X 2.0 8.6 10.6 12.5 25, 50, 75, 100, 125, 150, 175, 200 (mm) Bore size (mm) OB OL P PA PB PW Q RA RB RC S SA SB T U VA VB WA WB 50, 75, 100st Larger than 100st 25st 50, 75, 100st Larger than 100st 25st 117 128 168 55 74 89 54 56 71 100 125 150 24 24 35 188 225 272 70 80 100 14 14.5 17.5 Rc1/4 Rc3/8 Rc3/8 9 8 8 14 17.5 20 124 156 188 148 198 236 39 41 51 52 52 72 50 54 47 38 42

Wedge Cam Operation Gripper Series MHK2

M5 X 0.8 (Finger opening port) 22.5 2.3 19 Series MHK2 Wedge Cam Operation Gripper Dimensions MHK2-20 /Standard model Scale: 37% (mm) 18.6 20 2-M5 X 0.8 thread 8 deep 4H9 4 deep +0.030 0 21H9 1.5 deep +0.052 0 2-M5 X .8 thread 10 deep 4-M5 X 0.8 thread 10 deep Bottom hole dia.4.3 through-hole 0 -0.1 8 Open 26 +1.2 0 5 13.5 16 0.02 60 58 32 42 30 0 -0.2 Closed 16 29 4H9 4 deep +0.030 0 21

Compact Guide Cylinder End Lock Type SeriesMGP

124 200 300 84 122 172 46 48 40 14 9 Rc1/4 34 21.5 47 40 130 60 146 110 130 92 124 200 300 48 86 124 174 48 50 14 9 Rc1/4 39 28 55 50 130 70 158 124 142 110 52 128 200 300 50 88 124 174 63 MGPM (slide bearing)/A, DB, E dimensions (mm) (mm) DB E A Bore size (mm) Bore size (mm) X XA XB XC XL YY YL Z Over 25 to 175st 17.5 Over 25 to 175st 102 25st or less Over 175st 25st or less Over 175st 42

Angular Air Gripper Series MHC2/MHCA2/MHCM2

10-4 x (202 + 32)/12} x 10-6 = 2.21 x 10-8 (kg.m2) = 2.21 x 10-8 + 6.48 x 10-4 x 16.42 x 10-6 = 0.20 x 10-6 (kg.m2) IA Inertial moment around Z axis IA =IZ1 + m1r12 x 10-6 z f2 z2 B part r2 = 23.5(mm) Weight calculation m2 = d x e x f x Relative density m2 = 4 x 5 + 6 x 2.7 x 10-6 = 3.24 x 10-4 (kg) Inertial moment around Z2 axis IZ2 = {m2 (d2 x e2) / 12} x 10-6 IZ2 = {3.24 x 10-4 x (42

Compact End Lock Cylinder Series CBQ2

1.5 86 7 17 63 85 77 15.5 79 71 10.5 15 15 20 77 M10 x 1.5 103 7 17 (mm) Bore size (mm) R W Z L M N O P 32 7 34 5.5 9 Rc 1/8 7 49.5 14 40 7 40 5.5 9 Rc 1/8 7 57 14 50 8 50 6.6 11 Rc 1/4 8 71 19 63 8 60 9 14 Rc 1/4 10.5 84 19 Series CBQ2 Dimensions Foot type/CBQ2L, CDBQ2L (mm) Foot type B + Stroke L With rear lock With front lock Bore size (mm) L L1 LD A B LS A B LS 89.7 65.5 49.5 82.2 58 42

Single Axis Electric Actuator Series LJ1H

Refer to page 204 regarding brake wiring. 600 a = 2000 a = 1000 400 a = 3000 a 200 L3 Mey 0 5 10 20 15 Transfer load m (kg) Refer to page 145 for deflection data. 42 Standard Motor/Vertical Mount Specification Series LJ1H30 Dimensions/LJ1H303NA Scale: 10% 8H10 depth 10 4-M8 x 1.25 thread depth 10 120 4-M12 x 1.75 thread depth 15 20 80 12.5 16.5 Cable entry side Work piece mounting reference

Rotary One-touch Fittings Manifold Series KM

(mm) fitting 6 KM15-04-06-3 10.4 6 4.5 6 6 7.5 7.5 12.8 13 15.5 15.5 19 19 9.9 11.1 11.1 12.8 12.8 13 25 27 38 42 61.5 67 74 77 17 18.5 18.5 21 85 18 19 20 21 22.5 78.5 85.5 92.5 98 105 4 10.4 16 38.2 KM15-04-08-3 15.2 KM15-06-08-3 12.8 15.2 KM15-06-10-3 18.5 KM15-08-10-3 15.2 18.5 8 8 8 8 6 12.8 45.4 17 10 10 10 10 8 18.5 21 15.2 52.6 KM16/Dimensions Applicable tube O.D.(mm) Part No.

Positioning Driver Series LC6C

LED for power supply, LED for alarm 5 to 40C (41 to 104F) Dimensions (mm) 1in=25.4mm LC6C220AD Dedicated teaching box LC51T1 02 TEACH 42 97 POWER ALM PARA AL-RES JOG MON I/O TEST 38 130 STOP SMC LC5-1-T1 TEACHING BOX 96 35 RET ESC/ $MODE 50 21

Uniaxial Electric Actuator Series LJ1

P.42~46 Order Made Specifications. P.47 LJ1H202NAK LJ1H303PDLC1-1B3H Dedicated Controller LC1 Series .P.49 LJ1H303NDTypical Equipment Configurations . P.50, 51 LJ1H303SELC1-1B3M LC1 Series. P.52~60 LJ1H303PAK LC1-1B3V LJ1H303NAK Dedicated Teaching Box LC1 Series .P.61 LJ1S101SCLC1-1B1S P.61, 62 LC1 Series. P.63 LC1 Series Options. P.64 Catalog Terminology.

Mechanically Jointed Rodless Cylinder Series MY1

Vertical mounting x P. 42 Wc: MHL2-16D1 (795g) P. 80 z y x y z Wa: Connection plate t = 10 (880g) Wd: Work piece (500g) Refer to the pages above for actual examples of calculation for each orientation. 2 Load blocking Work piece mass and center of gravity 5 42.5 65 150 Center of gravity Work piece no.

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

1.1 WX 17.5 Bottom port (ZZ) (Applicable O-ring) 2-10 Y Bore size (mm) 50 63 GC 12 15 J M14 x 2 M16 x 2 MM M8 x 1.25 A 212 245 B 17 19 C 10.5 12.5 CH 41.5 47.0 G 27.0 29.5 GA 25.0 27.5 GB 37.5 39.5 H 124 149 K 28 32 L 250 290 LD 11 14 LH 57 65 LL LW 168 200 M 15 16 N 47 50 NC 44 60 NE 122 147 NH 60 70 087 100 M10 x 1.25 Bore size (mm) 50 63 NW 118 142 PA 120 140 PB 186 220 PG 10 12 PP 26 42

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

MY2HT25G MY2H25-16AStroke MY2H25-16BStroke MYH25-15AR4901 GMY25 RCS-8 TMY-25 P-5 4 x 1.8 x 1.1 MY2H40G/MY2HT40G MY2H40-16AStroke MY2H40-16BStroke MYH40-15AR4902 GMY40 RCS-12 TMY-40 C-9 7.15 x 3.75 x 1.7 Material Special resin Stainless steel Special resin NBR NBR NBR NBR NBR Description Seal belt Dust seal band Scraper Piston seal Cushion seal Tube gasket O-ring O-ring No. 14 15 18 39 40 41 42

Air Cylinder NCY2 Series Magnetically Coupled Rodless Cylinder

:in'') 1O(1.5-1.3xiqixsl) 7 a.2.55 1.9+14 F: orjle (PositiDn. ro trcn slid block) dlag (kg) 10: Distance from mouniing sur,ace io toad,s 1 O (2.48-1 .3x1o{xST) 50 Nots) Applya.l in ca.eoi: tt0-300mmST,015.500mnST, @s-soommsT, Sg2 0_6oo.nnsT, and 040-600mmST at tfi6 mat. a.17,5 a 6 0 3.4+1' d.105 42+h SHotizontal operation [Load, 0ffset in operational diruction (r)l ro: Dislance from cent*

Sine Rodless Cylinder Series REBR Direct Mount Type

REBHT25-PS 32 REBHT32-PS 78 Sine Rodless Cylinder High Precision Guide Type Series REBH Dimensions/15, 25 Single axis type/REBH PA L LL 4-M thread depth MM Guide central axis ZZ PB XB 2-P S + Stroke LW EA EB HC HP HA H HB NT HT NL HG PP W 8 A N Z + Stroke Square nut for body mounting J TW (mm) Model A EA EB H HA HB HC HG HP HT J L LL LW M MM REBH15 REBH25 97 26.5 21 46 33.5 33.5 45 17 42

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

Display (PF2D30/31) 40 Sensort 15 Brown 6 2 Analog output Switch output or Pluse output Main circuit Main circuit Main circuit Main circuit 8 4 Load + 12 to 24VDC White 7 3 Black A 62 52 42 5 1 Blue Model A PF2D5--1 PF2D520 12.7 PF2D504 4-4.5 9.52 Display (PF2D30/31) Sensor Brown 52 1 2 6 Analog output Switch output or Pluse output 4 8 Load + 12 to 24VDC White 3 7 Black 1 5 Blue 18 PF2D5