Body Size: 40, Backflow: without Backflow Function, Thread: F (G), IN Port Size: 03 (3/8), OUT Port Size: 03 (3/8), Options: BE (w/Bracket + Square embedded type pressure gauge, with limit indicator), Set Pressure: 0.05 TO 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Knob: Downward, Pressure Unit: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa

Body Size/Type: 32 (Elbow Size 03 Standard), Control Type: 0 (Meter-out), 1: 1, Thread Type: N (NPT), Port Size: 03 (3/8), Applicable Tubing O.D: 09 (ø5/16"), Sealant: S (w/Sealant)

Body Size/Type: 32 (Elbow Size 03 Standard), Control Type: 0 (Meter-out), 1: 1, Thread Type: N (NPT), Port Size: 03 (3/8), Applicable Tubing O.D: 11 (ø3/8"), Sealant: S (w/Sealant)

Body Size/Type: 32 (Elbow Size 03 Standard), Control Type: 1 (Meter-in), 1: 1, Thread Type: N (NPT), Port Size: 03 (3/8), Applicable Tubing O.D: 11 (ø3/8"), Sealant: S (w/Sealant)

SMC CORPORATION OF JAPAN

HEAD OFFICE: 1-16-4, SHIMBASHI, MINATO-KU, TOKYO 105, JAPAN TELEPHONE: 03-3502-2740 FACSIMILE: 03-3508-2480 ECC-PNAL-SOFT-B Effective June 1999 Specifications are subject to change without notice.

3.2

Series Pressure range 0~-101kPa PSE541 Vacuum pressure -101kPa 0Pa For air -100~100kPa PSE543 Compound pressure 100kPa -100kPa 1-16-4 Shimbashi, Minato-ku, Tokyo 105-8659, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2002 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer

Low Differential Pressure Sensor

Sensor -2kPa 0 2kPa 5kPa 10kPa Pressure range For low differential pressure PSE550 0 2kPa -0.2kPa 2kPa Rated differential pressure range of sensor Set differential pressure range of controller 1-16-4 Shimbashi, Minato-ku, Tokyo 105-8659, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2003 SMC CORPORATION All Rights Reserved 1st printing July, 2003 D-YGA P-120 (YGA)

The multi-pin connectors replace the

Connector type Connector type SMC Corporation 1-16-4 Shimbashi, Minato-ku, Tokyo 105-8659, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2001 SMC CORPORATION All Rights Reserved 1st printing December, 2001 D-Export dept. P-100(D) Printed in Japan. This pamphlet is printed on recycled paper with concern for the global environment.

3 Port Solenoid Valve

-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2002 SMC Corporation All Rights Reserved 1st printing GT D-036 P-650(DN) * Printed in Japan.

Body Size: 40, Backflow: K (w/Backflow Function), Thread: N (NPT), IN Port Size: 03 (3/8), OUT Port Size: 03 (3/8), Options: J (Right Angle Square Type Pressure Gauge w/Limit Indicator), Set Pressure: 0.05 TO 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Knob: Downward, Pressure Unit: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale)

Body Size: 40, Backflow: K (w/Backflow Function), Thread: N (NPT), IN Port Size: 03 (3/8), OUT Port Size: 03 (3/8), Options: BJ (w/Bracket, Right Angle Square Type Pressure Gauge w/Limit Indicator), Set Pressure: 0.05 TO 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Knob: Downward, Pressure Unit: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale)

Nozzle Diameter: 18 (ø1.8mm), Vacuum Pressure: S (-89 kPa), SUP: 03 (Screw-in Rc 3/8), VAC: 03 (Screw-in Rc 3/8)

Body Size/Type: 32 (Elbow Size 03 Standard), Control Type: 0 (Meter-out), 1: 1, Thread Type: G (G), Port Size: 03 (3/8), Applicable Tubing O.D: 10 (ø10)

Stations: 03 (3 Stations), Piping: B (U Side: Open; D Side: Open), Thread Type: Rc, Supply Unit Components: S (w/Flow Adj. Valve; Stop Valve: None), Return Unit Flow Switch: 5 (Remote Sensor Unit), Return Unit Flow Range: 04 (0.5 to 4 L/min), Return Unit Components: Flow Adj.

Body Size: 40, Backflow: without Backflow Function, Thread: N (NPT), IN Port Size: 03 (3/8), OUT Port Size: 03 (3/8), Options: E1 (Output: NPN output / Electrical entry: Wiring bottom entry), Set Pressure: 0.05 TO 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Knob: Y (Upward), Pressure Unit: ZA (Digital Pressure Switch: w/Unit Selection Function)

Body Size: 40, Backflow: without Backflow Function, Thread: N (NPT), IN Port Size: 03 (3/8), OUT Port Size: 03 (3/8), Options: BE1 (w/Bracket + Output: NPN output / Electrical entry: Wiring bottom entry), Set Pressure: 0.05 TO 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Knob: Y (Upward), Pressure Unit: ZA (Digital Pressure Switch: w/Unit Selection Function)

Series LVH is a manually operated valve, available in a threaded or integral fitting type.Manually operated, integral fitting valve, Body class: 2 (ø4 orifice dia.), 3 (ø8 orifice dia.), 4 (ø10 orifice dia.), Normally closed (N.C.), Applicable tubing size: 03 (ø3), 04 (ø4), 06 (ø6), 08 (ø8), 10 (ø10), 12 (ø12), 03 (1/8"), 05 (3/16"), 07 (1/4"), 11 (3/8"), 13 (1/2") HIGH PURITY CHEMICAL VALVE

Body Size: 40, Backflow: without Backflow Function, Thread: N (NPT), IN Port Size: 03 (3/8), OUT Port Size: 03 (3/8), Options: w/o Mounting Option, Set Pressure: 1 (0.02 to 0.2 MPa Setting, Exhaust Mechanism: Relieving Type, Knob: Downward, Pressure Unit: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale)

Stations: 03 (3 Stations), Supply/Return Unit Layout: D (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: P (w/o Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 04 (0.5 to 4 L/min), Return Unit Components: Flow Adj.

Stations: 03 (3 Stations), Supply/Return Unit Layout: U (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: P (w/o Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 04 (0.5 to 4 L/min), Return Unit Components: Flow Adj.