High Vacuum L Type Valve

Turn ON the solenoid valve to supply air pressure of 0.4MPa (G) to the port 1(P). Loosen the bolts in numerical order to disassemble the body and the bonnet assembly. When it is difficult to remove the bonnet assembly due to adhesion of the external seal, pull the bonnet assembly straight up slowly without twisting the bonnet.

High Vacuum L Type Valve

A Unit: (mm) Model A B C D E Fn Fd G H J XLG-16-2 40 108 38 20 30 17 44 19 XLG-25-2 50 121 48 27 12 40 26 44 21 XLG-40-2 65 171 66 39 11 55 41 67 29 12 XL-OMV0003 5-3.Dimensions Size 50, 63, 80 E C C E E (KF flange) (K flange) Fd Fn D K J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J K XLG-50-2 70 185 79 46 11 75 52 72 29 9 XLG-63-2 88 212 100 55 11 87 95 70 76 33 9 XLG-80-2 90 257 117

Vacuum Pad with Ejector

Rubber hardness Material NBR Silicone Urethane rubber FKM rubber Rubber hardness (5o) A55 A50 A50 A60 22 - Weight Material: NBR, Mounting: A [g] (1) Weight Difference by Mounting Style [g] B C D E J G H 20 -5 14 7 25 1 11 (2) Weight Difference by Material [g] Pad diameter Silicone Urethane rubber FKM / form rubber ZHP63BM -2.9 0 20.3 ZHP63BMNA-[] C6S 184 ZHP80BM -5.0 0 35.1 ZHP80BMNA-[] C6S

AMX-OM-L020_e

W ARN I N G /H I N TS O N CO RRECT U SE Vi brat i on, Ai r onl y ! I m pact Envi ronm ent H i gher t han /M ERI TS 60

Compact

F E Model Applicable actuator A B C D E F G H MYC-S16A LEMC25 60.6 64.6 70.6 77.2 15 26 4.9 3.4 MYC-S25A LEMC32 95.9 97.5 107.9 115.5 25 38 6.4 4.5 A set of side supports consists of a left support and a right support.

02-cxs-e

:GR-S-010 (10 g) 151

06-cba2-e

Seal kit includes a grease pack (40, 50: 10 g, 63, 80: 20 g, 100: 30 g). Order with the following part number when only the grease pack is needed. Grease pack part no.: GR-S-010 (10 g), GR-S-020 (20 g) 39

07-cv3-e

Seal kit includes a grease pack (40, 50: 10 g, 63, 80: 20 g, 100: 30 g). Order with the following part number when only the grease pack is needed. Grease pack part no.: GR-S-010 (10 g), GR-S-020 (20 g) 199

07-cvs1-e

Seal kit includes a grease pack (40, 50: 10 g, 63, 80: 20 g, 100: 30 g). Order with the following part number when only the grease pack is needed. Grease pack part no.: GR-S-010 (10 g), GR-S-020 (20 g) 201

08-ca2-e

Seal kit includes a grease pack (40, 50: 10 g, 63, 80: 20 g, 100: 30 g). Order with the following part number when only the grease pack is needed. Grease pack part no.: GR-S-010 (10 g), GR-S-020 (20 g) 35

08-ca2kw-e

Seal kit includes a grease pack (40, 50: 10 g, 63, 80: 20 g, 100: 30 g). Order with the following part number when only the grease pack is needed. Grease pack part no.: GR-S-010 (10 g), GR-S-020 (20 g) Piston seal NBR Cushion valve seal NBR Cylinder tube gasket NBR Disassembly/Replacement 1. Please consult with SMC when the rod seal is to be replaced.

08-ca2w-e

Seal kit includes a grease pack (40, 50: 10 g, 63, 80: 20 g, 100: 30 g). Order with the following part number when only the grease pack is needed. Grease pack part no.: GR-S-010 (10 g), GR-S-020 (20 g) 15 is a non-replaceable part, so it is not included in the seal kit. 36

ITVH

Test sample ITVH ITVH 3 W or less Power consumption ITVX PVQ 3000 L/min (ANR)* Maximum flow rate VY1 * Supply pressure: 3.0 MPa, Set pressure: 1.0 MPa VBA VBAT Fluorine grease Parts in contact with fluid AP100 Rc, NPT, G Pipe thread type * Without options Approx. 630 g* Weight Digital pressure display 955 3.0 MPa Maximum Supply Pressure High Pressure Electro-Pneumatic Regulator ITVH Series

20.0

Normal Bottom Peak BATTERY 1.5V x 2 LR6 G kV MADE IN JAPAN IZD IZE POWER LIGHT 110 Do not apply a strong impact on the sensing part.

Fieldbus System

End Plate Model EX245-EA2-1 EX245-EA2-2 Bracket Yes No Weight 200 g 150 g EX245-EA24 EX245 Series Dimensions SI Unit End Plate EX245-SPN1 EX245-EA2-1 120 6.5 14 22.1 28.6 6.6 5.6 98.8 148.5 133.5 61.5 1.6 6 85 10 EX245-EA2-2 37 18 120 14 61.5 44 50 130 23 35 Digital Input Module Digital Output Module EX245-DY1 EX245-DX1 22 22 27 13.5 61 120 120 81 27 54 54 61 5 Fieldbus System: For Input/

Bag Filter

FGG P.C.D B E F FGA C A (mm) Applicable model G H I Part No.

AR20-B to AR60-B

AR 30 q 03 t y K r BE B Option/Semi-standard: Select one each for a to g. Option/Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order.

Thermo-con/Rack Mount Type

Heat generation amount Q : Unknown : 0.8C (0.8 K) : 25C (298.15 K) : 25.8C (298.95 K) : 3 L/min : Water Density g: 1 x 103 kg/m3 Circulating fluid temperature difference DT (= T2 T1) Circulating fluid outlet temperature T1 Circulating fluid return temperature T2 Circulating fluid flow rate L Circulating fluid Specific heat C: 4.2 x 103 J/(kgK) Q = DT x L x g x C 60 x 1000 T2: Return temperature

Series 10-, 21- AF-A Air Filter

flats 17 Clearance for maintenance G 1/4 Drain A Metal bowl 10-/21-AF20-A 10-/21-AF30-A to 60-A With bowl guard Metal bowl with level gauge Metal bowl Applicable model Semi-standard specifications Dimensions B B B B Metal bowl with level gauge Bracket mounting size Semi-standard specifications Standard specifications Model B Metal bowl With bowl guard B B V U T R Q N M J G D E C B A P S

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

Regulator Series AR-B 1021Series ARK-B 1021Regulator with Backflow Function How to Order Clean series K F 10 AR B 30 03 BG 1N K F 21 AR B 30 03 BG 1N Copper, fluorine and silicone-free + Low particle generation q r t y w e Regulator Option/Semi-standard: Select one each for a to g.