Body, Exhaust Type: G (Single Unit - High-noise Reduction Silencer Exhaust), Nominal Nozzle Size: 15 (ø1.5), Air Operated: Q1 (Air Operated, Supply Valve; N.C; Release Valve: N.C.), Vacuum Sensor: C (Digital Pressure Switch for Vacuum / 0 to -101 kPa / PNP 2 Outputs), Connector: Y (For Pressure Switch for Vacuum: 2m Lead Wire w/Connector; Pressure Sensor Assembly: 3m w/Lead Wire), Vacuum,

Stations: 10 (Stations), Wiring: L (Individual Wiring or None), Manifold Options: without Option, Exhaust: Q (Vacuum Pump System), Pressure Switch for Vacuum/Pressure Sensor: A (Digital Pressure Switch for Vacuum, 0 to -101, NPN 2 Outputs, with Unit Selection Function), Leadwire: L (Standard Leadwires, X2), Unit Options: C [Vacuum Pump System PE Port Female Thread Specification (M3)], 1st

Rated Vacuum Range: -101 to 0 kPa, Output Specification: P (PNP Open Collector 1 Output), Unit Specification: P (w/Unit Selection Function, Initial Value psi), Piping Specification: M5 (M5 Female Thread), Option 1: w/o Lead Wire, Option 2: A1 (Bracket A, Vertical Mounting), Option 3: Y (w/o Operation Manual, w/o Calibration Certificate)

IO-Link/ELECTRO-PNEUMATIC REGULATOR

End of report 7 Doc.No.DIT-69900-OM005-E Revision E: Correction concerning communication data, Product ID addition and correction by software modification. 0120-837-838 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the

DIQ-69200-OM002

This operation manual refers to all standard types and is partially applicable to special models. 0120-837-838 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2014 SMC Corporation All Rights Reserved

Electro-pneumatics Hybrid Regulator

If the product has failed, then please return the electro-pneumatic hybrid regulatorc as it is. 10 VY-OMK0001-C Revision history CE ARenewal WQ 1st printing : 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer

Air Suction Filter

Procedure 3 Element Cover Procedure 2 Procedure 6 Gasket Stop pin Procedure 5 Procedure 2 -11- Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2018 SMC Corporation All Rights Reserved

Vacuum Ejector Body Ported Type/Box Type (Built-in Silencer)

ZH-OM00401 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2021 SMC Corporation All Rights Reserved 20 -

ITV2-OM00112_E

This operation manual refers to all standard types and is partially applicable to special models. 0120-837-838 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2012 SMC Corporation All Rights Reserved

 MICRO MIST SEPARATOR REGULATOR 

S Revision history A The tightening torque value of the element assy is changed. 2017.7 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2008 SMC Corporation All Rights Reserved

！ Contact our sales office regarding a delivery date or a price since this is a special model. SP158X-002E P.G.Information (Specialized Product) P: TS SMC Corporation Liquid Dispense Pump (Solenoid type) 4-14-1, SOTO-KANDA

SP158X-002E P: TS P.G.Information (Specialized Product) SMC Corporation 4-14-1, SOTO-KANDA, CHIYODA-KU, TOKYO 101-0021, JAPAN URL: http://www.smcworld.com Liquid Dispense Pump (Solenoid type) Series LSP Features Compact solenoid type diaphragm pump, which dispenses fixed amount of liquid from 5L to 200L each time it is operated.

Flame Resistant (Equivalent to UL-94 Standard V-0) Speed Controller with One-touch Fittings Elbow Type AS Series

15.2 32.1 13.2 6 34 17 34.4 25.2 17.7 15.2 17 8 36 12 18.5 36.4 41.1 36.1 35.6 30.6 27.2 18.5 18.5 10 38 21 18.3 44.5 35.3 13.2 6 R 1/4 63 17 39.3 27.8 15.2 8 65 18.5 41 29.5 21.3 49.9 44.9 44.4 39.4 18.5 10 67 21 43.1 31.5 20.9 12 69 22 44.3 32.8 19 14 23 13.2 6 58 17 39.3 27.8 15.2 8 60 18.5 41 29.5 R 3/8 19.8 47.4 42.4 42.4 37.4 18.5 10 62 21 43.1 31.5 20.9 12 64 22 44.3 32.8 18.5 10 101

! Contact our sales office for delivery dates and prices as this is a special model. SP133X-010E P: RU P.G.Information (Specialized Product) SMC CORPORATION Pilot Operated Check Valve 4-14-1,SOTO-KANDA, CHIYODA

SP133X-010E P: RU Pilot Operated Check Valve ASP-X369 Series, XTO Series Intended use: Drop prevention of cylinders and circuit configuration for P.G.Information (Specialized Product) SMC CORPORATION 4-14-1,SOTO-KANDA, CHIYODA-KU, TOKYO 101-0021, JAPAN URL: http://www.smcworld.com temporary intermediate or emergency stops (Note) Precise intermediate stops are not guaranteed.

SMC Pneumatic Clean Series

the value in the graphs below. 0 -0.001 -0.002 -0.003 -0.004 -0.005 -0.006 -0.007 -0.008 -0.009 -0.010 -0.011 -0.012 11-CJ2 11-CM2 11-CQ -0.027 13-MXS16 Vacuum pressure (MPa) Vacuum pressure (MPa) -0.028 13-MJP 13-MXS20 -0.029 11-CU -0.030 13-MXS25 -0.031 11-CXS -0.032 1 2 3 4 1 2 3 4 Piping length (m) Piping length (m) Back matter 6 Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

AS-FPQ/AS-FPG

Operating Pressure Particulate Generation Grade Classifications 1.2 104 Average particle concentration Particles/ft3 Max. operating pressure MPa Grade 4 1.0 103 0.8 Grade 3 102 0.6 101 Grade 2 100 0.4 Grade 1 10-1 0.2 0 5 0 20 40 60 1 0.1 0.2 Particle size m or less 0.3 0.5 Operating temperature C 15-17-3 4 Series AS-FPQ/FPG How to Order AS 2 1 1 2 F P Q 01 06 Body size 1 2 3 4 M5 standard

CG5-X6011

CD1 CD2 CL CP 0.500 0 -.002 0.106 2.28 1.94 NCDP-150-SUS 0.750 0 -.002 0.140 3.10 2.72 NCDP-325-SUS Note: Cotter Pins are included. 7 Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, Japan Phone: 03-5207-8271 Fax: 03-5298-5361 URL http://www.smcworld.com 10100 SMC Boulevard Noblesville, IN 46060, U.S.A.

New

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 URL http://www.smcworld.com 2010 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing OV printing OV 7150SZ Printed in Japan. D-DN

10-my1h-e

.: GR-S-010 (10 g) 101

(Or None in the Case of No Switch), Made-to-Order: X10 [Long Stroke (101 to 200mm)], Port Thread: -

(Or None in the Case of No Switch), Made-to-Order: X10 [Long Stroke (101 to 200mm)], Port Thread: NPT 1/8