Speed Controller: Standard Type Series AS In-line Push Locking Type 1

Needle Valve/Flow Characteristics AS3500 Inlet pressure: 0.5 MPa Flow rate (/min (ANR)) Effective area (mm2) Metal handle Resin handle Number of needle rotations JIS Symbol How to Order 02 AS3500 Thread type Material for handle Nil N F Resin Metal Nil 2 Rc NPT G Port size 1/4 3/8 02 03 Caution Be sure to read before handling.

Metering Valve with Silencer Series ASN2 1

0 Electroless nickel plated Electroless nickel plated Electroless nickel plated Nickel plated Brass Carbon steel NBR PVA sponge Soft polyethlene Brass NBR/Stainless steel 304 Electroless nickel plated M5, U10/32 only Note) ASN201/02 type is made of steel.

Lubrication Equipment

ALF400 ALT-9 1.17-11 Auto Feed Lube ALF400 to 900 Operating pressure range Tank and line pressure How to Order Auto Feed Lube ALF 40 02 0 Option Auto Feed Lube Port size Symbol Description Applicable model W/ bracket ALF400 to 600 B 02 03 04 06 10 12 14 20 4 1 Body size 8 3 AC 40 50 60 80 90 2 1 2 1 4 3 4 3 AV 1 1 2 1 1 1 2 2 1 4 1 AU 2 1 AF Thread Rc (PT) NPT G (PF) N F AR Note 1) Tank

CC

Conditions: Operating pressure 0.5MPa, Operating oil Turbine oil Class 1 (ISO VG32), Piping length 1m AS420-02, 03, 04 AS500-06 AS2000-01, 02 AS600-10 AS3000-02, 03 AS4000-02, 03, 04 Circuit 4.12-12

Series IDG

IDG60S to IDG100S IDG3 to IDG50 IDG3H to IDG50H IDG30L/ IDG50L Port size With separator regulator Symbol Bore Size 3 5 10 20 30 50 60 75 100 V IDG60 to IDG100 IDG60H to IDG100H IDG60L to IDG100L 01 1/8 02 1/4 IDG60S to IDG100S Note) Note) 03 3/8 04 1/2 Note 1) Specifications with element service indicator are also available. See the order made section on page 33.

Microspeed Cylinder

Elbow/Universal Type Flow rate and effective area AS221FM-02 AS221FM-01 Model AS121FM-M5 AS231FM-02 AS231FM-01 AS131FM-M5 3.2, 4, 6 6, 8 Metric sizes 3.2, 4 8, 10 4 6 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" Inch sizes 1/8", 5/32" 5/32" 3/16" 38 (1.33) 7 (0.25) Flow rate l/min (ANR) (CFM) 12 (0.42) Controlled flow 0.6 (0.03) 0.2 (0.01) 0.1 (0.006) Effective area

3 Port Air Operated Valve Series SYJA300 1

SYJA524-01 SYJA712-01 SYJA722-01 SYJA714-01 SYJA714-02 0.76 0.69 0.69 0.66 0.63 0.64 0.51 0.42 0.34 0.33 0.45 0.48 2.5 2.4 2.7 2.6 2.3 2.3 0.77 0.72 0.71 0.74 0.70 0.68 0.43 0.38 0.32 0.31 0.21 0.31 2.8 2.7 2.9 3.0 2.8 2.7 N.C. N.O. Rc 1/8 Body ported 80 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 M5 x 0.8 130 (Without subplate 80) N.C. Base mounted (with sub-plate) SYJA724-01 SYJA724-02 N.O.

VT325

Suitable for use in vacuum applications 101.2 kPa (For vacuum specifications type: VT/VO325V) 02 1 G VT325 SY Thread type SYJ Nil F N T Rc G NPT NPTF For manifold: Enter VO.

VHS

VHS400-02 VHS401-02 VHS400-03 VHS401-03 VHS400-04 VHS401-04 Pipipng direction VHS500-06 VHS501-06 SA Right IN1 (P) 3 4 1 2 3 8 1 4 Port size Effective area (mm2) Weight (kg) VA 1 (P) 2 (A) 21 105 76 54 35 35 57 93 2 (A) 3 (R) SA 0.25 0.34 Left or right to the front face of the handle.

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Elbow/Universal Type Flow rate and effective area AS221FM-02 AS221FM-01 Model AS121FM-M5 AS231FM-02 AS231FM-01 AS131FM-M5 3.2, 4, 6 6, 8 Metric sizes 3.2, 4 8, 10 4 6 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" Inch sizes 1/8", 5/32" 5/32" 3/16" l/min (ANR) {Nl/min} 38 7 Flow rate 12 Controlled flow Effective area mm 0.6 0.2 0.1 l/min (ANR) {Nl/min} 230 Flow rate

Series LX Dedicated Stepper Motor Driver and Positioning Driver Series LC6D/LC6C

Performance/Specifications General specifications LC5-1-T1-02 Part no.

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

22 L For positive pressure ZSE50 02 M F L 22 For compound pressure Piping specifications Option 02 T2 G2 R 1/4 (M5 with female screw), Piping in backward direction Nil None NPT 1/4 (M5 with female screw), Piping in backward direction Bracket A G 1/4 (M5 with female screw), Piping in backward direction Optional A Input/output specifications 22 30 62 NPN open collector 2 output + Analog output

Pressure Relief 3 Port Valve with Locking Holes

VH*-OMX0068-A PRODUCT NAME Pressure Relief 3 Port Valve with Locking Holes MODEL / Series / Product Number VHS20-(F,N)01~(F,N)02(-R,Z)-D VHS30-(F,N)02~(F,N)03(-R,Z)-D VHS40-(F,N)02~(F,N)04(-R,Z)-D Contents Page 1. Safety Instructions 1~5 2. Application 6 3. Specifications 6 4. How to Order 7~8 5. Construction / Parts List 9 6.

PSxx-OMM0002CN

Ground () * UL UL1310 2 UL1585 2 30[Vrms] 42.4[V ]2 UL , 100 () NG -5No.PS-OMM0002CN-F SUS630SUS304 () * (14 ) FG (49 N () () TSJSwagelok(Swagelok URJ Swagelok(VCR)/GroundGround Swagelok,VCRSwagelok Company -6No.PS-OMM0002CN-F * 6 33 () () 10m DC(-)() * ( ) () CE -7No.PS-OMM0002CN-F 0~50(5) SUS630() SUS304() ( ) * 10~15 15 /1% 1941 LCD * -8No.PS-OMM0002CN-F ISE80 02

(mm)Connection threadsModel Elbow typeUniversal type Meter-outMeter-inMeter-outMeter-in4R 1/4-02-04AS2211FG-02-04-02-04-02-04

(mm)Connection threadsModel Elbow typeUniversal type Meter-outMeter-inMeter-outMeter-in10R 1/4-02-10AS2211FG-02-10AS2301FG-02-10AS2311FG-02-10

(mm)Connection threadsModel Elbow typeUniversal type Meter-outMeter-inMeter-outMeter-in10R 1/4AS3201FG-02-10AS3211FG-02-10AS3301FG-02-10AS3311FG-02-10

(mm)Connection threadsModel Elbow typeUniversal type Meter-outMeter-inMeter-outMeter-in4R 1/4-02-04AS2211FG-02-04-02-04-02-04

① When there is no piping rotation stopper, the part numbers are as follows: IRV10-01/02□-X3 and IRV20-02/03/04□-X3.
② When there is a piping rotation stopper, the part numbers are as follows: IRV10-01/02□-X28 and IRV20-02/03/04□-X28.
The IRV10 series catalog can be found here.

① When there is no piping rotation stopper, the part numbers are as follows: IRV10-01/02□-X3 and IRV20-02/03/04□-X3.
② When there is a piping rotation stopper, the part numbers are as follows: IRV10-01/02□-X28 and IRV20-02/03/04□-X28.
The IRV10 series catalog can be found here.