EX260-SMJ_eng L ERR L RUN PWR(V) PWR Outline Dimensions Precautions for maintenance Be sure to switch off the power. Check there is no foreign matter inside the SI unit. Check there is no damage and no foreign matter being stuck to the gasket. Be sure to tighten the screws with the specified torque.
min)Flow setting range Note 7) (l/min)Main tank capacity Note 8) ( l )Sub-tank capacity Note 9) ( l )Port sizeWetted parts materialTemperature rangePressure rangeRequired flow Note 10) (50/60 Hz) (l/min)Power supplyBreaker capacityRated currentAlarmCommunications( C)(MPa)(A)(kg)HRZ010-WSWater-cooled refrigerationR404A (HFC)PID controlTemperature: 10 to 35 C, Humidity: 30 to 70%RH?
min)Flow setting range Note 7) (l/min)Main tank capacity Note 8) ( l )Sub-tank capacity Note 9) ( l )Port sizeWetted parts materialTemperature rangePressure rangeRequired flow Note 10) (50/60 Hz) (l/min)Power supplyBreaker capacityRated currentAlarmCommunications( C)(MPa)(A)(kg)HRZ010-WSWater-cooled refrigerationR404A (HFC)PID controlTemperature: 10 to 35 C, Humidity: 30 to 70%RH?
min)Flow setting range Note 7) (l/min)Main tank capacity Note 8) ( l )Sub-tank capacity Note 9) ( l )Port sizeWetted parts materialTemperature rangePressure rangeRequired flow Note 10) (50/60 Hz) (l/min)Power supplyBreaker capacityRated currentAlarmCommunications( C)(MPa)(A)(kg)HRZ010-W2SWater-cooled refrigerationR404A (HFC)PID controlTemperature: 10 to 35 C, Humidity: 30 to 70%RHClear water
) +/-0.03 (Type L); Non-rotating accuracy 80 & 100mm bore: +/-0.03° (Type M) +/-0.03 (Type L); Rubber bumpers as standard; Auto switch capable; Material restriction: Copper and Zinc free
(Type L); Non-rotating accuracy 80 & 100mm bore: +/-0.03° (Type M) +/-0.03 (Type L); Air cushions standard; Auto switch capable; Material restriction: Copper and Zinc free
) +/-0.03 (Type L); Non-rotating accuracy 80 & 100mm bore: +/-0.03° (Type M) +/-0.03 (Type L); Rubber bumpers as standard; Auto switch capable; Material restriction: Copper and Zinc free
(Type L); Non-rotating accuracy 80 & 100mm bore: +/-0.03° (Type M) +/-0.03 (Type L); Air cushions standard; Auto switch capable; Material restriction: Copper and Zinc free
IO-Link: L/min; Accumulated Flow: L; Temp.: °C)
The S type is a high-vacuum type, and the L type is a large flow rate type.
Refer to the ZH10 models and “Flow Rate Characteristics” graphs below. Symbol “S” (-90 kPa) and “L” (-48 kpa or -66 kPa) are available for the vacuum pressure reached, but they are not related to the nozzle diameter.
20 to 350 L/min2 L/min2 L/pulse30A340 g425 g
min)Flow setting range Note 7) (l/min)Main tank capacity Note 8) ( l )Sub-tank capacity Note 9) ( l )Port sizeWetted parts materialTemperature rangePressure rangeRequired flow Note 10) (50/60 Hz) (l/min)Power supplyBreaker capacityRated currentAlarmCommunications(C)(MPa)(A)(kg)HRZ010-W1SWater-cooled refrigerationR404A (HFC)PID controlTemperature: 10 to 35C, Humidity: 30 to 70%RHAqueous solution
min)Flow setting range Note 7) (l/min)Main tank capacity Note 8) ( l )Sub-tank capacity Note 9) ( l )Port sizeWetted parts materialTemperature rangePressure rangeRequired flow Note 10) (50/60 Hz) (l/min)Power supplyBreaker capacityRated currentAlarmCommunications(C)(MPa)(A)(kg)HRZ010-W1SWater-cooled refrigerationR404A (HFC)PID controlTemperature: 10 to 35C, Humidity: 30 to 70%RHAqueous solution
min)Flow setting range Note 7) (l/min)Main tank capacity Note 8) ( l )Sub-tank capacity Note 9) ( l )Port sizeWetted parts materialTemperature rangePressure rangeRequired flow Note 10) (50/60 Hz) (l/min)Power supplyBreaker capacityRated currentAlarmCommunications(C)(MPa)(A)(kg)HRZ010-W1SWater-cooled refrigerationR404A (HFC)PID controlTemperature: 10 to 35C, Humidity: 30 to 70%RHAqueous solution
min)Flow setting range Note 7) (l/min)Main tank capacity Note 8) ( l )Sub-tank capacity Note 9) ( l )Port sizeWetted parts materialTemperature rangePressure rangeRequired flow Note 10) (50/60 Hz) (l/min)Power supplyBreaker capacityRated currentAlarmCommunications(C)(MPa)(A)(kg)HRZ010-W1SWater-cooled refrigerationR404A (HFC)PID controlTemperature: 10 to 35C, Humidity: 30 to 70%RHAqueous solution
min)Flow setting range Note 7) (l/min)Main tank capacity Note 8) ( l )Sub-tank capacity Note 9) ( l )Port sizeWetted parts materialTemperature rangePressure rangeRequired flow Note 10) (50/60 Hz) (l/min)Power supplyBreaker capacityRated currentAlarmCommunications(C)(MPa)(A)(kg)HRZ010-W1SWater-cooled refrigerationR404A (HFC)PID controlTemperature: 10 to 35C, Humidity: 30 to 70%RHAqueous solution
min)Flow setting range Note 7) (l/min)Main tank capacity Note 8) ( l )Sub-tank capacity Note 9) ( l )Port sizeWetted parts materialTemperature rangePressure rangeRequired flow Note 10) (50/60 Hz) (l/min)Power supplyBreaker capacityRated currentAlarmCommunications(C)(MPa)(A)(kg)HRZ010-W1SWater-cooled refrigerationR404A (HFC)PID controlTemperature: 10 to 35C, Humidity: 30 to 70%RHAqueous solution
min)Flow setting range Note 7) (l/min)Main tank capacity Note 8) ( l )Sub-tank capacity Note 9) ( l )Port sizeWetted parts materialTemperature rangePressure rangeRequired flow Note 10) (50/60 Hz) (l/min)Power supplyBreaker capacityRated currentAlarmCommunications(C)(MPa)(A)(kg)HRZ010-W1SWater-cooled refrigerationR404A (HFC)PID controlTemperature: 10 to 35C, Humidity: 30 to 70%RHAqueous solution