ITV_D-E

Thi s operat i on m anual i s subj ect t o change w i t hout pri or not i ce or any obl i gat i on on t he part of t he m anuf act urer. I TV2O M 00051D 6

ZP3

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet Width across flats 7 E N S U F GN GS HS 04 06 08 UM U2 6.5 0.9 M-5AU-2 3 6 10 15 20 J JB K U4 8.5 1.8 M-5AU-4 ZP3 T U2 6.5 0.9 M-5AU-2 U4 8.5 1.8 M-5AU-4 U6 10.5 2.5 M-5AU-6 10 13 16 Construction p. 161 1 N: NBR, S: Silicone rubber, U: Urethane rubber, F: FKM, GN: Conductive NBR, GS: Conductive silicone rubber, HS: Semiconductive

Rotary Actuator

CRB1 L1 L1 = L1 = L1 Q1 = M Q1 = M L1 = L1 MSU Q1 = M Q1 = M W1 = CRJ L1 = Q1 CRA1 CRA1 Q1 Q1 Q1 L1 K axis T axis J axis X axis CRQ2 X = [mm] [mm] L3 = L1 = Size Thread 30 50 63 80 100 M3 x 0.5 2.5 M5 x 0.8 4 4 M6 x 1 5 5 M8 x 1.25 6.8 6.8 6.8 M10 x 1.5 8.5 8.5 M12 x 1.75 10.3 10.3 Rc1/8 8 8 Rc1/4 11 Size Thread 30 50 63 80 100 M3 x 0.5 2.5 M5 x 0.8 4 4 M6 x 1 5 5 M8 x 1.25

7

A B M G1/2 IN OUT 2 x M4 x 0.7 Thread depth 8 2 x P Port size L K I F 18 (D) J Conduit U E 280 C (42) 45 23 G1/2 For Heated water/ High temperature oil Full-wave rectifier T A B IN OUT M 2 x P Port size L K F I (D) J (mm) Model Conduit terminal Conduit Grommet Electrical entry Port size P A B C E F I J K L T V 1/4, 3/8 1/2 88 (93.5) 22.5 30 D M T 55.5 (61) U T 49.5 (55) U U 50 20 4.5 5

Aluminum High Vacuum Angle Valve

indicator Flange side r Temperature specifications/Heater t Auto switch type Heater With 100C heater With 120C heater Temperature 5 to 60C Symbol Nil Auto switch model Remarks Without auto switch (without built-in magnet) Symbol Nil High temperature type D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9/

Single Axis Electric Actuator Series LJ1H

of gravity (mm) m a = 2000 1000 L1 a = 3000 0 2 4 6 8 10 Transfer load m (kg) 600 L2 400 Mer L2 (mm) Rolling Yawing m 200 L2 Mer 0 2 4 6 8 10 m Transfer load m (kg) 3000 a = 1000 2000 L3 (mm) L3 1000 a = 2000 m a = 3000 Mey a 0 2 4 6 8 10 Transfer load m (kg) Refer to page 145 for deflection data. 2 Standard Motor/Horizontal Mount Specification Series LJ1H10 Dimensions/LJ1H101PB Scale:

MG

m (kg) 80 100 80 10 10 80 5 10 20 29 30 50 49 300 200 100 5 10 20 29 30 50 49 300 200 100 Stroke (mm) Stroke (mm) 8-19-16 Compact Guide Cylinder Series MGP Horizontal Mounting (Ball bushing bearing) (19) l = 50 mm, V = 400 m/s (20) l = 100 mm, V = 400 m/s MGPL12 to 25 5 MGPL12 to 25 5 25 25 25 25 25 25 MX Load weight m (kg) Load weight m (kg) MTS 20 20 20 20 20 20 MY 16 16 16 16 16 16 CY

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

: Transfer load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) a = 2000 m 1000 L1 a = 3000 0 2 4 6 8 10 Transfer load m (kg) 600 L2 400 Mer L2 (mm) Rolling Yawing m 200 L2 Mer 0 2 4 6 8 10 m Transfer load m (kg) 3000 a = 1000 2000 L3 (mm) L3 1000 a = 2000 m a = 3000 Mey a 0 2 4 6 8 10 Transfer load m (kg) Refer to page 145 for

Possible to transfer a workpiece at low-speed.

L1 L1 = L1 = L1 L1 = Q1 = M Q1 = M Q1 = M Q1 = M L1= L1 L1= Q1 = M Q1 K axis Q1 T axis (mm) Q1 Q1 L1 L1 Size Thread M 3 x 0.5 M 4 x 0.7 M 5 x 0.8 M 6 x 1 M 8 x 1.25 M10 x 1.5 Rc 1/8 Q1 J axis Z axis (mm) 15 20 30 40 10 (mm) Size Thread M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 4.2 5 6.8 8.5 8.2 2.5 2.5 3.3 2.5 3.3 4.2 5 20 10 15 40 30 Size Thread M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 3.3

Compact

Nil Without cable (Without communication plug connector)*2 Nil Screw mounting D DIN rail mounting* LEC 1 1.5 m 3 3 m 5 5 m S Straight type communication plug connector*2 * DIN rail is not included. Order it separately. LEC S LEC SS-T T T-branch type communication plug connector*2 *1 When Without controller is selected for controller types, I/O cable cannot be selected.

o

wthout connectq t: L type plug connector with lead wir 't$rHi& @ Grommet Lead wire length rl2inch (300mm) M0: M type plug connector wthout connector l: M type plug conneclor wnh lead wire length: 12 inch (3oommr.dL Grommet Lead wire length : 24 inch (600mm] ll,ow to ordar Connector ass'y number v.J1_9:?

o

wthout connectq t: L type plug connector with lead wir 't$rHi& @ Grommet Lead wire length rl2inch (300mm) M0: M type plug connector wthout connector l: M type plug conneclor wnh lead wire length: 12 inch (3oommr.dL Grommet Lead wire length : 24 inch (600mm] ll,ow to ordar Connector ass'y number v.J1_9:?

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

wthout connectq t: L type plug connector with lead wir 't$rHi& @ Grommet Lead wire length rl2inch (300mm) M0: M type plug connector wthout connector l: M type plug conneclor wnh lead wire length: 12 inch (3oommr.dL Grommet Lead wire length : 24 inch (600mm] ll,ow to ordar Connector ass'y number v.J1_9:?

CJ2

Dd9 d L m t CJ2 l Applicable bore (mm) Applicable snap ring Part no.

Vacuum Pad

ZP3-T(10/13/16)UM;(J/K)3-@ ZP3-T(10/13/16)B;(J/K)3-@ ZP3-T(10/13/16)UM;(J/K)6-@ ZP3-T(10/13/16)B;(J/K)6-@ ZP3-T(10/13/16)UM;(J/K)10-@ ZP3-T(10/13/16)B;(J/K)10-@ ZP3-T(10/13/16)UM;(JB/K)15-@ ZP3-T(10/13/16)B;(JB/K)15-@ ZP3-T(10/13/16)UM;(JB/K)20-@ ZP3-T(10/13/16)B(JB/K)20-@ Buffer assembly part no. Note 3) Buffer assembly part no. Note 3) Pad unit part no.

MGP

MXQ MXF m m MXW MXP MG MGP MGQ MGG 25/50 stroke Over 50 stroke 200 200 MGC P=0.5MPa P=0.5MPa MGPS80 MGPS80 MGF 100 100 Load weight m (kg) Load weight m (kg) CY1 MGPS50 MGPS50 50 50 MY1 40 40 30 30 20 20 10 20 30 40 50 100 200 10 10 20 30 40 50 100 200 10 Eccentric distance l (mm) Eccentric distance l (mm) 3.17-31 Series MGPS Construction !6 o i !0 !8 r !1 t !9 !2 !6e q u !4 w !7 !3 @0 !

Air Cylinder

Clevis Pivot Bracket Pin (For CM2E(V)) Trunnion Nut/Material: Carbon steel (mm) (mm) H Material: Carbon steel B d D m m L2 C D t t L1 d Part no. Applicable bore size B C D d H TN-020B 20 26 28 25.5 M20 x 1.5 10 TN-032B 25, 32 32 34 31.5 M26 x 1.5 10 TN-040B 40 41 45 40.5 M32 x 2 10 Part no.

MGP

50mm V = 200m/s 20 l =100mm V = 200m/s MGPL16 to 25 MGPL16 to 25 10 10 25 25 20 25 20 25 5 5 20 Load weight m (kg) Load weight m (kg) Load weight m (kg) Load weight m (kg) 20 16 16 16 16 1 20 50 76 75 100 200 1 20 50 76 75 100 200 Stroke (mm) Stroke (mm) MGPL32 to 63 MGPL32 to 63 30 30 50, 63 20 20 50, 63 50, 63 Load weight m (kg) 32, 40 50, 63 50, 63 32, 40 32, 40 32, 40 50, 63 32, 40 10

The ISE2 series is a compact, pressure switch (for positive pressure) and can be integrated with ZX or ZR vacuum systems. The ISE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., 3-Screen High Precision Dig Press Switch, PRESSURE SWITCH, ISE1-6, 65.00000 lb

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(Example) For M3: L2 = 6 mm Applicable shaft types: J, K, T 2. Q1 = M L2 = L2 + (3 x P) 3. L1 + (3 x P) L2 + (3 x P) 4. L2 = Q2 = M L1 = 5. Q2 = M 6.