MY1

B 100 124 88.5 Operating range l Note) 9 10 6 B A MY1HT (High rigidity/High precision guide type) (mm) 63 50 Mounting position A 290.5 335.5 B 123.5 138.5 Operating range l Note) 5 5 A B 8-11-106

Aluminum High Vacuum Angle Valve

Rear flange surface M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) 3 Solid state auto switch Seal material changed part Flange: Reed auto switch Leakage (Pam3/s or less) Note) Internal 1.3 x 10-9 (FKM) 1.3 x 10-7 1.3 x 10-9 (FKM) 1.3 x 10-7 Symbol Changed part External Without auto switch (with built-in

Air Cylinder

Clevis (mm) Bore size Stroke range B CD CZ L RR TE TF TH TT TV TW TX TY TZ 1 to 50 st 51 to 100 st 101 to 125 st 126 to 200 st Z ZZ Z ZZ Z ZZ Z ZZ 20 Up to 125 38 8 29 14 11 10 5.5 25 3.2 (35.8) 42 16 28 43.4 143 164 168 189 193 214 25 Up to 200 45.5 10 33 16 13 10 5.5 30 3.2 (39.8) 42 20 28 48 150 171 175 196 200 221 225 246 32 Up to 200 54 12 40 20 15 10 6.6 35 4.5 (49.4) 48 22 28 59.4

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 0 10 20 30 40 50 60 Work load [kg] 11LEFS 1500 1500 1500 Mep 11LEJS 1000 1000 1000 L3 [mm] L3 [mm] L3 [mm] m 25AL3 Z 500 500 500 LEC 0 0 0 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 0 10 20 30 40 50 60 Work load [kg] LEC S 1500 1500 1500 LEC SS-T LEC Y LEC Y L4 1000 1000 1000 L4 [mm] L4 [mm] L4 [mm] X Motorless 500 500

Hydraulic

(mm) With rod boot Stroke range (mm) Bore size (mm) l e CD J B BB C F GA GB M NA NB P R S LH LT LW LX X Y Z SS f Q B-rod C-rod B-rod C-rod 32 M10 x 1.25 58 109 38 14 21 15 11 37 31 3/8 39 130 11 35 14 13 88 29 14 98 57 21.5 15 52 25 to 1400 40 M10 x 1.25 65 118 45 10 21 15 11 36 30 3/8 42 130 11 37.5 14 13 95 29 14 98 57 12 15 52 52 25 to 1400 1/3.5 stroke 50 M10 x 1.25 76 145 52 10 27

LJ1H

Motor Mounting 143 Deflection Data 145 Part Number Designations N 1 1 B G LJ1 H 10 100 F W X10 Guide type High rigidity direct acting guide H X10 Non-standard motor Series Series 10 Series 20 Series 30 Limit switch 10 20 30 None B contact specification 2 pcs.

CJ2

Bore size B C d H 7 8 8.1 9.2 M4 X 0.7 M5 X 0.8 3.2 4 NTJ-010A NTJ-015A 10 16 (mm) Bore 10 16 C GA GB H KA LD A B MM NA NB L LH LX X Y S Z LB 3.5, 6.5Depth of counter bore: 4 14 16 5 20 4.2 15 12 M4 X 0.7 20.5 9.5 23 8 12 28 8 54 74 16 4.5, 8Depth of counter bore: 5 20 16 5 20 5.2 15 18 M5 X 0.8 20.5 9.5 26 10 16 28 8 55 75 20 Bottom mounting CJ2RKA10 SCJ210, #10 CJ2RKA16 SCJ216, #10 The

CA2

600 up to 600 up to 750 up to 750 CS1 B H1 K KA C J D E F G H MM N P TT TZ S S TX TY Z Z ZZ 150 164 172 204 216 A AL B1 ZZ 140 154 162 194 206 0.032 0.059 0.032 0.059 0.032 0.059 0.040 0.073 0.040 0.073 62 74 90 110 130 85 95 110 140 162 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 10 10 8 11 11 13 16 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 15 17 17 21 21 51 58 58 71 72

Body Size: 40, Backflow: w/o Backflow Function, Thread: N (NPT), Port Size: 04 (1/2), Options: BG (B+G), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale), Made to Order: X406 (0.4 MPa Setting)

Size: 40 (1/2), Port Size: 04 (1/2, Size 40), Accessories: None, Handle Orientation: Handle Down

Size: 1/2, Port Size: 1/2, Size 40, Accessories: Mounting Bracket, Handle Orientation: Handle Down

Size: 1/2, Port Size: 1/2, Size 40, Accessories: None, Handle Orientation: Handle Down

Body Size: 40, Backflow: w/o Backflow Function, Thread: N (NPT), Port Size: 03 (3/8), Options: EH (E+H), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale), Made to Order: X406 (0.4 MPa Setting)

Special Applications: Copper, Fluorine & Silicon-free+Low Particle Generation, Body Size: 40, Reverse Flow: No, Thread: NPT, Port Size: 04 [1/2 (Size 40)], Accessory, Not Attached: None, Option: Nameplate/Caution Plate for Bowl in Imperial Units

Special Applications: Copper, Fluorine & Silicon-free+Low Particle Generation, Body Size: 40, Reverse Flow: No, Thread: NPT, Port Size: 04 [1/2 (Size 40)], Accessory, Not Attached: BG [B+G (Size 20 to 60)], Option: Nameplate/Caution Plate for Bowl in Imperial Units

Body Size: 40, Backflow: w/o Backflow Function, Thread: N (NPT), Port Size: 06 (3/4), Mounting: w/o Mounting Option, Set Pressure: 0.05 to 0.85 MPa, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Unit: Z (Name Plate and Pressure Gauge in Imperial Units: psi)

Special Applications: 21-AR (Copper, Fluorine & Silicon-free+Low Particle Generation), Body Size: 40, Reverse Flow: No, Thread: N (NPT), Port Size: 04 [1/2 (Size 40)], Accessory, Not Attached: None, Option: Z (Nameplate/Caution Plate for Bowl in Imperial Units )

Special Applications: 21-AR (Copper, Fluorine & Silicon-free+Low Particle Generation), Body Size: 40, Reverse Flow: No, Thread: N (NPT), Port Size: 04 [1/2 (Size 40)], Accessory, Not Attached: BG [B+G (Size 20 to 60)], Option: Z (Nameplate/Caution Plate for Bowl in Imperial Units )

Special Applications: 21-AR (Copper, Fluorine & Silicon-free+Low Particle Generation), Body Size: 40, Reverse Flow: No, Thread: N (NPT), Port Size: 02 [1/4 (Size 20, 25, 30, 40)], Accessory, Not Attached: BG [B+G (Size 20 to 60)], Option: Z (Nameplate/Caution Plate for Bowl in Imperial Units )

Body Size: 40, Backflow: w/o Backflow Function, Thread: N (NPT), Port Size: 04 (1/2), Options: E (Square Embedded Type Pressure Gauge, w/Limit Indicator), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale), Made to Order: X406 (0.4 MPa Setting