Title not found 13 7 6 9 8 11 10 3 Connector B terminal no.
S, Z type 24 VDC: 7% to +10% 12 VDC: 4% to +10% Operating pressure (MPa) Operating direction 0.5 Bore size (mm) 0.3 0.7 181 IN 302 422 32 Standard Stroke 241 OUT 402 563 317 IN 528 739 40 (mm) Bore size (mm) Standard stroke 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 377 OUT 628 880 495 IN 825 1150 32 1 50 589 OUT 982 1370 40 50 2 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15,
10 10 0 0 0 0 15 10 5 0.0 0.6 0.5 0.4 0.3 0.2 0.1 Flow rate l/min (ANR) Supply pressure (MPa) ZM07H Exhaust Characteristics Flow Characteristics 90 90 40 80 80 Vacuum pressure Vacuum pressure (kPa) Vacuum pressure (kPa) Suction flow rate l/min (ANR) Air consumption l/min (ANR) 70 70 Suction flow rate 30 60 60 Air consumption 50 50 20 40 40 30 30 10 20 20 10 10 0 0 0 0 30 20 25 15 10 5 0.0
Guide Series LTF Lead screw lead mm Mounting orientation Motor type Series Page Model Guide type Ground ball screw Rolled ball screw 6 10 20 10 20 10 20 10 20 6 10 20 10 20 10 20 10 20 LTF6 LTF8 LTF6 LTF8 LTF6 LTF8 LTF6 LTF8 P.2 Horizontal 10 10 P.10 Standard motor 6 6 P.18 Vertical 10 10 P.26 Frame-type linear guide LTF 6 6 P.34 Horizontal Courtesy of Steven Engineering, Inc.-230 Ryan Way
seal 5.4 (0.3) VQZ1221 10 or less 13 or less VZS Metal seal 2.0 (0.11) VQZ1320 20 or less 26 or less Closed center VQZ1000 61 Rubber seal 3.1 (0.17) VQZ1321 25 or less 33 or less VFS Metal seal 2.7 (0.15) VQZ1420 3 position 20 or less 26 or less Exhaust center Rubber seal 5.4 (0.3) VQZ1421 25 or less 33 or less VS Pressure center Rubber seal 3.1 (0.17) VQZ1521 25 or less 33 or less Metal
Metric System (g) = 105.5 meters per sec. per sec NewtonMeters KilopondMeters Foot-lbs Inch-lbs 3 3 1.020 x 10 -1 7.376 x 10 -1 8.851 1 3 7.233 3 3 1 3 86.80 0.01 3 1.382 x 10 -1 1 3 12 3 1.356 1.130 x 10 -1 1.52 x 10 -2 8.333 x 10 -2 1 3 Length (Linear Measurement) Meter Centimeter Kilometer Mile Inch Foot 3 100 3 1x10 4 6.214x10 -4 39.370 3 3.281 3 1 3 1 3 1x10 5 6.214x10 -6 3.937x10 -1
Metric System (g) = 105.5 meters per sec. per sec NewtonMeters KilopondMeters Foot-lbs Inch-lbs 3 3 1.020 x 10 -1 7.376 x 10 -1 8.851 1 3 7.233 3 3 1 3 86.80 0.01 3 1.382 x 10 -1 1 3 12 3 1.356 1.130 x 10 -1 1.52 x 10 -2 8.333 x 10 -2 1 3 Length (Linear Measurement) Meter Centimeter Kilometer Mile Inch Foot 3 100 3 1x10 4 6.214x10 -4 39.370 3 3.281 3 1 3 1 3 1x10 5 6.214x10 -6 3.937x10 -1
25 30 41 E 0 -0.1 2-5.2 through (mounting hole) 32 31 31 Finger opening port M5 x 0.8 2-10 1.2 1.2 E-E +0.1 0 Close: 0 Open: 201 4-M6 x 1 thread depth 6 40 8-M4 x 0.7 thread depth 4 Mounting thread Attachment mounting thread 52 24 Groove for auto switch mounting 2.3 4 2-3H9 +0.025 0 depth 3 6 16 16 7.5 7.5 3 2-M6 x 1 thread depth 6 Mounting thread Groove for auto switch mounting 25 56 18
-7A-X2 ZP 13 C ZPG13C-7A-X2 7 7 7 7 ZP13C ZP 16 C ZPG16C-7A-X2 7 7 7 8 ZP16C ZP 20 C ZPG20C-7A-X2 9 10 10 11 ZP20C ZPT3-7A-X2 ZP 25 C ZPG25C-7A-X2 10 10 10 11 ZP25C ZP 32 C ZPG32C-7A-X2 10 11 11 12 ZP32C ZP 10 B ZPG10B-7A-X2 7 7 7 8 ZP10B ZPT2-7A-X2 ZP 13 B ZPG13B-7A-X2 7 8 8 8 ZP13B ZP 16 B ZPG16B-7A-X2 8 8 8 9 ZP16B ZP 20 B ZPG20B-7A-X2 11 11 11 13 ZP20B ZPT3-7A-X2 ZP 25 B ZPG25B
weight [kg] 2.5 Effective torque (Nm) MRQS40 15 150 2 10 100 1.5 40 4 5 40 50 32 1 MRQS32 2 2.5 3 20 25 30 0.5 0 1.5 15 0.1 0.2 0.3 0.4 0.5 0.6 0.7 Operating pressure (MPa) 1 0.4 0.5 0.6 0.7 10 6.
0.03 30 3 25 0.05 R45 50 0.05 6.5 6.5 18 10 10 18 R25 19 R6 R6 R25 19 19 19 NAAMS code A Weight kg (lbs) NAAMS code A Weight kg (lbs) B C D E F G H I B C D E F G H I Part no.
FLT 09 Alarm10*1 10 Alarm11 Reservoir High Temp.
6)*1 55 + 35 (n 2) (n = 2, 3, 4, 5) D-M9mA 25 25 40 25 + 35 (n 2) 2 (n = 2, 4, 6)*1 60 + 35 (n 2) (n = 2, 3, 4, 5) D-M9mV 25 25 35 20 + 35 (n 2) 2 (n = 2, 4, 6)*1 35 + 35 (n 2) (n = 2, 3, 4, 5) D-M9mWV D-M9mAV 25 25 35 20 + 35 (n 2) 2 (n = 2, 4, 6)*1 35 + 35 (n 2) (n = 2, 3, 4, 5) *1 When n is an odd number, an even number that is one larger than the odd number is to be used for the
16 (4)Lead [mm] AC servo motor LECSN2T5Size LECSB2-T7 LECSC2-T7 LECSS2-T7 (Absolute encoder) 16 25 * T7 200 25 12 16 (20) 6 8 (10) LECSN2T7*The values shown in ( ) are the lead for size 25 parallel mounting types.
-7A-X2 ZP 13 C ZPG13C-7A-X2 7 7 7 7 ZP13C ZP 16 C ZPG16C-7A-X2 7 7 7 8 ZP16C ZP 20 C ZPG20C-7A-X2 9 10 10 11 ZP20C ZPT3-7A-X2 ZP 25 C ZPG25C-7A-X2 10 10 10 11 ZP25C ZP 32 C ZPG32C-7A-X2 10 11 11 12 ZP32C ZP 10 B ZPG10B-7A-X2 7 7 7 8 ZP10B ZPT2-7A-X2 ZP 13 B ZPG13B-7A-X2 7 8 8 8 ZP13B ZP 16 B ZPG16B-7A-X2 8 8 8 9 ZP16B ZP 20 B ZPG20B-7A-X2 11 11 11 13 ZP20B ZPT3-7A-X2 ZP 25 B ZPG25B
Operation of the cylinder with its body fixed will damage the wear ring, resulting in increase of particle generation or malfunction. 12-REA40 10-AS2001F-06-X214 10-AS2301F-02-06-X214 10-AS2201F-02-06-X214 12-REA50 10-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 12-REA63 10-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 Although speed adjustment is possible with
4 20, 25, 32, 40 AS221FG-02 AS331FG-02 R(PT) 1/4 40, 50, 63 AS321FG-02 AS331FG-03 R(PT) 3/8 40, 50, 63 AS321FG-03 AS431FG-04 R(PT) 1/2 63, 80, 100 AS421FG-04 AS131FG-U10/32 10-32UNF 6, 10, 16, 20 AS121FG-U10/32 AS231FG-N01 NPT1/8 20, 25, 32 AS221FG-N01 Elbow type AS231FG-N02 NPT1/4 20, 25, 32, 40 AS221FG-N02 AS331FG-N02 NPT1/4 40, 50, 63 AS321FG-N02 AS331FG-N03 NPT3/8 40, 50, 63 AS321FG-N03
the case of EZ or TZ, the length is longer by 10 mm.
size Model 11-/22-CXS6 6 11-/22-CXS10 11-/22-CXS15 11-/22-CXS20 11-/22-CXS25 11-/22-CXS32 10 15 20 25 32 10, 20, 30, 40, 50 Vacuum suction type Relief type M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Double acting (Both sides) Non-lube 10-/12-/21-CXS6 6 single rod 10-/12-/21-CXS10 10-/12-/21-CXS15 10-/12-/21-CXS20 10-/12-/21-CXS25 10-/12-/21-CXS32 10, 20, 30, 40, 50 10 15 20 25 32 M5 x 0.8